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G. Son, S. Han, J. Park, K. Kwon, and K. Yu, “High-efficiency broadband light coupling between optical fibers and photonic integrated circuits,” Nanophotonics 7(12), 1845–1864 (2018).
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D. Oser, D. Pérez-Galacho, C. Alonso-Ramos, X. Le Roux, S. Tanzilli, L. Vivien, L. Labonté, and É. Cassan, “Subwavelength engineering and asymmetry: two efficient tools for sub-nanometer-bandwidth silicon Bragg filters,” Opt. Lett. 43(14), 3208–3211 (2018).
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R. Marchetti, C. Lacava, L. Carroll, K. Gradkowski, and P. Minzioni, “Coupling strategies for silicon photonics integrated chips [Invited],” Photon. Res. 7(2), 201–239 (2019).
[Crossref]
R. Marchetti, C. Lacava, A. Khokhar, X. Chen, I. Cristiani, D. J. Richardson, G. T. Reed, P. Petropoulos, and P. Minzioni, “High-efficiency grating-couplers: demonstration of a new design strategy,” Sci. Rep. 7(1), 16670 (2017).
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D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, B. Lamontagne, S. Wang, J. Lapointe, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “Subwavelength index engineered surface grating coupler with sub-decibel efficiency for 220-nm silicon-on-insulator waveguides,” Opt. Express 23(17), 22628–22635 (2015).
[Crossref]
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D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, B. Lamontagne, S. Wang, J. Lapointe, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “Subwavelength index engineered surface grating coupler with sub-decibel efficiency for 220-nm silicon-on-insulator waveguides,” Opt. Express 23(17), 22628–22635 (2015).
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P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, and M.-J. Picard, “Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency,” Opt. Express 23(17), 22553–22563 (2015).
[Crossref]
[PubMed]
D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, J. Lapointe, S. Janz, R. Halir, A. Ortega-Moñux, J. G. Wangüemert-Pérez, I. Molina-Fernández, J.-M. Fédéli, L. Vivien, and M. Dado, “High-directionality fiber-chip grating coupler with interleaved trenches and subwavelength index-matching structure,” Opt. Lett. 40(18), 4190–4193 (2015).
[Crossref]
[PubMed]
D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photonics Rev. 8(6), L93–L97 (2014).
[Crossref]
R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
[Crossref]
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[Crossref]
D. Oser, D. Pérez-Galacho, C. Alonso-Ramos, X. Le Roux, S. Tanzilli, L. Vivien, L. Labonté, and É. Cassan, “Subwavelength engineering and asymmetry: two efficient tools for sub-nanometer-bandwidth silicon Bragg filters,” Opt. Lett. 43(14), 3208–3211 (2018).
[Crossref]
[PubMed]
D. Benedikovic, C. Alonso-Ramos, D. Pérez-Galacho, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, and L. Vivien, “L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography,” Opt. Lett. 42(17), 3439–3442 (2017).
[Crossref]
[PubMed]
L. Carroll, J.-S. Lee, C. Scarcella, K. Gradkowski, M. Duperron, H. Lu, Y. Zhao, C. Eason, P. Morrissey, M. Rensing, S. Collins, H. Y. Hwang, and P. O’Brien, “Photonic Packaging: Transforming Silicon Photonic Integrated Circuits into Photonic Devices,” Appl. Sci. (Basel) 6(12), 426 (2016).
[Crossref]
T. Barwicz, B. Peng, R. Leidy, A. Janta-Polczynski, T. Houghton, M. Hhater, S. Kamlapurkar, S. Engelman, P. Fortier, N. Boyer, and W. M. J. Green, “Integrated Metamaterial Interfaces for Self-Aligned Fiber-to-Chip Coupling in Volume Manufacturing,” IEEE J. Sel. Top. Quantum Electron. 25(3), 4700313 (2019).
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D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
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[Crossref]
W. S. Sacher, J. C. Mikkelsen, Y. Huang, J. C. C. Mak, Z. Yong, X. Luo, Y. Li, P. Dumais, J. Jiang, D. Goodwill, E. Bernier, P. G.-Q. Lo, and J. K. S. Poon, “Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices,” Proc. IEEE 106(12), 2232–2245 (2018).
[Crossref]
A. Novack, M. Streshinsky, R. Ding, Y. Liu, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, and M. Hochberg, “Progress in silicon platforms for integrated optics,” Nanophotonics 3(4–5), 205–214 (2014).
[Crossref]
A. Novack, M. Streshinsky, R. Ding, Y. Liu, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, and M. Hochberg, “Progress in silicon platforms for integrated optics,” Nanophotonics 3(4–5), 205–214 (2014).
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A. Novack, M. Streshinsky, R. Ding, Y. Liu, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, and M. Hochberg, “Progress in silicon platforms for integrated optics,” Nanophotonics 3(4–5), 205–214 (2014).
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W. S. Sacher, J. C. Mikkelsen, Y. Huang, J. C. C. Mak, Z. Yong, X. Luo, Y. Li, P. Dumais, J. Jiang, D. Goodwill, E. Bernier, P. G.-Q. Lo, and J. K. S. Poon, “Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices,” Proc. IEEE 106(12), 2232–2245 (2018).
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L. Carroll, J.-S. Lee, C. Scarcella, K. Gradkowski, M. Duperron, H. Lu, Y. Zhao, C. Eason, P. Morrissey, M. Rensing, S. Collins, H. Y. Hwang, and P. O’Brien, “Photonic Packaging: Transforming Silicon Photonic Integrated Circuits into Photonic Devices,” Appl. Sci. (Basel) 6(12), 426 (2016).
[Crossref]
W. S. Sacher, J. C. Mikkelsen, Y. Huang, J. C. C. Mak, Z. Yong, X. Luo, Y. Li, P. Dumais, J. Jiang, D. Goodwill, E. Bernier, P. G.-Q. Lo, and J. K. S. Poon, “Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices,” Proc. IEEE 106(12), 2232–2245 (2018).
[Crossref]
R. Halir, L. Zavargo-Peche, D.-X. Xu, P. Cheben, R. Ma, J. H. Schmid, S. Janz, A. Densmore, A. Ortega-Moñux, I. Molina-Fernandez, M. Fournier, and J.-M. Fédéli, “Single etch grating couplers for mass fabrication with DUV lithography,” Opt. Quantum Electron. 44(12–13), 521–526 (2012).
[Crossref]
R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
[Crossref]
[PubMed]
F. Boeuf, S. Crémer, E. Temporiti, M. Feré, M. Shaw, C. Baudot, N. Vulliet, T. Pinguet, A. Mekis, G. Masini, H. Petiton, P. Le Maitre, M. Traldi, and L. Maggi, “Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform,” IEEE J. Light. Technol. 34(2), 286–295 (2016).
[Crossref]
W. S. Sacher, J. C. Mikkelsen, Y. Huang, J. C. C. Mak, Z. Yong, X. Luo, Y. Li, P. Dumais, J. Jiang, D. Goodwill, E. Bernier, P. G.-Q. Lo, and J. K. S. Poon, “Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices,” Proc. IEEE 106(12), 2232–2245 (2018).
[Crossref]
D. Benedikovic, C. Alonso-Ramos, D. Pérez-Galacho, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, and L. Vivien, “L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography,” Opt. Lett. 42(17), 3439–3442 (2017).
[Crossref]
[PubMed]
R. Marchetti, C. Lacava, L. Carroll, K. Gradkowski, and P. Minzioni, “Coupling strategies for silicon photonics integrated chips [Invited],” Photon. Res. 7(2), 201–239 (2019).
[Crossref]
R. Marchetti, C. Lacava, A. Khokhar, X. Chen, I. Cristiani, D. J. Richardson, G. T. Reed, P. Petropoulos, and P. Minzioni, “High-efficiency grating-couplers: demonstration of a new design strategy,” Sci. Rep. 7(1), 16670 (2017).
[Crossref]
[PubMed]
D. Benedikovic, C. Alonso-Ramos, D. Pérez-Galacho, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, and L. Vivien, “L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography,” Opt. Lett. 42(17), 3439–3442 (2017).
[Crossref]
[PubMed]
R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, J. G. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-Grating Metamaterial Structures for Silicon Photonic Devices,” Proc. IEEE 106(12), 2144–2157 (2018).
[Crossref]
F. Boeuf, S. Crémer, E. Temporiti, M. Feré, M. Shaw, C. Baudot, N. Vulliet, T. Pinguet, A. Mekis, G. Masini, H. Petiton, P. Le Maitre, M. Traldi, and L. Maggi, “Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform,” IEEE J. Light. Technol. 34(2), 286–295 (2016).
[Crossref]
A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron. 17(3), 597–608 (2011).
[Crossref]
F. Boeuf, S. Crémer, E. Temporiti, M. Feré, M. Shaw, C. Baudot, N. Vulliet, T. Pinguet, A. Mekis, G. Masini, H. Petiton, P. Le Maitre, M. Traldi, and L. Maggi, “Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform,” IEEE J. Light. Technol. 34(2), 286–295 (2016).
[Crossref]
A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron. 17(3), 597–608 (2011).
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W. S. Sacher, J. C. Mikkelsen, Y. Huang, J. C. C. Mak, Z. Yong, X. Luo, Y. Li, P. Dumais, J. Jiang, D. Goodwill, E. Bernier, P. G.-Q. Lo, and J. K. S. Poon, “Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices,” Proc. IEEE 106(12), 2232–2245 (2018).
[Crossref]
R. Marchetti, C. Lacava, L. Carroll, K. Gradkowski, and P. Minzioni, “Coupling strategies for silicon photonics integrated chips [Invited],” Photon. Res. 7(2), 201–239 (2019).
[Crossref]
R. Marchetti, C. Lacava, A. Khokhar, X. Chen, I. Cristiani, D. J. Richardson, G. T. Reed, P. Petropoulos, and P. Minzioni, “High-efficiency grating-couplers: demonstration of a new design strategy,” Sci. Rep. 7(1), 16670 (2017).
[Crossref]
[PubMed]
D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Dale, I. Moerman, S. Verstuyft, D. De Messel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]
L. Zavargo-Peche, A. Ortega-Moñux, J. G. Wangüemert-Perez, and I. Molina-Fernandez, “Fourier based combined techniques to design novel sub-wavelength optical integrated devices,” Prog. Electromagnetics Res. 123, 447–465 (2012).
[Crossref]
R. Halir, L. Zavargo-Peche, D.-X. Xu, P. Cheben, R. Ma, J. H. Schmid, S. Janz, A. Densmore, A. Ortega-Moñux, I. Molina-Fernandez, M. Fournier, and J.-M. Fédéli, “Single etch grating couplers for mass fabrication with DUV lithography,” Opt. Quantum Electron. 44(12–13), 521–526 (2012).
[Crossref]
D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, J. Lapointe, S. Janz, R. Halir, A. Ortega-Moñux, J. G. Wangüemert-Pérez, I. Molina-Fernández, J.-M. Fédéli, L. Vivien, and M. Dado, “High-directionality fiber-chip grating coupler with interleaved trenches and subwavelength index-matching structure,” Opt. Lett. 40(18), 4190–4193 (2015).
[Crossref]
[PubMed]
C. Alonso-Ramos, P. Cheben, A. Ortega-Moñux, J. H. Schmid, D.-X. Xu, and I. Molina-Fernández, “Fiber-chip grating coupler based on interleaved trenches with directionality exceeding 95,” Opt. Lett. 39(18), 5351–5354 (2014).
[Crossref]
[PubMed]
R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
[Crossref]
[PubMed]
R. Halir, P. Cheben, S. Janz, D.-X. Xu, I. Molina-Fernández, and J.-G. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref]
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R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, J. G. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-Grating Metamaterial Structures for Silicon Photonic Devices,” Proc. IEEE 106(12), 2144–2157 (2018).
[Crossref]
Y. Chen, T. Domínguez Bucio, A. Z. Khokhar, M. Banakar, K. Grabska, F. Y. Gardes, R. Halir, Í. Molina-Fernández, P. Cheben, and J.-J. He, “Experimental demonstration of an apodized-imaging chip-fiber grating coupler for Si3N4 waveguides,” Opt. Lett. 42(18), 3566–3569 (2017).
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[Crossref]
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[Crossref]
A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron. 17(3), 597–608 (2011).
[Crossref]
A. Novack, M. Streshinsky, R. Ding, Y. Liu, A. E.-J. Lim, G.-Q. Lo, T. Baehr-Jones, and M. Hochberg, “Progress in silicon platforms for integrated optics,” Nanophotonics 3(4–5), 205–214 (2014).
[Crossref]
L. Carroll, J.-S. Lee, C. Scarcella, K. Gradkowski, M. Duperron, H. Lu, Y. Zhao, C. Eason, P. Morrissey, M. Rensing, S. Collins, H. Y. Hwang, and P. O’Brien, “Photonic Packaging: Transforming Silicon Photonic Integrated Circuits into Photonic Devices,” Appl. Sci. (Basel) 6(12), 426 (2016).
[Crossref]
C. Kopp, S. Bernabé, B. B. Bakir, J.-M. Fédéli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon photonic circuits: On-CMOS integration, fiber optical coupling, and packaging,” IEEE J. Sel. Top. Quantum Electron. 17(3), 498–509 (2011).
[Crossref]
R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, J. G. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-Grating Metamaterial Structures for Silicon Photonic Devices,” Proc. IEEE 106(12), 2144–2157 (2018).
[Crossref]
M. Papes, P. Cheben, D. Benedikovic, J. H. Schmid, J. Pond, R. Halir, A. Ortega-Moñux, G. Wangüemert-Pérez, W. N. Ye, D.-X. Xu, S. Janz, M. Dado, and V. Vašinek, “Fiber-chip edge coupler with large mode size for silicon photonic wire waveguides,” Opt. Express 24(5), 5026–5038 (2016).
[Crossref]
[PubMed]
D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, B. Lamontagne, S. Wang, J. Lapointe, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “Subwavelength index engineered surface grating coupler with sub-decibel efficiency for 220-nm silicon-on-insulator waveguides,” Opt. Express 23(17), 22628–22635 (2015).
[Crossref]
[PubMed]
D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, J. Lapointe, S. Janz, R. Halir, A. Ortega-Moñux, J. G. Wangüemert-Pérez, I. Molina-Fernández, J.-M. Fédéli, L. Vivien, and M. Dado, “High-directionality fiber-chip grating coupler with interleaved trenches and subwavelength index-matching structure,” Opt. Lett. 40(18), 4190–4193 (2015).
[Crossref]
[PubMed]
C. Alonso-Ramos, P. Cheben, A. Ortega-Moñux, J. H. Schmid, D.-X. Xu, and I. Molina-Fernández, “Fiber-chip grating coupler based on interleaved trenches with directionality exceeding 95,” Opt. Lett. 39(18), 5351–5354 (2014).
[Crossref]
[PubMed]
D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photonics Rev. 8(6), L93–L97 (2014).
[Crossref]
L. Zavargo-Peche, A. Ortega-Moñux, J. G. Wangüemert-Perez, and I. Molina-Fernandez, “Fourier based combined techniques to design novel sub-wavelength optical integrated devices,” Prog. Electromagnetics Res. 123, 447–465 (2012).
[Crossref]
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[Crossref]
D. Oser, D. Pérez-Galacho, C. Alonso-Ramos, X. Le Roux, S. Tanzilli, L. Vivien, L. Labonté, and É. Cassan, “Subwavelength engineering and asymmetry: two efficient tools for sub-nanometer-bandwidth silicon Bragg filters,” Opt. Lett. 43(14), 3208–3211 (2018).
[Crossref]
[PubMed]
P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, and M.-J. Picard, “Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency,” Opt. Express 23(17), 22553–22563 (2015).
[Crossref]
[PubMed]
M. Papes, P. Cheben, D. Benedikovic, J. H. Schmid, J. Pond, R. Halir, A. Ortega-Moñux, G. Wangüemert-Pérez, W. N. Ye, D.-X. Xu, S. Janz, M. Dado, and V. Vašinek, “Fiber-chip edge coupler with large mode size for silicon photonic wire waveguides,” Opt. Express 24(5), 5026–5038 (2016).
[Crossref]
[PubMed]
G. Son, S. Han, J. Park, K. Kwon, and K. Yu, “High-efficiency broadband light coupling between optical fibers and photonic integrated circuits,” Nanophotonics 7(12), 1845–1864 (2018).
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M. Passoni, D. Gerace, L. Carroll, and L. C. Andreani, “Grating couplers in silicon-on-insulator: The role of photonic guided resonances on lineshape and bandwidth,” Appl. Phys. Lett. 110(4), 041107 (2017).
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T. Barwicz, B. Peng, R. Leidy, A. Janta-Polczynski, T. Houghton, M. Hhater, S. Kamlapurkar, S. Engelman, P. Fortier, N. Boyer, and W. M. J. Green, “Integrated Metamaterial Interfaces for Self-Aligned Fiber-to-Chip Coupling in Volume Manufacturing,” IEEE J. Sel. Top. Quantum Electron. 25(3), 4700313 (2019).
[Crossref]
D. Oser, D. Pérez-Galacho, C. Alonso-Ramos, X. Le Roux, S. Tanzilli, L. Vivien, L. Labonté, and É. Cassan, “Subwavelength engineering and asymmetry: two efficient tools for sub-nanometer-bandwidth silicon Bragg filters,” Opt. Lett. 43(14), 3208–3211 (2018).
[Crossref]
[PubMed]
D. Benedikovic, C. Alonso-Ramos, D. Pérez-Galacho, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, and L. Vivien, “L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography,” Opt. Lett. 42(17), 3439–3442 (2017).
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