Abstract

The design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm×5 cm×10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a relatively high spectral resolution, 0.1 cm-1, with adequate optical throughput.

© 1999 Optical Society of America

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  1. C. Gonzalez, R. L. Smith, D. G. Howitt, and S. D. Collins, Sensors Actuators A 66, 315 (1998).
    [CrossRef]
  2. H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137, 3612, 3626 (1990).
    [CrossRef]
  3. C. González and S. D. Collins, IEEE Photon. Lett. 9, 616 (1997).
    [CrossRef]
  4. C. González and S. D. Collins, Laser Focus World 34(5), 187 (1997).
  5. C. González, R. J. Welty, R. L. Smith, and S. D. Collins, Proc. SPIE 3008, 171 (1997).
    [CrossRef]
  6. C. González and S. D. Collins, Opt. Lett. 22, 709 (1997).
    [CrossRef]
  7. F. Twyman, Prism and Lens Making, 2nd ed. (Hilger, London, 1988).
  8. A. V. Oppenheim and R. W. Schafer, Digital Signal Processing (Prentice-Hall, Englewood Cliffs, N.J., 1975), p. 556.

1998 (1)

C. Gonzalez, R. L. Smith, D. G. Howitt, and S. D. Collins, Sensors Actuators A 66, 315 (1998).
[CrossRef]

1997 (4)

C. González and S. D. Collins, IEEE Photon. Lett. 9, 616 (1997).
[CrossRef]

C. González and S. D. Collins, Laser Focus World 34(5), 187 (1997).

C. González, R. J. Welty, R. L. Smith, and S. D. Collins, Proc. SPIE 3008, 171 (1997).
[CrossRef]

C. González and S. D. Collins, Opt. Lett. 22, 709 (1997).
[CrossRef]

1990 (1)

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137, 3612, 3626 (1990).
[CrossRef]

Baumgartel, H.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137, 3612, 3626 (1990).
[CrossRef]

Collins, S. D.

C. Gonzalez, R. L. Smith, D. G. Howitt, and S. D. Collins, Sensors Actuators A 66, 315 (1998).
[CrossRef]

C. González and S. D. Collins, IEEE Photon. Lett. 9, 616 (1997).
[CrossRef]

C. González and S. D. Collins, Laser Focus World 34(5), 187 (1997).

C. González, R. J. Welty, R. L. Smith, and S. D. Collins, Proc. SPIE 3008, 171 (1997).
[CrossRef]

C. González and S. D. Collins, Opt. Lett. 22, 709 (1997).
[CrossRef]

Csepregi, L.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137, 3612, 3626 (1990).
[CrossRef]

Gonzalez, C.

C. Gonzalez, R. L. Smith, D. G. Howitt, and S. D. Collins, Sensors Actuators A 66, 315 (1998).
[CrossRef]

González, C.

C. González and S. D. Collins, IEEE Photon. Lett. 9, 616 (1997).
[CrossRef]

C. González and S. D. Collins, Laser Focus World 34(5), 187 (1997).

C. González and S. D. Collins, Opt. Lett. 22, 709 (1997).
[CrossRef]

C. González, R. J. Welty, R. L. Smith, and S. D. Collins, Proc. SPIE 3008, 171 (1997).
[CrossRef]

Heuberger, A.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137, 3612, 3626 (1990).
[CrossRef]

Howitt, D. G.

C. Gonzalez, R. L. Smith, D. G. Howitt, and S. D. Collins, Sensors Actuators A 66, 315 (1998).
[CrossRef]

Oppenheim, A. V.

A. V. Oppenheim and R. W. Schafer, Digital Signal Processing (Prentice-Hall, Englewood Cliffs, N.J., 1975), p. 556.

Schafer, R. W.

A. V. Oppenheim and R. W. Schafer, Digital Signal Processing (Prentice-Hall, Englewood Cliffs, N.J., 1975), p. 556.

Seidel, H.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137, 3612, 3626 (1990).
[CrossRef]

Smith, R. L.

C. Gonzalez, R. L. Smith, D. G. Howitt, and S. D. Collins, Sensors Actuators A 66, 315 (1998).
[CrossRef]

C. González, R. J. Welty, R. L. Smith, and S. D. Collins, Proc. SPIE 3008, 171 (1997).
[CrossRef]

Twyman, F.

F. Twyman, Prism and Lens Making, 2nd ed. (Hilger, London, 1988).

Welty, R. J.

C. González, R. J. Welty, R. L. Smith, and S. D. Collins, Proc. SPIE 3008, 171 (1997).
[CrossRef]

IEEE Photon. Lett. (1)

C. González and S. D. Collins, IEEE Photon. Lett. 9, 616 (1997).
[CrossRef]

J. Electrochem. Soc. (1)

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgartel, J. Electrochem. Soc. 137, 3612, 3626 (1990).
[CrossRef]

Laser Focus World (1)

C. González and S. D. Collins, Laser Focus World 34(5), 187 (1997).

Opt. Lett. (1)

Proc. SPIE (1)

C. González, R. J. Welty, R. L. Smith, and S. D. Collins, Proc. SPIE 3008, 171 (1997).
[CrossRef]

Sensors Actuators A (1)

C. Gonzalez, R. L. Smith, D. G. Howitt, and S. D. Collins, Sensors Actuators A 66, 315 (1998).
[CrossRef]

Other (2)

F. Twyman, Prism and Lens Making, 2nd ed. (Hilger, London, 1988).

A. V. Oppenheim and R. W. Schafer, Digital Signal Processing (Prentice-Hall, Englewood Cliffs, N.J., 1975), p. 556.

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