Abstract

We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to ±5 nm or less.

© 2001 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. K. Creath, in Proceedings of Fringe ’97, Vol. 3 of Akademie Verlag Series in Optical Metrology (Akedemie-Verlag, Berlin, 1997), p. 52.
  2. J. Biegen, Opt. Lett. 19, 1690 (1994).
    [CrossRef] [PubMed]
  3. T. Doi, K. Toyoda, and Y. Tanimuira, Appl. Opt. 36, 7157 (1997).
    [CrossRef]
  4. G. D. Feke, D. P. Snow, R. D. Grober, P. J. Groot, and L. Deck, Appl. Opt. 37, 1796 (1998).
    [CrossRef]
  5. E. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985), Vol. I.
  6. S. S. C. Chim and G. S. Kino, Appl. Opt. 31, 2550 (1992).
    [CrossRef] [PubMed]
  7. K. Larkin, J. Opt. Soc. Am. A 13, 832 (1996).
    [CrossRef]
  8. P. Sandoz, R. Devillers, and A. Plato, J. Mod. Opt. 44, 519 (1997).
    [CrossRef]
  9. P. de Groot and L. Deck, Opt. Lett. 18, 1462 (1993).
    [CrossRef] [PubMed]
  10. P. de Groot and L. Deck, J. Mod. Opt. 42, 389 (1995).
    [CrossRef]
  11. M. C. Parks and S. W. Kim, Opt. Eng. 39, 952 (2000).
    [CrossRef]

2000 (1)

M. C. Parks and S. W. Kim, Opt. Eng. 39, 952 (2000).
[CrossRef]

1998 (1)

1997 (2)

T. Doi, K. Toyoda, and Y. Tanimuira, Appl. Opt. 36, 7157 (1997).
[CrossRef]

P. Sandoz, R. Devillers, and A. Plato, J. Mod. Opt. 44, 519 (1997).
[CrossRef]

1996 (1)

1995 (1)

P. de Groot and L. Deck, J. Mod. Opt. 42, 389 (1995).
[CrossRef]

1994 (1)

1993 (1)

1992 (1)

Biegen, J.

Chim, S. S. C.

Creath, K.

K. Creath, in Proceedings of Fringe ’97, Vol. 3 of Akademie Verlag Series in Optical Metrology (Akedemie-Verlag, Berlin, 1997), p. 52.

de Groot, P.

P. de Groot and L. Deck, J. Mod. Opt. 42, 389 (1995).
[CrossRef]

P. de Groot and L. Deck, Opt. Lett. 18, 1462 (1993).
[CrossRef] [PubMed]

Deck, L.

Devillers, R.

P. Sandoz, R. Devillers, and A. Plato, J. Mod. Opt. 44, 519 (1997).
[CrossRef]

Doi, T.

Feke, G. D.

Grober, R. D.

Groot, P. J.

Kim, S. W.

M. C. Parks and S. W. Kim, Opt. Eng. 39, 952 (2000).
[CrossRef]

Kino, G. S.

Larkin, K.

Palik, E.

E. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985), Vol. I.

Parks, M. C.

M. C. Parks and S. W. Kim, Opt. Eng. 39, 952 (2000).
[CrossRef]

Plato, A.

P. Sandoz, R. Devillers, and A. Plato, J. Mod. Opt. 44, 519 (1997).
[CrossRef]

Sandoz, P.

P. Sandoz, R. Devillers, and A. Plato, J. Mod. Opt. 44, 519 (1997).
[CrossRef]

Snow, D. P.

Tanimuira, Y.

Toyoda, K.

Appl. Opt. (3)

J. Mod. Opt. (2)

P. Sandoz, R. Devillers, and A. Plato, J. Mod. Opt. 44, 519 (1997).
[CrossRef]

P. de Groot and L. Deck, J. Mod. Opt. 42, 389 (1995).
[CrossRef]

J. Opt. Soc. Am. A (1)

Opt. Eng. (1)

M. C. Parks and S. W. Kim, Opt. Eng. 39, 952 (2000).
[CrossRef]

Opt. Lett. (2)

Other (2)

K. Creath, in Proceedings of Fringe ’97, Vol. 3 of Akademie Verlag Series in Optical Metrology (Akedemie-Verlag, Berlin, 1997), p. 52.

E. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985), Vol. I.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

Schematic of the Michelson interferometer.

Fig. 2
Fig. 2

Variation of phase change on reflection with wavelength for different metals.

Fig. 3
Fig. 3

Step height made from dissimilar metallic materials.

Tables (1)

Tables Icon

Table 1 Measurement Results for Two Different Step Heightsa

Equations (11)

Equations on this page are rendered with MathJax. Learn more.

Iz=I0k0-Δk/2k0+Δk/21+γk×cos2kz-z0+ϕkFkdk,
Φk=2kz-z0+ϕk,
ϕkϕk0+k-k0dϕdk.
Φk2kz-z0-12dϕdk+ϕk0-k0dϕdk.
Iz=gz-zmcos2k0z-zm+ϕm,
zm=z0-12dϕdk=z0-zϕ.
h1=h-ϕ1A-ϕ1Bk1,h2=h-ϕ2A-ϕ2Bk2,
zϕ12dϕdk12ϕ2-ϕ1k2-k1.
H=zmA-zmB=z0A-z0B-zϕA-zϕB=h-12ϕ2A-ϕ1A-ϕ2B-ϕ1Bk2-k1.
Δh=h2-h1-1kcϕ2A-ϕ1A-ϕ2B-ϕ1B,
h=H-12kch2-h1k2-k1,

Metrics