Abstract

GeO2–SiO2 thin glass films were prepared by the rf sputtering deposition method. Changes in the refractive index of −3% and in the volume of 118% were induced in the film by irradiation with excimer-laser pulses. Bragg gratings a (periodic surface-relief pattern with a sinusoidal wave) have been written in the film by irradiation through a phase mask.

© 1996 Optical Society of America

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References

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1995 (3)

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

J. Nishii, N. Kitamura, H. Yamanaka, H. Hosono, H. Kawazoe, Opt. Lett. 20, 1184 (1995).
[CrossRef] [PubMed]

1994 (2)

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

J. Nishii, H. Yamanaka, H. Hosono, H. Kawazoe, Appl. Phys. Lett. 64, 282 (1994).
[CrossRef]

1993 (2)

1992 (2)

R. M. Atkins, V. Mizrahi, Electron. Lett. 28, 1743 (1992).
[CrossRef]

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

1985 (2)

E. J. Friebele, D. L. Griscom, Mater. Res. Soc. Symp. Proc. 61, 319 (1985).
[CrossRef]

H. Kawazoe, J. Non-Cryst. Solids 71, 231 (1985).
[CrossRef]

1978 (1)

K. O. Hill, Y. Fujii, D. C. Johnson, B. S. Kawasaki, Appl. Phys. Lett. 32, 647 (1978).
[CrossRef]

1961 (1)

R. V. Adams, Phys. Chem. Glasses 29, 101 (1961).

Abe, M.

Abe, Y.

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

Adams, R. V.

R. V. Adams, Phys. Chem. Glasses 29, 101 (1961).

Albert, J.

Atkins, R. M.

R. M. Atkins, V. Mizrahi, Electron. Lett. 28, 1743 (1992).
[CrossRef]

Bayon, J. F.

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Bernag, P.

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

Bernage, P.

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Bilodeau, F.

Cordier, P.

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

Cruz, J. L.

L. Dong, J. L. Cruz, L. Reekie, M. G. Xu, D. N. Payne, in Photosensitive and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington D.C., 1995), p. 70.

Dacosta, A.

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Dong, L.

L. Dong, J. L. Cruz, L. Reekie, M. G. Xu, D. N. Payne, in Photosensitive and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington D.C., 1995), p. 70.

Douay, M.

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Doukhan, J. C.

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

Fertein, E.

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

Friebele, E. J.

E. J. Friebele, D. L. Griscom, Mater. Res. Soc. Symp. Proc. 61, 319 (1985).
[CrossRef]

Fujii, Y.

K. O. Hill, Y. Fujii, D. C. Johnson, B. S. Kawasaki, Appl. Phys. Lett. 32, 647 (1978).
[CrossRef]

Fukumi, K.

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

Georges, T.

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

Griscom, D. L.

E. J. Friebele, D. L. Griscom, Mater. Res. Soc. Symp. Proc. 61, 319 (1985).
[CrossRef]

Guenot, P.

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

Hibino, Y.

Hill, K. O.

K. O. Hill, Y. Fujii, D. C. Johnson, B. S. Kawasaki, Appl. Phys. Lett. 32, 647 (1978).
[CrossRef]

Hill, K. P.

Hosono, H.

J. Nishii, N. Kitamura, H. Yamanaka, H. Hosono, H. Kawazoe, Opt. Lett. 20, 1184 (1995).
[CrossRef] [PubMed]

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

J. Nishii, H. Yamanaka, H. Hosono, H. Kawazoe, Appl. Phys. Lett. 64, 282 (1994).
[CrossRef]

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

Johnson, D. C.

Kawachi, M.

Kawamura, K.

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

Kawasaki, B. S.

K. O. Hill, Y. Fujii, D. C. Johnson, B. S. Kawasaki, Appl. Phys. Lett. 32, 647 (1978).
[CrossRef]

Kawazoe, H.

J. Nishii, N. Kitamura, H. Yamanaka, H. Hosono, H. Kawazoe, Opt. Lett. 20, 1184 (1995).
[CrossRef] [PubMed]

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

J. Nishii, H. Yamanaka, H. Hosono, H. Kawazoe, Appl. Phys. Lett. 64, 282 (1994).
[CrossRef]

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

H. Kawazoe, J. Non-Cryst. Solids 71, 231 (1985).
[CrossRef]

Kinser, D. L.

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

Kitamura, N.

Malo, B.

Mathieu, C.

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Mizrahi, V.

R. M. Atkins, V. Mizrahi, Electron. Lett. 28, 1743 (1992).
[CrossRef]

Muta, K.

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

Niay, P.

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Nishii, J.

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

J. Nishii, N. Kitamura, H. Yamanaka, H. Hosono, H. Kawazoe, Opt. Lett. 20, 1184 (1995).
[CrossRef] [PubMed]

J. Nishii, H. Yamanaka, H. Hosono, H. Kawazoe, Appl. Phys. Lett. 64, 282 (1994).
[CrossRef]

Payne, D. N.

L. Dong, J. L. Cruz, L. Reekie, M. G. Xu, D. N. Payne, in Photosensitive and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington D.C., 1995), p. 70.

Potter, B. G.

Poumellec, B.

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Ramecourt, D.

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Reekie, L.

L. Dong, J. L. Cruz, L. Reekie, M. G. Xu, D. N. Payne, in Photosensitive and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington D.C., 1995), p. 70.

Riant, I.

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

Sansonetti, P.

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

Simmons, H.

Simmons, K. D.

Stegeman, G. I.

Taunay, T.

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

Weeks, R. A.

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

Xu, M. G.

L. Dong, J. L. Cruz, L. Reekie, M. G. Xu, D. N. Payne, in Photosensitive and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington D.C., 1995), p. 70.

Yamanaka, H.

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

J. Nishii, N. Kitamura, H. Yamanaka, H. Hosono, H. Kawazoe, Opt. Lett. 20, 1184 (1995).
[CrossRef] [PubMed]

J. Nishii, H. Yamanaka, H. Hosono, H. Kawazoe, Appl. Phys. Lett. 64, 282 (1994).
[CrossRef]

Appl. Phys. Lett. (2)

K. O. Hill, Y. Fujii, D. C. Johnson, B. S. Kawasaki, Appl. Phys. Lett. 32, 647 (1978).
[CrossRef]

J. Nishii, H. Yamanaka, H. Hosono, H. Kawazoe, Appl. Phys. Lett. 64, 282 (1994).
[CrossRef]

Electron. Lett. (1)

R. M. Atkins, V. Mizrahi, Electron. Lett. 28, 1743 (1992).
[CrossRef]

J. Non-Cryst. Solids (1)

H. Kawazoe, J. Non-Cryst. Solids 71, 231 (1985).
[CrossRef]

Mater. Res. Soc. Symp. Proc. (1)

E. J. Friebele, D. L. Griscom, Mater. Res. Soc. Symp. Proc. 61, 319 (1985).
[CrossRef]

Opt. Commun. (1)

P. Cordier, J. C. Doukhan, E. Fertein, P. Bernage, P. Niay, J. F. Bayon, T. Georges, Opt. Commun. 111, 269 (1994).
[CrossRef]

Opt. Lett. (3)

Opt. Mater. (1)

B. Poumellec, P. Guenot, I. Riant, P. Sansonetti, P. Niay, P. Bernag, J. F. Bayon, Opt. Mater. 4, 441 (1995).
[CrossRef]

Phys. Chem. Glasses (1)

R. V. Adams, Phys. Chem. Glasses 29, 101 (1961).

Phys. Rev. B (2)

J. Nishii, K. Fukumi, H. Yamanaka, K. Kawamura, H. Hosono, H. Kawazoe, Phys. Rev. B 52, 1661 (1995).
[CrossRef]

H. Hosono, Y. Abe, D. L. Kinser, R. A. Weeks, K. Muta, H. Kawazoe, Phys. Rev. B 46, 11,445 (1992).
[CrossRef]

Other (2)

M. Douay, D. Ramecourt, T. Taunay, P. Bernage, P. Niay, A. Dacosta, C. Mathieu, J. F. Bayon, B. Poumellec, in Photosensitivity and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1995), p. 48.

L. Dong, J. L. Cruz, L. Reekie, M. G. Xu, D. N. Payne, in Photosensitive and Quadratic Nonlinearity in Glass Waveguides: Fundamentals and Applications, Vol. 22 of 1995 OSA Technical Digest Series (Optical Society of America, Washington D.C., 1995), p. 70.

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Figures (4)

Fig. 1
Fig. 1

Bird's-eye views of (a) the refractive index and (b) the thickness of the sputter-deposited GeO2–SiO2 thin glass film after irradiation with a 1200-pulse ArF laser following annealing at 500 °C and 1 h in vacuum. The refractive index was decreased by 0.052, and the thickness was increased by 29 nm.

Fig. 2
Fig. 2

Photographs taken with (a) a scanning electron microscope and (b) an atomic force microscope of the surface of the GeO2–SiO2 thin glass film after irradiation with 1200 ArF-laser pulses.

Fig. 3
Fig. 3

Absorption spectra of the GeO2–SiO2 thin glass film (3 μm thick) deposited onto the SiO2 glass plate: (a) as deposited, (b) annealed at 500 °C for 1 h, (c) irradiated with 1200 ArF-laser pulses after annealing. (d) Difference spectrum between (b) and (c).

Fig. 4
Fig. 4

IR absorption spectra of GeO2–SiO2 thin glass films (0.2 μm thick): (a) as deposited, (b) annealed at 500 °C for 1 h, (c) irradiated with 1200 ArF-laser pulses following annealing. (d), (e) Spectra of as-deposited pure SiO2 and GeO2 thin glass films, respectively.

Tables (1)

Tables Icon

Table 1 Refractive Index at 633 nm and Thickness of the GeO2–SiO2 Thin Glass Films Prepared by the Sputtering Method

Metrics