Abstract

We present the results of subwavelength antireflection surfaces etched into GaAs for use at 975 nm. These surfaces comprise linear gratings with periods less than the wavelength of light in GaAs. The structure appears as a homogeneous birefringent film. For one of the two polarizations, the film is directly analogous to the well-known quarter-wavelength antireflection coating. For the other polarization there is little effect on the surface reflectivity.

© 1996 Optical Society of America

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References

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  1. R. C. Enger, S. K. Case, Appl. Opt. 22, 3220 (1983).
    [CrossRef] [PubMed]
  2. D. C. Flanders, Appl. Phys. Lett. 42, 492 (1983).
    [CrossRef]
  3. Y. Ono, Y. Kimura, Y. Ohta, N. Nishida, Appl. Opt. 26, 1142 (1987).
    [CrossRef] [PubMed]
  4. D. Raquin, G. M. Morris, Appl. Opt. 32, 1154 (1993).
    [CrossRef]
  5. J. R. Wendt, G. A. Vawter, R. E. Smith, M. E. Warren, J. Vac. Sci. Technol. 13, 2705 (1995).
    [CrossRef]
  6. K. Knop, J. Opt. Soc. Am. 68, 1206 (1978).
    [CrossRef]
  7. M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. 71, 881 (1981).
    [CrossRef]
  8. D. A. B. Miller, J. Quantum Electron. 17, 306 (1981).
    [CrossRef]
  9. M. Born, E. Wolf, Principals of Optics, 6th ed. (Pergamon, New York, 1980).
  10. R. E. Collin, Field Theory of Guided Waves, 2nd ed. (IEEE Press, New York, 1991).
  11. M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, Opt. Lett. 20, 1141 (1995).
    [CrossRef]

1995 (2)

J. R. Wendt, G. A. Vawter, R. E. Smith, M. E. Warren, J. Vac. Sci. Technol. 13, 2705 (1995).
[CrossRef]

M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, Opt. Lett. 20, 1141 (1995).
[CrossRef]

1993 (1)

1987 (1)

1983 (2)

1981 (2)

M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. 71, 881 (1981).
[CrossRef]

D. A. B. Miller, J. Quantum Electron. 17, 306 (1981).
[CrossRef]

1978 (1)

Born, M.

M. Born, E. Wolf, Principals of Optics, 6th ed. (Pergamon, New York, 1980).

Case, S. K.

Collin, R. E.

R. E. Collin, Field Theory of Guided Waves, 2nd ed. (IEEE Press, New York, 1991).

Enger, R. C.

Flanders, D. C.

D. C. Flanders, Appl. Phys. Lett. 42, 492 (1983).
[CrossRef]

Gaylord, T. K.

M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. 71, 881 (1981).
[CrossRef]

Kimura, Y.

Knop, K.

Miller, D. A. B.

D. A. B. Miller, J. Quantum Electron. 17, 306 (1981).
[CrossRef]

Moharam, M. G.

M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. 71, 881 (1981).
[CrossRef]

Morris, G. M.

Nishida, N.

Ohta, Y.

Ono, Y.

Raquin, D.

Smith, R. E.

M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, Opt. Lett. 20, 1141 (1995).
[CrossRef]

J. R. Wendt, G. A. Vawter, R. E. Smith, M. E. Warren, J. Vac. Sci. Technol. 13, 2705 (1995).
[CrossRef]

Vawter, G. A.

J. R. Wendt, G. A. Vawter, R. E. Smith, M. E. Warren, J. Vac. Sci. Technol. 13, 2705 (1995).
[CrossRef]

M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, Opt. Lett. 20, 1141 (1995).
[CrossRef]

Warren, M. E.

M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, Opt. Lett. 20, 1141 (1995).
[CrossRef]

J. R. Wendt, G. A. Vawter, R. E. Smith, M. E. Warren, J. Vac. Sci. Technol. 13, 2705 (1995).
[CrossRef]

Wendt, J. R.

J. R. Wendt, G. A. Vawter, R. E. Smith, M. E. Warren, J. Vac. Sci. Technol. 13, 2705 (1995).
[CrossRef]

M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, Opt. Lett. 20, 1141 (1995).
[CrossRef]

Wolf, E.

M. Born, E. Wolf, Principals of Optics, 6th ed. (Pergamon, New York, 1980).

Appl. Opt. (3)

Appl. Phys. Lett. (1)

D. C. Flanders, Appl. Phys. Lett. 42, 492 (1983).
[CrossRef]

J. Opt. Soc. Am. (2)

K. Knop, J. Opt. Soc. Am. 68, 1206 (1978).
[CrossRef]

M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. 71, 881 (1981).
[CrossRef]

J. Quantum Electron. (1)

D. A. B. Miller, J. Quantum Electron. 17, 306 (1981).
[CrossRef]

J. Vac. Sci. Technol. (1)

J. R. Wendt, G. A. Vawter, R. E. Smith, M. E. Warren, J. Vac. Sci. Technol. 13, 2705 (1995).
[CrossRef]

Opt. Lett. (1)

M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, Opt. Lett. 20, 1141 (1995).
[CrossRef]

Other (2)

M. Born, E. Wolf, Principals of Optics, 6th ed. (Pergamon, New York, 1980).

R. E. Collin, Field Theory of Guided Waves, 2nd ed. (IEEE Press, New York, 1991).

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Figures (4)

Fig. 1
Fig. 1

Scanning electron micrograph of a cross section of three teeth of the AR structured surface etched into GaAs.

Fig. 2
Fig. 2

Transmission data and theory for the two polarizations passing through the AR structured surface etched into GaAs.

Fig. 3
Fig. 3

Schematic drawing of the sample and experimental setup.

Fig. 4
Fig. 4

Comparison of the theoretical TE transmission for AR surfaces with a range of pitches, designed with Eq. (3) (dashed curve) and Eq. (5) (solid curve).

Equations (6)

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T min , max = T f T b e α l ( 1 ± R f R b e α l ) 2 ,
R f TM R f TE = ( T max TM T min TM T max TM + T min TM ) ( T max TE + T min TE T max TE T min TE ) ,
( TE ) n eff 2 = f n GaAs 2 + ( 1 f ) n air 2 ,
( TM ) 1 n eff 2 = f 1 n GaAs 2 + ( 1 f ) 1 n air 2
( TE ) tanh [ π ( 1 f ) Λ λ n eff 2 n air 2 ] n GaAs 2 n eff 2 = tan ( π f Λ λ n GaAs 2 n eff 2 ) n eff 2 n air 2 ,
( TM ) tanh [ π ( 1 f ) Λ λ n eff 2 n air 2 ] n air 2 n GaAs 2 n eff 2 = tan ( π f Λ λ n GaAs 2 n eff 2 ) n GaAs 2 n eff 2 n air 2 .

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