Abstract

We have designed three mode order converters using the sub-wavelength grating on the silicon-on-insulator substrate. The proposed mode order converters can separately realize the mode order conversion from the fundamental transverse electric mode to the first-order transverse electric mode (TE0-to-TE1), the second-order transverse electric mode (TE0-to-TE2) and the third-order transverse electric mode (TE0-to-TE3) with compact device sizes and good performances. The simulation results show that the mode order conversion efficiencies of TE0-to-TE1, TE0-to-TE2 and TE0-to-TE3 are larger than 94.4%, 95.7% and 83.7% in the wavelength ranging from 1.5 µm to 1.6 µm, the corresponding device length are 8.72 µm, 4.98 µm and 14.54 µm. In addition, the mode order converter can be fabricated with only once etching which will be advantage to the device fabrication.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Full Article  |  PDF Article
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References

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  1. R. Helkey, A. A. M. Saleh, J. Buckwalter, and J. E. Bowers, “High-performance photonic integrated circuits on silicon,” IEEE J. Sel. Top. Quantum Electron. 25(5), 1–15 (2019).
    [Crossref]
  2. D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
    [Crossref]
  3. Y. He, Y. Zhang, Q. Zhu, S. An, R. Cao, X. Guo, C. Qiu, and Y. Su, “Silicon high-order mode (de) multiplexer on single polarization,” J. Lightwave Technol. 36(24), 5746–5753 (2018).
    [Crossref]
  4. K. Okamoto, “Progress and technical challenge for planar waveguide devices: silica and silicon waveguides,” Laser Photonics Rev. 6(1), 14–23 (2012).
    [Crossref]
  5. D. Dai and J. E. Bowers, “Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects,” Nanophotonics 3(4-5), 283–311 (2014).
    [Crossref]
  6. D. Ohana and U. Levy, “Mode conversion based on dielectric metamaterial in silicon,” Opt. Express 22(22), 27617–27631 (2014).
    [Crossref]
  7. L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
    [Crossref]
  8. Z. Chen, Y. Zhu, X. Ruan, Y. Li, Y. Li, and F. Zhang, “Bridged coupler and oval mode converter based silicon mode division (de) multiplexer and terabit WDM-MDM system demonstration,” J. Lightwave Technol. 36(13), 2757–2766 (2018).
    [Crossref]
  9. Y. Huang, G. Xu, and S. Ho, “An ultracompact optical mode order converter,” IEEE Photonics Technol. Lett. 18(21), 2281–2283 (2006).
    [Crossref]
  10. V. Liu, D. A. B. Miller, and S. Fan, “Ultra-compact photonic crystal waveguide spatial mode converter and its connection to the optical diode effect,” Opt. Express 20(27), 28388–28397 (2012).
    [Crossref]
  11. L. H. Frandsen, Y. Elesin, L. F. Frellsen, M. Mitrovic, Y. Ding, O. Sigmuud, and K. Yvind, “Topology optimized mode conversion in a photonic crystal waveguide fabricated in silicon-on-insulator material,” Opt. Express 22(7), 8525–8532 (2014).
    [Crossref]
  12. D. Chen, X. Xiao, L. Wang, Y. Yu, W. Liu, and Q. Yang, “Low-loss and fabrication tolerant silicon mode-order converters based on novel compact tapers,” Opt. Express 23(9), 11152–11159 (2015).
    [Crossref]
  13. H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
    [Crossref]
  14. H. Jia, H. Chen, J. Yang, H. Xiao, W. Chen, and Y. Tian, “Ultra-compact dual-polarization silicon mode-order converter,” Opt. Lett. 44(17), 4179–4182 (2019).
    [Crossref]
  15. D. Ohana, B. Desiatov, N. Mazurski, and U. Levy, “Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides,” Nano Lett. 16(12), 7956–7961 (2016).
    [Crossref]
  16. W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
    [Crossref]
  17. B. Shen, P. Wang, R. Polson, and R. Menon, “An integrated-nanophotonics polarization beamsplitter with 2.4× 2.4 µm 2 footprint,” Nat. Photonics 9(6), 378–382 (2015).
    [Crossref]
  18. M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
    [Crossref]
  19. R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
    [Crossref]
  20. L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
    [Crossref]
  21. M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

2019 (3)

R. Helkey, A. A. M. Saleh, J. Buckwalter, and J. E. Bowers, “High-performance photonic integrated circuits on silicon,” IEEE J. Sel. Top. Quantum Electron. 25(5), 1–15 (2019).
[Crossref]

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

H. Jia, H. Chen, J. Yang, H. Xiao, W. Chen, and Y. Tian, “Ultra-compact dual-polarization silicon mode-order converter,” Opt. Lett. 44(17), 4179–4182 (2019).
[Crossref]

2018 (6)

Z. Chen, Y. Zhu, X. Ruan, Y. Li, Y. Li, and F. Zhang, “Bridged coupler and oval mode converter based silicon mode division (de) multiplexer and terabit WDM-MDM system demonstration,” J. Lightwave Technol. 36(13), 2757–2766 (2018).
[Crossref]

Y. He, Y. Zhang, Q. Zhu, S. An, R. Cao, X. Guo, C. Qiu, and Y. Su, “Silicon high-order mode (de) multiplexer on single polarization,” J. Lightwave Technol. 36(24), 5746–5753 (2018).
[Crossref]

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

2016 (1)

D. Ohana, B. Desiatov, N. Mazurski, and U. Levy, “Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides,” Nano Lett. 16(12), 7956–7961 (2016).
[Crossref]

2015 (3)

B. Shen, P. Wang, R. Polson, and R. Menon, “An integrated-nanophotonics polarization beamsplitter with 2.4× 2.4 µm 2 footprint,” Nat. Photonics 9(6), 378–382 (2015).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

D. Chen, X. Xiao, L. Wang, Y. Yu, W. Liu, and Q. Yang, “Low-loss and fabrication tolerant silicon mode-order converters based on novel compact tapers,” Opt. Express 23(9), 11152–11159 (2015).
[Crossref]

2014 (4)

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

L. H. Frandsen, Y. Elesin, L. F. Frellsen, M. Mitrovic, Y. Ding, O. Sigmuud, and K. Yvind, “Topology optimized mode conversion in a photonic crystal waveguide fabricated in silicon-on-insulator material,” Opt. Express 22(7), 8525–8532 (2014).
[Crossref]

D. Ohana and U. Levy, “Mode conversion based on dielectric metamaterial in silicon,” Opt. Express 22(22), 27617–27631 (2014).
[Crossref]

D. Dai and J. E. Bowers, “Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects,” Nanophotonics 3(4-5), 283–311 (2014).
[Crossref]

2012 (2)

K. Okamoto, “Progress and technical challenge for planar waveguide devices: silica and silicon waveguides,” Laser Photonics Rev. 6(1), 14–23 (2012).
[Crossref]

V. Liu, D. A. B. Miller, and S. Fan, “Ultra-compact photonic crystal waveguide spatial mode converter and its connection to the optical diode effect,” Opt. Express 20(27), 28388–28397 (2012).
[Crossref]

2006 (1)

Y. Huang, G. Xu, and S. Ho, “An ultracompact optical mode order converter,” IEEE Photonics Technol. Lett. 18(21), 2281–2283 (2006).
[Crossref]

An, S.

Arbabi, A.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Bergmen, K.

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Bock, P. J.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Bowers, J. E.

R. Helkey, A. A. M. Saleh, J. Buckwalter, and J. E. Bowers, “High-performance photonic integrated circuits on silicon,” IEEE J. Sel. Top. Quantum Electron. 25(5), 1–15 (2019).
[Crossref]

D. Dai and J. E. Bowers, “Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects,” Nanophotonics 3(4-5), 283–311 (2014).
[Crossref]

Brake, J.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Buckwalter, J.

R. Helkey, A. A. M. Saleh, J. Buckwalter, and J. E. Bowers, “High-performance photonic integrated circuits on silicon,” IEEE J. Sel. Top. Quantum Electron. 25(5), 1–15 (2019).
[Crossref]

Cao, R.

Chang, W.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Cheben, P.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Chen, C. P.

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Chen, D.

Chen, H.

Chen, W.

Chen, X.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

Chen, Z.

Cheng, M.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Dai, D.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

D. Dai and J. E. Bowers, “Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects,” Nanophotonics 3(4-5), 283–311 (2014).
[Crossref]

Dai, P.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

Dai, T.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Desiatov, B.

D. Ohana, B. Desiatov, N. Mazurski, and U. Levy, “Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides,” Nano Lett. 16(12), 7956–7961 (2016).
[Crossref]

Ding, Y.

Elesin, Y.

Fan, S.

Faraon, A.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Fernandez, I. M.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Frandsen, L. H.

Frellsen, L. F.

Gabrielli, L. H.

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Gao, S.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Guo, X.

Halir, R.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Hao, L.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

He, Y.

Y. He, Y. Zhang, Q. Zhu, S. An, R. Cao, X. Guo, C. Qiu, and Y. Su, “Silicon high-order mode (de) multiplexer on single polarization,” J. Lightwave Technol. 36(24), 5746–5753 (2018).
[Crossref]

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

Helkey, R.

R. Helkey, A. A. M. Saleh, J. Buckwalter, and J. E. Bowers, “High-performance photonic integrated circuits on silicon,” IEEE J. Sel. Top. Quantum Electron. 25(5), 1–15 (2019).
[Crossref]

Ho, S.

Y. Huang, G. Xu, and S. Ho, “An ultracompact optical mode order converter,” IEEE Photonics Technol. Lett. 18(21), 2281–2283 (2006).
[Crossref]

Horie, Y.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Huang, Y.

Y. Huang, G. Xu, and S. Ho, “An ultracompact optical mode order converter,” IEEE Photonics Technol. Lett. 18(21), 2281–2283 (2006).
[Crossref]

Jang, M.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Janz, S.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Jia, H.

Kamali, S. M.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Koike-Akino, T.

M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

Kojima, K.

M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

Lapointe, J.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Levy, U.

D. Ohana, B. Desiatov, N. Mazurski, and U. Levy, “Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides,” Nano Lett. 16(12), 7956–7961 (2016).
[Crossref]

D. Ohana and U. Levy, “Mode conversion based on dielectric metamaterial in silicon,” Opt. Express 22(22), 27617–27631 (2014).
[Crossref]

Li, C.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Li, D.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Li, Y.

Lin, C.

M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

Lipson, M.

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Liu, D.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Liu, S.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

Liu, V.

Liu, W.

Liu, Y.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Lu, J.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

Lu, L.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Luo, L.

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Mazurski, N.

D. Ohana, B. Desiatov, N. Mazurski, and U. Levy, “Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides,” Nano Lett. 16(12), 7956–7961 (2016).
[Crossref]

Menon, R.

B. Shen, P. Wang, R. Polson, and R. Menon, “An integrated-nanophotonics polarization beamsplitter with 2.4× 2.4 µm 2 footprint,” Nat. Photonics 9(6), 378–382 (2015).
[Crossref]

Miller, D. A. B.

Mitrovic, M.

Monux, A. O.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Ohana, D.

D. Ohana, B. Desiatov, N. Mazurski, and U. Levy, “Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides,” Nano Lett. 16(12), 7956–7961 (2016).
[Crossref]

D. Ohana and U. Levy, “Mode conversion based on dielectric metamaterial in silicon,” Opt. Express 22(22), 27617–27631 (2014).
[Crossref]

Okamoto, K.

K. Okamoto, “Progress and technical challenge for planar waveguide devices: silica and silicon waveguides,” Laser Photonics Rev. 6(1), 14–23 (2012).
[Crossref]

Ophir, N.

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Pan, Z.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Parsons, K.

M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

Perez, J. G. W.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Poitras, C. B.

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Polson, R.

B. Shen, P. Wang, R. Polson, and R. Menon, “An integrated-nanophotonics polarization beamsplitter with 2.4× 2.4 µm 2 footprint,” Nat. Photonics 9(6), 378–382 (2015).
[Crossref]

Qiu, C.

Ramos, C. A.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Ren, X.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Ruan, H.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Ruan, X.

Saleh, A. A. M.

R. Helkey, A. A. M. Saleh, J. Buckwalter, and J. E. Bowers, “High-performance photonic integrated circuits on silicon,” IEEE J. Sel. Top. Quantum Electron. 25(5), 1–15 (2019).
[Crossref]

Schmid, J. H.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Shen, B.

B. Shen, P. Wang, R. Polson, and R. Menon, “An integrated-nanophotonics polarization beamsplitter with 2.4× 2.4 µm 2 footprint,” Nat. Photonics 9(6), 378–382 (2015).
[Crossref]

Shi, Y.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Shibukawa, A.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Sigmuud, O.

Su, Y.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

Y. He, Y. Zhang, Q. Zhu, S. An, R. Cao, X. Guo, C. Qiu, and Y. Su, “Silicon high-order mode (de) multiplexer on single polarization,” J. Lightwave Technol. 36(24), 5746–5753 (2018).
[Crossref]

Sun, L.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

Teng, M.

M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

Tian, Y.

Tsang, H.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Wang, B.

M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

Wang, H.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

Wang, L.

Wang, P.

B. Shen, P. Wang, R. Polson, and R. Menon, “An integrated-nanophotonics polarization beamsplitter with 2.4× 2.4 µm 2 footprint,” Nat. Photonics 9(6), 378–382 (2015).
[Crossref]

Wang, S.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Wu, H.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Wu, Z.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Xiao, H.

Xiao, R.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

Xiao, X.

Xu, D.

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Xu, G.

Y. Huang, G. Xu, and S. Ho, “An ultracompact optical mode order converter,” IEEE Photonics Technol. Lett. 18(21), 2281–2283 (2006).
[Crossref]

Yang, C.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Yang, J.

Yang, Q.

Yu, H.

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

Yu, Y.

Yvind, K.

Zhang, F.

Zhang, M.

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Zhang, Y.

Y. He, Y. Zhang, Q. Zhu, S. An, R. Cao, X. Guo, C. Qiu, and Y. Su, “Silicon high-order mode (de) multiplexer on single polarization,” J. Lightwave Technol. 36(24), 5746–5753 (2018).
[Crossref]

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

Zhao, Y.

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

Zhu, Q.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

Y. He, Y. Zhang, Q. Zhu, S. An, R. Cao, X. Guo, C. Qiu, and Y. Su, “Silicon high-order mode (de) multiplexer on single polarization,” J. Lightwave Technol. 36(24), 5746–5753 (2018).
[Crossref]

Zhu, Y.

Adv. Opt. Mater. (1)

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7(4), 1801191 (2018).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

R. Helkey, A. A. M. Saleh, J. Buckwalter, and J. E. Bowers, “High-performance photonic integrated circuits on silicon,” IEEE J. Sel. Top. Quantum Electron. 25(5), 1–15 (2019).
[Crossref]

IEEE Photonics J. (1)

L. Hao, R. Xiao, Y. Shi, P. Dai, Y. Zhao, S. Liu, J. Lu, and X. Chen, “Efficient TE-polarized mode-order converter based on high-index-contrast polygonal slot in a silicon-on-insulator waveguide,” IEEE Photonics J. 11(2), 1–10 (2019).
[Crossref]

IEEE Photonics Technol. Lett. (1)

Y. Huang, G. Xu, and S. Ho, “An ultracompact optical mode order converter,” IEEE Photonics Technol. Lett. 18(21), 2281–2283 (2006).
[Crossref]

J. Lightwave Technol. (2)

Laser Photonics Rev. (3)

K. Okamoto, “Progress and technical challenge for planar waveguide devices: silica and silicon waveguides,” Laser Photonics Rev. 6(1), 14–23 (2012).
[Crossref]

D. Dai, C. Li, S. Wang, H. Wu, Y. Shi, Z. Wu, S. Gao, T. Dai, H. Yu, and H. Tsang, “10-channel mode (de) multiplexer with dual polarizations,” Laser Photonics Rev. 12(1), 1700109 (2018).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. O. Monux, C. A. Ramos, J. H. Schmid, J. Lapointe, D. Xu, J. G. W. Perez, I. M. Fernandez, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Nano Lett. (1)

D. Ohana, B. Desiatov, N. Mazurski, and U. Levy, “Dielectric metasurface as a platform for spatial mode conversion in nanoscale waveguides,” Nano Lett. 16(12), 7956–7961 (2016).
[Crossref]

Nanophotonics (1)

D. Dai and J. E. Bowers, “Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects,” Nanophotonics 3(4-5), 283–311 (2014).
[Crossref]

Nat. Commun. (1)

L. Luo, N. Ophir, C. P. Chen, L. H. Gabrielli, C. B. Poitras, K. Bergmen, and M. Lipson, “WDM-compatible mode-division multiplexing on a silicon chip,” Nat. Commun. 5(1), 3069 (2014).
[Crossref]

Nat. Photonics (2)

B. Shen, P. Wang, R. Polson, and R. Menon, “An integrated-nanophotonics polarization beamsplitter with 2.4× 2.4 µm 2 footprint,” Nat. Photonics 9(6), 378–382 (2015).
[Crossref]

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref]

Opt. Express (4)

Opt. Lett. (1)

Photonics Res. (1)

W. Chang, L. Lu, X. Ren, D. Li, Z. Pan, M. Cheng, D. Liu, and M. Zhang, “Ultracompact dual-mode waveguide crossing based on subwavelength multimode-interference couplers,” Photonics Res. 6(7), 660–665 (2018).
[Crossref]

Other (1)

M. Teng, K. Kojima, T. Koike-Akino, B. Wang, C. Lin, and K. Parsons, “Broadband SOI mode order converter based on topology optimization,” in Proceedings of OFC, Th2A.8, 2018.

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Figures (13)

Fig. 1.
Fig. 1. (a) The cross section of the SOI substrate with a 220 nm thick silicon waveguide. The electric field intensity distributions of the TE0 mode (b), TE1 mode (c), TE2 mode (d) and TE3 mode (e).
Fig. 2.
Fig. 2. The schematic diagram of the mode order converter for TE0-to-TE1.
Fig. 3.
Fig. 3. The transmissivity of the TE1 mode by sweeping the duty cycle and the interval distance L2.
Fig. 4.
Fig. 4. The electric filed distribution of the mode order converter for TE0-to-TE1.
Fig. 5.
Fig. 5. The spectral response of the mode order converter for TE0-to-TE1.
Fig. 6.
Fig. 6. The schematic diagram of the mode order converter for TE0-to-TE2.
Fig. 7.
Fig. 7. The transmissivity of the TE2 mode by sweeping the duty cycle and the interval distance L2.
Fig. 8.
Fig. 8. The electric filed distribution of the mode order converter for TE0-to-TE2.
Fig. 9.
Fig. 9. The spectral response of the mode order converter for TE0-to-TE2.
Fig. 10.
Fig. 10. The schematic diagram of the mode order converter for TE0-to-TE3.
Fig. 11.
Fig. 11. The electric filed distribution of the mode order converter for TE0-to-TE3.
Fig. 12.
Fig. 12. The spectral response of the mode order converter for TE0-to-TE3.
Fig. 13.
Fig. 13. The tolerance analysis on the transmissiviy and the crosstalk of the mode order converter.