Abstract

Combining differential confocal microscopy and an annular pupil filter, we obtained the normalized axial intensity distribution curve of an optical system. We used the sharp slopes of the axial response curve of the optical system to measure the surface profile of a reflection grating. Experimental results prove that this method can extend the axial dynamic range and improve the transverse resolution of three-dimensional profilometry by sacrificing axial resolution.

© 2000 Optical Society of America

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References

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  1. C.-H. Lee and J. Wang, Opt. Commun. 135, 233 (1995).
    [CrossRef]
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    [CrossRef]

1999

1995

C.-H. Lee and J. Wang, Opt. Commun. 135, 233 (1995).
[CrossRef]

S. W. Hell, P. E. Hänninen, and E. Soini, Opt. Commun. 117, 20 (1995).
[CrossRef]

1988

1960

Hänninen, P. E.

S. W. Hell, P. E. Hänninen, and E. Soini, Opt. Commun. 117, 20 (1995).
[CrossRef]

Hegedus, Z. S.

Hell, S. W.

S. W. Hell, P. E. Hänninen, and E. Soini, Opt. Commun. 117, 20 (1995).
[CrossRef]

Lee, C.-H.

Sheppard, C. J. R.

Soini, E.

S. W. Hell, P. E. Hänninen, and E. Soini, Opt. Commun. 117, 20 (1995).
[CrossRef]

Tsai, C.-W.

Wang, J.

Welford, W. T.

J. Opt. Soc. Am.

J. Opt. Soc. Am. A

Opt. Commun.

S. W. Hell, P. E. Hänninen, and E. Soini, Opt. Commun. 117, 20 (1995).
[CrossRef]

C.-H. Lee and J. Wang, Opt. Commun. 135, 233 (1995).
[CrossRef]

Opt. Lett.

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Figures (4)

Fig. 1
Fig. 1

Experimental setup of the confocal reflection-mode scanning microscope with single-mode fiber coupling: 3D, three dimensional; PZT, piezoelectric transducer.

Fig. 2
Fig. 2

Intensity distribution along the axis of a fiber confocal scanning imaging system with two annular pupil filters at different values of and a clear-pupil filter.

Fig. 3
Fig. 3

Response curve to a straightedge object.

Fig. 4
Fig. 4

Profile of an optical grating. Dotted curves, profiles of the ideal reflection grating. Solid curves, experiment results obtained by (a) DCM and (b) DCM with an annular pupil filter.

Tables (1)

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Table 1 Results of Computer Simulation and Experiment

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