Abstract

Miniaturization of silicon photonics switches is essential for both dense integration and low-loss operation. However, it has remained unclear how small the switches can be made while using thermo-optic (TO) element switches. In this paper, the minimum possible distance between adjacent TO phase shifter arms was first examined. Next, the architecture for a switch matrix for the high-density arrangement of TO switches that includes multi-layer electrical wirings for compact electrical wire-out was proposed and demonstrated. As a result, we achieved 1/23 miniaturization of an 8 × 8 silicon photonics switch for the PIC part when compared with our previous design.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Full Article  |  PDF Article
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References

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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
  22. K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Non-duplicate polarization-diversity 8 × 8 Si-wire PILOSS switch integrated with polarization splitter-rotators,” Opt. Express 25(10), 10885–10892 (2017).
    [Crossref] [PubMed]
  23. K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Novel polarization diversity without switch duplication of a Si-wire PILOSS optical switch,” Opt. Express 24(7), 6861–6868 (2016).
    [Crossref] [PubMed]

2019 (4)

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

Q. Cheng, L. Y. Dai, N. C. Abrams, Y. H. Hung, P. E. Morrissey, M. Glick, P. O’Brien, and K. Bergman, “Ultralow-crosstalk, strictly non-blocking microring-based optical switch,” Photon. Res. 7(2), 155–161 (2019).
[Crossref]

2018 (1)

2017 (2)

2016 (3)

2015 (2)

2014 (1)

2013 (2)

Y. Ma, Y. Zhang, S. Yang, A. Novack, R. Ding, A. E. Lim, G. Q. Lo, T. Baehr-Jones, and M. Hochberg, “Ultralow loss single layer submicron silicon waveguide crossing for SOI optical interconnect,” Opt. Express 21(24), 29374–29382 (2013).
[Crossref] [PubMed]

K. Ishii, J. Kurumida, S. Namiki, T. Hasama, and H. Ishikawa, “Energy consumption and traffic scaling of dynamic optical path networks,” Proc. SPIE,  864686460A (2013).

2001 (1)

T. W. Yeow, K. L. E. Law, and A. Goldenberg, “MEMS optical switches,” IEEE Commun. Mag. 39(11), 158–163 (2001).
[Crossref]

1993 (1)

T. Nishi, T. Yamamoto, and S. Kuroyanagi, “A polarization-controlled free-space photonic switch based on a PI-LOSS switch,” IEEE Photonics Technol. Lett. 5(9), 1104–1106 (1993).
[Crossref]

Abrams, N. C.

Akiyama, S.

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

Baehr-Jones, T.

Bahadori, M.

Bergman, K.

Chen, J.

Cheng, Q.

Chiba, T.

Cong, G.

Dai, L. Y.

Ding, R.

Glick, M.

Goldenberg, A.

T. W. Yeow, K. L. E. Law, and A. Goldenberg, “MEMS optical switches,” IEEE Commun. Mag. 39(11), 158–163 (2001).
[Crossref]

Han, S.

Hasama, T.

K. Ishii, J. Kurumida, S. Namiki, T. Hasama, and H. Ishikawa, “Energy consumption and traffic scaling of dynamic optical path networks,” Proc. SPIE,  864686460A (2013).

Hasegawa, H.

K. Ueda, Y. Mori, H. Hasegawa, and K. Sato, “Novel Intra- and Inter-Datacenter Converged Network Exploiting Space- and Wavelength-Dimensional Switches,” in Optical Fiber Communication Conference (Optical Society of America, 2017), paper M3K.2.
[Crossref]

Hasegawa, J.

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

Hochberg, M.

Huang, Y.

W. D. Sacher, Y. Huang, G. Q. Lo, and J. K. S. Poon, “Multilayer silicon nitride-on-silicon integrated photonic platforms and devices,” J. Lightwave. Technol. 33(4), 901–910 (2015).
[Crossref]

Hung, Y. H.

Igarashi, Y.

Ikeda, K.

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Non-duplicate polarization-diversity 8 × 8 Si-wire PILOSS switch integrated with polarization splitter-rotators,” Opt. Express 25(10), 10885–10892 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Novel polarization diversity without switch duplication of a Si-wire PILOSS optical switch,” Opt. Express 24(7), 6861–6868 (2016).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, M. Toyama, M. Ohtsuka, N. Yokoyama, K. Matsumaro, M. Seki, K. Koshino, T. Sugaya, S. Suda, G. Cong, T. Kimura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer,” Opt. Express 23(13), 17599–17606 (2015).
[Crossref] [PubMed]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

Inoue, T.

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

Ishii, K.

K. Ishii, J. Kurumida, S. Namiki, T. Hasama, and H. Ishikawa, “Energy consumption and traffic scaling of dynamic optical path networks,” Proc. SPIE,  864686460A (2013).

Ishikawa, H.

K. Ishii, J. Kurumida, S. Namiki, T. Hasama, and H. Ishikawa, “Energy consumption and traffic scaling of dynamic optical path networks,” Proc. SPIE,  864686460A (2013).

Kawashima, H.

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Non-duplicate polarization-diversity 8 × 8 Si-wire PILOSS switch integrated with polarization splitter-rotators,” Opt. Express 25(10), 10885–10892 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Novel polarization diversity without switch duplication of a Si-wire PILOSS optical switch,” Opt. Express 24(7), 6861–6868 (2016).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, M. Toyama, M. Ohtsuka, N. Yokoyama, K. Matsumaro, M. Seki, K. Koshino, T. Sugaya, S. Suda, G. Cong, T. Kimura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer,” Opt. Express 23(13), 17599–17606 (2015).
[Crossref] [PubMed]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, and H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22(4), 3887–3894 (2014).
[Crossref] [PubMed]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

Kim, S. H.

Kimura, T.

Konoike, R.

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

Koshino, K.

Kurahashi, T.

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

Kuroyanagi, S.

T. Nishi, T. Yamamoto, and S. Kuroyanagi, “A polarization-controlled free-space photonic switch based on a PI-LOSS switch,” IEEE Photonics Technol. Lett. 5(9), 1104–1106 (1993).
[Crossref]

Kurumida, J.

K. Ishii, J. Kurumida, S. Namiki, T. Hasama, and H. Ishikawa, “Energy consumption and traffic scaling of dynamic optical path networks,” Proc. SPIE,  864686460A (2013).

Law, K. L. E.

T. W. Yeow, K. L. E. Law, and A. Goldenberg, “MEMS optical switches,” IEEE Commun. Mag. 39(11), 158–163 (2001).
[Crossref]

Lee, B. G.

B. G. Lee, “Photonic Switch Fabrics in Computer Communications Systems,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th3C.3.
[Crossref]

Li, D.

Li, X.

Li, Z.

Lim, A. E.

Lo, G. Q.

W. D. Sacher, Y. Huang, G. Q. Lo, and J. K. S. Poon, “Multilayer silicon nitride-on-silicon integrated photonic platforms and devices,” J. Lightwave. Technol. 33(4), 901–910 (2015).
[Crossref]

Y. Ma, Y. Zhang, S. Yang, A. Novack, R. Ding, A. E. Lim, G. Q. Lo, T. Baehr-Jones, and M. Hochberg, “Ultralow loss single layer submicron silicon waveguide crossing for SOI optical interconnect,” Opt. Express 21(24), 29374–29382 (2013).
[Crossref] [PubMed]

Lu, L.

Ma, Y.

Masahara, M.

Matsukawa, T.

Matsumaro, K.

Matsumoto, T.

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

Matsuura, H.

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

Mori, Y.

K. Ueda, Y. Mori, H. Hasegawa, and K. Sato, “Novel Intra- and Inter-Datacenter Converged Network Exploiting Space- and Wavelength-Dimensional Switches,” in Optical Fiber Communication Conference (Optical Society of America, 2017), paper M3K.2.
[Crossref]

Morrissey, P. E.

Muller, R. S.

Namiki, S.

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Non-duplicate polarization-diversity 8 × 8 Si-wire PILOSS switch integrated with polarization splitter-rotators,” Opt. Express 25(10), 10885–10892 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Novel polarization diversity without switch duplication of a Si-wire PILOSS optical switch,” Opt. Express 24(7), 6861–6868 (2016).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, M. Toyama, M. Ohtsuka, N. Yokoyama, K. Matsumaro, M. Seki, K. Koshino, T. Sugaya, S. Suda, G. Cong, T. Kimura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer,” Opt. Express 23(13), 17599–17606 (2015).
[Crossref] [PubMed]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, and H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22(4), 3887–3894 (2014).
[Crossref] [PubMed]

K. Ishii, J. Kurumida, S. Namiki, T. Hasama, and H. Ishikawa, “Energy consumption and traffic scaling of dynamic optical path networks,” Proc. SPIE,  864686460A (2013).

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

Nishi, T.

T. Nishi, T. Yamamoto, and S. Kuroyanagi, “A polarization-controlled free-space photonic switch based on a PI-LOSS switch,” IEEE Photonics Technol. Lett. 5(9), 1104–1106 (1993).
[Crossref]

Novack, A.

O’Brien, P.

Ohno, M.

Ohtsuka, M.

Poon, J. K. S.

W. D. Sacher, Y. Huang, G. Q. Lo, and J. K. S. Poon, “Multilayer silicon nitride-on-silicon integrated photonic platforms and devices,” J. Lightwave. Technol. 33(4), 901–910 (2015).
[Crossref]

Quack, N.

Rumley, S.

Sacher, W. D.

W. D. Sacher, Y. Huang, G. Q. Lo, and J. K. S. Poon, “Multilayer silicon nitride-on-silicon integrated photonic platforms and devices,” J. Lightwave. Technol. 33(4), 901–910 (2015).
[Crossref]

Sato, K.

K. Ueda, Y. Mori, H. Hasegawa, and K. Sato, “Novel Intra- and Inter-Datacenter Converged Network Exploiting Space- and Wavelength-Dimensional Switches,” in Optical Fiber Communication Conference (Optical Society of America, 2017), paper M3K.2.
[Crossref]

Seki, M.

Sekiguchi, S.

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

Seok, T. J.

Suda, S.

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, M. Toyama, M. Ohtsuka, N. Yokoyama, K. Matsumaro, M. Seki, K. Koshino, T. Sugaya, S. Suda, G. Cong, T. Kimura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer,” Opt. Express 23(13), 17599–17606 (2015).
[Crossref] [PubMed]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, and H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22(4), 3887–3894 (2014).
[Crossref] [PubMed]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

Sugaya, T.

Suzuki, K.

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Non-duplicate polarization-diversity 8 × 8 Si-wire PILOSS switch integrated with polarization splitter-rotators,” Opt. Express 25(10), 10885–10892 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Novel polarization diversity without switch duplication of a Si-wire PILOSS optical switch,” Opt. Express 24(7), 6861–6868 (2016).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, M. Toyama, M. Ohtsuka, N. Yokoyama, K. Matsumaro, M. Seki, K. Koshino, T. Sugaya, S. Suda, G. Cong, T. Kimura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer,” Opt. Express 23(13), 17599–17606 (2015).
[Crossref] [PubMed]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, and H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22(4), 3887–3894 (2014).
[Crossref] [PubMed]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

Tadokoro, H.

Takabayashi, K.

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

Tanizawa, K.

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Non-duplicate polarization-diversity 8 × 8 Si-wire PILOSS switch integrated with polarization splitter-rotators,” Opt. Express 25(10), 10885–10892 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Novel polarization diversity without switch duplication of a Si-wire PILOSS optical switch,” Opt. Express 24(7), 6861–6868 (2016).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, M. Toyama, M. Ohtsuka, N. Yokoyama, K. Matsumaro, M. Seki, K. Koshino, T. Sugaya, S. Suda, G. Cong, T. Kimura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer,” Opt. Express 23(13), 17599–17606 (2015).
[Crossref] [PubMed]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, and H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22(4), 3887–3894 (2014).
[Crossref] [PubMed]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

Toyama, M.

Ueda, K.

K. Ueda, Y. Mori, H. Hasegawa, and K. Sato, “Novel Intra- and Inter-Datacenter Converged Network Exploiting Space- and Wavelength-Dimensional Switches,” in Optical Fiber Communication Conference (Optical Society of America, 2017), paper M3K.2.
[Crossref]

Uetake, A.

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

Wang, M.

Wu, M. C.

Yamamoto, T.

T. Nishi, T. Yamamoto, and S. Kuroyanagi, “A polarization-controlled free-space photonic switch based on a PI-LOSS switch,” IEEE Photonics Technol. Lett. 5(9), 1104–1106 (1993).
[Crossref]

Yanagihara, M.

Yang, S.

Yeow, T. W.

T. W. Yeow, K. L. E. Law, and A. Goldenberg, “MEMS optical switches,” IEEE Commun. Mag. 39(11), 158–163 (2001).
[Crossref]

Yokoyama, N.

Zhang, Y.

Zhao, S.

Zhou, L.

IEEE Commun. Mag. (1)

T. W. Yeow, K. L. E. Law, and A. Goldenberg, “MEMS optical switches,” IEEE Commun. Mag. 39(11), 158–163 (2001).
[Crossref]

IEEE Photonics Technol. Lett. (1)

T. Nishi, T. Yamamoto, and S. Kuroyanagi, “A polarization-controlled free-space photonic switch based on a PI-LOSS switch,” IEEE Photonics Technol. Lett. 5(9), 1104–1106 (1993).
[Crossref]

J. Lightwave Technol. (1)

J. Lightwave. Technol. (4)

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch with Extremely High-Δ Silica PLC Connector,” J. Lightwave. Technol. 37(1), 116–122 (2019).
[Crossref]

T. Matsumoto, T. Kurahashi, R. Konoike, K. Suzuki, K. Tanizawa, A. Uetake, K. Takabayashi, K. Ikeda, H. Kawashima, S. Akiyama, and S. Sekiguchi, “Hybrid-Integration of SOA on Silicon Photonics Platform Based on Flip-Chip Bonding,” J. Lightwave. Technol. 37(2), 307–313 (2019).
[Crossref]

R. Konoike, K. Suzuki, T. Inoue, T. Matsumoto, T. Kurahashi, A. Uetake, K. Takabayashi, S. Akiyama, S. Sekiguchi, S. Namiki, H. Kawashima, and K. Ikeda, “SOA-Integrated Silicon Photonics Switch and its Lossless Multistage Transmission of High-Capacity WDM Signals,” J. Lightwave. Technol. 37(1), 123–130 (2019).
[Crossref]

W. D. Sacher, Y. Huang, G. Q. Lo, and J. K. S. Poon, “Multilayer silicon nitride-on-silicon integrated photonic platforms and devices,” J. Lightwave. Technol. 33(4), 901–910 (2015).
[Crossref]

Opt. Express (8)

Y. Ma, Y. Zhang, S. Yang, A. Novack, R. Ding, A. E. Lim, G. Q. Lo, T. Baehr-Jones, and M. Hochberg, “Ultralow loss single layer submicron silicon waveguide crossing for SOI optical interconnect,” Opt. Express 21(24), 29374–29382 (2013).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Non-duplicate polarization-diversity 8 × 8 Si-wire PILOSS switch integrated with polarization splitter-rotators,” Opt. Express 25(10), 10885–10892 (2017).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, K. Ikeda, S. Namiki, and H. Kawashima, “Novel polarization diversity without switch duplication of a Si-wire PILOSS optical switch,” Opt. Express 24(7), 6861–6868 (2016).
[Crossref] [PubMed]

Q. Cheng, S. Rumley, M. Bahadori, and K. Bergman, “Photonic switching in high performance datacenters [Invited],” Opt. Express 26(12), 16022–16043 (2018).
[Crossref] [PubMed]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, and H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22(4), 3887–3894 (2014).
[Crossref] [PubMed]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, T. Inoue, K. Ikeda, S. Namiki, and H. Kawashima, “Broadband silicon photonics 8 × 8 switch based on double-Mach-Zehnder element switches,” Opt. Express 25(7), 7538–7546 (2017).
[Crossref] [PubMed]

L. Lu, S. Zhao, L. Zhou, D. Li, Z. Li, M. Wang, X. Li, and J. Chen, “16 × 16 non-blocking silicon optical switch based on electro-optic Mach-Zehnder interferometers,” Opt. Express 24(9), 9295–9307 (2016).
[Crossref] [PubMed]

K. Tanizawa, K. Suzuki, M. Toyama, M. Ohtsuka, N. Yokoyama, K. Matsumaro, M. Seki, K. Koshino, T. Sugaya, S. Suda, G. Cong, T. Kimura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer,” Opt. Express 23(13), 17599–17606 (2015).
[Crossref] [PubMed]

Photon. Res. (1)

Proc. SPIE (1)

K. Ishii, J. Kurumida, S. Namiki, T. Hasama, and H. Ishikawa, “Energy consumption and traffic scaling of dynamic optical path networks,” Proc. SPIE,  864686460A (2013).

Other (6)

K. Ueda, Y. Mori, H. Hasegawa, and K. Sato, “Novel Intra- and Inter-Datacenter Converged Network Exploiting Space- and Wavelength-Dimensional Switches,” in Optical Fiber Communication Conference (Optical Society of America, 2017), paper M3K.2.
[Crossref]

K. Suzuki, R. Konoike, J. Hasegawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Low Insertion Loss and Power Efficient 32 × 32 Silicon Photonics Switch with Extremely-High-Δ PLC Connector,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th4B.5.
[Crossref]

K. Suzuki, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “2.5-dB loss, 100-nm Operating Bandwidth, and Low Power Consumption Strictly-Non-Blocking 8 × 8 Si Switch,” in Proceedings of European Conference on Optical Communication (IEEE, 2017), paper Tu.1.C.2.
[Crossref]

B. G. Lee, “Photonic Switch Fabrics in Computer Communications Systems,” in Optical Fiber Communication Conference (Optical Society of America, 2018), paper Th3C.3.
[Crossref]

K. Suzuki, R. Konoike, K. Tanizawa, S. Suda, H. Matsuura, K. Ikeda, S. Namiki, and H. Kawashima, “Ultralow-crosstalk and broadband multi-port optical switch using SiN/Si double-layer platform,” in Proceedings of Opto-Electronics and Communications Conference (IEEE, 2017), PDP-3.
[Crossref]

Y. Ohara, A. Noriki, K. Sakuma, K. W. Lee, M. Murugesan, J. Bea, F. Yamada, T. Fukushima, T. Tanaka, and M. Koyanagi, “10 μm Fine Pitch Cu/Sn Micro-Bumps for 3-D Super-Chip Stack,” in Proceedings of International Conference on 3D System Integration (IEEE, 2009), pp.1−6.

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Figures (11)

Fig. 1
Fig. 1 (a) A schematic illustration of the setup used for the examination of the thermal crosstalk. An asymmetric Mach-Zehnder interferometer (AMZI) with a position-shifted heater was prepared. The transmitted spectrum was measured by using an amplified spontaneous emission (ASE) source and an optical spectrum analyzer (OSA). (b) Micrograph of a fabricated sample, with heaters connected to probe pads for current injection. (c) Cross-sectional structure of the sample.
Fig. 2
Fig. 2 (a) Measured transmittance spectrum of the sample with d h = 0 μm where the upper heater is driven with the power of from 0 to 20 mW. (b) Measured amount of wavelength shift as functions of the heater power, where devices with d h = 0, 10, 20, and 30 μm were used. (c) Normalized slope of the wavelength shift as a function of the position shift of the heater. The solid curve shows the fit to the measured points. The dashed lines show the point of d h = 15 μm and the slope of 3%.
Fig. 3
Fig. 3 (a) An illustration of the thermal crosstalk (XT) caused by the nearby heater. (b) A sample case of the thermal crosstalk with the PILOSS switch topology.
Fig. 4
Fig. 4 (a) The PILOSS topology as a 2-D projection of the cylindrical structure. (b) Another way of projecting the cylindrical structure without waveguide intersections. (c) Re-arranged structure of Fig. 4(b). (d) Another structure for edge coupling.
Fig. 5
Fig. 5 (a) An illustration of single-layer wiring scheme for the 8 × 8 switch, where the long axis is extended to insert the wires between two phase shifter groups. (b) An illustration of the proposed multi-layer wiring scheme with three layers, where the length of the switch is limited only by the optical wirings.
Fig. 6
Fig. 6 (a) A STEM image of the cross-section of the fabricated sample. The 3rd Au layer had been accidentally peeled off before the STEM measurement. (b) A micrograph of the fabricated 8 × 8 switch with the modified PILOSS topology and the three-layer wiring scheme. The miniaturization achieved was 1/23 for the PIC part as compared with the previous report.
Fig. 7
Fig. 7 A histogram of the measured resistance of the 128 heaters on the chip. In this graph, the number of open circuit heaters (resistance ∞) has been plotted at the “0” position.
Fig. 8
Fig. 8 Measured fiber-to-fiber IL of all the path settings and all the ports of the switch (8 × 8 × 8 = 512 points). The gray points show the paths that could not be connected due to unsuccessful heaters.
Fig. 9
Fig. 9 Measured crosstalk spectrum of one of the worst crosstalk paths with a path setting of 1−5′, 2−6’, 3−8’, 4−7’, 5−1’, 6−2’, 7−3′, and 8−4’.
Fig. 10
Fig. 10 A detailed breakdown of the switch-part loss. The new design has a smaller number (degree) of bends and shorter waveguide length when compared with the previous design.
Fig. 11
Fig. 11 (a) A schematic illustration of the 4 × 4 non-duplicate polarization diversity configuration. PSR denotes the polarization splitter rotator. (b) A schematic illustration of the new scheme with double-layer optical waveguides. The black solid lines show Si waveguides and the red hyphenated lines show SiN waveguides.

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