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Direction-sensitive subwavelength displacement measurements at diffraction-limited spatial resolution

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Abstract

Direction-sensitive displacement measurements at diffraction-limited spatial resolution are demonstrated with an interferometric optical-feedback semiconductor laser confocal imaging system. Subwavelength axial movements of the reflecting sample, including the directions of motion, are detected within the depth of field. A comparison of theory and actual instrument performance is presented.

© 2002 Optical Society of America

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