Abstract

An all-dielectric metasurface is deemed to serve a potential platform to demonstrate spectral filters. Silicon-rich silicon nitride (SRN), which contains a relatively large portion of silicon, can exhibit higher refractive indices, when compared to silicon nitride. Meanwhile, the extinction coefficient of SRN is smaller than that of hydrogenated amorphous silicon, leading to reduced absorption loss in the shorter wavelength. SRN is therefore recommended as a scattering element from the perspective of realizing all-dielectric metasurfaces. In this work, we propose and embody a suite of highly efficient structural color filters, capitalizing on a dielectric metasurface that consists of a two-dimensional array of SRN nanodisks that are embedded in a polymeric layer. The SRN nanodisks may support the electric dipole (ED) and magnetic dipole (MD) resonances via Mie scattering, thereby leading to appropriate spectral filtering characteristics. The ED and MD are identified from field profile observation with the assistance of finite-difference time-domain simulations. The manufactured color filters are observed to produce various colors in both transmission and reflection modes throughout the visible band, giving rise to a high transmission of around 90% in the off-resonance region and a reflection ranging up to 60%. A variety of colors can be realized by tuning the resonance by adjusting the structural parameters such as the period, diameter, and height of the SRN nanodisks. The spectral position of resonances might be flexibly tuned by tailoring the polymer surrounding the SRN nanodisks. It is anticipated that the proposed coloring devices will be actively used for color displays, imaging devices, and photorealistic color printing.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2018 (7)

Y. Nagasaki, M. Suzuki, I. Hotta, and J. Takahara, “Control of Si-based all-dielectric printing color through oxidation,” ACS Photonics 5(4), 1460–1466 (2018).
[Crossref]

S. Colburn, A. Zhan, and A. Majumdar, “Metasurface optics for full-color computational imaging,” Sci. Adv. 4(2), r2114 (2018).
[PubMed]

Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, “Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging,” Phys. Rev. Appl. 10(1), 014005 (2018).
[Crossref]

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref] [PubMed]

Y. H. Ko and R. Magnusson, “Wideband dielectric metamaterial reflectors: Mie scattering or leaky Bloch mode resonance?” Optica 5(3), 289–294 (2018).
[Crossref]

I. Koirala, S. S. Lee, and D. Y. Choi, “Highly transmissive subtractive color filters based on an all-dielectric metasurface incorporating TiO2 nanopillars,” Opt. Express 26(14), 18320–18330 (2018).
[Crossref] [PubMed]

S. Colburn, A. Zhan, E. Bayati, J. Whitehead, A. Ryou, L. Huang, and A. Majumdar, “Broadband transparent and CMOS-compatible flat optics with silicon nitride metasurfaces,” Opt. Mater. Express 8(8), 2330–2344 (2018).
[Crossref]

2017 (7)

A. Zhan, S. Colburn, C. M. Dodson, and A. Majumdar, “Metasurface freeform nanophotonics,” Sci. Rep. 7(1), 1673 (2017).
[Crossref] [PubMed]

X. Zhu, W. Yan, U. Levy, N. A. Mortensen, and A. Kristensen, “Resonant laser printing of structural colors on high-index dielectric metasurfaces,” Sci. Adv. 3(5), e1602487 (2017).
[Crossref] [PubMed]

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

V. Vashistha, G. Vaidya, R. S. Hegde, A. E. Serebryannikov, N. Bonod, and M. Krawczyk, “All-dielectric metasurfaces based on cross-shaped resonators for color pixels with extended gamut,” ACS Photonics 4(5), 1076–1082 (2017).
[Crossref]

V. Vashistha, G. Vaidya, P. Gruszecki, A. E. Serebryannikov, and M. Krawczyk, “Polarization tunable all-dielectric color filters based on cross-shaped Si nanoantennas,” Sci. Rep. 7(1), 8092 (2017).
[Crossref] [PubMed]

Y. Nagasaki, M. Suzuki, and J. Takahara, “All-dielectric dual-color pixel with subwavelength resolution,” Nano Lett. 17(12), 7500–7506 (2017).
[Crossref] [PubMed]

2016 (7)

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

Z. Li, A. W. Clark, and J. M. Cooper, “Dual color plasmonic pixels create a polarization controlled nano color palette,” ACS Nano 10(1), 492–498 (2016).
[Crossref] [PubMed]

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon Mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref] [PubMed]

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

2015 (7)

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

B. S. Luk’yanchuk, N. V. Voshchinnikov, R. Paniagua-Domínguez, and A. I. Kuznetsov, “Optimum forward light scattering by spherical and spheroidal dielectric nanoparticles with high refractive index,” ACS Photonics 2(7), 993–999 (2015).
[Crossref]

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

Y. Gu, L. Zhang, J. K. W. Yang, S. P. Yeo, and C. W. Qiu, “Color generation via subwavelength plasmonic nanostructures,” Nanoscale 7(15), 6409–6419 (2015).
[Crossref] [PubMed]

F. Cheng, J. Gao, T. S. Luk, and X. Yang, “Structural color printing based on plasmonic metasurfaces of perfect light absorption,” Sci. Rep. 5(1), 11045 (2015).
[Crossref] [PubMed]

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

2014 (5)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

M. J. Uddin, T. Khaleque, and R. Magnusson, “Guided-mode resonant polarization-controlled tunable color filters,” Opt. Express 22(10), 12307–12315 (2014).
[Crossref] [PubMed]

L. Lin and Y. Yi, “Lattice plasmon resonance in core-shell SiO2/Au nanocylinder arrays,” Opt. Lett. 39(16), 4823–4826 (2014).
[Crossref] [PubMed]

H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
[Crossref] [PubMed]

2013 (7)

H. Park and K. B. Crozier, “Multispectral imaging with vertical silicon nanowires,” Sci. Rep. 3(1), 2460 (2013).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

M. J. Uddin and R. Magnusson, “Highly efficient color filter array using resonant Si3N4 gratings,” Opt. Express 21(10), 12495–12506 (2013).
[Crossref] [PubMed]

J. van de Groep and A. Polman, “Designing dielectric resonators on substrates: combining magnetic and electric resonances,” Opt. Express 21(22), 26285–26302 (2013).
[Crossref] [PubMed]

Y. S. Do, J. H. Park, B. Y. Hwang, S. M. Lee, B. K. Ju, and K. C. Choi, “Plasmonic color filter and its fabrication for large-area applications,” Adv. Opt. Mater. 1(2), 133–138 (2013).
[Crossref]

B. Zeng, Y. Gao, and F. J. Bartoli, “Ultrathin nanostructured metals for highly transmissive plasmonic subtractive color filters,” Sci. Rep. 3(1), 2840 (2013).
[Crossref] [PubMed]

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

2012 (4)

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

T. Ellenbogen, K. Seo, and K. B. Crozier, “Chromatic plasmonic polarizers for active visible color filtering and polarimetry,” Nano Lett. 12(2), 1026–1031 (2012).
[Crossref] [PubMed]

M. J. Uddin and R. Magnusson, “Efficient guided-mode-resonant tunable color filters,” IEEE Photonics Technol. Lett. 24(17), 1552–1554 (2012).
[Crossref]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

2011 (2)

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

T. Xu, H. Shi, Y.-K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

2010 (1)

T. Xu, Y. K. Wu, X. Luo, and L. J. Guo, “Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging,” Nat. Commun. 1(5), 59 (2010).
[Crossref] [PubMed]

2008 (1)

2007 (1)

B. S. So, Y. H. You, K. H. Kim, J. Hwang, W. Cho, S. S. Lee, T. M. Chung, Y. K. Lee, C. G. Kim, K. S. An, Y. C. Kim, Y. H. Lee, and W. S. Seo, “Crystallization of amorphous silicon thin films using self-limiting ALD of nickel oxide,” Electrochem. Solid-State Lett. 10(5), J61–J64 (2007).
[Crossref]

2006 (1)

A. A. D. T. Adikaari, J. D. Carey, V. Stolojan, J. L. Keddie, and S. R. P. Silva, “Bandgap enhancement of layered nanocrystalline silicon from excimer laser crystallization,” Nanotechnology 17(21), 5412–5416 (2006).
[Crossref]

2005 (1)

S. Kinoshita and S. Yoshioka, “Structural colors in nature: the role of regularity and irregularity in the structure,” ChemPhysChem 6(8), 1442–1459 (2005).
[Crossref] [PubMed]

Adikaari, A. A. D. T.

A. A. D. T. Adikaari, J. D. Carey, V. Stolojan, J. L. Keddie, and S. R. P. Silva, “Bandgap enhancement of layered nanocrystalline silicon from excimer laser crystallization,” Nanotechnology 17(21), 5412–5416 (2006).
[Crossref]

An, K. S.

B. S. So, Y. H. You, K. H. Kim, J. Hwang, W. Cho, S. S. Lee, T. M. Chung, Y. K. Lee, C. G. Kim, K. S. An, Y. C. Kim, Y. H. Lee, and W. S. Seo, “Crystallization of amorphous silicon thin films using self-limiting ALD of nickel oxide,” Electrochem. Solid-State Lett. 10(5), J61–J64 (2007).
[Crossref]

Arbabi, A.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Bagheri, M.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Bartoli, F. J.

B. Zeng, Y. Gao, and F. J. Bartoli, “Ultrathin nanostructured metals for highly transmissive plasmonic subtractive color filters,” Sci. Rep. 3(1), 2840 (2013).
[Crossref] [PubMed]

Bayati, E.

Bedu, F.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon Mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref] [PubMed]

Boltasseva, A.

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Bonod, N.

V. Vashistha, G. Vaidya, R. S. Hegde, A. E. Serebryannikov, N. Bonod, and M. Krawczyk, “All-dielectric metasurfaces based on cross-shaped resonators for color pixels with extended gamut,” ACS Photonics 4(5), 1076–1082 (2017).
[Crossref]

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon Mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref] [PubMed]

Brake, J.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref] [PubMed]

Brener, I.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Campione, S.

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Capasso, F.

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Carey, J. D.

A. A. D. T. Adikaari, J. D. Carey, V. Stolojan, J. L. Keddie, and S. R. P. Silva, “Bandgap enhancement of layered nanocrystalline silicon from excimer laser crystallization,” Nanotechnology 17(21), 5412–5416 (2006).
[Crossref]

Chen, W. T.

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

Chen, Y.-J.

Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, “Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging,” Phys. Rev. Appl. 10(1), 014005 (2018).
[Crossref]

Cheng, F.

F. Cheng, J. Gao, T. S. Luk, and X. Yang, “Structural color printing based on plasmonic metasurfaces of perfect light absorption,” Sci. Rep. 5(1), 11045 (2015).
[Crossref] [PubMed]

Cho, W.

B. S. So, Y. H. You, K. H. Kim, J. Hwang, W. Cho, S. S. Lee, T. M. Chung, Y. K. Lee, C. G. Kim, K. S. An, Y. C. Kim, Y. H. Lee, and W. S. Seo, “Crystallization of amorphous silicon thin films using self-limiting ALD of nickel oxide,” Electrochem. Solid-State Lett. 10(5), J61–J64 (2007).
[Crossref]

Choi, D. Y.

I. Koirala, S. S. Lee, and D. Y. Choi, “Highly transmissive subtractive color filters based on an all-dielectric metasurface incorporating TiO2 nanopillars,” Opt. Express 26(14), 18320–18330 (2018).
[Crossref] [PubMed]

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

Choi, K. C.

Y. S. Do, J. H. Park, B. Y. Hwang, S. M. Lee, B. K. Ju, and K. C. Choi, “Plasmonic color filter and its fabrication for large-area applications,” Adv. Opt. Mater. 1(2), 133–138 (2013).
[Crossref]

Chong, K. E.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Chung, T. M.

B. S. So, Y. H. You, K. H. Kim, J. Hwang, W. Cho, S. S. Lee, T. M. Chung, Y. K. Lee, C. G. Kim, K. S. An, Y. C. Kim, Y. H. Lee, and W. S. Seo, “Crystallization of amorphous silicon thin films using self-limiting ALD of nickel oxide,” Electrochem. Solid-State Lett. 10(5), J61–J64 (2007).
[Crossref]

Clark, A. W.

Z. Li, A. W. Clark, and J. M. Cooper, “Dual color plasmonic pixels create a polarization controlled nano color palette,” ACS Nano 10(1), 492–498 (2016).
[Crossref] [PubMed]

Colburn, S.

S. Colburn, A. Zhan, and A. Majumdar, “Metasurface optics for full-color computational imaging,” Sci. Adv. 4(2), r2114 (2018).
[PubMed]

S. Colburn, A. Zhan, E. Bayati, J. Whitehead, A. Ryou, L. Huang, and A. Majumdar, “Broadband transparent and CMOS-compatible flat optics with silicon nitride metasurfaces,” Opt. Mater. Express 8(8), 2330–2344 (2018).
[Crossref]

A. Zhan, S. Colburn, C. M. Dodson, and A. Majumdar, “Metasurface freeform nanophotonics,” Sci. Rep. 7(1), 1673 (2017).
[Crossref] [PubMed]

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

Cooper, J. M.

Z. Li, A. W. Clark, and J. M. Cooper, “Dual color plasmonic pixels create a polarization controlled nano color palette,” ACS Nano 10(1), 492–498 (2016).
[Crossref] [PubMed]

Crozier, K. B.

H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
[Crossref] [PubMed]

H. Park and K. B. Crozier, “Multispectral imaging with vertical silicon nanowires,” Sci. Rep. 3(1), 2460 (2013).
[Crossref] [PubMed]

T. Ellenbogen, K. Seo, and K. B. Crozier, “Chromatic plasmonic polarizers for active visible color filtering and polarimetry,” Nano Lett. 12(2), 1026–1031 (2012).
[Crossref] [PubMed]

Dan, Y.

H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
[Crossref] [PubMed]

Decker, M.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Devlin, R. C.

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Ding, F.

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
[Crossref] [PubMed]

Do, Y. S.

Y. S. Do, J. H. Park, B. Y. Hwang, S. M. Lee, B. K. Ju, and K. C. Choi, “Plasmonic color filter and its fabrication for large-area applications,” Adv. Opt. Mater. 1(2), 133–138 (2013).
[Crossref]

Dodson, C. M.

A. Zhan, S. Colburn, C. M. Dodson, and A. Majumdar, “Metasurface freeform nanophotonics,” Sci. Rep. 7(1), 1673 (2017).
[Crossref] [PubMed]

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

Dominguez, J.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Dong, J.-W.

Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, “Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging,” Phys. Rev. Appl. 10(1), 014005 (2018).
[Crossref]

Duan, H.

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Duan, Z.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Duane, P. K.

H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
[Crossref] [PubMed]

Ellenbogen, T.

T. Ellenbogen, K. Seo, and K. B. Crozier, “Chromatic plasmonic polarizers for active visible color filtering and polarimetry,” Nano Lett. 12(2), 1026–1031 (2012).
[Crossref] [PubMed]

Fan, Z.-B.

Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, “Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging,” Phys. Rev. Appl. 10(1), 014005 (2018).
[Crossref]

Faraon, A.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Fofang, N. T.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Fryett, T. K.

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

Fu, Y. H.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang, and B. Luk’yanchuk, “Magnetic light,” Sci. Rep. 2(1), 492 (2012).
[Crossref] [PubMed]

Gallas, B.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon Mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref] [PubMed]

Gao, J.

F. Cheng, J. Gao, T. S. Luk, and X. Yang, “Structural color printing based on plasmonic metasurfaces of perfect light absorption,” Sci. Rep. 5(1), 11045 (2015).
[Crossref] [PubMed]

Gao, S.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

Gao, Y.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

B. Zeng, Y. Gao, and F. J. Bartoli, “Ultrathin nanostructured metals for highly transmissive plasmonic subtractive color filters,” Sci. Rep. 3(1), 2840 (2013).
[Crossref] [PubMed]

Gonzales, E.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Gruszecki, P.

V. Vashistha, G. Vaidya, P. Gruszecki, A. E. Serebryannikov, and M. Krawczyk, “Polarization tunable all-dielectric color filters based on cross-shaped Si nanoantennas,” Sci. Rep. 7(1), 8092 (2017).
[Crossref] [PubMed]

Gu, Y.

Y. Gu, L. Zhang, J. K. W. Yang, S. P. Yeo, and C. W. Qiu, “Color generation via subwavelength plasmonic nanostructures,” Nanoscale 7(15), 6409–6419 (2015).
[Crossref] [PubMed]

Guo, L. J.

T. Xu, H. Shi, Y.-K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

T. Xu, Y. K. Wu, X. Luo, and L. J. Guo, “Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging,” Nat. Commun. 1(5), 59 (2010).
[Crossref] [PubMed]

He, S.

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
[Crossref] [PubMed]

Hegde, R. S.

V. Vashistha, G. Vaidya, R. S. Hegde, A. E. Serebryannikov, N. Bonod, and M. Krawczyk, “All-dielectric metasurfaces based on cross-shaped resonators for color pixels with extended gamut,” ACS Photonics 4(5), 1076–1082 (2017).
[Crossref]

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Horie, Y.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
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X. Zhu, W. Yan, U. Levy, N. A. Mortensen, and A. Kristensen, “Resonant laser printing of structural colors on high-index dielectric metasurfaces,” Sci. Adv. 3(5), e1602487 (2017).
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Y. Nagasaki, M. Suzuki, and J. Takahara, “All-dielectric dual-color pixel with subwavelength resolution,” Nano Lett. 17(12), 7500–7506 (2017).
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T. Xu, H. Shi, Y.-K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
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Seo, K.

H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
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V. Vashistha, G. Vaidya, P. Gruszecki, A. E. Serebryannikov, and M. Krawczyk, “Polarization tunable all-dielectric color filters based on cross-shaped Si nanoantennas,” Sci. Rep. 7(1), 8092 (2017).
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V. Vashistha, G. Vaidya, R. S. Hegde, A. E. Serebryannikov, N. Bonod, and M. Krawczyk, “All-dielectric metasurfaces based on cross-shaped resonators for color pixels with extended gamut,” ACS Photonics 4(5), 1076–1082 (2017).
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F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
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Shi, H.

T. Xu, H. Shi, Y.-K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
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Shibukawa, A.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
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Shrestha, V. R.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
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S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
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K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
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S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
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Y. Nagasaki, M. Suzuki, I. Hotta, and J. Takahara, “Control of Si-based all-dielectric printing color through oxidation,” ACS Photonics 5(4), 1460–1466 (2018).
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Uddin, M. J.

Vaidya, G.

V. Vashistha, G. Vaidya, R. S. Hegde, A. E. Serebryannikov, N. Bonod, and M. Krawczyk, “All-dielectric metasurfaces based on cross-shaped resonators for color pixels with extended gamut,” ACS Photonics 4(5), 1076–1082 (2017).
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V. Vashistha, G. Vaidya, P. Gruszecki, A. E. Serebryannikov, and M. Krawczyk, “Polarization tunable all-dielectric color filters based on cross-shaped Si nanoantennas,” Sci. Rep. 7(1), 8092 (2017).
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Vashistha, V.

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V. Vashistha, G. Vaidya, P. Gruszecki, A. E. Serebryannikov, and M. Krawczyk, “Polarization tunable all-dielectric color filters based on cross-shaped Si nanoantennas,” Sci. Rep. 7(1), 8092 (2017).
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B. S. Luk’yanchuk, N. V. Voshchinnikov, R. Paniagua-Domínguez, and A. I. Kuznetsov, “Optimum forward light scattering by spherical and spheroidal dielectric nanoparticles with high refractive index,” ACS Photonics 2(7), 993–999 (2015).
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K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
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F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
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K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
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H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
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T. Xu, Y. K. Wu, X. Luo, and L. J. Guo, “Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging,” Nat. Commun. 1(5), 59 (2010).
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T. Xu, H. Shi, Y.-K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
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S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
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Xie, M.-Y.

Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, “Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging,” Phys. Rev. Appl. 10(1), 014005 (2018).
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T. Xu, H. Shi, Y.-K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
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H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
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T. Xu, Y. K. Wu, X. Luo, and L. J. Guo, “Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging,” Nat. Commun. 1(5), 59 (2010).
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Yang, J. K. W.

Y. Gu, L. Zhang, J. K. W. Yang, S. P. Yeo, and C. W. Qiu, “Color generation via subwavelength plasmonic nanostructures,” Nanoscale 7(15), 6409–6419 (2015).
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K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
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Yang, X.

F. Cheng, J. Gao, T. S. Luk, and X. Yang, “Structural color printing based on plasmonic metasurfaces of perfect light absorption,” Sci. Rep. 5(1), 11045 (2015).
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Y. Gu, L. Zhang, J. K. W. Yang, S. P. Yeo, and C. W. Qiu, “Color generation via subwavelength plasmonic nanostructures,” Nanoscale 7(15), 6409–6419 (2015).
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Yi, Y.

Yoshioka, S.

S. Kinoshita and S. Yoshioka, “Structural colors in nature: the role of regularity and irregularity in the structure,” ChemPhysChem 6(8), 1442–1459 (2005).
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B. S. So, Y. H. You, K. H. Kim, J. Hwang, W. Cho, S. S. Lee, T. M. Chung, Y. K. Lee, C. G. Kim, K. S. An, Y. C. Kim, Y. H. Lee, and W. S. Seo, “Crystallization of amorphous silicon thin films using self-limiting ALD of nickel oxide,” Electrochem. Solid-State Lett. 10(5), J61–J64 (2007).
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Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Yu, Y. J.

H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
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Yue, W.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
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Zhang, C.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
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Y. Gu, L. Zhang, J. K. W. Yang, S. P. Yeo, and C. W. Qiu, “Color generation via subwavelength plasmonic nanostructures,” Nanoscale 7(15), 6409–6419 (2015).
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Zhao, F.-L.

Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, “Silicon nitride metalenses for close-to-one numerical aperture and wide-angle visible imaging,” Phys. Rev. Appl. 10(1), 014005 (2018).
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Zhou, Z.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
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Zhu, A. Y.

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
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Zhu, X.

X. Zhu, W. Yan, U. Levy, N. A. Mortensen, and A. Kristensen, “Resonant laser printing of structural colors on high-index dielectric metasurfaces,” Sci. Adv. 3(5), e1602487 (2017).
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ACS Nano (6)

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
[Crossref] [PubMed]

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

Z. Li, A. W. Clark, and J. M. Cooper, “Dual color plasmonic pixels create a polarization controlled nano color palette,” ACS Nano 10(1), 492–498 (2016).
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J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon Mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref] [PubMed]

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

ACS Photonics (5)

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

Y. Nagasaki, M. Suzuki, I. Hotta, and J. Takahara, “Control of Si-based all-dielectric printing color through oxidation,” ACS Photonics 5(4), 1460–1466 (2018).
[Crossref]

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

B. S. Luk’yanchuk, N. V. Voshchinnikov, R. Paniagua-Domínguez, and A. I. Kuznetsov, “Optimum forward light scattering by spherical and spheroidal dielectric nanoparticles with high refractive index,” ACS Photonics 2(7), 993–999 (2015).
[Crossref]

V. Vashistha, G. Vaidya, R. S. Hegde, A. E. Serebryannikov, N. Bonod, and M. Krawczyk, “All-dielectric metasurfaces based on cross-shaped resonators for color pixels with extended gamut,” ACS Photonics 4(5), 1076–1082 (2017).
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Adv. Opt. Mater. (1)

Y. S. Do, J. H. Park, B. Y. Hwang, S. M. Lee, B. K. Ju, and K. C. Choi, “Plasmonic color filter and its fabrication for large-area applications,” Adv. Opt. Mater. 1(2), 133–138 (2013).
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ChemPhysChem (1)

S. Kinoshita and S. Yoshioka, “Structural colors in nature: the role of regularity and irregularity in the structure,” ChemPhysChem 6(8), 1442–1459 (2005).
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Electrochem. Solid-State Lett. (1)

B. S. So, Y. H. You, K. H. Kim, J. Hwang, W. Cho, S. S. Lee, T. M. Chung, Y. K. Lee, C. G. Kim, K. S. An, Y. C. Kim, Y. H. Lee, and W. S. Seo, “Crystallization of amorphous silicon thin films using self-limiting ALD of nickel oxide,” Electrochem. Solid-State Lett. 10(5), J61–J64 (2007).
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IEEE Photonics Technol. Lett. (1)

M. J. Uddin and R. Magnusson, “Efficient guided-mode-resonant tunable color filters,” IEEE Photonics Technol. Lett. 24(17), 1552–1554 (2012).
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Laser Photonics Rev. (1)

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Nano Lett. (6)

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

H. Park, Y. Dan, K. Seo, Y. J. Yu, P. K. Duane, M. Wober, and K. B. Crozier, “Filter-free image sensor pixels comprising silicon nanowires with selective color absorption,” Nano Lett. 14(4), 1804–1809 (2014).
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Nanotechnology (1)

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Nat. Commun. (1)

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Figures (8)

Fig. 1
Fig. 1 Dispersion characteristics of Si-related dielectric materials including c-Si, a-Si:H, Si-rich SiN (SRN), and SiN in the visible spectral band. SRN is found to provide higher refractive indices than SiN, while exhibiting lower loss than a-Si:H.

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Fig. 2
Fig. 2 Configuration of the proposed all-dielectric metasurface resorting to SRN nanodisks built into a polymeric layer. The inset depicts a cross-sectional view of the metasurface which comprises an array of SRN nanodisks with the dimensions of P = 400 nm, D = 200 nm, and H = 200 nm.

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Fig. 3
Fig. 3 (a) Measured and calculated transmission spectra for the fabricated color filters. (b) Their color outputs in transmission mode. (c) CIE 1931 chromaticity diagrams corresponding to the measured and calculated spectra, respectively.

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Fig. 4
Fig. 4 (a) Measured and calculated reflection spectra for the fabricated color filters. (b) Their color outputs in reflection mode. (c) CIE 1931 chromaticity diagrams corresponding to the measured and calculated spectra, respectively.

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Fig. 5
Fig. 5 (a) Contour map of the calculated reflection spectra when the gap between adjacent nanodisks is varied from 100 nm to 300 nm, while the height (H) and diameter (D) of the nanodisks are fixed as 200 nm. (b) Calculated scattering cross-sections corresponding to gaps of 150 nm, 200 nm, and 250 nm.

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Fig. 6
Fig. 6 Reflection spectra for the metasurface with P = 400 nm and D = 200 nm, depending on the surrounding medium. The metasurface whose SRN nanodisks are exposed in air provides distinct reflection peaks for the ED and MD resonances. When the SRN nanodisks are immersed in a polymer with n = 1.55, the resonance peak for the ED is apparently observed to red-shift.

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Fig. 7
Fig. 7 (a) Scattering, absorption, and extinction cross-sections of the metasurface corresponding to P = 400 nm and D = 200 nm, where the SRN nanodisks are in contact with air. (b) E-field (left) and H-field (right) profiles for the ED resonance at λ = 582 nm as observed in the yz-plane. (c) Field profiles for the MD resonance at λ = 642 nm as observed in the xz-plane.

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Fig. 8
Fig. 8 (a) Scattering, absorption, and extinction cross-sections of the metasurface corresponding to P = 400 nm and D = 200 nm, where the SRN nanodisks are in contact with a polymer of ZEP520A. (b) E-field (left) and H-field (right) profiles for the ED resonance at λ = 646 nm as observed in the yz-plane. (c) Field profiles for the MD resonance at λ = 662 nm as observed in the xz-plane.

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