Abstract

We present the design, fabrication, and characterization of a subwavelength-pulse-width spatially modulated diffractive array illuminator for an operating wavelength of 0.633 μm. Electromagnetic and scalar diffraction theories are used to reduce manufacturing difficulties while yielding high diffraction efficiency coupled with low reconstruction error. We employ direct electron beam writing and reactive ion etching to realize a transmission-type three-beam array illuminator in photoresist.

© 1996 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Binary surface-relief gratings for array illumination in digital optics

Antti Vasara, Mohammad R. Taghizadeh, Jari Turunen, Jan Westerholm, Eero Noponen, Hiroyuki Ichikawa, J. Michael Miller, Tommi Jaakkola, and Sirpa Kuisma
Appl. Opt. 31(17) 3320-3336 (1992)

Binary high-frequency-carrier diffractive optical elements: electromagnetic theory

Eero Noponen and Jari Turunen
J. Opt. Soc. Am. A 11(3) 1097-1109 (1994)

Bragg holograms with binary synthetic surface-relief profile

Jari Turunen, Eero Noponen, Paul Blair, J. Michael Miller, and Mohammad R. Taghizadeh
Opt. Lett. 18(12) 1022-1024 (1993)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription