Abstract

Heterogeneous integration through low-temperature die bonding is a promising technique to enable high-performance III-V photodetectors on the silicon nitride (Si3N4) photonic platform. Here we demonstrate InGaAs/InP modified uni-traveling carrier photodiodes on Si3N4 waveguides with 20 nA dark current, 20 GHz bandwidth, and record-high external (internal) responsivities of 0.8 A/W (0.94 A/W) and 0.33 A/W (0.83 A/W) at 1550 nm and 1064 nm, respectively. Open eye diagrams at 40 Gbit/s are demonstrated. Balanced photodiodes of this type reach 10 GHz bandwidth with over 40 dB common mode rejection ratio.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2019 (2)

2018 (3)

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

D. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon nitride in silicon photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

2017 (3)

2016 (1)

2015 (2)

2014 (1)

2013 (1)

2012 (1)

2008 (1)

A. Poloti, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref]

2007 (1)

Andrekson, P. A.

Baet, R.

Bartolozzi, I.

Bauters, J. F.

Beling, A.

Q. Li, K. Sun, K. Li, Q. Yu, P. Runge, W. Ebert, A. Beling, and J. C. Campbell, “” High-power evanescently coupled waveguide MUTC photodiode with> 105-GHz bandwidth,”,” J. Lightwave Technol. 35(21), 4752–4757 (2017).
[Crossref]

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Bienstman, P.

Binetti, P. R. A.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Bluesone, A.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Blumenthal, D.

D. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon nitride in silicon photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

Boller, K. J.

Bowers, J. E.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

C. J. Krückel, P. A. Andrekson, D. T. Spencer, J. F. Bauters, M. J. R. Heck, and J. E. Bowers, “Continuous wave-pumped wavelength conversion in low-loss silicon nitride waveguides,” Opt. Lett. 40(6), 875–878 (2015).
[Crossref]

M. Piels, J. F. Bauters, M. L. Davenport, M. J. R. Heck, and J. E. Bowers, “Low-loss silicon nitride AWG demultiplexer heterogeneously integrated with hybrid III–V/silicon photodetectors,” J. Lightwave Technol. 32(4), 817–823 (2014).
[Crossref]

Briles, T. C.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Burla, M.

Campbell, J. C.

Carlson, D. R.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Chang, L.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Cryan, M. J.

A. Poloti, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref]

Davenport, M. L.

Di Cioccio, L.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Diddams, S. A.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Doerr, C. R.

C. R. Doerr, “Silicon photonic integration in telecommunications,” Frontiers in Physics 3, 37 (2015).
[Crossref]

Drake, T.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Ebert, W.

Fan, L.

Fedeli, J.-M.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Feng, S.

Foster, M. A.

Fredrick, C.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Gaeta, A. L.

Gao, J.

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Gao, Y.

Geiselmann, M.

M. H. Pfeiffer, J. Liu, M. Geiselmann, and T. J. Kippenberg, “Coupling ideality of integrated planar high-Q microresonators,” Phys. Rev. Appl. 7(2), 024026 (2017).
[Crossref]

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Geuzebroek, D.

D. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon nitride in silicon photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

Halir, R.

Han, K.

Heck, M. J. R.

Heideman, R.

D. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon nitride in silicon photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

Heideman, R. G.

Hickstein, D. D.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Jaramillo-Villegas, J. A.

Katrien, D. V.

Kerber, G. C.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Kim, S.

Kippenberg, T. J.

A. L. Gaeta, M. Lipson, and T. J. Kippenberg, “Photonic-chip-based frequency combs,” Nat. Photonics 13(3), 158–169 (2019).
[Crossref]

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

M. H. Pfeiffer, J. Liu, M. Geiselmann, and T. J. Kippenberg, “Coupling ideality of integrated planar high-Q microresonators,” Phys. Rev. Appl. 7(2), 024026 (2017).
[Crossref]

Komljenovic, T.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Kowligy, A.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Krückel, C. J.

Lagahe, C.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Lai, W.

Leaird, D. E.

Lee, S.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Lee, Y. J.

Leijtens, X. J. M.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Leinse, A.

Levy, J. S.

Li, K.

Li, Q.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Q. Li, K. Sun, K. Li, Q. Yu, P. Runge, W. Ebert, A. Beling, and J. C. Campbell, “” High-power evanescently coupled waveguide MUTC photodiode with> 105-GHz bandwidth,”,” J. Lightwave Technol. 35(21), 4752–4757 (2017).
[Crossref]

Li, S.

Lipson, M.

Liu, G.

Liu, J.

M. H. Pfeiffer, J. Liu, M. Geiselmann, and T. J. Kippenberg, “Coupling ideality of integrated planar high-Q microresonators,” Phys. Rev. Appl. 7(2), 024026 (2017).
[Crossref]

Liu, Y.

llic, B. R.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Marpaung, D. A. I.

Metcalf, A. J.

Navickaite, G.

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Newbury, N. R.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Niu, B.

Noman, A. A.

Norberg, E.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Nötzel, R.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

O’brien, J. L.

A. Poloti, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref]

Oei, Y. S.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Oh, D. Y.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Okawachi, Y.

Oldenbeuving, R. M.

Orobtchouk, R.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Papp, S. B.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Pfeiffer, M. H.

M. H. Pfeiffer, J. Liu, M. Geiselmann, and T. J. Kippenberg, “Coupling ideality of integrated planar high-Q microresonators,” Phys. Rev. Appl. 7(2), 024026 (2017).
[Crossref]

Pfeiffer, M. H. P.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Piels, M.

Poloti, A.

A. Poloti, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref]

Qi, M.

Rarity, J. G.

A. Poloti, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref]

Ripoll, A. M.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Roeloffzen, C.

D. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon nitride in silicon photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

Roeloffzen, C. G. H.

Runge, P.

Schacht, E.

Shang, K.

Shen, Y.

Shu, C.

Sinclair, L. C.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Smalbrugge, E.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Smit, M.K.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Spencer, D. T.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

C. J. Krückel, P. A. Andrekson, D. T. Spencer, J. F. Bauters, M. J. R. Heck, and J. E. Bowers, “Continuous wave-pumped wavelength conversion in low-loss silicon nitride waveguides,” Opt. Lett. 40(6), 875–878 (2015).
[Crossref]

Srinivasan, K.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Stone, J.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Su, T.

Suh, M.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Sun, K.

Q. Li, K. Sun, K. Li, Q. Yu, P. Runge, W. Ebert, A. Beling, and J. C. Campbell, “” High-power evanescently coupled waveguide MUTC photodiode with> 105-GHz bandwidth,”,” J. Lightwave Technol. 35(21), 4752–4757 (2017).
[Crossref]

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Taddei, C.

Teng, M.

Theogarajan, L.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Tsang, H. K.

Vahala, K.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

van Dijk, P. W. L.

Van Thourhout, D.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

van Veldhoven, P.J.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Varghese, L. T.

Volet, N.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Vries, T. D.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

Wang, C.

Wang, J.

Wang, P.

Weiner, A. M.

Westly, D.

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Xie, L.

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Xie, X.

Xuan, Y.

Xue, X.

Yang, K. Y.

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Ye, N.

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Yoo, S. J. B.

Yu, Q.

Q. Li, K. Sun, K. Li, Q. Yu, P. Runge, W. Ebert, A. Beling, and J. C. Campbell, “” High-power evanescently coupled waveguide MUTC photodiode with> 105-GHz bandwidth,”,” J. Lightwave Technol. 35(21), 4752–4757 (2017).
[Crossref]

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Yu, S.

A. Poloti, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref]

Zang, J.

Zervas, M.

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

Zhou, G.

Zhuang, L.

Frontiers in Physics (1)

C. R. Doerr, “Silicon photonic integration in telecommunications,” Frontiers in Physics 3, 37 (2015).
[Crossref]

J. Lightwave Technol. (2)

Nat. Photonics (1)

A. L. Gaeta, M. Lipson, and T. J. Kippenberg, “Photonic-chip-based frequency combs,” Nat. Photonics 13(3), 158–169 (2019).
[Crossref]

Nature (1)

D. T. Spencer, T. Drake, T. C. Briles, J. Stone, L. C. Sinclair, C. Fredrick, Q. Li, D. Westly, B. R. llic, A. Bluesone, N. Volet, T. Komljenovic, L. Chang, S. Lee, D. Y. Oh, M. Suh, K. Y. Yang, M. H. P. Pfeiffer, T. J. Kippenberg, E. Norberg, L. Theogarajan, K. Vahala, N. R. Newbury, K. Srinivasan, J. E. Bowers, and S. A. Diddams, “An optical-frequency synthesizer using integrated photonics,” Nature 557(7703), 81–85 (2018).
[Crossref]

Opt. Express (3)

Opt. Lett. (2)

Optica (2)

Phys. Rev. Appl. (1)

M. H. Pfeiffer, J. Liu, M. Geiselmann, and T. J. Kippenberg, “Coupling ideality of integrated planar high-Q microresonators,” Phys. Rev. Appl. 7(2), 024026 (2017).
[Crossref]

Phys. Rev. Lett. (1)

D. D. Hickstein, G. C. Kerber, D. R. Carlson, L. Chang, D. Westly, K. Srinivasan, A. Kowligy, J. E. Bowers, S. A. Diddams, and S. B. Papp, “Quasi-phase-matched supercontinuum generation in photonic waveguides,” Phys. Rev. Lett. 120(5), 053903 (2018).
[Crossref]

Proc. IEEE (1)

D. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon nitride in silicon photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

Science (1)

A. Poloti, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O’brien, “Silica-on-silicon waveguide quantum circuits,” Science 320(5876), 646–649 (2008).
[Crossref]

Other (2)

Q. Yu, N. Ye, J. Gao, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “High-Responsivity Photodiodes Heterogeneously Integrated on Silicon Nitride Waveguides,” In Integrated Photonics Research, Silicon and Nanophotonics, Optical Society of America, IW3A-5, 2019.

P. R. A. Binetti, X. J. M. Leijtens, A. M. Ripoll, T. D. Vries, E. Smalbrugge, Y. S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, D. Van Thourhout, P.J. van Veldhoven, R. Nötzel, and M.K. Smit, “InP-based photodetector bonded on CMOS with Si3N4 interconnect waveguides,” In2009 IEEE LEOS Annual Meeting Conference Proceedings, pp. 139-140. IEEE, 2009.

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Figures (8)

Fig. 1.
Fig. 1. Microscope pictures of Si3N4/Si chip with (a) patterned waveguides and bonding window, and (b) heterogeneously integrated III-V die; (c) fabricated PDs on Si3N4/Si chip; cross-sectional views of (d) Si3N4 waveguide outside the bonding window, (e) Si3N4 waveguide inside the bonding window, and (f) PD on Si3N4; (g) epitaxial structure of PD with doping concentrations in cm-3; (h) microscope pictures of single PD, and (i) balanced PDs with circuit representation; (j) SEM picture of the PD’s cross-section.
Fig. 2.
Fig. 2. Dark current of a pair of balanced PDs.
Fig. 3.
Fig. 3. Measured and simulated external responsivities for PDs of various lengths at 1550 nm (a), and 1064 nm (b) wavelength.
Fig. 4.
Fig. 4. Simulated mode intensity distributions in the PD at 1550 nm (left panel) and 1064 nm (right panel).
Fig. 5.
Fig. 5. Measured frequency responses of various sized PDs at 1550 nm with 8 V reverse bias and 2 mA photocurrent.
Fig. 6.
Fig. 6. Detected 40 Gbit/s eye diagram at 0.5 mA (left panel) and 2 mA (right panel) average photocurrents.
Fig. 7.
Fig. 7. Measured frequency responses of balanced PDs at 1550 nm and 1064 nm at 8 V reverse bias. Each data point was taken in differential mode.
Fig. 8.
Fig. 8. Common and differential mode powers of balanced PDs at 10 GHz, 8 V reverse bias, 2 mA photocurrent for each PD, and 1550 nm wavelength.

Tables (1)

Tables Icon

Table 1. Optical detectors on Si3N4 waveguides at 1550 nm wavelength reported in the literature.