Abstract

A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating’s normal-incidence efficiency near 11.4  nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8  nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37  nm.

© 2001 Optical Society of America

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