Abstract

We describe a method and algorithm for reducing the sensitivity of phase-shifting interferometry to external vibrations. Using an interline-transfer camera, a shutter, and a fast phase shifter, we acquire a series of paired interferograms in quadrature, with the pairs spaced to maximize residual phase-error cancellation. The rapid acquisition of quadrature pairs significantly improves resistance of interferometry to low-frequency vibrations.

© 1998 Optical Society of America

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1996

1995

P. de Groot, J. Opt. Soc. Am. 12, 354 (1995).

1991

C. L. Koliopoulos, Proc. SPIE 1531, 119 (1991).

1990

1984

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).

1983

Appl. Opt.

J. Opt. Soc. Am.

P. de Groot, J. Opt. Soc. Am. 12, 354 (1995).

Opt. Eng.

R. Smythe and R. Moore, Opt. Eng. 23, 361 (1984).

Proc. SPIE

C. L. Koliopoulos, Proc. SPIE 1531, 119 (1991).

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