Abstract

We report the development of a new microstereophotolithography technique for creation of three-dimensional microcomponents by use of a planar, layer-by-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantage of the wide supply of commercially available photopolymers designed for conventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The experimental setup is briefly described, and the first microcomponent fabricated by this system is shown.

© 1999 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
UV microstereolithography system that uses spatial light modulator technology

Chris Chatwin, Maria Farsari, Shiping Huang, Malcolm Heywood, Philip Birch, Rupert Young, and John Richardson
Appl. Opt. 37(32) 7514-7522 (1998)

Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator

Shaun D. Gittard, Alexander Nguyen, Kotaro Obata, Anastasia Koroleva, Roger J. Narayan, and Boris N. Chichkov
Biomed. Opt. Express 2(11) 3167-3178 (2011)

Generation of nondiffracting Bessel beams by use of a spatial light modulator

Narupon Chattrapiban, Elizabeth A. Rogers, David Cofield, Wendell T. Hill, III, and Rajarshi Roy
Opt. Lett. 28(22) 2183-2185 (2003)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription