Abstract

We demonstrate a spherical diffractive lens fabricated in fused quartz for use at the 632.8-nm wavelength. The lens is constructed by use of a modulated two-dimensional binary grating with a high transmitted zeroth-order efficiency. Rigorous eigenmode analysis is used to correlate the desired phase modulation with the fill factor. Fabrication requires only one lithography step. Using the lens, we were able to image a focal spot with a diffraction-limited spot size (FWHM).

© 1996 Optical Society of America

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  1. W. E. Kock, Bell Syst. Tech. J. 27, 58 (1948).
  2. W. Stork, N. Streibl, H. Haidner, P. Kipfer, Opt. Lett. 16, 1921 (1991).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
  7. E. Noponen, J. Turunen, J. Opt. Soc. Am. A 11, 2494 (1994).
    [CrossRef]
  8. H. Dammann, Optik 31, 95 (1970).
  9. O. Joubert, G. S. Oehrlein, Y. Zhang, J. Vac. Sci. Technol. A 12, 658 (1994).
    [CrossRef]
  10. S. M. Shank, R. Soave, A. Then, G. W. Tasker, “Fabrication of high aspect-ratio substructures in silicon for microchannel plates,” J. Vac. Sci. Technol. B (to be published).
  11. S. M. Sze, VLSI Technology (McGraw-Hill, New York, 1983), p. 226.
  12. H. Watanabe, Y. Todokoro, J. Vac. Sci. Technol. B 11, 2669 (1993).
    [CrossRef]

1995 (1)

1994 (4)

E. Noponen, J. Turunen, J. Opt. Soc. Am. A 11, 1097 (1994).
[CrossRef]

E. Noponen, J. Turunen, J. Opt. Soc. Am. A 11, 2494 (1994).
[CrossRef]

P. Kipfer, M. Collischon, H. Haidner, J. Schwider, Proc. SPIE 2169, 100 (1994).
[CrossRef]

O. Joubert, G. S. Oehrlein, Y. Zhang, J. Vac. Sci. Technol. A 12, 658 (1994).
[CrossRef]

1993 (1)

H. Watanabe, Y. Todokoro, J. Vac. Sci. Technol. B 11, 2669 (1993).
[CrossRef]

1992 (1)

1991 (1)

1970 (1)

H. Dammann, Optik 31, 95 (1970).

1948 (1)

W. E. Kock, Bell Syst. Tech. J. 27, 58 (1948).

Chen, F. T.

Collischon, M.

P. Kipfer, M. Collischon, H. Haidner, J. Schwider, Proc. SPIE 2169, 100 (1994).
[CrossRef]

Craighead, H. G.

Dammann, H.

H. Dammann, Optik 31, 95 (1970).

Farn, M. W.

Haidner, H.

P. Kipfer, M. Collischon, H. Haidner, J. Schwider, Proc. SPIE 2169, 100 (1994).
[CrossRef]

W. Stork, N. Streibl, H. Haidner, P. Kipfer, Opt. Lett. 16, 1921 (1991).
[CrossRef] [PubMed]

Joubert, O.

O. Joubert, G. S. Oehrlein, Y. Zhang, J. Vac. Sci. Technol. A 12, 658 (1994).
[CrossRef]

Kipfer, P.

P. Kipfer, M. Collischon, H. Haidner, J. Schwider, Proc. SPIE 2169, 100 (1994).
[CrossRef]

W. Stork, N. Streibl, H. Haidner, P. Kipfer, Opt. Lett. 16, 1921 (1991).
[CrossRef] [PubMed]

Kock, W. E.

W. E. Kock, Bell Syst. Tech. J. 27, 58 (1948).

Noponen, E.

Oehrlein, G. S.

O. Joubert, G. S. Oehrlein, Y. Zhang, J. Vac. Sci. Technol. A 12, 658 (1994).
[CrossRef]

Schwider, J.

P. Kipfer, M. Collischon, H. Haidner, J. Schwider, Proc. SPIE 2169, 100 (1994).
[CrossRef]

Shank, S. M.

S. M. Shank, R. Soave, A. Then, G. W. Tasker, “Fabrication of high aspect-ratio substructures in silicon for microchannel plates,” J. Vac. Sci. Technol. B (to be published).

Soave, R.

S. M. Shank, R. Soave, A. Then, G. W. Tasker, “Fabrication of high aspect-ratio substructures in silicon for microchannel plates,” J. Vac. Sci. Technol. B (to be published).

Stork, W.

Streibl, N.

Sze, S. M.

S. M. Sze, VLSI Technology (McGraw-Hill, New York, 1983), p. 226.

Tasker, G. W.

S. M. Shank, R. Soave, A. Then, G. W. Tasker, “Fabrication of high aspect-ratio substructures in silicon for microchannel plates,” J. Vac. Sci. Technol. B (to be published).

Then, A.

S. M. Shank, R. Soave, A. Then, G. W. Tasker, “Fabrication of high aspect-ratio substructures in silicon for microchannel plates,” J. Vac. Sci. Technol. B (to be published).

Todokoro, Y.

H. Watanabe, Y. Todokoro, J. Vac. Sci. Technol. B 11, 2669 (1993).
[CrossRef]

Turunen, J.

Watanabe, H.

H. Watanabe, Y. Todokoro, J. Vac. Sci. Technol. B 11, 2669 (1993).
[CrossRef]

Zhang, Y.

O. Joubert, G. S. Oehrlein, Y. Zhang, J. Vac. Sci. Technol. A 12, 658 (1994).
[CrossRef]

Appl. Opt. (1)

Bell Syst. Tech. J. (1)

W. E. Kock, Bell Syst. Tech. J. 27, 58 (1948).

J. Opt. Soc. Am. A (2)

J. Vac. Sci. Technol. A (1)

O. Joubert, G. S. Oehrlein, Y. Zhang, J. Vac. Sci. Technol. A 12, 658 (1994).
[CrossRef]

J. Vac. Sci. Technol. B (1)

H. Watanabe, Y. Todokoro, J. Vac. Sci. Technol. B 11, 2669 (1993).
[CrossRef]

Opt. Lett. (2)

Optik (1)

H. Dammann, Optik 31, 95 (1970).

Proc. SPIE (1)

P. Kipfer, M. Collischon, H. Haidner, J. Schwider, Proc. SPIE 2169, 100 (1994).
[CrossRef]

Other (2)

S. M. Shank, R. Soave, A. Then, G. W. Tasker, “Fabrication of high aspect-ratio substructures in silicon for microchannel plates,” J. Vac. Sci. Technol. B (to be published).

S. M. Sze, VLSI Technology (McGraw-Hill, New York, 1983), p. 226.

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