Abstract

The unique ability of the ultrafast lasers to perform sub-spot size machining has been proved to be advantageous over conventional lasers for sub-micron-machining. To achieve this, a Gaussian laser beam free of spatial defects is essential. In this research work, submicron holes with clear edge and symmetric shape on thin metal films using a Ti:Sapphire regenerative amplified femtosecond pulsed laser are produced. While analysing, it is observed that there are two shallow pits accompanying the produced hole, symmetrically located at the two sides of the hole, especially when the holes are in the sub-micron range. A careful study on the effects of these shallow pits and the methods to eliminate the same are presented in this letter. It has been concluded that the shallow pits are Rowland ghosts raised by deficiencies of grating space present in the two pairs of gratings used for pulse stretching and compressing. Methods of eliminating these ghosts to achieve features with better edge acuity and quality are also presented.

© 2001 Optical Society of America

Full Article  |  PDF Article
Related Articles
Measurement and Removal of Ghosts in Spectra Recorded by Modern Gratings

John V. Kline and David W. Steinhaus
Appl. Opt. 7(10) 2015-2018 (1968)

The Diffraction Grating—An Opinionated Appraisal

George R. Harrison
Appl. Opt. 12(9) 2039-2049 (1973)

Narcissistic ghosts in Rowland-mounted, concave gratings with β = 0°: a cautionary note

Stephan R. McCandliss, Jason B. McPhate, and Paul D. Feldman
Appl. Opt. 37(22) 5070-5074 (1998)

References

  • View by:
  • |
  • |
  • |

  1. X. Liu, “Submicon lines in thin metallic films micromachined by an ultrafast laser oscillator,” Technical digest-Conference on Lasers and Electro-Optics1998, 511 (1998).
  2. P. Bado, W. Clark, and A. A. Said, Hand book of look micromachining, (1999), http://www.cmxr.com/micromachining/handbook
  3. P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
    [Crossref]
  4. X. Liu, D. Du., and G. Mourou, “Laser ablation and micromachining with femtosecond laser pulses,” IEEE journal of Quantum Electronics,  33, 1706–1716 (1997).
    [Crossref]
  5. F. A. Jenkins and H. E. White, Fundamentals of optics, (McGRAW-HILL book company, Singapore1981)
  6. E. G. Loewen and E. Popov, Diffraction greatings and applications, (Marcel Dekker, INC, New York1997)

1997 (1)

X. Liu, D. Du., and G. Mourou, “Laser ablation and micromachining with femtosecond laser pulses,” IEEE journal of Quantum Electronics,  33, 1706–1716 (1997).
[Crossref]

1995 (1)

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

Bado, P.

P. Bado, W. Clark, and A. A. Said, Hand book of look micromachining, (1999), http://www.cmxr.com/micromachining/handbook

Clark, W.

P. Bado, W. Clark, and A. A. Said, Hand book of look micromachining, (1999), http://www.cmxr.com/micromachining/handbook

D. Du.,

X. Liu, D. Du., and G. Mourou, “Laser ablation and micromachining with femtosecond laser pulses,” IEEE journal of Quantum Electronics,  33, 1706–1716 (1997).
[Crossref]

Du, D.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

Dutta, S. K.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

Jenkins, F. A.

F. A. Jenkins and H. E. White, Fundamentals of optics, (McGRAW-HILL book company, Singapore1981)

Liu, X.

X. Liu, D. Du., and G. Mourou, “Laser ablation and micromachining with femtosecond laser pulses,” IEEE journal of Quantum Electronics,  33, 1706–1716 (1997).
[Crossref]

X. Liu, “Submicon lines in thin metallic films micromachined by an ultrafast laser oscillator,” Technical digest-Conference on Lasers and Electro-Optics1998, 511 (1998).

Loewen, E. G.

E. G. Loewen and E. Popov, Diffraction greatings and applications, (Marcel Dekker, INC, New York1997)

Mourou, G.

X. Liu, D. Du., and G. Mourou, “Laser ablation and micromachining with femtosecond laser pulses,” IEEE journal of Quantum Electronics,  33, 1706–1716 (1997).
[Crossref]

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

Popov, E.

E. G. Loewen and E. Popov, Diffraction greatings and applications, (Marcel Dekker, INC, New York1997)

Pronko, P. P.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

Rudd, J. V.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

Said, A. A.

P. Bado, W. Clark, and A. A. Said, Hand book of look micromachining, (1999), http://www.cmxr.com/micromachining/handbook

Squier, J.

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

White, H. E.

F. A. Jenkins and H. E. White, Fundamentals of optics, (McGRAW-HILL book company, Singapore1981)

IEEE journal of Quantum Electronics (1)

X. Liu, D. Du., and G. Mourou, “Laser ablation and micromachining with femtosecond laser pulses,” IEEE journal of Quantum Electronics,  33, 1706–1716 (1997).
[Crossref]

Optics Communications (1)

P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of submicron holes using a femtosecond laser at 800nm,” Optics Communications,  114, 106–110 (1995).
[Crossref]

Other (4)

F. A. Jenkins and H. E. White, Fundamentals of optics, (McGRAW-HILL book company, Singapore1981)

E. G. Loewen and E. Popov, Diffraction greatings and applications, (Marcel Dekker, INC, New York1997)

X. Liu, “Submicon lines in thin metallic films micromachined by an ultrafast laser oscillator,” Technical digest-Conference on Lasers and Electro-Optics1998, 511 (1998).

P. Bado, W. Clark, and A. A. Said, Hand book of look micromachining, (1999), http://www.cmxr.com/micromachining/handbook

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1.
Fig. 1.

Pits created on 1000Å platinum film. (pulse energy of 15nJ, 100 pulses, wavelength of 400nm, pulsewidth of 300fs)

Fig. 2.
Fig. 2.

Rowland ghost measured from first order diffraction of a grating of 100µm-space, illuminated by 632.8nm red laser. Spot diameter of 260µm.

Fig. 3.
Fig. 3.

Pits created on 1000Å platinum film. (pulse energy of 20nJ, 100 pulses, wavelength of 400nm, pulsewidth of 300fs)

Figure 4.
Figure 4.

Pits created on 1000Å platinum film. (pulse energy of 13nJ, 100 pulses, wavelength of 400nm, pulsewidth of 300fs)

Metrics