Abstract

We demonstrate a ps 167.75-nm vacuum-ultraviolet (VUV) laser by cascaded second-harmonic generation (SHG). The VUV laser is produced by eighth-harmonic generation (EHG) of a mode-locked ps 1342-nm Nd:YVO4 amplifier through three stages cascaded SHG with two LiB3O5 crystals and one KBe2BO3F2 crystal, successively. The 167.75-nm laser provides up to 65-μW output power, and the corresponding photon flux and photon flux density are 5.5×1013s1 and 1.6×1018s1·cm2, respectively.

© 2015 Optical Society of America

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