Abstract

A novel real-time gray-scale photolithography technique for the fabrication of continuous microstructures that uses a LCD panel as a real-time gray-scale mask is presented. The principle of design of the technique is explained, and computer simulation results based on partially coherent imaging theory are given for the patterning of a microlens array and a zigzag grating. An experiment is set up, and a microlens array and a zigzag grating on panchromatic silver halide sensitized gelatin with trypsinase etching are obtained.

© 2002 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. 33, 3556 (1994).
    [CrossRef]
  2. E. B. Kley, B. Schnabel, and U. D. Zeitner, Proc. SPIE 3008, 22 (1997).
  3. P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
    [CrossRef]
  4. T. J. Suleski and D. C. O’Shea, Appl. Opt. 34, 7507 (1995).
    [CrossRef] [PubMed]
  5. W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
    [CrossRef]
  6. A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
    [CrossRef]
  7. M. Farsari, S. Huang, P. Birch, F. Claret-Tournier, R. Young, D. Budgett, C. Bradfield, and C. Chatwin, Opt. Lett. 24, 549 (1999).
    [CrossRef]
  8. S. Monneret, V. Loubere, and S. Corbel, Proc. SPIE 3680, 553 (1999).
    [CrossRef]
  9. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1980), Chap. 10.
  10. A. Fimia, I. Pascual, and A. Belendez, Appl. Opt. 31, 4625 (1992).
    [CrossRef] [PubMed]

1999 (2)

1997 (2)

A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
[CrossRef]

E. B. Kley, B. Schnabel, and U. D. Zeitner, Proc. SPIE 3008, 22 (1997).

1995 (1)

1994 (3)

W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
[CrossRef]

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. 33, 3556 (1994).
[CrossRef]

1992 (1)

Andre, J. C.

A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
[CrossRef]

Belendez, A.

Bertsch, A.

A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
[CrossRef]

Birch, P.

Born, M.

M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1980), Chap. 10.

Bradfield, C.

Budgett, D.

Chatwin, C.

Claret-Tournier, F.

Corbel, S.

S. Monneret, V. Loubere, and S. Corbel, Proc. SPIE 3680, 553 (1999).
[CrossRef]

Farsari, M.

Fimia, A.

Fischbach, P. S.

W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
[CrossRef]

Gale, M. T.

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. 33, 3556 (1994).
[CrossRef]

Henke, W.

W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
[CrossRef]

Hoppe, W.

W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
[CrossRef]

Huang, S.

Jezequel, J. Y.

A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
[CrossRef]

Kley, E. B.

E. B. Kley, B. Schnabel, and U. D. Zeitner, Proc. SPIE 3008, 22 (1997).

Loubere, V.

S. Monneret, V. Loubere, and S. Corbel, Proc. SPIE 3680, 553 (1999).
[CrossRef]

Mayer, J. M.

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

Monneret, S.

S. Monneret, V. Loubere, and S. Corbel, Proc. SPIE 3680, 553 (1999).
[CrossRef]

O’Shea, D. C.

Opplinger, P.

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

Pascual, I.

Pedersen, J.

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. 33, 3556 (1994).
[CrossRef]

Quenzer, H. J.

W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
[CrossRef]

Regnault, P.

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

Rossi, M.

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. 33, 3556 (1994).
[CrossRef]

Schnabel, B.

E. B. Kley, B. Schnabel, and U. D. Zeitner, Proc. SPIE 3008, 22 (1997).

Sixt, J. M.

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

Stauffer, J. M.

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

Suleski, T. J.

Vorin, G.

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

Wangner, B.

W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
[CrossRef]

Wolf, E.

M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1980), Chap. 10.

Young, R.

Zeitner, U. D.

E. B. Kley, B. Schnabel, and U. D. Zeitner, Proc. SPIE 3008, 22 (1997).

Zissi, S.

A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
[CrossRef]

Appl. Opt. (2)

Jpn. J. Appl. Phys. (1)

W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33-1, 6809 (1994).
[CrossRef]

Microelectron. Eng. (1)

P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
[CrossRef]

Microsyst. Technol. (1)

A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
[CrossRef]

Opt. Eng. (1)

M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. 33, 3556 (1994).
[CrossRef]

Opt. Lett. (1)

Proc. SPIE (2)

S. Monneret, V. Loubere, and S. Corbel, Proc. SPIE 3680, 553 (1999).
[CrossRef]

E. B. Kley, B. Schnabel, and U. D. Zeitner, Proc. SPIE 3008, 22 (1997).

Other (1)

M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1980), Chap. 10.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1

Five LCD mask patterns for the microlens.

Fig. 2
Fig. 2

Calculated dose distribution for (left) the zigzag grating and (right) the microlens.

Fig. 3
Fig. 3

Experimental system for LCD mask lithography.

Fig. 4
Fig. 4

Interference patterns of the fabricated zigzag grating and microlens observed with an interference microscope.

Fig. 5
Fig. 5

Measured profile of zigzag gratings.

Fig. 6
Fig. 6

Measured profile of microlens array structures.

Equations (6)

Equations on this page are rendered with MathJax. Learn more.

ϕgray=Ix,yt,
ϕreal=Itx,y,
fx,y=n=1N2n-1bnx,y,
ϕreal=n=1N2n-1Inx,yt0,
t0=ttotaln=1N2n-1,
Iimagexi,yi=fλ,NA,σ,Tobjectx0,y0=σIeffxs,ys∬;Ufx,fyHxs-fx,ys-fs×expj2πfxxi+fyyidfxdfy2dxsdys,

Metrics