Abstract

We report high-power vacuum-ultraviolet (vuv) generation at the Lyman-α wavelength of 121.6 nm, using a simple experimental system. vuv radiation is produced through two-photon-resonant difference-frequency mixing with a tunable ArF excimer laser and a Nd:YAG-pumped dye laser. Using phase-matched mixtures of Kr and Ar at a total pressure of 650  mbar, we produced 7-µJ energies at Lyman-α in approximately 5 ns 1.3 kW, as measured directly with a pyroelectric energy probe. Measurements indicate that higher powers are possible with system optimization. A tuning range of 0.1 nm was achieved for a fixed gas mole fraction at a total pressure of 650  mbar. Qualitative agreement is found between measured tuning profiles and theoretical predictions.

© 1998 Optical Society of America

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