Abstract

We study, both theoretically and experimentally, tunable metasurfaces supporting sharp Fano-resonances inspired by optical bound states in the continuum. We explore the use of arsenic trisulfide (a photosensitive chalcogenide glass) having optical properties which can be finely tuned by light absorption at the post-fabrication stage. We select the resonant wavelength of the metasurface corresponding to the energy below the arsenic trisulfide bandgap, and experimentally control the resonance spectral position via exposure to the light of energies above the bandgap.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
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  29. L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
    [Crossref]
  30. K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
    [Crossref]

2019 (7)

K. Koshelev, A. Bogdanov, and Y. Kivshar, “Meta-optics and bound states in the continuum,” Sci. Bull. 64(12), 836–842 (2019).
[Crossref]

K. Koshelev, G. Favraud, A. Bogdanov, Y. Kivshar, and A. Fratalocchi, “Nonradiating photonics with resonant dielectric nanostructures,” Nanophotonics 8(5), 725–745 (2019).
[Crossref]

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

K. Fan, I. V. Shadrivov, and W. J. Padilla, “Dynamic bound states in the continuum,” Optica 6(2), 169 (2019).
[Crossref]

A. Bourgade and J. Lumeau, “Large aperture, highly uniform narrow bandpass Fabry-Perot filter using photosensitive As $_{\textrm {2}}$2 S $_{\textrm {3}}$3 thin films,” Opt. Lett. 44(2), 351 (2019).
[Crossref]

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

2018 (4)

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

K. L. Koshelev, S. K. Sychev, Z. F. Sadrieva, A. A. Bogdanov, and I. V. Iorsh, “Strong coupling between excitons in transition metal dichalcogenides and optical bound states in the continuum,” Phys. Rev. B 98(16), 161113 (2018).
[Crossref]

K. Koshelev, S. Lepeshov, M. Liu, A. Bogdanov, and Y. Kivshar, “Asymmetric Metasurfaces with High- Q Resonances Governed by Bound States in the Continuum,” Phys. Rev. Lett. 121(19), 193903 (2018).
[Crossref]

Y. Kivshar, “All-dielectric meta-optics and non-linear nanophotonics,” Natl. Sci. Rev. 5(2), 144–158 (2018).
[Crossref]

2017 (3)

S. Kruk and Y. Kivshar, “Functional Meta-Optics and Nanophotonics Governed by Mie Resonances,” ACS Photonics 4(11), 2638–2649 (2017).
[Crossref]

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

2016 (1)

C. W. Hsu, B. Zhen, A. D. Stone, J. D. Joannopoulos, and M. Soljacić, “Bound states in the continuum,” Nat. Rev. Mater. 1(9), 16048 (2016).
[Crossref]

2015 (3)

2014 (1)

2013 (1)

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

2008 (2)

M. Bauer, D. Griessbach, A. Hermerschmidt, S. Krüger, M. Scheele, and A. Schischmanow, “Geometrical camera calibration with diffractive optical elements,” Opt. Express 16(25), 20241 (2008).
[Crossref]

W. Shen, M. Cathelinaud, M. Lequime, V. Nazabal, and X. Liu, “Photosensitive post tuning of chalcogenide Te20as30se50 narrow bandpass filters,” Opt. Commun. 281(14), 3726–3731 (2008).
[Crossref]

2007 (1)

2003 (1)

A. Zakery and S. Elliott, “Optical properties and applications of chalcogenide glasses: a review,” J. Non-Cryst. Solids 330(1-3), 1–12 (2003).
[Crossref]

2002 (1)

1961 (1)

U. Fano, “Effects of Configuration Interaction on Intensities and Phase Shifts,” Phys. Rev. 124(6), 1866–1878 (1961).
[Crossref]

Altug, H.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

Arvelo, E. R.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

Bauer, M.

Bogdanov, A.

K. Koshelev, A. Bogdanov, and Y. Kivshar, “Meta-optics and bound states in the continuum,” Sci. Bull. 64(12), 836–842 (2019).
[Crossref]

K. Koshelev, G. Favraud, A. Bogdanov, Y. Kivshar, and A. Fratalocchi, “Nonradiating photonics with resonant dielectric nanostructures,” Nanophotonics 8(5), 725–745 (2019).
[Crossref]

K. Koshelev, S. Lepeshov, M. Liu, A. Bogdanov, and Y. Kivshar, “Asymmetric Metasurfaces with High- Q Resonances Governed by Bound States in the Continuum,” Phys. Rev. Lett. 121(19), 193903 (2018).
[Crossref]

Bogdanov, A. A.

K. L. Koshelev, S. K. Sychev, Z. F. Sadrieva, A. A. Bogdanov, and I. V. Iorsh, “Strong coupling between excitons in transition metal dichalcogenides and optical bound states in the continuum,” Phys. Rev. B 98(16), 161113 (2018).
[Crossref]

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Bonod, N.

N. Bonod, “Large-scale dielectric metasurfaces: Silicon photonics,” Nat. Mater. 14(7), 664–665 (2015).
[Crossref]

Bourgade, A.

Brändli, V.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Brière, G.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Bulla, D.

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

Cathelinaud, M.

W. Shen, M. Cathelinaud, M. Lequime, V. Nazabal, and X. Liu, “Photosensitive post tuning of chalcogenide Te20as30se50 narrow bandpass filters,” Opt. Commun. 281(14), 3726–3731 (2008).
[Crossref]

Cevher, V.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

Chenot, S.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Choi, D.-Y.

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

P. Ma, D.-Y. Choi, Y. Yu, Z. Yang, K. Vu, T. Nguyen, A. Mitchell, B. Luther-Davies, and S. Madden, “High Q factor chalcogenide ring resonators for cavity-enhanced MIR spectroscopic sensing,” Opt. Express 23(15), 19969 (2015).
[Crossref]

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

Damilano, B.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

DeCorby, R.

Duboz, J.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Elliott, S.

A. Zakery and S. Elliott, “Optical properties and applications of chalcogenide glasses: a review,” J. Non-Cryst. Solids 330(1-3), 1–12 (2003).
[Crossref]

Fan, K.

Fano, U.

U. Fano, “Effects of Configuration Interaction on Intensities and Phase Shifts,” Phys. Rev. 124(6), 1866–1878 (1961).
[Crossref]

Favraud, G.

K. Koshelev, G. Favraud, A. Bogdanov, Y. Kivshar, and A. Fratalocchi, “Nonradiating photonics with resonant dielectric nanostructures,” Nanophotonics 8(5), 725–745 (2019).
[Crossref]

Fratalocchi, A.

K. Koshelev, G. Favraud, A. Bogdanov, Y. Kivshar, and A. Fratalocchi, “Nonradiating photonics with resonant dielectric nanostructures,” Nanophotonics 8(5), 725–745 (2019).
[Crossref]

Genevet, P.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Griessbach, D.

Haugen, C.

Hermerschmidt, A.

Héron, S.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Hsu, C. W.

C. W. Hsu, B. Zhen, A. D. Stone, J. D. Joannopoulos, and M. Soljacić, “Bound states in the continuum,” Nat. Rev. Mater. 1(9), 16048 (2016).
[Crossref]

Iorsh, I. V.

K. L. Koshelev, S. K. Sychev, Z. F. Sadrieva, A. A. Bogdanov, and I. V. Iorsh, “Strong coupling between excitons in transition metal dichalcogenides and optical bound states in the continuum,” Phys. Rev. B 98(16), 161113 (2018).
[Crossref]

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Iwanaga, M.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Jahani, Y.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

Jin, J.

J. Jin, X. Yin, L. Ni, M. Soljacić, B. Zhen, and C. Peng, “Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering,” arXiv:1812.00892 (2018).

Joannopoulos, J. D.

C. W. Hsu, B. Zhen, A. D. Stone, J. D. Joannopoulos, and M. Soljacić, “Bound states in the continuum,” Nat. Rev. Mater. 1(9), 16048 (2016).
[Crossref]

Joërg, A.

Kasap, S.

Kivshar, Y.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

K. Koshelev, G. Favraud, A. Bogdanov, Y. Kivshar, and A. Fratalocchi, “Nonradiating photonics with resonant dielectric nanostructures,” Nanophotonics 8(5), 725–745 (2019).
[Crossref]

K. Koshelev, A. Bogdanov, and Y. Kivshar, “Meta-optics and bound states in the continuum,” Sci. Bull. 64(12), 836–842 (2019).
[Crossref]

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

Y. Kivshar, “All-dielectric meta-optics and non-linear nanophotonics,” Natl. Sci. Rev. 5(2), 144–158 (2018).
[Crossref]

K. Koshelev, S. Lepeshov, M. Liu, A. Bogdanov, and Y. Kivshar, “Asymmetric Metasurfaces with High- Q Resonances Governed by Bound States in the Continuum,” Phys. Rev. Lett. 121(19), 193903 (2018).
[Crossref]

S. Kruk and Y. Kivshar, “Functional Meta-Optics and Nanophotonics Governed by Mie Resonances,” ACS Photonics 4(11), 2638–2649 (2017).
[Crossref]

Kivshar, Y. S.

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Koshelev, K.

K. Koshelev, A. Bogdanov, and Y. Kivshar, “Meta-optics and bound states in the continuum,” Sci. Bull. 64(12), 836–842 (2019).
[Crossref]

K. Koshelev, G. Favraud, A. Bogdanov, Y. Kivshar, and A. Fratalocchi, “Nonradiating photonics with resonant dielectric nanostructures,” Nanophotonics 8(5), 725–745 (2019).
[Crossref]

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

K. Koshelev, S. Lepeshov, M. Liu, A. Bogdanov, and Y. Kivshar, “Asymmetric Metasurfaces with High- Q Resonances Governed by Bound States in the Continuum,” Phys. Rev. Lett. 121(19), 193903 (2018).
[Crossref]

Koshelev, K. L.

K. L. Koshelev, S. K. Sychev, Z. F. Sadrieva, A. A. Bogdanov, and I. V. Iorsh, “Strong coupling between excitons in transition metal dichalcogenides and optical bound states in the continuum,” Phys. Rev. B 98(16), 161113 (2018).
[Crossref]

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Kravchenko, I.

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

Krüger, S.

Kruk, S.

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

S. Kruk and Y. Kivshar, “Functional Meta-Optics and Nanophotonics Governed by Mie Resonances,” ACS Photonics 4(11), 2638–2649 (2017).
[Crossref]

Lavrinenko, A. V.

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Lepeshov, S.

K. Koshelev, S. Lepeshov, M. Liu, A. Bogdanov, and Y. Kivshar, “Asymmetric Metasurfaces with High- Q Resonances Governed by Bound States in the Continuum,” Phys. Rev. Lett. 121(19), 193903 (2018).
[Crossref]

Lequime, M.

W. Shen, M. Cathelinaud, M. Lequime, V. Nazabal, and X. Liu, “Photosensitive post tuning of chalcogenide Te20as30se50 narrow bandpass filters,” Opt. Commun. 281(14), 3726–3731 (2008).
[Crossref]

Li, G.

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

Li, K.

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

Limonov, M. F.

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Liu, M.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

K. Koshelev, S. Lepeshov, M. Liu, A. Bogdanov, and Y. Kivshar, “Asymmetric Metasurfaces with High- Q Resonances Governed by Bound States in the Continuum,” Phys. Rev. Lett. 121(19), 193903 (2018).
[Crossref]

Liu, X.

W. Shen, M. Cathelinaud, M. Lequime, V. Nazabal, and X. Liu, “Photosensitive post tuning of chalcogenide Te20as30se50 narrow bandpass filters,” Opt. Commun. 281(14), 3726–3731 (2008).
[Crossref]

Lumeau, J.

Luther-Davies, B.

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

P. Ma, D.-Y. Choi, Y. Yu, Z. Yang, K. Vu, T. Nguyen, A. Mitchell, B. Luther-Davies, and S. Madden, “High Q factor chalcogenide ring resonators for cavity-enhanced MIR spectroscopic sensing,” Opt. Express 23(15), 19969 (2015).
[Crossref]

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

Ma, P.

Madden, S.

P. Ma, D.-Y. Choi, Y. Yu, Z. Yang, K. Vu, T. Nguyen, A. Mitchell, B. Luther-Davies, and S. Madden, “High Q factor chalcogenide ring resonators for cavity-enhanced MIR spectroscopic sensing,” Opt. Express 23(15), 19969 (2015).
[Crossref]

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

Malureanu, R.

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Maystre, D.

D. Maystre, “Theory of Wood’s Anomalies,” in Plasmonics, vol. 167S. Enoch and N. Bonod, eds. (Springer Berlin Heidelberg, Berlin, Heidelberg, 2012), pp. 39–83.

McMullin, J.

Meshginqalam, B.

Mitchell, A.

Nazabal, V.

W. Shen, M. Cathelinaud, M. Lequime, V. Nazabal, and X. Liu, “Photosensitive post tuning of chalcogenide Te20as30se50 narrow bandpass filters,” Opt. Commun. 281(14), 3726–3731 (2008).
[Crossref]

Nguyen, T.

Ni, L.

J. Jin, X. Yin, L. Ni, M. Soljacić, B. Zhen, and C. Peng, “Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering,” arXiv:1812.00892 (2018).

Ni, P.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Padilla, W. J.

Peng, C.

J. Jin, X. Yin, L. Ni, M. Soljacić, B. Zhen, and C. Peng, “Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering,” arXiv:1812.00892 (2018).

Robinson, T.

Rybin, M. V.

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Sabatyan, A.

Sadrieva, Z. F.

K. L. Koshelev, S. K. Sychev, Z. F. Sadrieva, A. A. Bogdanov, and I. V. Iorsh, “Strong coupling between excitons in transition metal dichalcogenides and optical bound states in the continuum,” Phys. Rev. B 98(16), 161113 (2018).
[Crossref]

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Samusev, A.

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Samusev, K. B.

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Scheele, M.

Schischmanow, A.

Shadrivov, I. V.

Shen, W.

W. Shen, M. Cathelinaud, M. Lequime, V. Nazabal, and X. Liu, “Photosensitive post tuning of chalcogenide Te20as30se50 narrow bandpass filters,” Opt. Commun. 281(14), 3726–3731 (2008).
[Crossref]

Sinev, I. S.

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Soljacic, M.

C. W. Hsu, B. Zhen, A. D. Stone, J. D. Joannopoulos, and M. Soljacić, “Bound states in the continuum,” Nat. Rev. Mater. 1(9), 16048 (2016).
[Crossref]

J. Jin, X. Yin, L. Ni, M. Soljacić, B. Zhen, and C. Peng, “Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering,” arXiv:1812.00892 (2018).

Stone, A. D.

C. W. Hsu, B. Zhen, A. D. Stone, J. D. Joannopoulos, and M. Soljacić, “Bound states in the continuum,” Nat. Rev. Mater. 1(9), 16048 (2016).
[Crossref]

Sychev, S. K.

K. L. Koshelev, S. K. Sychev, Z. F. Sadrieva, A. A. Bogdanov, and I. V. Iorsh, “Strong coupling between excitons in transition metal dichalcogenides and optical bound states in the continuum,” Phys. Rev. B 98(16), 161113 (2018).
[Crossref]

Takayama, O.

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

Tang, Y.

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

Tittl, A.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

Tonchev, D.

Turunen, J.

J. Turunen and F. Wyrowski, Diffractive Optics for Industrial and Commercial Applications (John Wiley & Sons, Limited, 1997).

van Popta, A.

Vézian, S.

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Vu, K.

Wade, A.

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

Wang, L.

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

Wang, R.

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

Wernicke, G.

Wyrowski, F.

J. Turunen and F. Wyrowski, Diffractive Optics for Industrial and Commercial Applications (John Wiley & Sons, Limited, 1997).

Yang, Z.

Yesilkoy, F.

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

Yin, X.

J. Jin, X. Yin, L. Ni, M. Soljacić, B. Zhen, and C. Peng, “Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering,” arXiv:1812.00892 (2018).

Yu, Y.

Zakery, A.

A. Zakery and S. Elliott, “Optical properties and applications of chalcogenide glasses: a review,” J. Non-Cryst. Solids 330(1-3), 1–12 (2003).
[Crossref]

Zhen, B.

C. W. Hsu, B. Zhen, A. D. Stone, J. D. Joannopoulos, and M. Soljacić, “Bound states in the continuum,” Nat. Rev. Mater. 1(9), 16048 (2016).
[Crossref]

J. Jin, X. Yin, L. Ni, M. Soljacić, B. Zhen, and C. Peng, “Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering,” arXiv:1812.00892 (2018).

ACS Photonics (3)

S. Kruk and Y. Kivshar, “Functional Meta-Optics and Nanophotonics Governed by Mie Resonances,” ACS Photonics 4(11), 2638–2649 (2017).
[Crossref]

Z. F. Sadrieva, I. S. Sinev, K. L. Koshelev, A. Samusev, I. V. Iorsh, O. Takayama, R. Malureanu, A. A. Bogdanov, and A. V. Lavrinenko, “Transition from Optical Bound States in the Continuum to Leaky Resonances: Role of Substrate and Roughness,” ACS Photonics 4(4), 723–727 (2017).
[Crossref]

K. Koshelev, Y. Tang, K. Li, D.-Y. Choi, G. Li, and Y. Kivshar, “Nonlinear metasurfaces governed by bound states in the continuum,” ACS Photonics 6(7), 1639–1644 (2019).
[Crossref]

Adv. Opt. Mater. (1)

G. Brière, P. Ni, S. Héron, S. Chenot, S. Vézian, V. Brändli, B. Damilano, J. Duboz, M. Iwanaga, and P. Genevet, “An Etching-Free Approach Toward Large-Scale Light-Emitting Metasurfaces,” Adv. Opt. Mater. 7(14), 1801271 (2019).
[Crossref]

Appl. Opt. (1)

J. Non-Cryst. Solids (1)

A. Zakery and S. Elliott, “Optical properties and applications of chalcogenide glasses: a review,” J. Non-Cryst. Solids 330(1-3), 1–12 (2003).
[Crossref]

Nano Lett. (1)

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref]

Nanophotonics (1)

K. Koshelev, G. Favraud, A. Bogdanov, Y. Kivshar, and A. Fratalocchi, “Nonradiating photonics with resonant dielectric nanostructures,” Nanophotonics 8(5), 725–745 (2019).
[Crossref]

Nat. Mater. (1)

N. Bonod, “Large-scale dielectric metasurfaces: Silicon photonics,” Nat. Mater. 14(7), 664–665 (2015).
[Crossref]

Nat. Photonics (1)

F. Yesilkoy, E. R. Arvelo, Y. Jahani, M. Liu, A. Tittl, V. Cevher, Y. Kivshar, and H. Altug, “Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces,” Nat. Photonics 13(6), 390–396 (2019).
[Crossref]

Nat. Rev. Mater. (1)

C. W. Hsu, B. Zhen, A. D. Stone, J. D. Joannopoulos, and M. Soljacić, “Bound states in the continuum,” Nat. Rev. Mater. 1(9), 16048 (2016).
[Crossref]

Natl. Sci. Rev. (1)

Y. Kivshar, “All-dielectric meta-optics and non-linear nanophotonics,” Natl. Sci. Rev. 5(2), 144–158 (2018).
[Crossref]

Opt. Commun. (1)

W. Shen, M. Cathelinaud, M. Lequime, V. Nazabal, and X. Liu, “Photosensitive post tuning of chalcogenide Te20as30se50 narrow bandpass filters,” Opt. Commun. 281(14), 3726–3731 (2008).
[Crossref]

Opt. Express (3)

Opt. Lett. (3)

Optica (1)

Phys. Procedia (1)

D.-Y. Choi, A. Wade, S. Madden, R. Wang, D. Bulla, and B. Luther-Davies, “Photo-induced and Thermal Annealing of Chalcogenide Films for Waveguide Fabrication,” Phys. Procedia 48, 196–205 (2013).
[Crossref]

Phys. Rev. (1)

U. Fano, “Effects of Configuration Interaction on Intensities and Phase Shifts,” Phys. Rev. 124(6), 1866–1878 (1961).
[Crossref]

Phys. Rev. B (1)

K. L. Koshelev, S. K. Sychev, Z. F. Sadrieva, A. A. Bogdanov, and I. V. Iorsh, “Strong coupling between excitons in transition metal dichalcogenides and optical bound states in the continuum,” Phys. Rev. B 98(16), 161113 (2018).
[Crossref]

Phys. Rev. Lett. (2)

K. Koshelev, S. Lepeshov, M. Liu, A. Bogdanov, and Y. Kivshar, “Asymmetric Metasurfaces with High- Q Resonances Governed by Bound States in the Continuum,” Phys. Rev. Lett. 121(19), 193903 (2018).
[Crossref]

M. V. Rybin, K. L. Koshelev, Z. F. Sadrieva, K. B. Samusev, A. A. Bogdanov, M. F. Limonov, and Y. S. Kivshar, “High-Q supercavity modes in subwavelength dielectric resonators,” Phys. Rev. Lett. 119(24), 243901 (2017).
[Crossref]

Sci. Bull. (1)

K. Koshelev, A. Bogdanov, and Y. Kivshar, “Meta-optics and bound states in the continuum,” Sci. Bull. 64(12), 836–842 (2019).
[Crossref]

Other (4)

J. Turunen and F. Wyrowski, Diffractive Optics for Industrial and Commercial Applications (John Wiley & Sons, Limited, 1997).

D. Maystre, “Theory of Wood’s Anomalies,” in Plasmonics, vol. 167S. Enoch and N. Bonod, eds. (Springer Berlin Heidelberg, Berlin, Heidelberg, 2012), pp. 39–83.

J. Jin, X. Yin, L. Ni, M. Soljacić, B. Zhen, and C. Peng, “Topologically Enabled Ultra-high-Q Guided Resonances Robust to Out-of-plane Scattering,” arXiv:1812.00892 (2018).

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Figures (4)

Fig. 1.
Fig. 1. (a) Design of a metasurface consisting of a square array of As$_2$S$_3$-bar pairs of different length placed on a glass substrate. Parameters: the period is 490 nm, height is 180 nm, bar width is 140 nm, larger bar length is 390 nm, and the distance between bars is 100 nm. The inset shows the orientation and polarization of the incident field considered in numerical simulations and experiments. (b) Definition of the asymmetry parameter $\alpha$. (c) Dispersion of the refractive index $n$ and extinction coefficient $k$ for As$_2$S$_3$.
Fig. 2.
Fig. 2. (a) Numerically simulated transmission spectra with respect to the excitation wavelength and $\alpha$. The white dashed line illustrates the quasi-BIC dispersion. (b) The top view of the near-field distribution of the electric field for the BIC and quasi-BIC, marked with pink circles in (a). (c) Dependence of the radiative $Q$ factor on the asymmetry parameter. The dashed line shows an inverse quadratic fitting.
Fig. 3.
Fig. 3. (a) Dependence of As$_2$S$_3$ refractive index change on the dosage of light exposure. The red open dots show the experimental results from [20]. The black dashed line is the guide for eyes. The experimental conditions are shown with the red solid line. (b) Simulated transmission spectrum for initial and exposed As$_2$S$_3$ metasurface with $\alpha =0.064$.
Fig. 4.
Fig. 4. (a) Top-view SEM image of the As$_2$S$_3$ metasurface placed on a slide glass substrate. (b) Experimental transmission spectrum for initial and exposed As$_2$S$_3$ fabricated metasurface.

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