Abstract

We report the development of a new microstereophotolithography technique for creation of three-dimensional microcomponents by use of a planar, layer-by-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantage of the wide supply of commercially available photopolymers designed for conventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The experimental setup is briefly described, and the first microcomponent fabricated by this system is shown.

© 1999 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. Bertsch, J. Y. Jézéquel, and J. C. André, J. Photochem. Photobiol. A 107, 275 (1997).
    [CrossRef]
  2. M. Pottenger, B. Eyre, E. Kruglick, and G. Lin, Solid State Technol. 40(9), 89 (1997).
  3. S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
    [CrossRef]
  4. C. Chatwin, M. Farsari, S. Huang, M. Heywood, P. Birch, R. Young, and J. Richardson, Appl. Opt. 37, 7514 (1998).
    [CrossRef]
  5. M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
    [CrossRef]

1998 (3)

S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
[CrossRef]

C. Chatwin, M. Farsari, S. Huang, M. Heywood, P. Birch, R. Young, and J. Richardson, Appl. Opt. 37, 7514 (1998).
[CrossRef]

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

1997 (2)

A. Bertsch, J. Y. Jézéquel, and J. C. André, J. Photochem. Photobiol. A 107, 275 (1997).
[CrossRef]

M. Pottenger, B. Eyre, E. Kruglick, and G. Lin, Solid State Technol. 40(9), 89 (1997).

André, J. C.

A. Bertsch, J. Y. Jézéquel, and J. C. André, J. Photochem. Photobiol. A 107, 275 (1997).
[CrossRef]

Bertsch, A.

A. Bertsch, J. Y. Jézéquel, and J. C. André, J. Photochem. Photobiol. A 107, 275 (1997).
[CrossRef]

Birch, P.

Chatwin, C.

Chatwin, C. R.

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
[CrossRef]

Eyre, B.

M. Pottenger, B. Eyre, E. Kruglick, and G. Lin, Solid State Technol. 40(9), 89 (1997).

Farsari, M.

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
[CrossRef]

C. Chatwin, M. Farsari, S. Huang, M. Heywood, P. Birch, R. Young, and J. Richardson, Appl. Opt. 37, 7514 (1998).
[CrossRef]

Heywood, M.

Heywood, M. I.

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
[CrossRef]

Huang, S.

S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
[CrossRef]

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

C. Chatwin, M. Farsari, S. Huang, M. Heywood, P. Birch, R. Young, and J. Richardson, Appl. Opt. 37, 7514 (1998).
[CrossRef]

Jézéquel, J. Y.

A. Bertsch, J. Y. Jézéquel, and J. C. André, J. Photochem. Photobiol. A 107, 275 (1997).
[CrossRef]

Kruglick, E.

M. Pottenger, B. Eyre, E. Kruglick, and G. Lin, Solid State Technol. 40(9), 89 (1997).

Lin, G.

M. Pottenger, B. Eyre, E. Kruglick, and G. Lin, Solid State Technol. 40(9), 89 (1997).

Morrell, P. J. B.

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

Pottenger, M.

M. Pottenger, B. Eyre, E. Kruglick, and G. Lin, Solid State Technol. 40(9), 89 (1997).

Richardson, J.

Young, R.

Young, R. C. D.

S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
[CrossRef]

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

Appl. Opt. (1)

J. Photochem. Photobiol. A (1)

A. Bertsch, J. Y. Jézéquel, and J. C. André, J. Photochem. Photobiol. A 107, 275 (1997).
[CrossRef]

Microprocessors Microsystems (1)

S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
[CrossRef]

Opt. Eng. (1)

M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).
[CrossRef]

Solid State Technol. (1)

M. Pottenger, B. Eyre, E. Kruglick, and G. Lin, Solid State Technol. 40(9), 89 (1997).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Experimental setup.

Fig. 2
Fig. 2

Drawing of the microgear.

Fig. 3
Fig. 3

Scanning-electron microscopy photograph of the microgear.

Fig. 4
Fig. 4

Enlargement of the central part of the microgear.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

Ez=E0exp-z/Dp,

Metrics