Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Real-time gray-scale photolithography for fabrication of continuous microstructure

Not Accessible

Your library or personal account may give you access

Abstract

A novel real-time gray-scale photolithography technique for the fabrication of continuous microstructures that uses a LCD panel as a real-time gray-scale mask is presented. The principle of design of the technique is explained, and computer simulation results based on partially coherent imaging theory are given for the patterning of a microlens array and a zigzag grating. An experiment is set up, and a microlens array and a zigzag grating on panchromatic silver halide sensitized gelatin with trypsinase etching are obtained.

© 2002 Optical Society of America

Full Article  |  PDF Article
More Like This
Design and fabrication of diffractive optical elements by use of gray-scale photolithography

Jin-Seung Sohn, Myung-Bok Lee, Wan-Chin Kim, Eun-Hyung Cho, Tae-Wan Kim, Chan-Young Yoon, No-Cheol Park, and Young-Pil Park
Appl. Opt. 44(4) 506-511 (2005)

Real-time analysis of partially polarized light with a space-variant subwavelength dielectric grating

Ze’ev Bomzon, Gabriel Biener, Vladimir Kleiner, and Erez Hasman
Opt. Lett. 27(3) 188-190 (2002)

Method of measuring the spatial resolution of a photoresist

J. A. Hoffnagle, W. D. Hinsberg, M. I. Sanchez, and F. A. Houle
Opt. Lett. 27(20) 1776-1778 (2002)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved