Abstract

La/B4C multilayers have been fabricated by magnetron sputtering for use as x-ray mirrors at energies below 190  eV, particularly for detection of boron K and α x rays at 183  eV, their performance has been compared with that of Mo/B4C multilayers, which are currently the best-performing multilayers for this energy range. Transmission electron microscopy and synchrotron soft-x-ray reflectometry were used to study the structural quality of the multilayers and their performance as x-ray mirrors. The results show a significant improvement of the peak reflectivity and the spectral purity, indicating that La/B4C has a high potential to replace Mo/B4C in many x-ray optical applications below 190  eV.

© 2001 Optical Society of America

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