Abstract

We present a new application of digital holography for phase-contrast imaging and optical metrology. This holographic imaging technique uses a CCD camera for recording of a digital Fresnel off-axis hologram and a numerical method for hologram reconstruction. The method simultaneously provides an amplitude-contrast image and a quantitative phase-contrast image. An application to surface profilometry is presented and shows excellent agreement with contact-stylus probe measurements.

© 1999 Optical Society of America

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References

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  1. M. Pluta, Non-Standard Techniques for Phase Contrast Microscopy, Vol. 6 of Advances in Optical and Electron Microscopy (Academic, London, 1975).
  2. P. Gleyzes, A. C. Boccara, and H. Saint-Jalmes, Opt. Lett. 22, 1529 (1997).
    [CrossRef]
  3. See, e.g., U. Brand and W. Hillman, Precis. Eng. 17, 23 (1995), and references therein.
  4. U. Schnars and W. Jüptner, Appl. Opt. 33, 179 (1994).
    [CrossRef] [PubMed]
  5. E. Cuche, P. Poscio, and C. Depeursinge, Proc. SPIE 2927, 61 (1996).
    [CrossRef]
  6. U. Schnars, J. Opt. Soc. Am. A 11, 2011 (1994).
    [CrossRef]
  7. L. P. Yaroslavskii and N. S. Merzlyakov, Methods of Digital Holography (Consultants Bureau, New York, 1980), Chap. 1.
    [CrossRef]

1997

1996

E. Cuche, P. Poscio, and C. Depeursinge, Proc. SPIE 2927, 61 (1996).
[CrossRef]

1995

See, e.g., U. Brand and W. Hillman, Precis. Eng. 17, 23 (1995), and references therein.

1994

Boccara, A. C.

Brand, U.

See, e.g., U. Brand and W. Hillman, Precis. Eng. 17, 23 (1995), and references therein.

Cuche, E.

E. Cuche, P. Poscio, and C. Depeursinge, Proc. SPIE 2927, 61 (1996).
[CrossRef]

Depeursinge, C.

E. Cuche, P. Poscio, and C. Depeursinge, Proc. SPIE 2927, 61 (1996).
[CrossRef]

Gleyzes, P.

Hillman, W.

See, e.g., U. Brand and W. Hillman, Precis. Eng. 17, 23 (1995), and references therein.

Jüptner, W.

Merzlyakov, N. S.

L. P. Yaroslavskii and N. S. Merzlyakov, Methods of Digital Holography (Consultants Bureau, New York, 1980), Chap. 1.
[CrossRef]

Pluta, M.

M. Pluta, Non-Standard Techniques for Phase Contrast Microscopy, Vol. 6 of Advances in Optical and Electron Microscopy (Academic, London, 1975).

Poscio, P.

E. Cuche, P. Poscio, and C. Depeursinge, Proc. SPIE 2927, 61 (1996).
[CrossRef]

Saint-Jalmes, H.

Schnars, U.

Yaroslavskii, L. P.

L. P. Yaroslavskii and N. S. Merzlyakov, Methods of Digital Holography (Consultants Bureau, New York, 1980), Chap. 1.
[CrossRef]

Appl. Opt.

J. Opt. Soc. Am. A

Opt. Lett.

Precis. Eng.

See, e.g., U. Brand and W. Hillman, Precis. Eng. 17, 23 (1995), and references therein.

Proc. SPIE

E. Cuche, P. Poscio, and C. Depeursinge, Proc. SPIE 2927, 61 (1996).
[CrossRef]

Other

L. P. Yaroslavskii and N. S. Merzlyakov, Methods of Digital Holography (Consultants Bureau, New York, 1980), Chap. 1.
[CrossRef]

M. Pluta, Non-Standard Techniques for Phase Contrast Microscopy, Vol. 6 of Advances in Optical and Electron Microscopy (Academic, London, 1975).

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Figures (3)

Fig. 1
Fig. 1

Experimental setup: NF's, neutral-density filter's; M, mirror; O, object wave; R, reference wave. Inset, detail showing the off-axis geometry at the incidence of O upon the CCD.

Fig. 2
Fig. 2

Reconstructed images obtained with a pure phase object: (a) amplitude contrast, (b) phase contrast, (c) three-dimensional perspective of the reconstructed height distribution (the vertical scale is not equal to the transverse scale).

Fig. 3
Fig. 3

Step-height measurement.

Equations (7)

Equations on this page are rendered with MathJax. Learn more.

IHx,y=R2+O2+R*O+RO*,
IHk,l=IHx,yrectxL,yL×kNlNδx-kΔx,y-lΔy,
ΨkΔx,lΔy=RDk,lIHk,l=RDR2+RDO2+RDR*O+RDRO*.
RDk,l=ARexpi2πλkxkΔx+kylΔy,
ΨmΔξ,nΔη=Aexpiπλdm2Δξ2+n2Δη2×FFTRDk,lIHk,lexpiπλdk2Δx2+l2Δy2m,n,
Δξ=Δη=λd/L.
hξ,η=λ/4πϕξ,η.

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