Abstract

We have measured laser damage thresholds of a variety of fluoride-based multilayer coatings at 249 nm by using pulse lengths between 450 fs and 25 ns. Rare-earth fluoride materials yield coatings with damage resistance approximately three times greater than conventional oxide multilayers. In the scaling law, where the damage threshold is proportional to the nth power of the pulse length, the value of n changed between 1 and 0.25 over the range of pulse lengths employed.

© 1993 Optical Society of America

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  1. T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).
  2. F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).
  3. S. Foltyn, B. E. Newnam, IEEE J. Quantum Electron. QE-17, 2092 (1981).
    [Crossref]
  4. S. Foltyn, L. J. John, Natl. Bur. Stand. Spec. Publ. 752, 336 (1986).
  5. I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
    [Crossref]
  6. S. Szatmári, F. P. Schäfer, E. Müller-Horsche, W. Mückenheim, Opt. Commun. 63, 305 (1987).
    [Crossref]
  7. K. Mann, H. Gerhardt, G. Pfeifer, R. Wolf, Proc. Soc. Photo-Opt. Instrum. Eng. 1624, 436 (1992).

1992 (1)

K. Mann, H. Gerhardt, G. Pfeifer, R. Wolf, Proc. Soc. Photo-Opt. Instrum. Eng. 1624, 436 (1992).

1991 (1)

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

1990 (1)

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

1987 (1)

S. Szatmári, F. P. Schäfer, E. Müller-Horsche, W. Mückenheim, Opt. Commun. 63, 305 (1987).
[Crossref]

1986 (1)

S. Foltyn, L. J. John, Natl. Bur. Stand. Spec. Publ. 752, 336 (1986).

1981 (2)

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

S. Foltyn, B. E. Newnam, IEEE J. Quantum Electron. QE-17, 2092 (1981).
[Crossref]

Andrew, J. E.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Carniglia, C. K

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

Foltyn, S.

S. Foltyn, L. J. John, Natl. Bur. Stand. Spec. Publ. 752, 336 (1986).

S. Foltyn, B. E. Newnam, IEEE J. Quantum Electron. QE-17, 2092 (1981).
[Crossref]

Gerhardt, H.

K. Mann, H. Gerhardt, G. Pfeifer, R. Wolf, Proc. Soc. Photo-Opt. Instrum. Eng. 1624, 436 (1992).

Hart, T. T.

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

Harvey, E. C.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Hashimoto, I.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

Hirst, G. J.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Hooker, C. J.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Izawa, T.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

John, L. J.

S. Foltyn, L. J. John, Natl. Bur. Stand. Spec. Publ. 752, 336 (1986).

Key, M. H.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Lichtenstein, T. L.

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

Lister, J. M. D.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Lowdermilk, W. H.

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

Mann, K.

K. Mann, H. Gerhardt, G. Pfeifer, R. Wolf, Proc. Soc. Photo-Opt. Instrum. Eng. 1624, 436 (1992).

Matsumoto, Y.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

Milam, D.

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

Mückenheim, W.

S. Szatmári, F. P. Schäfer, E. Müller-Horsche, W. Mückenheim, Opt. Commun. 63, 305 (1987).
[Crossref]

Müller-Horsche, E.

S. Szatmári, F. P. Schäfer, E. Müller-Horsche, W. Mückenheim, Opt. Commun. 63, 305 (1987).
[Crossref]

Newnam, B. E.

S. Foltyn, B. E. Newnam, IEEE J. Quantum Electron. QE-17, 2092 (1981).
[Crossref]

Owadano, Y.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

Pfeifer, G.

K. Mann, H. Gerhardt, G. Pfeifer, R. Wolf, Proc. Soc. Photo-Opt. Instrum. Eng. 1624, 436 (1992).

Rainer, F.

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

Rodgers, P. A.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Ross, I. N.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Schäfer, F. P.

S. Szatmári, F. P. Schäfer, E. Müller-Horsche, W. Mückenheim, Opt. Commun. 63, 305 (1987).
[Crossref]

Shaw, M. J.

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

Szatmári, S.

S. Szatmári, F. P. Schäfer, E. Müller-Horsche, W. Mückenheim, Opt. Commun. 63, 305 (1987).
[Crossref]

Uchimura, R.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

Wolf, R.

K. Mann, H. Gerhardt, G. Pfeifer, R. Wolf, Proc. Soc. Photo-Opt. Instrum. Eng. 1624, 436 (1992).

Yakouh, T.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

Yamamura, N.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

Yano, M.

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

IEEE J. Quantum Electron. (1)

S. Foltyn, B. E. Newnam, IEEE J. Quantum Electron. QE-17, 2092 (1981).
[Crossref]

Natl. Bur. Stand. Spec. Publ. (2)

S. Foltyn, L. J. John, Natl. Bur. Stand. Spec. Publ. 752, 336 (1986).

F. Rainer, W. H. Lowdermilk, D. Milam, C. K Carniglia, T. T. Hart, T. L. Lichtenstein, Natl. Bur. Stand. Spec. Publ. 683, 274 (1981).

Opt. Commun. (2)

I. N. Ross, M. J. Shaw, C. J. Hooker, M. H. Key, E. C. Harvey, J. M. D. Lister, J. E. Andrew, G. J. Hirst, P. A. Rodgers, Opt. Commun. 78, 263 (1990).
[Crossref]

S. Szatmári, F. P. Schäfer, E. Müller-Horsche, W. Mückenheim, Opt. Commun. 63, 305 (1987).
[Crossref]

Proc. Soc. Photo-Opt. Instrum. Eng. (2)

K. Mann, H. Gerhardt, G. Pfeifer, R. Wolf, Proc. Soc. Photo-Opt. Instrum. Eng. 1624, 436 (1992).

T. Izawa, N. Yamamura, R. Uchimura, I. Hashimoto, T. Yakouh, Y. Owadano, Y. Matsumoto, M. Yano, Proc. Soc. Photo-Opt. Instrum. Eng. 1441, 339 (1991).

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Figures (2)

Fig. 1
Fig. 1

Experimental arrangement used for the damage measurements.

Fig. 2
Fig. 2

Plot of the data from Table 2 showing the laser fluences at which the samples survived many shots without damage as a function of pulse length. Some of the plotted symbols have been shifted laterally to avoid overlap. The solid lines are drawn for two values of the scaling exponent n in Eq. (1).

Tables (2)

Tables Icon

Table 1 Laser Fluences (in J cm−2) Giving 100% Probability of Damage in a Single Shot

Tables Icon

Table 2 Laser Fluences (in J cm−2) at Which the Test Sample Survived Many Shots without Damage

Equations (1)

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LDT ( pulse length ) n

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