Abstract

A novel monolithic free-space optical disk pickup head has been fabricated by micromachined micro-optical bench technology. The pickup head contains a self-aligned semiconductor edge-emitting laser, a collimating lens, a beam splitter, two focusing lenses, and two 45° mirrors. All optical components are built monolithically on Si substrates. The 45° mirror directs the optical output beam in the surface-normal direction. This novel design could significantly reduce the size and the weight of the optical pickup head as well as the cost of the assembly processes. The weight reduction could also greatly increase the data access rate.

© 1996 Optical Society of America

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References

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  1. M. Mansuripur, “Principles of optical disk data storage,” in Handbook of Optics, Fundamentals, Techniques, & Design, 2nd ed., M. Bass, ed. (McGraw-Hill, New York, 1995), Chap, 31.
  2. S. Ura, T. Suhara, H. Nishihara, J. Koyama, J. Lightwave Technol. 4, 913 (1986).
    [CrossRef]
  3. T. Shiono, H. Ogawa, Appl. Opt. 33, 7350 (1994).
    [CrossRef] [PubMed]
  4. L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, IEEE Photon. Technol. Lett. 6, 1445 (1994).
    [CrossRef]
  5. L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, Appl. Phys. Lett. 66, 2946 (1995).
    [CrossRef]
  6. K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sensors Actuators A 33, 249 (1992).
    [CrossRef]

1995 (1)

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, Appl. Phys. Lett. 66, 2946 (1995).
[CrossRef]

1994 (2)

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, IEEE Photon. Technol. Lett. 6, 1445 (1994).
[CrossRef]

T. Shiono, H. Ogawa, Appl. Opt. 33, 7350 (1994).
[CrossRef] [PubMed]

1992 (1)

K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sensors Actuators A 33, 249 (1992).
[CrossRef]

1986 (1)

S. Ura, T. Suhara, H. Nishihara, J. Koyama, J. Lightwave Technol. 4, 913 (1986).
[CrossRef]

Burgett, S. R.

K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sensors Actuators A 33, 249 (1992).
[CrossRef]

Fearing, R. S.

K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sensors Actuators A 33, 249 (1992).
[CrossRef]

Judy, M. W.

K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sensors Actuators A 33, 249 (1992).
[CrossRef]

Koyama, J.

S. Ura, T. Suhara, H. Nishihara, J. Koyama, J. Lightwave Technol. 4, 913 (1986).
[CrossRef]

Lee, S. S.

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, Appl. Phys. Lett. 66, 2946 (1995).
[CrossRef]

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, IEEE Photon. Technol. Lett. 6, 1445 (1994).
[CrossRef]

Lin, L. Y.

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, Appl. Phys. Lett. 66, 2946 (1995).
[CrossRef]

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, IEEE Photon. Technol. Lett. 6, 1445 (1994).
[CrossRef]

Mansuripur, M.

M. Mansuripur, “Principles of optical disk data storage,” in Handbook of Optics, Fundamentals, Techniques, & Design, 2nd ed., M. Bass, ed. (McGraw-Hill, New York, 1995), Chap, 31.

Nishihara, H.

S. Ura, T. Suhara, H. Nishihara, J. Koyama, J. Lightwave Technol. 4, 913 (1986).
[CrossRef]

Ogawa, H.

Pister, K. S. J.

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, Appl. Phys. Lett. 66, 2946 (1995).
[CrossRef]

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, IEEE Photon. Technol. Lett. 6, 1445 (1994).
[CrossRef]

K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sensors Actuators A 33, 249 (1992).
[CrossRef]

Shiono, T.

Suhara, T.

S. Ura, T. Suhara, H. Nishihara, J. Koyama, J. Lightwave Technol. 4, 913 (1986).
[CrossRef]

Ura, S.

S. Ura, T. Suhara, H. Nishihara, J. Koyama, J. Lightwave Technol. 4, 913 (1986).
[CrossRef]

Wu, M. C.

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, Appl. Phys. Lett. 66, 2946 (1995).
[CrossRef]

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, IEEE Photon. Technol. Lett. 6, 1445 (1994).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, Appl. Phys. Lett. 66, 2946 (1995).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

L. Y. Lin, S. S. Lee, K. S. J. Pister, M. C. Wu, IEEE Photon. Technol. Lett. 6, 1445 (1994).
[CrossRef]

J. Lightwave Technol. (1)

S. Ura, T. Suhara, H. Nishihara, J. Koyama, J. Lightwave Technol. 4, 913 (1986).
[CrossRef]

Sensors Actuators A (1)

K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sensors Actuators A 33, 249 (1992).
[CrossRef]

Other (1)

M. Mansuripur, “Principles of optical disk data storage,” in Handbook of Optics, Fundamentals, Techniques, & Design, 2nd ed., M. Bass, ed. (McGraw-Hill, New York, 1995), Chap, 31.

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Figures (4)

Fig. 1
Fig. 1

(a) Schematic and (b) scanning electron micrograph of the free-space integrated optical disk pickup head.

Fig. 2
Fig. 2

Widths of the collimated beam versus distance from the lens. The divergence angles of the laser beam emitted from the semiconductor edge-emitting laser have been reduced to 0.53° × 1.8° by the collimating lens.

Fig. 3
Fig. 3

(a) CCD images of the focused spot near the focal plane. (b) 1/e-field beam width versus longitudinal displacement near the focal plane. The different focal lengths in the X and the Y directions result from the intrinsic astigmatism of the edge-emitting laser.

Fig. 4
Fig. 4

Optical beam profiles at the focal plane. The FWHM beam widths are 6.1 and 2.6 μm in the X and the Y directions, respectively.

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