Abstract

Resonant effects in diffraction from two-dimensional dielectric gratings is demonstrated experimentally. A two-layer structure, which consists of a uniform guiding layer and a grating layer, yielded symmetric, low-sideband resonance that is suitable for narrow-band filter applications. Excellent agreement between measured and calculated spectral and angular dependence is obtained.

© 1996 Optical Society of America

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References

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  1. L. Mashev, E. Popov, Opt. Commun. 55, 377 (1985).
    [CrossRef]
  2. R. Magnusson, S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
    [CrossRef]
  3. M. T. Gale, K. Knop, R. Morf, Proc. SPIE 1210, 83 (1990).
    [CrossRef]
  4. H. L. Bertoni, L.-H. S. Cheo, T. Tamir, IEEE Trans. Antennas Propag. 37, 78 (1989).
    [CrossRef]
  5. R. Petit, ed., Electromagnetic Theory of Gratings (Springer-Verlag, Berlin, 1980).
    [CrossRef]
  6. R. Magnusson, S. S. Wang, T. D. Black, A. Sohn, IEEE Trans. Antennas Propag. 42, 567 (1994).
    [CrossRef]
  7. A. Malag, Opt. Commun. 32, 54 (1980).
    [CrossRef]

1994 (1)

R. Magnusson, S. S. Wang, T. D. Black, A. Sohn, IEEE Trans. Antennas Propag. 42, 567 (1994).
[CrossRef]

1992 (1)

R. Magnusson, S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
[CrossRef]

1990 (1)

M. T. Gale, K. Knop, R. Morf, Proc. SPIE 1210, 83 (1990).
[CrossRef]

1989 (1)

H. L. Bertoni, L.-H. S. Cheo, T. Tamir, IEEE Trans. Antennas Propag. 37, 78 (1989).
[CrossRef]

1985 (1)

L. Mashev, E. Popov, Opt. Commun. 55, 377 (1985).
[CrossRef]

1980 (1)

A. Malag, Opt. Commun. 32, 54 (1980).
[CrossRef]

Bertoni, H. L.

H. L. Bertoni, L.-H. S. Cheo, T. Tamir, IEEE Trans. Antennas Propag. 37, 78 (1989).
[CrossRef]

Black, T. D.

R. Magnusson, S. S. Wang, T. D. Black, A. Sohn, IEEE Trans. Antennas Propag. 42, 567 (1994).
[CrossRef]

Cheo, L.-H. S.

H. L. Bertoni, L.-H. S. Cheo, T. Tamir, IEEE Trans. Antennas Propag. 37, 78 (1989).
[CrossRef]

Gale, M. T.

M. T. Gale, K. Knop, R. Morf, Proc. SPIE 1210, 83 (1990).
[CrossRef]

Knop, K.

M. T. Gale, K. Knop, R. Morf, Proc. SPIE 1210, 83 (1990).
[CrossRef]

Magnusson, R.

R. Magnusson, S. S. Wang, T. D. Black, A. Sohn, IEEE Trans. Antennas Propag. 42, 567 (1994).
[CrossRef]

R. Magnusson, S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
[CrossRef]

Malag, A.

A. Malag, Opt. Commun. 32, 54 (1980).
[CrossRef]

Mashev, L.

L. Mashev, E. Popov, Opt. Commun. 55, 377 (1985).
[CrossRef]

Morf, R.

M. T. Gale, K. Knop, R. Morf, Proc. SPIE 1210, 83 (1990).
[CrossRef]

Popov, E.

L. Mashev, E. Popov, Opt. Commun. 55, 377 (1985).
[CrossRef]

Sohn, A.

R. Magnusson, S. S. Wang, T. D. Black, A. Sohn, IEEE Trans. Antennas Propag. 42, 567 (1994).
[CrossRef]

Tamir, T.

H. L. Bertoni, L.-H. S. Cheo, T. Tamir, IEEE Trans. Antennas Propag. 37, 78 (1989).
[CrossRef]

Wang, S. S.

R. Magnusson, S. S. Wang, T. D. Black, A. Sohn, IEEE Trans. Antennas Propag. 42, 567 (1994).
[CrossRef]

R. Magnusson, S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
[CrossRef]

Appl. Phys. Lett. (1)

R. Magnusson, S. S. Wang, Appl. Phys. Lett. 61, 1022 (1992).
[CrossRef]

IEEE Trans. Antennas Propag. (2)

H. L. Bertoni, L.-H. S. Cheo, T. Tamir, IEEE Trans. Antennas Propag. 37, 78 (1989).
[CrossRef]

R. Magnusson, S. S. Wang, T. D. Black, A. Sohn, IEEE Trans. Antennas Propag. 42, 567 (1994).
[CrossRef]

Opt. Commun. (2)

A. Malag, Opt. Commun. 32, 54 (1980).
[CrossRef]

L. Mashev, E. Popov, Opt. Commun. 55, 377 (1985).
[CrossRef]

Proc. SPIE (1)

M. T. Gale, K. Knop, R. Morf, Proc. SPIE 1210, 83 (1990).
[CrossRef]

Other (1)

R. Petit, ed., Electromagnetic Theory of Gratings (Springer-Verlag, Berlin, 1980).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Geometry of a 2D grating structure.

Fig. 2
Fig. 2

Calculated resonant reflection from a two-layer structure with a circular-hole photoresist grating. The values of the parameters are refractive indices nr = 1.625, nSiN = 2.02, ns = 1.454; thicknesses dr = 90 and dSiN = 151 nm; duty cycle 0.564; normal incidence; and TE polarization.

Fig. 3
Fig. 3

Scanning electron microscope picture of the 2D resonant structure with a period of 0.4605 μm.

Fig. 4
Fig. 4

Measured and calculated resonant reflection: (a) λ = 785 nm, (b) θ = 1.4°.

Equations (2)

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k l , m n = k x m x ^ + k y n y ^ + k z l , m n z ^ ,             l = 1 , 3 ,
k x m x ^ + k y n y ^ = β ,

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