Micro-machined membrane deformable mirrors (MMDMs) are being evaluated for their suitability as wavefront correctors at cryogenic temperatures. Presented here are experimental results for the change in the initial mirror figure of 37-channel MMDMs from OKO Technologies upon cooling to T=78K. The changes in the influence functions are also explored. Of the sample of 3 mirrors tested, one was found to have sufficiently small initial static aberrations to be useful as a wavefront corrector at this temperature. The influence functions at T=78K were found to be similar in shape to both those at room temperature and theoretical predictions of the MMDMs surface shape. The magnitude of the surface deflection at T=78K was reduced by around 20% compared with room temperature values.
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