Abstract

The Modulation Sideband Technology for Absolute Ranging (MSTAR) sensor permits absolute distance measurement with subnanometer accuracy, an improvement of 4 orders of magnitude over current techniques. The system uses fast phase modulators to resolve the integer cycle ambiguity of standard interferometers. The concept is described and demonstrated over target distances up to 1 m. The design can be extended to kilometer-scale separations.

© 2003 Optical Society of America

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References

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    [CrossRef]
  2. O. Bock, J. Opt. A 1, 77 (1999).
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2001 (1)

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

1999 (1)

O. Bock, J. Opt. A 1, 77 (1999).
[CrossRef]

1998 (2)

I. Fujima, S. Iwasaki, and K. Seta, Meas. Sci. Technol. 9, 1049 (1998).
[CrossRef]

D. Xiaoli and S. Katuo, Meas. Sci. Technol. 9, 1031 (1998).
[CrossRef]

1993 (1)

N. Bobroff, Meas. Sci. Technol. 4, 907 (1993).
[CrossRef]

1992 (1)

J. M. Payne, D. Parker, and R. G. Bradley, Rev. Sci. Instrum 63, 3311 (1992).
[CrossRef]

1991 (1)

1989 (1)

1988 (1)

Bobroff, N.

N. Bobroff, Meas. Sci. Technol. 4, 907 (1993).
[CrossRef]

Bock, O.

O. Bock, J. Opt. A 1, 77 (1999).
[CrossRef]

Bradley, R. G.

J. M. Payne, D. Parker, and R. G. Bradley, Rev. Sci. Instrum 63, 3311 (1992).
[CrossRef]

Chang, D. H.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Chang, Y.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Dalton, L. R.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Dandliker, R.

de Groot, P.

Erlig, H.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Fetterman, H. R.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Fujima, I.

I. Fujima, S. Iwasaki, and K. Seta, Meas. Sci. Technol. 9, 1049 (1998).
[CrossRef]

Iwasaki, S.

I. Fujima, S. Iwasaki, and K. Seta, Meas. Sci. Technol. 9, 1049 (1998).
[CrossRef]

Katuo, S.

D. Xiaoli and S. Katuo, Meas. Sci. Technol. 9, 1031 (1998).
[CrossRef]

Oh, M.-C.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Parker, D.

J. M. Payne, D. Parker, and R. G. Bradley, Rev. Sci. Instrum 63, 3311 (1992).
[CrossRef]

Payne, J. M.

J. M. Payne, D. Parker, and R. G. Bradley, Rev. Sci. Instrum 63, 3311 (1992).
[CrossRef]

Prongue, D.

Seta, K.

I. Fujima, S. Iwasaki, and K. Seta, Meas. Sci. Technol. 9, 1049 (1998).
[CrossRef]

Steier, W. H.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Szep, A.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Tharlman, R.

Wickramasinghe, H. K.

Williams, C. C.

Xiaoli, D.

D. Xiaoli and S. Katuo, Meas. Sci. Technol. 9, 1031 (1998).
[CrossRef]

Zhang, C.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Zhang, X. H.

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

X. H. Zhang, M.-C. Oh, A. Szep, W. H. Steier, C. Zhang, L. R. Dalton, H. Erlig, Y. Chang, D. H. Chang, and H. R. Fetterman, Appl. Phys. Lett. 78, 3136 (2001).
[CrossRef]

J. Opt. A (1)

O. Bock, J. Opt. A 1, 77 (1999).
[CrossRef]

Meas. Sci. Technol. (3)

I. Fujima, S. Iwasaki, and K. Seta, Meas. Sci. Technol. 9, 1049 (1998).
[CrossRef]

N. Bobroff, Meas. Sci. Technol. 4, 907 (1993).
[CrossRef]

D. Xiaoli and S. Katuo, Meas. Sci. Technol. 9, 1031 (1998).
[CrossRef]

Opt. Lett. (2)

Rev. Sci. Instrum (1)

J. M. Payne, D. Parker, and R. G. Bradley, Rev. Sci. Instrum 63, 3311 (1992).
[CrossRef]

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Figures (2)

Fig. 1
Fig. 1

(a) Schematic of the MSTAR system. The distance to be measured, x, lies between the reference mirror and the target retroreflector. (b) Optical spectrum before photodetection. Long-dashed lines, measurement beams; short-dashed lines, local beams. (c) Spectrum of electrical signals after photodetection.

Fig. 2
Fig. 2

MSTAR absolute measurement versus true displacement from the start point (based on fringe counting). The residual error, σx=xMSTAR-ΔxTRUTH-xSTART, is overlaid.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

xcar=c2ν+fMΔϕcar±m=LΔϕcar±m,
x=c4FMΔϕusb-Δϕlsb±n=LΔϕusb-Δϕlsb±n,

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