Abstract

Experimental measurements of the light scattered from a metallic circular cylinder, with a section diameter comparable with the incident wavelength, upon a metallic flat substrate are presented. The validity of the theoretical numerical calculation obtained from a one-dimensional model based on Maxwell's coupled integral equations for real metals is demonstrated by comparison with the experimental results. The theoretical model is able to reproduce a geometric feature as the partial burying of the cylinder in the substrate because of the sputtering process.

© 1996 Optical Society of America

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References

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  1. J. A. Ogilvy, Theory of Wave Scattering from Random Rough Surfaces (Hilger, London, 1991), Chap. 6.
  2. R. P. Young, Opt. Eng. 15, 516 (1976).
  3. A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
  14. M. Nieto-Vesperinas, Scattering and Diffraction in Physical Optics (Wiley, New York, 1991), Chap. 6.
  15. G. Videen, W. S. Bickel, Appl. Opt. 31, 3488 (1992).
    [CrossRef] [PubMed]
  16. V. J. Iafelice, W. S. Bickel, Appl. Opt. 26, 1799 (1987).
    [CrossRef]
  17. F. Moreno, J. M. Saiz, F. González, Appl. Phys. Lett. 68, 3087 (1996).
    [CrossRef]

1996

F. Moreno, J. M. Saiz, F. González, Appl. Phys. Lett. 68, 3087 (1996).
[CrossRef]

1995

P. J. Valle, F. Moreno, J. M. Saiz, F. González, Phys. Rev. B 51, 13,681 (1995).
[CrossRef]

A. Madrazo, M. Nieto-Vesperinas, J. Opt. Soc. Am. A 12, 1295 (1995).
[CrossRef]

1994

1993

1992

1989

A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
[CrossRef]

1987

1986

P. A. Bobbert, J. Vlieger, Physica 137A, 209 (1986).

1981

1976

R. P. Young, Opt. Eng. 15, 516 (1976).

Abromson, D.

Bell, B. W.

Bickel, W. S.

Bobbert, P. A.

P. A. Bobbert, J. Vlieger, Physica 137A, 209 (1986).

Bonch-Bruevich, A. M.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Cullis, A. G.

A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
[CrossRef]

González, F.

F. Moreno, J. M. Saiz, F. González, Appl. Phys. Lett. 68, 3087 (1996).
[CrossRef]

P. J. Valle, F. Moreno, J. M. Saiz, F. González, Phys. Rev. B 51, 13,681 (1995).
[CrossRef]

P. J. Valle, F. González, F. Moreno, Appl. Opt. 33, 512 (1994).
[CrossRef] [PubMed]

F. Moreno, F. González, J. M. Saiz, P. J. Valle, D. L. Jordan, J. Opt. Soc. Am. A 10, 141 (1993).
[CrossRef]

Iafelice, V. J.

Jordan, D. L.

Libenson, M. N.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Madrazo, A.

A. Madrazo, M. Nieto-Vesperinas, J. Opt. Soc. Am. A 12, 1295 (1995).
[CrossRef]

Makin, V. S.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Martin, A. R. S.

A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
[CrossRef]

Moreno, F.

F. Moreno, J. M. Saiz, F. González, Appl. Phys. Lett. 68, 3087 (1996).
[CrossRef]

P. J. Valle, F. Moreno, J. M. Saiz, F. González, Phys. Rev. B 51, 13,681 (1995).
[CrossRef]

P. J. Valle, F. González, F. Moreno, Appl. Opt. 33, 512 (1994).
[CrossRef] [PubMed]

F. Moreno, F. González, J. M. Saiz, P. J. Valle, D. L. Jordan, J. Opt. Soc. Am. A 10, 141 (1993).
[CrossRef]

Nahm, K. B.

Nieto-Vesperinas, M.

A. Madrazo, M. Nieto-Vesperinas, J. Opt. Soc. Am. A 12, 1295 (1995).
[CrossRef]

M. Nieto-Vesperinas, Scattering and Diffraction in Physical Optics (Wiley, New York, 1991), Chap. 6.

Ogilvy, J. A.

J. A. Ogilvy, Theory of Wave Scattering from Random Rough Surfaces (Hilger, London, 1991), Chap. 6.

Pidduck, A. J.

A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
[CrossRef]

Robbins, D. J.

A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
[CrossRef]

Saiz, J. M.

F. Moreno, J. M. Saiz, F. González, Appl. Phys. Lett. 68, 3087 (1996).
[CrossRef]

P. J. Valle, F. Moreno, J. M. Saiz, F. González, Phys. Rev. B 51, 13,681 (1995).
[CrossRef]

F. Moreno, F. González, J. M. Saiz, P. J. Valle, D. L. Jordan, J. Opt. Soc. Am. A 10, 141 (1993).
[CrossRef]

Trubaev, V. V.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Turner, M. G.

Valle, P. J.

Videen, G.

Vlieger, J.

P. A. Bobbert, J. Vlieger, Physica 137A, 209 (1986).

Wolfe, W. L.

Young, I. M.

A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
[CrossRef]

Young, R. P.

R. P. Young, Opt. Eng. 15, 516 (1976).

Appl. Opt.

Appl. Phys. Lett.

F. Moreno, J. M. Saiz, F. González, Appl. Phys. Lett. 68, 3087 (1996).
[CrossRef]

J. Opt. Soc. Am. A

Mater. Sci. Eng. B

A. J. Pidduck, D. J. Robbins, I. M. Young, A. G. Cullis, A. R. S. Martin, Mater. Sci. Eng. B 4, 417 (1989).
[CrossRef]

Opt. Eng.

R. P. Young, Opt. Eng. 15, 516 (1976).

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Phys. Rev. B

P. J. Valle, F. Moreno, J. M. Saiz, F. González, Phys. Rev. B 51, 13,681 (1995).
[CrossRef]

Physica

P. A. Bobbert, J. Vlieger, Physica 137A, 209 (1986).

Other

J. A. Ogilvy, Theory of Wave Scattering from Random Rough Surfaces (Hilger, London, 1991), Chap. 6.

M. Nieto-Vesperinas, Scattering and Diffraction in Physical Optics (Wiley, New York, 1991), Chap. 6.

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Figures (3)

Fig. 1
Fig. 1

Scattering patterns corresponding to a cylinder of diameter D = 1.1 μm at normal incidence. Results from the one-dimensional model (continuous curves) are plotted, together with the experimental results (dashed curves). (a) s incident wave, (b) p incident wave.

Fig. 2
Fig. 2

Same as Fig. 1 for θi = 30°.

Fig. 3
Fig. 3

Scattering patterns corresponding to a buried cylinder of diameter D = 1.1 μm for an s incident wave. Results from the one-dimensional model, with Δ = D/30 (continuous curves) are plotted, together with the experimental results (dashed curves). (a) θi = 0°, (b) θi = 30°.

Equations (1)

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E ( r ) = E i ( r ) + 1 4 π S [ E ( r ) G ( r , r ) n G ( r , r ) E ( r ) n ] d S ,

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