Abstract

In order to control the length of micro-channels ablated at the surface of dielectrics, we use annular filtering apertures for tailoring the depth of focus of micrometric Gaussian-Bessel beams. We identify experimentally and numerically the appropriate beam truncation that promotes a smooth axial distribution of intensity with a small elongation, suitable for processing micro-channels of small aspect ratio. Single-shot channel fabrication is demonstrated on the front surface of a fused silica sample, with sub-micron diameter, high-quality opening, and depth of few micrometers, using 1 ps low-energy (< 0.45 µJ) pulse. Finally, we realize 10 × 10 matrices of densely packed channels with aspect ratio ~5 and a spatial period down to 1.5 μm, as a prospective demonstration of direct laser fabrication of 2D photonic-crystal structures.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
  27. J. Dudutis, P. GeČys, and G. RaČiukaitis, “Non-ideal axicon-generated Bessel beam application for intra-volume glass modification,” Opt. Express 24(25), 28433–28443 (2016).
    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref]
  32. P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
    [Crossref]
  33. P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
    [Crossref]
  34. M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
    [Crossref]
  35. V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
    [Crossref]

2018 (4)

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

G. Zhang, R. Stoian, W. Zhao, and G. Cheng, “Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone,” Opt. Express 26(2), 917–926 (2018).
[Crossref] [PubMed]

Z. Yao, L. Jiang, X. Li, A. Wang, Z. Wang, M. Li, and Y. Lu, “Non-diffraction-length, tunable, Bessel-like beams generation by spatially shaping a femtosecond laser beam for high-aspect-ratio micro-hole drilling,” Opt. Express 26(17), 21960–21968 (2018).
[Crossref] [PubMed]

2017 (4)

L. Rapp, R. Meyer, L. Furfaro, C. Billet, R. Giust, and F. Courvoisier, “High speed cleaving of crystals with ultrafast Bessel beams,” Opt. Express 25(8), 9312–9317 (2017).
[Crossref] [PubMed]

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J. P. Colombier, and R. Stoian, “3D Nano-fabrication using controlled Bessel-glass interactions in ultrafast modes,” J. Laser Micro Nanoen. 12, 274–280 (2017).

M. Cywiak, D. Cywiak, and E. Yáñez, “Finite Gaussian wavelet superposition and Fresnel diffraction integral for calculating the propagation of truncated, non-diffracting and accelerating beams,” Opt. Commun. 405, 132–142 (2017).
[Crossref]

2016 (6)

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125–137 (2016).
[Crossref]

N. Götte, T. Winkler, T. Meinl, T. Kusserow, B. Zielinski, C. Sarpe, A. Senftleben, H. Hillmer, and T. Baumert, “Temporal Airy pulses for controlled high aspect ratio nanomachining of dielectrics,” Optica 3(4), 389–395 (2016).
[Crossref]

I. Ouadghiri-Idrissi, R. Giust, L. Froehly, M. Jacquot, L. Furfaro, J. M. Dudley, and F. Courvoisier, “Arbitrary shaping of on-axis amplitude of femtosecond Bessel beams with a single phase-only spatial light modulator,” Opt. Express 24(11), 11495–11504 (2016).
[Crossref] [PubMed]

J. Dudutis, P. GeČys, and G. RaČiukaitis, “Non-ideal axicon-generated Bessel beam application for intra-volume glass modification,” Opt. Express 24(25), 28433–28443 (2016).
[Crossref] [PubMed]

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

2015 (3)

M. A. Porras, C. Ruiz-Jiménez, and J. C. Losada, “Underlying conservation and stability laws in nonlinear propagation of axicon-generated Bessel beams,” Phys. Rev. A 92(6), 063826 (2015).
[Crossref]

S. Mitra, M. Chanal, R. Clady, A. Mouskeftaras, and D. Grojo, “Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining,” Appl. Opt. 54(24), 7358–7365 (2015).
[Crossref] [PubMed]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

2014 (1)

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

2013 (1)

F. Courvoisier, J. Zhang, M. K. Bhuyan, M. Jacquot, and J. M. Dudley, “Applications of femtosecond Bessel beams to laser ablation,” Appl. Phys., A Mater. Sci. Process. 112(1), 29–34 (2013).
[Crossref]

2012 (1)

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev. 6(5), 607–621 (2012).
[Crossref]

2011 (1)

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

2010 (2)

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

2009 (1)

2008 (3)

G. W. Burr, S. Diziain, and M.-P. Bernal, “The impact of finite-depth cylindrical and conical holes in lithium niobate photonic crystals,” Opt. Express 16(9), 6302–6316 (2008).
[Crossref] [PubMed]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
[Crossref]

N. Blow, “Cell imaging: New ways to see a smaller world,” Nature 456(7223), 825–828 (2008).
[Crossref] [PubMed]

2007 (1)

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

2006 (1)

2005 (3)

M. Roussey, M.-P. Bernal, N. Courjal, and F. I. Baida, “Experimental and theoretical characterization of a lithium niobate photonic crystal,” Appl. Phys. Lett. 87(24), 241101 (2005).
[Crossref]

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87(17), 171103 (2005).
[Crossref]

D. McGloin and K. Dholakia, “Bessel beams: diffraction in a new light,” Contemp. Phys. 46(1), 15–28 (2005).
[Crossref]

1996 (1)

R. P. MacDonald, S. A. Boothroyd, T. Okamoto, J. Chrostowski, and B. A. Syrett, “Interboard optical data distribution by Bessel beam shadowing,” Opt. Commun. 122(4-6), 169–177 (1996).
[Crossref]

1987 (1)

J. Durnin, J. Miceli, and J. H. Eberly, “Diffraction-free beams,” Phys. Rev. Lett. 58(15), 1499–1501 (1987).
[Crossref] [PubMed]

Adibi, A.

Akturk, S.

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Arnold, C. B.

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev. 6(5), 607–621 (2012).
[Crossref]

Arnold, C. L.

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Askari, M.

Baida, F. I.

M. Roussey, M.-P. Bernal, N. Courjal, and F. I. Baida, “Experimental and theoretical characterization of a lithium niobate photonic crystal,” Appl. Phys. Lett. 87(24), 241101 (2005).
[Crossref]

Baumert, T.

Bernal, M.-P.

G. W. Burr, S. Diziain, and M.-P. Bernal, “The impact of finite-depth cylindrical and conical holes in lithium niobate photonic crystals,” Opt. Express 16(9), 6302–6316 (2008).
[Crossref] [PubMed]

M. Roussey, M.-P. Bernal, N. Courjal, and F. I. Baida, “Experimental and theoretical characterization of a lithium niobate photonic crystal,” Appl. Phys. Lett. 87(24), 241101 (2005).
[Crossref]

Bhuyan, M. K.

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J. P. Colombier, and R. Stoian, “3D Nano-fabrication using controlled Bessel-glass interactions in ultrafast modes,” J. Laser Micro Nanoen. 12, 274–280 (2017).

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

F. Courvoisier, J. Zhang, M. K. Bhuyan, M. Jacquot, and J. M. Dudley, “Applications of femtosecond Bessel beams to laser ablation,” Appl. Phys., A Mater. Sci. Process. 112(1), 29–34 (2013).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

Billet, C.

Blow, N.

N. Blow, “Cell imaging: New ways to see a smaller world,” Nature 456(7223), 825–828 (2008).
[Crossref] [PubMed]

Bonanomi, S.

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Boothroyd, S. A.

R. P. MacDonald, S. A. Boothroyd, T. Okamoto, J. Chrostowski, and B. A. Syrett, “Interboard optical data distribution by Bessel beam shadowing,” Opt. Commun. 122(4-6), 169–177 (1996).
[Crossref]

Brocas, A.

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Burr, G. W.

Chanal, M.

Cheng, G.

G. Zhang, R. Stoian, W. Zhao, and G. Cheng, “Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone,” Opt. Express 26(2), 917–926 (2018).
[Crossref] [PubMed]

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

Cheng, Y.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Chimier, B.

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Chrostowski, J.

R. P. MacDonald, S. A. Boothroyd, T. Okamoto, J. Chrostowski, and B. A. Syrett, “Interboard optical data distribution by Bessel beam shadowing,” Opt. Commun. 122(4-6), 169–177 (1996).
[Crossref]

Chu, W.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Cizmár, T.

Clady, R.

Colombier, J. P.

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J. P. Colombier, and R. Stoian, “3D Nano-fabrication using controlled Bessel-glass interactions in ultrafast modes,” J. Laser Micro Nanoen. 12, 274–280 (2017).

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

Couairon, A.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125–137 (2016).
[Crossref]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
[Crossref]

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

Courjal, N.

M. Roussey, M.-P. Bernal, N. Courjal, and F. I. Baida, “Experimental and theoretical characterization of a lithium niobate photonic crystal,” Appl. Phys. Lett. 87(24), 241101 (2005).
[Crossref]

Courvoisier, F.

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

L. Rapp, R. Meyer, L. Furfaro, C. Billet, R. Giust, and F. Courvoisier, “High speed cleaving of crystals with ultrafast Bessel beams,” Opt. Express 25(8), 9312–9317 (2017).
[Crossref] [PubMed]

I. Ouadghiri-Idrissi, R. Giust, L. Froehly, M. Jacquot, L. Furfaro, J. M. Dudley, and F. Courvoisier, “Arbitrary shaping of on-axis amplitude of femtosecond Bessel beams with a single phase-only spatial light modulator,” Opt. Express 24(11), 11495–11504 (2016).
[Crossref] [PubMed]

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125–137 (2016).
[Crossref]

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

F. Courvoisier, J. Zhang, M. K. Bhuyan, M. Jacquot, and J. M. Dudley, “Applications of femtosecond Bessel beams to laser ablation,” Appl. Phys., A Mater. Sci. Process. 112(1), 29–34 (2013).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

Cywiak, D.

M. Cywiak, D. Cywiak, and E. Yáñez, “Finite Gaussian wavelet superposition and Fresnel diffraction integral for calculating the propagation of truncated, non-diffracting and accelerating beams,” Opt. Commun. 405, 132–142 (2017).
[Crossref]

Cywiak, M.

M. Cywiak, D. Cywiak, and E. Yáñez, “Finite Gaussian wavelet superposition and Fresnel diffraction integral for calculating the propagation of truncated, non-diffracting and accelerating beams,” Opt. Commun. 405, 132–142 (2017).
[Crossref]

Dholakia, K.

T. Cizmár and K. Dholakia, “Tunable Bessel light modes: engineering the axial propagation,” Opt. Express 17(18), 15558–15570 (2009).
[Crossref] [PubMed]

D. McGloin and K. Dholakia, “Bessel beams: diffraction in a new light,” Contemp. Phys. 46(1), 15–28 (2005).
[Crossref]

Di Trapani, P.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
[Crossref]

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

Diziain, S.

Dubietis, A.

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

Dudley, J. M.

I. Ouadghiri-Idrissi, R. Giust, L. Froehly, M. Jacquot, L. Furfaro, J. M. Dudley, and F. Courvoisier, “Arbitrary shaping of on-axis amplitude of femtosecond Bessel beams with a single phase-only spatial light modulator,” Opt. Express 24(11), 11495–11504 (2016).
[Crossref] [PubMed]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

F. Courvoisier, J. Zhang, M. K. Bhuyan, M. Jacquot, and J. M. Dudley, “Applications of femtosecond Bessel beams to laser ablation,” Appl. Phys., A Mater. Sci. Process. 112(1), 29–34 (2013).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

Dudutis, J.

Duocastella, M.

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev. 6(5), 607–621 (2012).
[Crossref]

Durnin, J.

J. Durnin, J. Miceli, and J. H. Eberly, “Diffraction-free beams,” Phys. Rev. Lett. 58(15), 1499–1501 (1987).
[Crossref] [PubMed]

Eberly, J. H.

J. Durnin, J. Miceli, and J. H. Eberly, “Diffraction-free beams,” Phys. Rev. Lett. 58(15), 1499–1501 (1987).
[Crossref] [PubMed]

Faccio, D.

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
[Crossref]

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

Faure, N.

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

Franco, M.

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
[Crossref]

Froehly, L.

Furfaro, L.

Garzillo, V.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

GeCys, P.

Giust, R.

Götte, N.

Grigutis, R.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

Grojo, D.

He, F.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Hillmer, H.

Huang, J.

Itina, T.

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Jacquot, M.

I. Ouadghiri-Idrissi, R. Giust, L. Froehly, M. Jacquot, L. Furfaro, J. M. Dudley, and F. Courvoisier, “Arbitrary shaping of on-axis amplitude of femtosecond Bessel beams with a single phase-only spatial light modulator,” Opt. Express 24(11), 11495–11504 (2016).
[Crossref] [PubMed]

F. Courvoisier, J. Zhang, M. K. Bhuyan, M. Jacquot, and J. M. Dudley, “Applications of femtosecond Bessel beams to laser ablation,” Appl. Phys., A Mater. Sci. Process. 112(1), 29–34 (2013).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

Jedrkiewicz, O.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Jiang, L.

Jukna, V.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Kamata, M.

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87(17), 171103 (2005).
[Crossref]

Kieffer, J. C.

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Kusserow, T.

Lacourt, P. A.

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

Lacourt, P.-A.

Lassonde, P.

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Légaré, F.

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Li, M.

Li, X.

Liu, X.

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

Losada, J. C.

M. A. Porras, C. Ruiz-Jiménez, and J. C. Losada, “Underlying conservation and stability laws in nonlinear propagation of axicon-generated Bessel beams,” Phys. Rev. A 92(6), 063826 (2015).
[Crossref]

Lu, Y.

MacDonald, R. P.

R. P. MacDonald, S. A. Boothroyd, T. Okamoto, J. Chrostowski, and B. A. Syrett, “Interboard optical data distribution by Bessel beam shadowing,” Opt. Commun. 122(4-6), 169–177 (1996).
[Crossref]

McGloin, D.

D. McGloin and K. Dholakia, “Bessel beams: diffraction in a new light,” Contemp. Phys. 46(1), 15–28 (2005).
[Crossref]

Meinl, T.

Meyer, R.

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

L. Rapp, R. Meyer, L. Furfaro, C. Billet, R. Giust, and F. Courvoisier, “High speed cleaving of crystals with ultrafast Bessel beams,” Opt. Express 25(8), 9312–9317 (2017).
[Crossref] [PubMed]

Miceli, J.

J. Durnin, J. Miceli, and J. H. Eberly, “Diffraction-free beams,” Phys. Rev. Lett. 58(15), 1499–1501 (1987).
[Crossref] [PubMed]

Mitra, S.

Mohammadi, S.

Momeni, B.

Mouskeftaras, A.

Mysyrowicz, A.

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Obara, M.

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87(17), 171103 (2005).
[Crossref]

Okamoto, T.

R. P. MacDonald, S. A. Boothroyd, T. Okamoto, J. Chrostowski, and B. A. Syrett, “Interboard optical data distribution by Bessel beam shadowing,” Opt. Commun. 122(4-6), 169–177 (1996).
[Crossref]

Olivier, T.

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

Ouadghiri-Idrissi, I.

Parola, A.

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

Piskarskas, A.

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

Polesana, P.

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
[Crossref]

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

Porras, M. A.

M. A. Porras, C. Ruiz-Jiménez, and J. C. Losada, “Underlying conservation and stability laws in nonlinear propagation of axicon-generated Bessel beams,” Phys. Rev. A 92(6), 063826 (2015).
[Crossref]

P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
[Crossref] [PubMed]

RaCiukaitis, G.

Rakhshandehroo, M.

Rapp, L.

Roussey, M.

M. Roussey, M.-P. Bernal, N. Courjal, and F. I. Baida, “Experimental and theoretical characterization of a lithium niobate photonic crystal,” Appl. Phys. Lett. 87(24), 241101 (2005).
[Crossref]

Ruiz-Jiménez, C.

M. A. Porras, C. Ruiz-Jiménez, and J. C. Losada, “Underlying conservation and stability laws in nonlinear propagation of axicon-generated Bessel beams,” Phys. Rev. A 92(6), 063826 (2015).
[Crossref]

Salut, R.

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

Sanner, N.

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Sarpe, C.

Senftleben, A.

Sentis, M.

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Soltani, M.

Somayaji, M.

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J. P. Colombier, and R. Stoian, “3D Nano-fabrication using controlled Bessel-glass interactions in ultrafast modes,” J. Laser Micro Nanoen. 12, 274–280 (2017).

Stoian, R.

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

G. Zhang, R. Stoian, W. Zhao, and G. Cheng, “Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone,” Opt. Express 26(2), 917–926 (2018).
[Crossref] [PubMed]

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J. P. Colombier, and R. Stoian, “3D Nano-fabrication using controlled Bessel-glass interactions in ultrafast modes,” J. Laser Micro Nanoen. 12, 274–280 (2017).

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125–137 (2016).
[Crossref]

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

Sugioka, K.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Syrett, B. A.

R. P. MacDonald, S. A. Boothroyd, T. Okamoto, J. Chrostowski, and B. A. Syrett, “Interboard optical data distribution by Bessel beam shadowing,” Opt. Commun. 122(4-6), 169–177 (1996).
[Crossref]

Tan, Y.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Toratani, E.

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87(17), 171103 (2005).
[Crossref]

Utéza, O.

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Varkentina, N.

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

Velpula, P. K.

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J. P. Colombier, and R. Stoian, “3D Nano-fabrication using controlled Bessel-glass interactions in ultrafast modes,” J. Laser Micro Nanoen. 12, 274–280 (2017).

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

Wang, A.

Wang, Z.

Winkler, T.

Withford, M. J.

Xie, C.

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Yáñez, E.

M. Cywiak, D. Cywiak, and E. Yáñez, “Finite Gaussian wavelet superposition and Fresnel diffraction integral for calculating the propagation of truncated, non-diffracting and accelerating beams,” Opt. Commun. 405, 132–142 (2017).
[Crossref]

Yao, Z.

Yu, J.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Zhang, G.

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

G. Zhang, R. Stoian, W. Zhao, and G. Cheng, “Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone,” Opt. Express 26(2), 917–926 (2018).
[Crossref] [PubMed]

Zhang, H.

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

Zhang, J.

F. Courvoisier, J. Zhang, M. K. Bhuyan, M. Jacquot, and J. M. Dudley, “Applications of femtosecond Bessel beams to laser ablation,” Appl. Phys., A Mater. Sci. Process. 112(1), 29–34 (2013).
[Crossref]

Zhao, W.

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

G. Zhang, R. Stoian, W. Zhao, and G. Cheng, “Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone,” Opt. Express 26(2), 917–926 (2018).
[Crossref] [PubMed]

Zhou, C.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Zielinski, B.

Adv. Opt. Technol. (1)

R. Stoian, M. K. Bhuyan, G. Zhang, G. Cheng, R. Meyer, and F. Courvoisier, “Ultrafast Bessel beams: advanced tools for laser materials processing,” Adv. Opt. Technol. 7(3), 165–174 (2018).
[Crossref]

Appl. Opt. (1)

Appl. Phys. Lett. (4)

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87(17), 171103 (2005).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond Bessel beams,” Appl. Phys. Lett. 97(8), 081102 (2010).
[Crossref]

M. Roussey, M.-P. Bernal, N. Courjal, and F. I. Baida, “Experimental and theoretical characterization of a lithium niobate photonic crystal,” Appl. Phys. Lett. 87(24), 241101 (2005).
[Crossref]

M. K. Bhuyan, P. K. Velpula, J. P. Colombier, T. Olivier, N. Faure, and R. Stoian, “Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams,” Appl. Phys. Lett. 104(2), 021107 (2014).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (3)

O. Utéza, N. Sanner, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, and J. C. Kieffer, “Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration,” Appl. Phys., A Mater. Sci. Process. 105(1), 131–141 (2011).
[Crossref]

X. Liu, N. Sanner, M. Sentis, R. Stoian, W. Zhao, G. Cheng, and O. Utéza, “Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse,” Appl. Phys., A Mater. Sci. Process. 124(2), 206 (2018).
[Crossref]

F. Courvoisier, J. Zhang, M. K. Bhuyan, M. Jacquot, and J. M. Dudley, “Applications of femtosecond Bessel beams to laser ablation,” Appl. Phys., A Mater. Sci. Process. 112(1), 29–34 (2013).
[Crossref]

Contemp. Phys. (1)

D. McGloin and K. Dholakia, “Bessel beams: diffraction in a new light,” Contemp. Phys. 46(1), 15–28 (2005).
[Crossref]

J. Appl. Phys. (1)

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120(1), 013102 (2016).
[Crossref]

J. Laser Micro Nanoen. (1)

M. K. Bhuyan, P. K. Velpula, M. Somayaji, J. P. Colombier, and R. Stoian, “3D Nano-fabrication using controlled Bessel-glass interactions in ultrafast modes,” J. Laser Micro Nanoen. 12, 274–280 (2017).

J. Phys. At. Mol. Opt. Phys. (1)

C. L. Arnold, S. Akturk, A. Mysyrowicz, V. Jukna, A. Couairon, T. Itina, R. Stoian, C. Xie, J. M. Dudley, F. Courvoisier, S. Bonanomi, O. Jedrkiewicz, and P. Di Trapani, “Nonlinear Bessel vortex beams for applications,” J. Phys. At. Mol. Opt. Phys. 48(9), 94006–94016 (2015).
[Crossref]

Laser Photonics Rev. (2)

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev. 6(5), 607–621 (2012).
[Crossref]

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J. P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 10(2), 230–244 (2016).
[Crossref]

Nature (1)

N. Blow, “Cell imaging: New ways to see a smaller world,” Nature 456(7223), 825–828 (2008).
[Crossref] [PubMed]

Opt. Commun. (2)

R. P. MacDonald, S. A. Boothroyd, T. Okamoto, J. Chrostowski, and B. A. Syrett, “Interboard optical data distribution by Bessel beam shadowing,” Opt. Commun. 122(4-6), 169–177 (1996).
[Crossref]

M. Cywiak, D. Cywiak, and E. Yáñez, “Finite Gaussian wavelet superposition and Fresnel diffraction integral for calculating the propagation of truncated, non-diffracting and accelerating beams,” Opt. Commun. 405, 132–142 (2017).
[Crossref]

Opt. Express (9)

T. Cizmár and K. Dholakia, “Tunable Bessel light modes: engineering the axial propagation,” Opt. Express 17(18), 15558–15570 (2009).
[Crossref] [PubMed]

I. Ouadghiri-Idrissi, R. Giust, L. Froehly, M. Jacquot, L. Furfaro, J. M. Dudley, and F. Courvoisier, “Arbitrary shaping of on-axis amplitude of femtosecond Bessel beams with a single phase-only spatial light modulator,” Opt. Express 24(11), 11495–11504 (2016).
[Crossref] [PubMed]

Z. Yao, L. Jiang, X. Li, A. Wang, Z. Wang, M. Li, and Y. Lu, “Non-diffraction-length, tunable, Bessel-like beams generation by spatially shaping a femtosecond laser beam for high-aspect-ratio micro-hole drilling,” Opt. Express 26(17), 21960–21968 (2018).
[Crossref] [PubMed]

J. Dudutis, P. GeČys, and G. RaČiukaitis, “Non-ideal axicon-generated Bessel beam application for intra-volume glass modification,” Opt. Express 24(25), 28433–28443 (2016).
[Crossref] [PubMed]

G. W. Burr, S. Diziain, and M.-P. Bernal, “The impact of finite-depth cylindrical and conical holes in lithium niobate photonic crystals,” Opt. Express 16(9), 6302–6316 (2008).
[Crossref] [PubMed]

G. Zhang, R. Stoian, W. Zhao, and G. Cheng, “Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone,” Opt. Express 26(2), 917–926 (2018).
[Crossref] [PubMed]

B. Momeni, J. Huang, M. Soltani, M. Askari, S. Mohammadi, M. Rakhshandehroo, and A. Adibi, “Compact wavelength demultiplexing using focusing negative index photonic crystal superprisms,” Opt. Express 14(6), 2413–2422 (2006).
[Crossref] [PubMed]

L. Rapp, R. Meyer, L. Furfaro, C. Billet, R. Giust, and F. Courvoisier, “High speed cleaving of crystals with ultrafast Bessel beams,” Opt. Express 25(8), 9312–9317 (2017).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18(2), 566–574 (2010).
[Crossref] [PubMed]

Opt. Laser Technol. (1)

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125–137 (2016).
[Crossref]

Optica (1)

Phys. Rev. A (2)

M. A. Porras, C. Ruiz-Jiménez, and J. C. Losada, “Underlying conservation and stability laws in nonlinear propagation of axicon-generated Bessel beams,” Phys. Rev. A 92(6), 063826 (2015).
[Crossref]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77(4), 043814 (2008).
[Crossref]

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P. Polesana, A. Couairon, D. Faccio, A. Parola, M. A. Porras, A. Dubietis, A. Piskarskas, and P. Di Trapani, “Observation of conical waves in focusing, dispersive, and dissipative Kerr media,” Phys. Rev. Lett. 99(22), 223902 (2007).
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Sci. Rep. (1)

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7(1), 40785 (2017).
[Crossref] [PubMed]

Other (1)

J. W. Goodman, Introduction to Fourier optics (McGraw-Hill, 2005).

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Figures (7)

Fig. 1
Fig. 1 (a) Schematic diagram of the experimental setup. The dashed line indicates the position where the annular aperture is inserted for truncating the initial Gaussian-Bessel beam in order to manipulate its properties in the 2nd Bessel region. All beams are characterized in air by the imaging system. The detailed arrangement of the imaging system is shown in the inset above. (b) Comparison of the propagation of the Gaussian-Bessel beam, and (c) the TGB beam resulting from annular truncation (slit width of 420 μm and mean radius of 1185 μm). (d) The normalized axial intensities of these two beams are plotted versus the optical axis using the same range of z coordinate for easy comparison.
Fig. 2
Fig. 2 Simulations of the TGB beam in the first Bessel region. (a) Top: the intensity of the transmitted wave through the annular aperture (No. 1 aperture in Table 1); Bottom: the wrapped phase of the transmitted wave. (b) Top: 2D simulation profile of the propagation of the TGB beam. The red arrows indicate the three positions presented in (c); Bottom: the axial intensity plot of the beam. (c) The transverse image of the beam at three typical axial positions in the first Bessel region, top is the simulation result; bottom is the corresponding experimental result. Each subplot has the size of 1.3 mm × 1.3 mm. The scale bar added for reference equals 200 μm for all images.
Fig. 3
Fig. 3 Profiles of the TGB beam as a function of the slit width of the applied annular aperture. (a-c) Simulation of the 2D beam profile in the first Bessel region versus the slit width dw gradually decreasing from full beam transmission to dw = 120 µm. The mean radii of the ring aperture are all set as r ¯ = 1185 μm. (d) Normalized axial intensity curves corresponding to (c). (e) Experimental intensity distribution in the second Bessel region. Slit width dw is 420 µm, 220 µm, 120 µm in sequence, corresponding to the three subplots in (c). (f) Normalized axial intensity curves corresponding to (e).
Fig. 4
Fig. 4 Optical microscope images of the channels fabricated by 25 fs and 1 ps single-shot laser pulses. The top view (each has a size of 9.5 μm × 9.5 μm) and side view of channels are presented to reveal the evolution of the modifications as a function of pulse energy. Laser beam comes from the top for all side view images.
Fig. 5
Fig. 5 Surface morphologies of the channel openings are characterized by SEM. The sample has been tilted by 40° for better imaging. The dashed line pairs indicate the measured opening diameters of the central primary holes which are analyzed in Section 4.2.
Fig. 6
Fig. 6 Dependence of channel diameter (a) and channel length (b) as a function of the applied pulse energy and for the two pulse durations of 25 fs and 1 ps. (c) A zoomed graph of the most interesting range (1 ps case, E < 0.5 µJ) including channel diameter and length.
Fig. 7
Fig. 7 10 × 10 channel arrays, with periods of: (a) 5 µm, (b) 3 µm, and (c) 1.5 μm, fabricated by the TGB beam with 1 ps pulse duration and 0.36 μJ pulse energy. As indicated by the yellow dashed boxes in (b) and (c), the insets show zooms in the upper-right corner of the matrix for better resolution. (d,e,f): elemental analysis by EDS on the polished sample surface.

Tables (1)

Tables Icon

Table 1 Characteristics of the three different annular apertures.

Equations (3)

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U ( x , y ) = exp ( i k Z ) i λ Z [ U ( x , y ) h ( x , y ) ]
h ( x , y ) = exp [ i k 2 Z ( x 2 + y 2 ) ]
U ( m , n , Z ) = exp ( i k Z ) i λ Z × F F T 1 { F F T [ U ( m , n ) ] F F T [ h ( m , n ) ] }

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