Abstract

The implementation of polarization controlling components enables additional functionalities of short-wave infrared (SWIR) imagers. The high-performance and mass-producible polarization controller based on Si metasurface is in high demand for the next-generation SWIR imaging system. In this work, we report the first demonstration of all-Si metasurface based polarizing bandpass filters (PBFs) on 12-inch wafers. The PBF achieves a polarization extinction ratio of above 10 dB in power within the passbands. Using the complementary metal-oxide-semiconductor (CMOS) compatible 193nm ArF deep ultra-violet (DUV) immersion lithography and inductively coupled plasma (ICP) etch processing line, a device yield of 82% is achieved.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2019 (3)

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
[Crossref] [PubMed]

S. Lan, X. Zhang, M. Taghinejad, S. Rodrigues, K.-T. Lee, Z. Liu, and W. Cai, “Metasurfaces for Near-Eye Augmented Reality,” ACS Photonics 6(4), 864–870 (2019).
[Crossref]

H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
[Crossref]

2018 (9)

A. She, S. Zhang, S. Shian, D. R. Clarke, and F. Capasso, “Large area metalenses: design, characterization, and mass manufacturing,” Opt. Express 26(2), 1573–1585 (2018).
[Crossref] [PubMed]

J. Guo, Y. Tu, L. Yang, Y. Zhang, L. Wang, and B. Wang, “Design and Simulation of Active Frequency-selective Metasurface for Full-colour Plasmonic Display,” Sci. Rep. 8(1), 11778 (2018).
[Crossref] [PubMed]

Q. Wang, E. Plum, Q. Yang, X. Zhang, Q. Xu, Y. Xu, J. Han, and W. Zhang, “Reflective chiral meta-holography: multiplexing holograms for circularly polarized waves,” Light Sci. Appl. 7(1), 25 (2018).
[Crossref] [PubMed]

S. Liu, P. P. Vabishchevich, A. Vaskin, J. L. Reno, G. A. Keeler, M. B. Sinclair, I. Staude, and I. Brener, “An all-dielectric metasurface as a broadband optical frequency mixer,” Nat. Commun. 9(1), 2507 (2018).
[Crossref] [PubMed]

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref] [PubMed]

T. Hu, C.-K. Tseng, Y. H. Fu, Z. Xu, Y. Dong, S. Wang, K. H. Lai, V. Bliznetsov, S. Zhu, Q. Lin, and Y. Gu, “Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer,” Opt. Express 26(15), 19548–19554 (2018).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

H. Pahlevaninezhad, M. Khorasaninejad, Y.-W. Huang, Z. Shi, L. P. Hariri, D. C. Adams, V. Ding, A. Zhu, C.-W. Qiu, F. Capasso, and M. J. Suter, “Nano-optic endoscope for high-resolution optical coherence tomography in vivo,” Nat. Photonics 12(9), 540–547 (2018).
[Crossref] [PubMed]

G.-Y. Lee, J.-Y. Hong, S. Hwang, S. Moon, H. Kang, S. Jeon, H. Kim, J.-H. Jeong, and B. Lee, “Metasurface eyepiece for augmented reality,” Nat. Commun. 9(1), 4562 (2018).
[Crossref] [PubMed]

2017 (5)

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN Metalens for Pixel-Level Full-Color Routing at Visible Light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

X. Duan, S. Kamin, and N. Liu, “Dynamic plasmonic colour display,” Nat. Commun. 8(1), 14606 (2017).
[Crossref] [PubMed]

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface Polarization Optics: Independent Phase Control of Arbitrary Orthogonal States of Polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C.-W. Qiu, “Dielectric Meta-Holograms Enabled with Dual Magnetic Resonances in Visible Light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

2016 (3)

2015 (1)

2014 (1)

T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
[Crossref] [PubMed]

2013 (1)

D. A. LeMaster, A. H. Mahamat, B. M. Ratliff, A. S. Alenin, J. S. Tyo, and B. M. Koch, “SWIR active polarization imaging for material identification,” Proc. SPIE 8873, 88730O (2013).

2010 (2)

Achilefu, S.

T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
[Crossref] [PubMed]

Adams, D. C.

H. Pahlevaninezhad, M. Khorasaninejad, Y.-W. Huang, Z. Shi, L. P. Hariri, D. C. Adams, V. Ding, A. Zhu, C.-W. Qiu, F. Capasso, and M. J. Suter, “Nano-optic endoscope for high-resolution optical coherence tomography in vivo,” Nat. Photonics 12(9), 540–547 (2018).
[Crossref] [PubMed]

Ai, Y.

Alenin, A. S.

D. A. LeMaster, A. H. Mahamat, B. M. Ratliff, A. S. Alenin, J. S. Tyo, and B. M. Koch, “SWIR active polarization imaging for material identification,” Proc. SPIE 8873, 88730O (2013).

Ambrosio, A.

M. Khorasaninejad, A. Ambrosio, P. Kanhaiya, and F. Capasso, “Broadband and chiral binary dielectric meta-holograms,” Sci. Adv. 2(5), e1501258 (2016).
[Crossref] [PubMed]

Anwar, M. S.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C.-W. Qiu, “Dielectric Meta-Holograms Enabled with Dual Magnetic Resonances in Visible Light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Balthasar Mueller, J. P.

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface Polarization Optics: Independent Phase Control of Arbitrary Orthogonal States of Polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

Bianchi, A.

Bliznetsov, V.

T. Hu, C.-K. Tseng, Y. H. Fu, Z. Xu, Y. Dong, S. Wang, K. H. Lai, V. Bliznetsov, S. Zhu, Q. Lin, and Y. Gu, “Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer,” Opt. Express 26(15), 19548–19554 (2018).
[Crossref] [PubMed]

V. Bliznetsov and K. L. W. Loong, “Development of trilayer mask etching for fabrication of high aspect ratio structures,” in Proceedings of Electron Devices Technology and Manufacturing Conference (IEEE, 2019), pp. 127–129.
[Crossref]

Brener, I.

S. Liu, P. P. Vabishchevich, A. Vaskin, J. L. Reno, G. A. Keeler, M. B. Sinclair, I. Staude, and I. Brener, “An all-dielectric metasurface as a broadband optical frequency mixer,” Nat. Commun. 9(1), 2507 (2018).
[Crossref] [PubMed]

Cai, W.

S. Lan, X. Zhang, M. Taghinejad, S. Rodrigues, K.-T. Lee, Z. Liu, and W. Cai, “Metasurfaces for Near-Eye Augmented Reality,” ACS Photonics 6(4), 864–870 (2019).
[Crossref]

Capasso, F.

H. Pahlevaninezhad, M. Khorasaninejad, Y.-W. Huang, Z. Shi, L. P. Hariri, D. C. Adams, V. Ding, A. Zhu, C.-W. Qiu, F. Capasso, and M. J. Suter, “Nano-optic endoscope for high-resolution optical coherence tomography in vivo,” Nat. Photonics 12(9), 540–547 (2018).
[Crossref] [PubMed]

A. She, S. Zhang, S. Shian, D. R. Clarke, and F. Capasso, “Large area metalenses: design, characterization, and mass manufacturing,” Opt. Express 26(2), 1573–1585 (2018).
[Crossref] [PubMed]

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface Polarization Optics: Independent Phase Control of Arbitrary Orthogonal States of Polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

M. Khorasaninejad, A. Ambrosio, P. Kanhaiya, and F. Capasso, “Broadband and chiral binary dielectric meta-holograms,” Sci. Adv. 2(5), e1501258 (2016).
[Crossref] [PubMed]

Cassese, T.

Charanya, T.

T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
[Crossref] [PubMed]

Cheah, K. W.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

Chen, B. H.

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN Metalens for Pixel-Level Full-Color Routing at Visible Light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chen, J.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
[Crossref] [PubMed]

Chen, J.-W.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
[Crossref] [PubMed]

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN Metalens for Pixel-Level Full-Color Routing at Visible Light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chen, M. K.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
[Crossref] [PubMed]

Chen, M.-K.

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

Chen, S.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

Chen, Y. H.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
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Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C.-W. Qiu, “Dielectric Meta-Holograms Enabled with Dual Magnetic Resonances in Visible Light,” ACS Nano 11(9), 9382–9389 (2017).
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G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
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L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
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D. A. LeMaster, A. H. Mahamat, B. M. Ratliff, A. S. Alenin, J. S. Tyo, and B. M. Koch, “SWIR active polarization imaging for material identification,” Proc. SPIE 8873, 88730O (2013).

Marshall, J.

T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
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Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C.-W. Qiu, “Dielectric Meta-Holograms Enabled with Dual Magnetic Resonances in Visible Light,” ACS Nano 11(9), 9382–9389 (2017).
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G.-Y. Lee, J.-Y. Hong, S. Hwang, S. Moon, H. Kang, S. Jeon, H. Kim, J.-H. Jeong, and B. Lee, “Metasurface eyepiece for augmented reality,” Nat. Commun. 9(1), 4562 (2018).
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H. Pahlevaninezhad, M. Khorasaninejad, Y.-W. Huang, Z. Shi, L. P. Hariri, D. C. Adams, V. Ding, A. Zhu, C.-W. Qiu, F. Capasso, and M. J. Suter, “Nano-optic endoscope for high-resolution optical coherence tomography in vivo,” Nat. Photonics 12(9), 540–547 (2018).
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H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
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Plum, E.

Q. Wang, E. Plum, Q. Yang, X. Zhang, Q. Xu, Y. Xu, J. Han, and W. Zhang, “Reflective chiral meta-holography: multiplexing holograms for circularly polarized waves,” Light Sci. Appl. 7(1), 25 (2018).
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T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
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Pun, E. Y. B.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
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H. Pahlevaninezhad, M. Khorasaninejad, Y.-W. Huang, Z. Shi, L. P. Hariri, D. C. Adams, V. Ding, A. Zhu, C.-W. Qiu, F. Capasso, and M. J. Suter, “Nano-optic endoscope for high-resolution optical coherence tomography in vivo,” Nat. Photonics 12(9), 540–547 (2018).
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T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
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D. A. LeMaster, A. H. Mahamat, B. M. Ratliff, A. S. Alenin, J. S. Tyo, and B. M. Koch, “SWIR active polarization imaging for material identification,” Proc. SPIE 8873, 88730O (2013).

Ren, Z.

Reno, J. L.

S. Liu, P. P. Vabishchevich, A. Vaskin, J. L. Reno, G. A. Keeler, M. B. Sinclair, I. Staude, and I. Brener, “An all-dielectric metasurface as a broadband optical frequency mixer,” Nat. Commun. 9(1), 2507 (2018).
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Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C.-W. Qiu, “Dielectric Meta-Holograms Enabled with Dual Magnetic Resonances in Visible Light,” ACS Nano 11(9), 9382–9389 (2017).
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T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
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S. Lan, X. Zhang, M. Taghinejad, S. Rodrigues, K.-T. Lee, Z. Liu, and W. Cai, “Metasurfaces for Near-Eye Augmented Reality,” ACS Photonics 6(4), 864–870 (2019).
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Rubin, N. A.

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Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C.-W. Qiu, “Dielectric Meta-Holograms Enabled with Dual Magnetic Resonances in Visible Light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Schlickriede, C.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
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She, A.

Shi, Z.

H. Pahlevaninezhad, M. Khorasaninejad, Y.-W. Huang, Z. Shi, L. P. Hariri, D. C. Adams, V. Ding, A. Zhu, C.-W. Qiu, F. Capasso, and M. J. Suter, “Nano-optic endoscope for high-resolution optical coherence tomography in vivo,” Nat. Photonics 12(9), 540–547 (2018).
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Shian, S.

Sinclair, M. B.

S. Liu, P. P. Vabishchevich, A. Vaskin, J. L. Reno, G. A. Keeler, M. B. Sinclair, I. Staude, and I. Brener, “An all-dielectric metasurface as a broadband optical frequency mixer,” Nat. Commun. 9(1), 2507 (2018).
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Song, B.

H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
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Sorianello, V.

Staude, I.

S. Liu, P. P. Vabishchevich, A. Vaskin, J. L. Reno, G. A. Keeler, M. B. Sinclair, I. Staude, and I. Brener, “An all-dielectric metasurface as a broadband optical frequency mixer,” Nat. Commun. 9(1), 2507 (2018).
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R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
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S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
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B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN Metalens for Pixel-Level Full-Color Routing at Visible Light,” Nano Lett. 17(10), 6345–6352 (2017).
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H. Pahlevaninezhad, M. Khorasaninejad, Y.-W. Huang, Z. Shi, L. P. Hariri, D. C. Adams, V. Ding, A. Zhu, C.-W. Qiu, F. Capasso, and M. J. Suter, “Nano-optic endoscope for high-resolution optical coherence tomography in vivo,” Nat. Photonics 12(9), 540–547 (2018).
[Crossref] [PubMed]

Taghinejad, M.

S. Lan, X. Zhang, M. Taghinejad, S. Rodrigues, K.-T. Lee, Z. Liu, and W. Cai, “Metasurfaces for Near-Eye Augmented Reality,” ACS Photonics 6(4), 864–870 (2019).
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Testa, F.

Tsai, D. P.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
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S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
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B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN Metalens for Pixel-Level Full-Color Routing at Visible Light,” Nano Lett. 17(10), 6345–6352 (2017).
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Tseng, C.-K.

Tu, Y.

J. Guo, Y. Tu, L. Yang, Y. Zhang, L. Wang, and B. Wang, “Design and Simulation of Active Frequency-selective Metasurface for Full-colour Plasmonic Display,” Sci. Rep. 8(1), 11778 (2018).
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D. A. LeMaster, A. H. Mahamat, B. M. Ratliff, A. S. Alenin, J. S. Tyo, and B. M. Koch, “SWIR active polarization imaging for material identification,” Proc. SPIE 8873, 88730O (2013).

Vabishchevich, P. P.

S. Liu, P. P. Vabishchevich, A. Vaskin, J. L. Reno, G. A. Keeler, M. B. Sinclair, I. Staude, and I. Brener, “An all-dielectric metasurface as a broadband optical frequency mixer,” Nat. Commun. 9(1), 2507 (2018).
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Van der Spiegel, J.

Vaskin, A.

S. Liu, P. P. Vabishchevich, A. Vaskin, J. L. Reno, G. A. Keeler, M. B. Sinclair, I. Staude, and I. Brener, “An all-dielectric metasurface as a broadband optical frequency mixer,” Nat. Commun. 9(1), 2507 (2018).
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Wang, B.

J. Guo, Y. Tu, L. Yang, Y. Zhang, L. Wang, and B. Wang, “Design and Simulation of Active Frequency-selective Metasurface for Full-colour Plasmonic Display,” Sci. Rep. 8(1), 11778 (2018).
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R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
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S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
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Wang, L.

J. Guo, Y. Tu, L. Yang, Y. Zhang, L. Wang, and B. Wang, “Design and Simulation of Active Frequency-selective Metasurface for Full-colour Plasmonic Display,” Sci. Rep. 8(1), 11778 (2018).
[Crossref] [PubMed]

L. Wang, S. Kruk, K. Koshelev, I. Kravchenko, B. Luther-Davies, and Y. Kivshar, “Nonlinear Wavefront Control with All-Dielectric Metasurfaces,” Nano Lett. 18(6), 3978–3984 (2018).
[Crossref] [PubMed]

Wang, Q.

Q. Wang, E. Plum, Q. Yang, X. Zhang, Q. Xu, Y. Xu, J. Han, and W. Zhang, “Reflective chiral meta-holography: multiplexing holograms for circularly polarized waves,” Light Sci. Appl. 7(1), 25 (2018).
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Wang, S.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
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T. Hu, C.-K. Tseng, Y. H. Fu, Z. Xu, Y. Dong, S. Wang, K. H. Lai, V. Bliznetsov, S. Zhu, Q. Lin, and Y. Gu, “Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer,” Opt. Express 26(15), 19548–19554 (2018).
[Crossref] [PubMed]

Wang, Y.

H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
[Crossref]

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C.-W. Qiu, “Dielectric Meta-Holograms Enabled with Dual Magnetic Resonances in Visible Light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Wang, Z.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
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S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

Wu, L.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

Wu, P. C.

R. J. Lin, V.-C. Su, S. Wang, M. K. Chen, T. L. Chung, Y. H. Chen, H. Y. Kuo, J.-W. Chen, J. Chen, Y.-T. Huang, J.-H. Wang, C. H. Chu, P. C. Wu, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “Achromatic metalens array for full-colour light-field imaging,” Nat. Nanotechnol. 14(3), 227–231 (2019).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN Metalens for Pixel-Level Full-Color Routing at Visible Light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Wu, W.

H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
[Crossref]

Xu, Q.

Q. Wang, E. Plum, Q. Yang, X. Zhang, Q. Xu, Y. Xu, J. Han, and W. Zhang, “Reflective chiral meta-holography: multiplexing holograms for circularly polarized waves,” Light Sci. Appl. 7(1), 25 (2018).
[Crossref] [PubMed]

Xu, Y.

Q. Wang, E. Plum, Q. Yang, X. Zhang, Q. Xu, Y. Xu, J. Han, and W. Zhang, “Reflective chiral meta-holography: multiplexing holograms for circularly polarized waves,” Light Sci. Appl. 7(1), 25 (2018).
[Crossref] [PubMed]

Xu, Z.

T. Hu, C.-K. Tseng, Y. H. Fu, Z. Xu, Y. Dong, S. Wang, K. H. Lai, V. Bliznetsov, S. Zhu, Q. Lin, and Y. Gu, “Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer,” Opt. Express 26(15), 19548–19554 (2018).
[Crossref] [PubMed]

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

Yang, H.

H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
[Crossref]

Yang, L.

J. Guo, Y. Tu, L. Yang, Y. Zhang, L. Wang, and B. Wang, “Design and Simulation of Active Frequency-selective Metasurface for Full-colour Plasmonic Display,” Sci. Rep. 8(1), 11778 (2018).
[Crossref] [PubMed]

Yang, Q.

Q. Wang, E. Plum, Q. Yang, X. Zhang, Q. Xu, Y. Xu, J. Han, and W. Zhang, “Reflective chiral meta-holography: multiplexing holograms for circularly polarized waves,” Light Sci. Appl. 7(1), 25 (2018).
[Crossref] [PubMed]

Yoon, J.

H. Liu, H. Yang, Y. Li, B. Song, Y. Wang, Z. Liu, L. Peng, H. Lim, J. Yoon, and W. Wu, “Switchable All-Dielectric Metasurfaces for Full-Color Reflective Display,” Adv. Opt. Mater. 7(8), 1801639 (2019).
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York, T.

T. York, S. B. Powell, S. Gao, L. Kahan, T. Charanya, D. Saha, N. W. Roberts, T. W. Cronin, J. Marshall, S. Achilefu, S. P. Lake, B. Raman, and V. Gruev, “Bioinspired Polarization Imaging Sensors: From Circuits and Optics to Signal Processing Algorithms and Biomedical Applications: Analysis at the focal plane emulates nature’s method in sensors to image and diagnose with polarized light,” Proc IEEE Inst Electr Electron Eng 102(10), 1450–1469 (2014).
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V. Gruev, R. Perkins, and T. York, “CCD polarization imaging sensor with aluminum nanowire optical filters,” Opt. Express 18(18), 19087–19094 (2010).
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Zentgraf, T.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear Metasurface for Simultaneous Control of Spin and Orbital Angular Momentum in Second Harmonic Generation,” Nano Lett. 17(12), 7974–7979 (2017).
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Figures (6)

Fig. 1
Fig. 1 (a) The schematic of the proposed all-Si PBF. There are two different passbands, one for X- and the other for Y-polarized light beams. Within the former passband, only the X-polarized light is transmitted whereas the Y-polarized light is reflected (as illustrated in this figure), and vice versa for the latter passband. (b) and (c) Simulated cross-sectional normalized E-field and H-field distribution of cylindrical pillars for X- polarizations incidence at 1320 nm. (d) and (e) Simulated cross-sectional normalized E-field and H-field distribution of cylindrical pillars for Y- polarizations at 1620 nm. (f) and (g) Simulated cross-sectional normalized E-field and H-field distribution of pyramid pillars for X- polarizations incidence at 1320 nm. (h) and (i) Simulated cross-sectional normalized E-field and H-field distribution of pyramid pillars for Y- polarizations at 1620 nm.
Fig. 2
Fig. 2 (a) Photography of the 300 mm Si metasurface wafer fabricated by IME’s multiple-projects-wafer (MPW) line for flat-optics. (b) Zoomed-in view of the die located at wafer center. (c) Top-view SEM image of a 3 × 3 Si pyramid array. (d) 45°-tilted SEM image of one Si pyramid located at wafer center. The dashed-yellow line A-A’ indicates the FIB milling region for TEM analysis. (e) Cross-sectional TEM image of the Si pyramid along A-A’.
Fig. 3
Fig. 3 (a) Die mapping of the 300 mm Si wafer. Wafer-level process uniformity was investigated by analyzing 17 dies at different locations. The red dots indicate the locations of the PBFs at different dies. The h, lx,top, ly,top, θx and θy values of the Si pyramids at different wafer dies are summarized in (b)-(f), respectively.
Fig. 4
Fig. 4 FDTD simulated and measured results of the PBF at the center die (0, 0). (a) Simulated transmittance spectra of X- and Y-polarization incidences. (b) Simulated cross-sectional E-field distribution for X- and Y-polarizations at 1310 nm and 1610 nm. (c) Measured transmittance spectra of X-polarization and Y-polarization incidence. (d) Extinction ratio of the PBF at SWIR range, which is defined as 10 × log (Tx/Ty) in decibel (dB).
Fig. 5
Fig. 5 FDTD simulated results of the PBF at die (0, −4). (a) Transmittance spectra of X-polarization and Y-polarization incidence. (b) Cross-sectional E-field distribution for X- and Y-polarizations at 1200 nm and 1560 nm. (c) FTIR measured transmittance spectra of the PBF at die (0, −4), with X- and Y-polarization incidences. (d) Extinction ratio of the PBF in SWIR.
Fig. 6
Fig. 6 (a) FTIR measurement results of the extinction ratio spectra for the selected 17 PBFs. 15 dies with 10 dB passband for X-polarization is highlighted in the dashed circle. (b) Working bandwidth with 10 dB extinction ratio for 17 PBFs based on (a).

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