Abstract

Integration of superconducting nanowire single-photon detectors and quantum sources with photonic waveguides is crucial for realizing advanced quantum integrated circuits. However, scalability is hindered by stringent requirements on high-performance detectors. Here we overcome the yield limitation by controlled coupling of photonic channels to pre-selected detectors based on measuring critical current, timing resolution, and detection efficiency. As a proof of concept of our approach, we demonstrate a hybrid on-chip full-transceiver consisting of a deterministically integrated detector coupled to a selected nanowire quantum dot through a filtering circuit made of a silicon nitride waveguide and a ring resonator filter, delivering 100 dB suppression of the excitation laser. In addition, we perform extensive testing of the detectors before and after integration in the photonic circuit and show that the high performance of the superconducting nanowire detectors, including timing jitter down to 23 ± 3 ps, is maintained. Our approach is fully compatible with wafer-level automated testing in a cleanroom environment.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2018 (3)

M. Schwartz, E. Schmidt, U. Rengstl, F. Hornung, S. Hepp, and S. L. Portalupi, K. llin, M. Jetter, M. Siegel, and P. Michler, “Fully on-chip single-photon hanbury-brown and twiss experiment on a monolithic semiconductor-superconductor platform,” Nano Letters 18, 6892–6897 (2018).
[Crossref]

J.-H. Kim, S. Aghaeimeibodi, C. J. K. Richardson, R. P. Leavitt, and E. Waks, “Super-radiant emission from quantum dots in a nanophotonic waveguide,” Nano Letters 18, 4734–4740 (2018).
[Crossref] [PubMed]

A. W. Elshaari, E. Büyüközer, I. E. Zadeh, T. Lettner, P. Zhao, E. Schöll, S. Gyger, M. E. Reimer, D. Dalacu, P. J. Poole, K. D. Jöns, and V. Zwiller, “Strain-tunable quantum integrated photonics,” Nano Letters 18, 7969–7976 (2018).
[Crossref]

2017 (8)

M. Davanco, J. Liu, L. Sapienza, C.-Z. Zhang, J. V. De Miranda Cardoso, V. Verma, R. Mirin, S. W. Nam, L. Liu, and K. Srinivasan, “Heterogeneous integration for on-chip quantum photonic circuits with single quantum dot devices,” Nature Communications 8, 889 (2017).
[Crossref] [PubMed]

J.-H. Kim, S. Aghaeimeibodi, C. J. K. Richardson, R. P. Leavitt, D. Englund, and E. Waks, “Hybrid integration of solid-state quantum emitters on a silicon photonic chip,” Nano Letters 17, 7394–7400 (2017).
[Crossref] [PubMed]

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. L. Thomas, G. Roelkens, D. V. Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits,” J. Lightwave Technol. 35, 639–649 (2017).
[Crossref]

A. W. Elshaari, I. E. Zadeh, A. Fognini, M. E. Reimer, D. Dalacu, P. J. Poole, V. Zwiller, and K. D. Jöns, “On-chip single photon filtering and multiplexing in hybrid quantum photonic circuits,” Nature Communications 8, 379 (2017).
[Crossref] [PubMed]

I. Esmaeil Zadeh, J. W. N. Los, R. B. M. Gourgues, V. Steinmetz, G. Bulgarini, S. M. Dobrovolskiy, V. Zwiller, and S. N. Dorenbos, “Single-photon detectors combining high efficiency, high detection rates, and ultra-high timing resolution,” APL Photonics 2, 111301 (2017).
[Crossref]

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nature Photonics 11, 441 (2017).
[Crossref]

J. M. Shainline, S. M. Buckley, R. P. Mirin, and S. W. Nam, “Superconducting optoelectronic circuits for neuromorphic computing,” Phys. Rev. Applied 7, 034013 (2017).
[Crossref]

2016 (5)

S. Khasminskaya, F. Pyatkov, K. Slowik, S. Ferrari, O. Kahl, V. Kovalyuk, P. Rath, A. Vetter, F. Hennrich, M. M. Kappes, G. Gol’tsman, A. Korneev, C. Rockstuhl, R. Krupke, and W. H. P. Pernice, “Fully integrated quantum photonic circuit with an electrically driven light source,” Nature Photonics 10, 727 (2016).
[Crossref]

M. Poot and H. X. Tang, “Characterization of optical quantum circuits using resonant phase shifts,” Applied Physics Letters 109, 131106 (2016).
[Crossref]

A. W. Elshaari, I. E. Zadeh, K. D. Jöns, and V. Zwiller, “Thermo-optic characterization of silicon nitride resonators for cryogenic photonic circuits,” IEEE Photonics Journal 8, 1–9 (2016).
[Crossref]

I. E. Zadeh, A. W. Elshaari, K. D. Jöns, A. Fognini, D. Dalacu, P. J. Poole, M. E. Reimer, and V. Zwiller, “Deterministic integration of single photon sources in silicon based photonic circuits,” Nano Letters 16, 2289–2294 (2016).
[Crossref] [PubMed]

Y. Chen, I. E. Zadeh, K. D. Jöns, A. Fognini, M. E. Reimer, J. Zhang, D. Dalacu, P. J. Poole, F. Ding, V. Zwiller, and O. G. Schmidt, “Controlling the exciton energy of a nanowire quantum dot by strain fields,” Applied Physics Letters 108, 182103 (2016).
[Crossref]

2015 (1)

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light: Science & Applications 4, e338 (2015).
[Crossref]

2013 (7)

G. Reithmaier, S. Lichtmannecker, T. Reichert, P. Hasch, K. Müller, M. Bichler, R. Gross, and J. J. Finley, “On-chip time resolved detection of quantum dot emission using integrated superconducting single photon detectors,” Scientific Reports 3, 1901 (2013).
[Crossref]

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nature Photonics 7, 210 (2013).
[Crossref]

C. Schuck, W. H. P. Pernice, and H. X. Tang, “Nbtin superconducting nanowire detectors for visible and telecom wavelengths single photon counting on si3n4 photonic circuits,” Applied Physics Letters 102, 051101 (2013).
[Crossref]

B. J. Metcalf, N. Thomas-Peter, J. B. Spring, D. Kundys, M. A. Broome, P. C. Humphreys, X.-M. Jin, M. Barbieri, W. Steven Kolthammer, J. C. Gates, B. J. Smith, N. K. Langford, P. G. R. Smith, and I. A. Walmsley, “Multiphoton quantum interference in a multiport integrated photonic device,” Nature Communications 4, 1356 (2013).
[Crossref]

V. Kovalyuk, W. Hartmann, O. Kahl, N. Kaurova, A. Korneev, G. Goltsman, and W. H. P. Pernice, “Absorption engineering of nbn nanowires deposited on silicon nitride nanophotonic circuits,” Opt. Express 21, 22683–22692 (2013).
[Crossref] [PubMed]

C. Schuck, W. H. P. Pernice, and H. X. Tang, “Waveguide integrated low noise nbtin nanowire single- photon detectors with milli-hz dark count rate,” Scientific Reports 3, 1893 (2013).
[Crossref]

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. V. Dorpe, “Low-loss singlemode pecvd silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a cmos pilot line,” IEEE Photonics Journal 5, 2202809 (2013).
[Crossref]

2012 (1)

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nature Communications 3, 1325 (2012).
[Crossref]

2009 (2)

J. L. O’Brien, A. Furusawa, and J. Vuckovic, “Photonic quantum technologies,” Nature Photonics 3, 687 (2009).
[Crossref]

M. Ejrnaes, A. Casaburi, O. Quaranta, S. Marchetti, A. Gaggero, F. Mattioli, R. Leoni, S. Pagano, and R. Cristiano, “Characterization of parallel superconducting nanowire single photon detectors,” Superconductor Science and Technology 22, 055006 (2009).
[Crossref]

2007 (1)

A. J. Kerman, E. A. Dauler, J. K. W. Yang, K. M. Rosfjord, V. Anant, K. K. Berggren, G. N. Goltsman, and B. M. Voronov, “Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Applied Physics Letters 90, 101110 (2007).
[Crossref]

2001 (1)

E. Knill, R. Laflamme, and G. J. Milburn, “A scheme for efficient quantum computation with linear optics,” Nature 409, 46 (2001).
[Crossref]

Aghaeimeibodi, S.

J.-H. Kim, S. Aghaeimeibodi, C. J. K. Richardson, R. P. Leavitt, and E. Waks, “Super-radiant emission from quantum dots in a nanophotonic waveguide,” Nano Letters 18, 4734–4740 (2018).
[Crossref] [PubMed]

J.-H. Kim, S. Aghaeimeibodi, C. J. K. Richardson, R. P. Leavitt, D. Englund, and E. Waks, “Hybrid integration of solid-state quantum emitters on a silicon photonic chip,” Nano Letters 17, 7394–7400 (2017).
[Crossref] [PubMed]

Allmaras, J. P.

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

Anant, V.

A. J. Kerman, E. A. Dauler, J. K. W. Yang, K. M. Rosfjord, V. Anant, K. K. Berggren, G. N. Goltsman, and B. M. Voronov, “Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Applied Physics Letters 90, 101110 (2007).
[Crossref]

Autry, T. M.

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

Baehr-Jones, T.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nature Photonics 11, 441 (2017).
[Crossref]

Baek, B.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nature Photonics 7, 210 (2013).
[Crossref]

Baets, R.

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. L. Thomas, G. Roelkens, D. V. Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits,” J. Lightwave Technol. 35, 639–649 (2017).
[Crossref]

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. V. Dorpe, “Low-loss singlemode pecvd silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a cmos pilot line,” IEEE Photonics Journal 5, 2202809 (2013).
[Crossref]

Barbieri, M.

B. J. Metcalf, N. Thomas-Peter, J. B. Spring, D. Kundys, M. A. Broome, P. C. Humphreys, X.-M. Jin, M. Barbieri, W. Steven Kolthammer, J. C. Gates, B. J. Smith, N. K. Langford, P. G. R. Smith, and I. A. Walmsley, “Multiphoton quantum interference in a multiport integrated photonic device,” Nature Communications 4, 1356 (2013).
[Crossref]

Berggren, K. K.

A. J. Kerman, E. A. Dauler, J. K. W. Yang, K. M. Rosfjord, V. Anant, K. K. Berggren, G. N. Goltsman, and B. M. Voronov, “Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Applied Physics Letters 90, 101110 (2007).
[Crossref]

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

Bersin, E. A.

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

Bichler, M.

G. Reithmaier, S. Lichtmannecker, T. Reichert, P. Hasch, K. Müller, M. Bichler, R. Gross, and J. J. Finley, “On-chip time resolved detection of quantum dot emission using integrated superconducting single photon detectors,” Scientific Reports 3, 1901 (2013).
[Crossref]

Bienstman, P.

Bois, B. D.

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S. Khasminskaya, F. Pyatkov, K. Slowik, S. Ferrari, O. Kahl, V. Kovalyuk, P. Rath, A. Vetter, F. Hennrich, M. M. Kappes, G. Gol’tsman, A. Korneev, C. Rockstuhl, R. Krupke, and W. H. P. Pernice, “Fully integrated quantum photonic circuit with an electrically driven light source,” Nature Photonics 10, 727 (2016).
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A. W. Elshaari, I. E. Zadeh, A. Fognini, M. E. Reimer, D. Dalacu, P. J. Poole, V. Zwiller, and K. D. Jöns, “On-chip single photon filtering and multiplexing in hybrid quantum photonic circuits,” Nature Communications 8, 379 (2017).
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J.-H. Kim, S. Aghaeimeibodi, C. J. K. Richardson, R. P. Leavitt, and E. Waks, “Super-radiant emission from quantum dots in a nanophotonic waveguide,” Nano Letters 18, 4734–4740 (2018).
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S. Khasminskaya, F. Pyatkov, K. Slowik, S. Ferrari, O. Kahl, V. Kovalyuk, P. Rath, A. Vetter, F. Hennrich, M. M. Kappes, G. Gol’tsman, A. Korneev, C. Rockstuhl, R. Krupke, and W. H. P. Pernice, “Fully integrated quantum photonic circuit with an electrically driven light source,” Nature Photonics 10, 727 (2016).
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Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nature Photonics 11, 441 (2017).
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B. J. Metcalf, N. Thomas-Peter, J. B. Spring, D. Kundys, M. A. Broome, P. C. Humphreys, X.-M. Jin, M. Barbieri, W. Steven Kolthammer, J. C. Gates, B. J. Smith, N. K. Langford, P. G. R. Smith, and I. A. Walmsley, “Multiphoton quantum interference in a multiport integrated photonic device,” Nature Communications 4, 1356 (2013).
[Crossref]

Wang, Z.

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
[Crossref]

Wollman, E. E.

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

Wu, J.

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
[Crossref]

Xie, X.

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
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Yang, J. K. W.

A. J. Kerman, E. A. Dauler, J. K. W. Yang, K. M. Rosfjord, V. Anant, K. K. Berggren, G. N. Goltsman, and B. M. Voronov, “Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Applied Physics Letters 90, 101110 (2007).
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You, L.

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
[Crossref]

Zadeh, I. E.

A. W. Elshaari, E. Büyüközer, I. E. Zadeh, T. Lettner, P. Zhao, E. Schöll, S. Gyger, M. E. Reimer, D. Dalacu, P. J. Poole, K. D. Jöns, and V. Zwiller, “Strain-tunable quantum integrated photonics,” Nano Letters 18, 7969–7976 (2018).
[Crossref]

A. W. Elshaari, I. E. Zadeh, A. Fognini, M. E. Reimer, D. Dalacu, P. J. Poole, V. Zwiller, and K. D. Jöns, “On-chip single photon filtering and multiplexing in hybrid quantum photonic circuits,” Nature Communications 8, 379 (2017).
[Crossref] [PubMed]

A. W. Elshaari, I. E. Zadeh, K. D. Jöns, and V. Zwiller, “Thermo-optic characterization of silicon nitride resonators for cryogenic photonic circuits,” IEEE Photonics Journal 8, 1–9 (2016).
[Crossref]

I. E. Zadeh, A. W. Elshaari, K. D. Jöns, A. Fognini, D. Dalacu, P. J. Poole, M. E. Reimer, and V. Zwiller, “Deterministic integration of single photon sources in silicon based photonic circuits,” Nano Letters 16, 2289–2294 (2016).
[Crossref] [PubMed]

Y. Chen, I. E. Zadeh, K. D. Jöns, A. Fognini, M. E. Reimer, J. Zhang, D. Dalacu, P. J. Poole, F. Ding, V. Zwiller, and O. G. Schmidt, “Controlling the exciton energy of a nanowire quantum dot by strain fields,” Applied Physics Letters 108, 182103 (2016).
[Crossref]

Zhang, C.-Z.

M. Davanco, J. Liu, L. Sapienza, C.-Z. Zhang, J. V. De Miranda Cardoso, V. Verma, R. Mirin, S. W. Nam, L. Liu, and K. Srinivasan, “Heterogeneous integration for on-chip quantum photonic circuits with single quantum dot devices,” Nature Communications 8, 889 (2017).
[Crossref] [PubMed]

Zhang, J.

Y. Chen, I. E. Zadeh, K. D. Jöns, A. Fognini, M. E. Reimer, J. Zhang, D. Dalacu, P. J. Poole, F. Ding, V. Zwiller, and O. G. Schmidt, “Controlling the exciton energy of a nanowire quantum dot by strain fields,” Applied Physics Letters 108, 182103 (2016).
[Crossref]

Zhang, L.

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
[Crossref]

Zhang, W.

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
[Crossref]

Zhao, P.

A. W. Elshaari, E. Büyüközer, I. E. Zadeh, T. Lettner, P. Zhao, E. Schöll, S. Gyger, M. E. Reimer, D. Dalacu, P. J. Poole, K. D. Jöns, and V. Zwiller, “Strain-tunable quantum integrated photonics,” Nano Letters 18, 7969–7976 (2018).
[Crossref]

Zhao, Q.-Y.

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

Zhao, S.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nature Photonics 11, 441 (2017).
[Crossref]

Zhu, D.

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

Zwiller, V.

A. W. Elshaari, E. Büyüközer, I. E. Zadeh, T. Lettner, P. Zhao, E. Schöll, S. Gyger, M. E. Reimer, D. Dalacu, P. J. Poole, K. D. Jöns, and V. Zwiller, “Strain-tunable quantum integrated photonics,” Nano Letters 18, 7969–7976 (2018).
[Crossref]

A. W. Elshaari, I. E. Zadeh, A. Fognini, M. E. Reimer, D. Dalacu, P. J. Poole, V. Zwiller, and K. D. Jöns, “On-chip single photon filtering and multiplexing in hybrid quantum photonic circuits,” Nature Communications 8, 379 (2017).
[Crossref] [PubMed]

I. Esmaeil Zadeh, J. W. N. Los, R. B. M. Gourgues, V. Steinmetz, G. Bulgarini, S. M. Dobrovolskiy, V. Zwiller, and S. N. Dorenbos, “Single-photon detectors combining high efficiency, high detection rates, and ultra-high timing resolution,” APL Photonics 2, 111301 (2017).
[Crossref]

A. W. Elshaari, I. E. Zadeh, K. D. Jöns, and V. Zwiller, “Thermo-optic characterization of silicon nitride resonators for cryogenic photonic circuits,” IEEE Photonics Journal 8, 1–9 (2016).
[Crossref]

I. E. Zadeh, A. W. Elshaari, K. D. Jöns, A. Fognini, D. Dalacu, P. J. Poole, M. E. Reimer, and V. Zwiller, “Deterministic integration of single photon sources in silicon based photonic circuits,” Nano Letters 16, 2289–2294 (2016).
[Crossref] [PubMed]

Y. Chen, I. E. Zadeh, K. D. Jöns, A. Fognini, M. E. Reimer, J. Zhang, D. Dalacu, P. J. Poole, F. Ding, V. Zwiller, and O. G. Schmidt, “Controlling the exciton energy of a nanowire quantum dot by strain fields,” Applied Physics Letters 108, 182103 (2016).
[Crossref]

I. Esmaeil Zadeh, J. W. N. Los, R. B. M. Gourgues, G. Bulgarini, S. M. Dobrovolskiy, V. Zwiller, and S. N. Dorenbos, “A single-photon detector with high efficiency and sub-10ps time resolution,” ArXiv e-prints (2018).

APL Photonics (1)

I. Esmaeil Zadeh, J. W. N. Los, R. B. M. Gourgues, V. Steinmetz, G. Bulgarini, S. M. Dobrovolskiy, V. Zwiller, and S. N. Dorenbos, “Single-photon detectors combining high efficiency, high detection rates, and ultra-high timing resolution,” APL Photonics 2, 111301 (2017).
[Crossref]

Applied Physics Letters (4)

C. Schuck, W. H. P. Pernice, and H. X. Tang, “Nbtin superconducting nanowire detectors for visible and telecom wavelengths single photon counting on si3n4 photonic circuits,” Applied Physics Letters 102, 051101 (2013).
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A. J. Kerman, E. A. Dauler, J. K. W. Yang, K. M. Rosfjord, V. Anant, K. K. Berggren, G. N. Goltsman, and B. M. Voronov, “Constriction-limited detection efficiency of superconducting nanowire single-photon detectors,” Applied Physics Letters 90, 101110 (2007).
[Crossref]

M. Poot and H. X. Tang, “Characterization of optical quantum circuits using resonant phase shifts,” Applied Physics Letters 109, 131106 (2016).
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Y. Chen, I. E. Zadeh, K. D. Jöns, A. Fognini, M. E. Reimer, J. Zhang, D. Dalacu, P. J. Poole, F. Ding, V. Zwiller, and O. G. Schmidt, “Controlling the exciton energy of a nanowire quantum dot by strain fields,” Applied Physics Letters 108, 182103 (2016).
[Crossref]

IEEE Photonics Journal (2)

A. W. Elshaari, I. E. Zadeh, K. D. Jöns, and V. Zwiller, “Thermo-optic characterization of silicon nitride resonators for cryogenic photonic circuits,” IEEE Photonics Journal 8, 1–9 (2016).
[Crossref]

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. V. Dorpe, “Low-loss singlemode pecvd silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a cmos pilot line,” IEEE Photonics Journal 5, 2202809 (2013).
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Light: Science & Applications (1)

P. Rath, O. Kahl, S. Ferrari, F. Sproll, G. Lewes-Malandrakis, D. Brink, K. Ilin, M. Siegel, C. Nebel, and W. Pernice, “Superconducting single-photon detectors integrated with diamond nanophotonic circuits,” Light: Science & Applications 4, e338 (2015).
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Nano Letters (5)

M. Schwartz, E. Schmidt, U. Rengstl, F. Hornung, S. Hepp, and S. L. Portalupi, K. llin, M. Jetter, M. Siegel, and P. Michler, “Fully on-chip single-photon hanbury-brown and twiss experiment on a monolithic semiconductor-superconductor platform,” Nano Letters 18, 6892–6897 (2018).
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A. W. Elshaari, E. Büyüközer, I. E. Zadeh, T. Lettner, P. Zhao, E. Schöll, S. Gyger, M. E. Reimer, D. Dalacu, P. J. Poole, K. D. Jöns, and V. Zwiller, “Strain-tunable quantum integrated photonics,” Nano Letters 18, 7969–7976 (2018).
[Crossref]

I. E. Zadeh, A. W. Elshaari, K. D. Jöns, A. Fognini, D. Dalacu, P. J. Poole, M. E. Reimer, and V. Zwiller, “Deterministic integration of single photon sources in silicon based photonic circuits,” Nano Letters 16, 2289–2294 (2016).
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J.-H. Kim, S. Aghaeimeibodi, C. J. K. Richardson, R. P. Leavitt, D. Englund, and E. Waks, “Hybrid integration of solid-state quantum emitters on a silicon photonic chip,” Nano Letters 17, 7394–7400 (2017).
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J.-H. Kim, S. Aghaeimeibodi, C. J. K. Richardson, R. P. Leavitt, and E. Waks, “Super-radiant emission from quantum dots in a nanophotonic waveguide,” Nano Letters 18, 4734–4740 (2018).
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Nature Communications (4)

A. W. Elshaari, I. E. Zadeh, A. Fognini, M. E. Reimer, D. Dalacu, P. J. Poole, V. Zwiller, and K. D. Jöns, “On-chip single photon filtering and multiplexing in hybrid quantum photonic circuits,” Nature Communications 8, 379 (2017).
[Crossref] [PubMed]

M. Davanco, J. Liu, L. Sapienza, C.-Z. Zhang, J. V. De Miranda Cardoso, V. Verma, R. Mirin, S. W. Nam, L. Liu, and K. Srinivasan, “Heterogeneous integration for on-chip quantum photonic circuits with single quantum dot devices,” Nature Communications 8, 889 (2017).
[Crossref] [PubMed]

B. J. Metcalf, N. Thomas-Peter, J. B. Spring, D. Kundys, M. A. Broome, P. C. Humphreys, X.-M. Jin, M. Barbieri, W. Steven Kolthammer, J. C. Gates, B. J. Smith, N. K. Langford, P. G. R. Smith, and I. A. Walmsley, “Multiphoton quantum interference in a multiport integrated photonic device,” Nature Communications 4, 1356 (2013).
[Crossref]

W. H. P. Pernice, C. Schuck, O. Minaeva, M. Li, G. N. Goltsman, A. V. Sergienko, and H. X. Tang, “High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuits,” Nature Communications 3, 1325 (2012).
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Opt. Express (1)

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Science China Physics, Mechanics & Astronomy (1)

W. Zhang, L. You, H. Li, J. Huang, C. Lv, L. Zhang, X. Liu, J. Wu, Z. Wang, and X. Xie, “Nbn superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature,” Science China Physics, Mechanics & Astronomy 60, 120314 (2017).
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Other (2)

I. Esmaeil Zadeh, J. W. N. Los, R. B. M. Gourgues, G. Bulgarini, S. M. Dobrovolskiy, V. Zwiller, and S. N. Dorenbos, “A single-photon detector with high efficiency and sub-10ps time resolution,” ArXiv e-prints (2018).

B. A. Korzh, Q.-Y. Zhao, S. Frasca, J. P. Allmaras, T. M. Autry, E. A. Bersin, M. Colangelo, G. M. Crouch, A. E. Dane, T. Gerrits, F. Marsili, G. Moody, E. Ramirez, J. D. Rezac, J. M. Stevens, E. E. Wollman, D. Zhu, P. D. Hale, K. L. Silverman, R. P. Mirin, S. W. Nam, M. D. Shaw, and K. K. Berggren, “Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector,” ArXiv e-prints.

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Figures (3)

Fig. 1
Fig. 1 (a) Schematics of the fabrication process. (b) Optical microscope image of a chip with 16 SNSPDs. (c) SEM image of the SNSPD and the series inductor. (d) SEM image of the U-shaped nanowire detector. (e) Normalized detection efficiency at 881 nm for two detectors on the same chip VS bias current.
Fig. 2
Fig. 2 (a) Histograms of the critical current before (top) and after (bottom) deposition of Si3N4. (b) Difference in critical current before and after deposition of Si3N4 for each detector, the two dashed vertical lines indicate current variation of -1 μA and 1 μA, respectively. (c) Timing jitter measurement after deposition of Si3N4. (d) Detector normalized internal efficiency before and after deposition of Si3N4 as function of bias current.
Fig. 3
Fig. 3 (a) 3D FDTD simulation of near field intensity distribution (normalized) of the fundamental quasi-TE mode along 5 μ. m of NbTiN superconducting nanowire. The light is coupled to the waveguide from the left on the picture. (b) Simulated cross section of the electric field (normalized) in the Si3N4 waveguide before reaching the nanowire detector. (c) Simulated cross section of the electric field (normalized) in the Si3N4 waveguide with NbTiN nanowires after 2.5 μm of propagation. (d) Left : An optical picture of a part of the photonic circuit which includes quantum dots nanowires, a waveguide and a ring resonator. Right: SEM image of the fabricated waveguide on top of the SNSPD. (e) Spectrum of a selected quantum dot nanowire. (f) Lifetime measurement of the quantum dot nanowire performed on chip.