Abstract

In this study, a biomimetic compound eye (BCE) was realized on diamond by combining thermal reflow with dry etching techniques. Firstly, photoresist pillars were developed on diamond surface by standard photolithography. Then, these pillars were reflowed on a hotplate to form spherical segment patterns. Furthermore, dry etching technique was used to transfer these patterns into diamond surface to form the convex curve surface with diameter of 300 μm, on which, ommatidia with diameter of 18 μm and space of 35 μm were fabricated with the same processes to obtain BCE. Finally, the as-fabricated diamond BCE was characterized, indicating a well-uniformity according to the point spread function and exhibiting clear images of the testing pattern in projection experiment, which is expected to work under harsh conditions such as high intensity irradiation and strong acid.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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  1. K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312, 557–561 (2006).
    [Crossref] [PubMed]
  2. J. Duparré, P. Dannberg, P. Schreiber, A. Bräuer, and A. Tünnermann, “Artificial apposition compound eye fabricated by micro-optics technology,” Appl. Opt. 43, 4303 (2004).
    [Crossref] [PubMed]
  3. J. Kim, K. H. Jeong, and L. P. Lee, “Artificial ommatidia by self-aligned microlenses and waveguides,” Opt. Lett. 30, 5 (2005).
    [Crossref] [PubMed]
  4. A. D. Straw, E. J. Warrant, and D. C. O’Carroll, “A “bright zone” in male hoverfly (eristalis tenax) eyes and associated faster motion detection and increased contrast sensitivity,” J. Exp. Biol. 209, 4339–4354 (2006).
    [Crossref] [PubMed]
  5. H. Liu, F. Chen, Q. Yang, and P. Qu, “Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections,” Appl. Phys. Lett. 100, 133701 (2012).
    [Crossref]
  6. P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
    [Crossref] [PubMed]
  7. W.-K. Kuo, G.-F. Kuo, S.-Y. Lin, and H. H. Yu, “Fabrication and characterization of artificial miniaturized insect compound eyes for imaging,” Bioinspir. Biomim. 10, 056010 (2015).
    [Crossref] [PubMed]
  8. L. Li and Y. Y. Allen, “Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera,” Appl. optics 51, 1843–1852 (2012).
    [Crossref]
  9. L. Li and A. Y. Yi, “Development of a 3d artificial compound eye,” Opt. Express 18, 18125–18137 (2010).
    [Crossref] [PubMed]
  10. T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
    [Crossref]
  11. J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.
  12. Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
    [Crossref]
  13. X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
    [Crossref]
  14. S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
    [Crossref]
  15. M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
    [Crossref]
  16. H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
    [Crossref]
  17. T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
    [Crossref] [PubMed]
  18. T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
    [Crossref]
  19. C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32, 1123–1129 (2010).
    [Crossref]
  20. C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
    [Crossref]
  21. H. Liu, J. Herrnsdorf, E. Gu, and M. D. Dawson, “Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. 34, 021602 (2016).
  22. T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
    [Crossref]
  23. A. M. Zaitsev, Optical Properties of Diamond: A Data Handbook (Springer, 2013).

2019 (1)

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

2018 (1)

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

2017 (3)

S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
[Crossref]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

2016 (4)

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

H. Liu, J. Herrnsdorf, E. Gu, and M. D. Dawson, “Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. 34, 021602 (2016).

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

2015 (1)

W.-K. Kuo, G.-F. Kuo, S.-Y. Lin, and H. H. Yu, “Fabrication and characterization of artificial miniaturized insect compound eyes for imaging,” Bioinspir. Biomim. 10, 056010 (2015).
[Crossref] [PubMed]

2012 (4)

L. Li and Y. Y. Allen, “Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera,” Appl. optics 51, 1843–1852 (2012).
[Crossref]

H. Liu, F. Chen, Q. Yang, and P. Qu, “Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections,” Appl. Phys. Lett. 100, 133701 (2012).
[Crossref]

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

2010 (2)

L. Li and A. Y. Yi, “Development of a 3d artificial compound eye,” Opt. Express 18, 18125–18137 (2010).
[Crossref] [PubMed]

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32, 1123–1129 (2010).
[Crossref]

2008 (1)

C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
[Crossref]

2006 (2)

K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312, 557–561 (2006).
[Crossref] [PubMed]

A. D. Straw, E. J. Warrant, and D. C. O’Carroll, “A “bright zone” in male hoverfly (eristalis tenax) eyes and associated faster motion detection and increased contrast sensitivity,” J. Exp. Biol. 209, 4339–4354 (2006).
[Crossref] [PubMed]

2005 (1)

2004 (1)

Allen, Y. Y.

L. Li and Y. Y. Allen, “Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera,” Appl. optics 51, 1843–1852 (2012).
[Crossref]

Bian, H.

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

Bräuer, A.

Bu, R.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

Chen, F.

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

H. Liu, F. Chen, Q. Yang, and P. Qu, “Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections,” Appl. Phys. Lett. 100, 133701 (2012).
[Crossref]

Chen, Q.-D.

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

Choi, K.-J.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Dannberg, P.

Dawson, M. D.

H. Liu, J. Herrnsdorf, E. Gu, and M. D. Dawson, “Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. 34, 021602 (2016).

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32, 1123–1129 (2010).
[Crossref]

C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
[Crossref]

Deng, Z.

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

Du, G.

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

Du, J.

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

Duparré, J.

Friel, I.

C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
[Crossref]

Fu, J.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Gu, E.

H. Liu, J. Herrnsdorf, E. Gu, and M. D. Dawson, “Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. 34, 021602 (2016).

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32, 1123–1129 (2010).
[Crossref]

C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
[Crossref]

Herrnsdorf, J.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

H. Liu, J. Herrnsdorf, E. Gu, and M. D. Dawson, “Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. 34, 021602 (2016).

Hou, X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

Huang, S.

S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
[Crossref]

Jeong, K. H.

Jeong, K.-H.

K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312, 557–561 (2006).
[Crossref] [PubMed]

Jung, I.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Kemp, A. J.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

Kim, J.

K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312, 557–561 (2006).
[Crossref] [PubMed]

J. Kim, K. H. Jeong, and L. P. Lee, “Artificial ommatidia by self-aligned microlenses and waveguides,” Opt. Lett. 30, 5 (2005).
[Crossref] [PubMed]

Kim, R.-H.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Kuo, G.-F.

W.-K. Kuo, G.-F. Kuo, S.-Y. Lin, and H. H. Yu, “Fabrication and characterization of artificial miniaturized insect compound eyes for imaging,” Bioinspir. Biomim. 10, 056010 (2015).
[Crossref] [PubMed]

Kuo, W.-K.

W.-K. Kuo, G.-F. Kuo, S.-Y. Lin, and H. H. Yu, “Fabrication and characterization of artificial miniaturized insect compound eyes for imaging,” Bioinspir. Biomim. 10, 056010 (2015).
[Crossref] [PubMed]

Lee, C. L.

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32, 1123–1129 (2010).
[Crossref]

C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
[Crossref]

Lee, L. P.

K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312, 557–561 (2006).
[Crossref] [PubMed]

J. Kim, K. H. Jeong, and L. P. Lee, “Artificial ommatidia by self-aligned microlenses and waveguides,” Opt. Lett. 30, 5 (2005).
[Crossref] [PubMed]

Li, C.

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Li, F.

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

Li, L.

L. Li and Y. Y. Allen, “Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera,” Appl. optics 51, 1843–1852 (2012).
[Crossref]

L. Li and A. Y. Yi, “Development of a 3d artificial compound eye,” Opt. Express 18, 18125–18137 (2010).
[Crossref] [PubMed]

Li, M.

S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
[Crossref]

Liang, Y.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

Lin, F.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Lin, S.-Y.

W.-K. Kuo, G.-F. Kuo, S.-Y. Lin, and H. H. Yu, “Fabrication and characterization of artificial miniaturized insect compound eyes for imaging,” Bioinspir. Biomim. 10, 056010 (2015).
[Crossref] [PubMed]

Liu, H.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

H. Liu, J. Herrnsdorf, E. Gu, and M. D. Dawson, “Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. 34, 021602 (2016).

H. Liu, F. Chen, Q. Yang, and P. Qu, “Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections,” Appl. Phys. Lett. 100, 133701 (2012).
[Crossref]

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

Liu, X.-Q.

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

Liu, Z.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Lu, C.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Lu, J.

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

Lu, Z.

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Malyarchuk, V.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

O’Carroll, D. C.

A. D. Straw, E. J. Warrant, and D. C. O’Carroll, “A “bright zone” in male hoverfly (eristalis tenax) eyes and associated faster motion detection and increased contrast sensitivity,” J. Exp. Biol. 209, 4339–4354 (2006).
[Crossref] [PubMed]

Park, H.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Qiu, J.

S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
[Crossref]

Qu, P.

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

H. Liu, F. Chen, Q. Yang, and P. Qu, “Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections,” Appl. Phys. Lett. 100, 133701 (2012).
[Crossref]

Reilly, S.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

Savitski, V. G.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

Scarsbrook, G. A.

C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
[Crossref]

Schreiber, P.

Shan, C.

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

Shen, H.

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

Shen, L.

S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
[Crossref]

Si, J.

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

Song, Y. M.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Straw, A. D.

A. D. Straw, E. J. Warrant, and D. C. O’Carroll, “A “bright zone” in male hoverfly (eristalis tenax) eyes and associated faster motion detection and increased contrast sensitivity,” J. Exp. Biol. 209, 4339–4354 (2006).
[Crossref] [PubMed]

Sun, H.-B.

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

Sun, Q.

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Tünnermann, A.

Wang, H. X.

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

Wang, H.-X.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Wang, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

Wang, M.

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

Wang, T.

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Wang, W.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

Wang, Y.

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

Warrant, E. J.

A. D. Straw, E. J. Warrant, and D. C. O’Carroll, “A “bright zone” in male hoverfly (eristalis tenax) eyes and associated faster motion detection and increased contrast sensitivity,” J. Exp. Biol. 209, 4339–4354 (2006).
[Crossref] [PubMed]

Wen, F.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Xiao, J.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Xie, E.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

Xie, Y.

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

Xu, Z.

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Yang, Q.

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

H. Liu, F. Chen, Q. Yang, and P. Qu, “Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections,” Appl. Phys. Lett. 100, 133701 (2012).
[Crossref]

Yang, S.-N.

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

Yi, A. Y.

Yong, J.

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

Yu, H. H.

W.-K. Kuo, G.-F. Kuo, S.-Y. Lin, and H. H. Yu, “Fabrication and characterization of artificial miniaturized insect compound eyes for imaging,” Bioinspir. Biomim. 10, 056010 (2015).
[Crossref] [PubMed]

Yu, L.

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

Yu, W.

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Zaitsev, A. M.

A. M. Zaitsev, Optical Properties of Diamond: A Data Handbook (Springer, 2013).

Zhang, H.

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Zhang, J.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

Zhang, M.

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Zhang, X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Zhang, Y.-L.

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

Zhang, Z.

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

Zhao, J.

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

Zhou, Y.

S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
[Crossref]

Zhu, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Zhu, T. F.

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

Zhu, T.-F.

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

Adv. Funct. Mater. (2)

Z. Deng, F. Chen, Q. Yang, H. Bian, G. Du, J. Yong, C. Shan, and X. Hou, “Dragonfly-eye-inspired artificial compound eyes with sophisticated imaging,” Adv. Funct. Mater. 26, 1995–2001 (2016).
[Crossref]

X.-Q. Liu, S.-N. Yang, L. Yu, Q.-D. Chen, Y.-L. Zhang, and H.-B. Sun, “Rapid engraving of artificial compound eyes from curved sapphire substrate,” Adv. Funct. Mater. 29, 1900037 (2019).
[Crossref]

Appl. Opt. (1)

Appl. optics (1)

L. Li and Y. Y. Allen, “Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera,” Appl. optics 51, 1843–1852 (2012).
[Crossref]

Appl. Phys. Lett. (1)

H. Liu, F. Chen, Q. Yang, and P. Qu, “Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections,” Appl. Phys. Lett. 100, 133701 (2012).
[Crossref]

Bioinspir. Biomim. (1)

W.-K. Kuo, G.-F. Kuo, S.-Y. Lin, and H. H. Yu, “Fabrication and characterization of artificial miniaturized insect compound eyes for imaging,” Bioinspir. Biomim. 10, 056010 (2015).
[Crossref] [PubMed]

Diam. Relat. Mater. (3)

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond raman lasers,” Diam. Relat. Mater. 65, 37–41 (2016).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diam. Relat. Mater. 80, 54–58 (2017).
[Crossref]

C. L. Lee, E. Gu, M. D. Dawson, I. Friel, and G. A. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diam. Relat. Mater. 17, 1292–1296 (2008).
[Crossref]

J. Exp. Biol. (1)

A. D. Straw, E. J. Warrant, and D. C. O’Carroll, “A “bright zone” in male hoverfly (eristalis tenax) eyes and associated faster motion detection and increased contrast sensitivity,” J. Exp. Biol. 209, 4339–4354 (2006).
[Crossref] [PubMed]

J. Mater. Chem. C (1)

M. Wang, T. Wang, H. Shen, J. Zhao, Z. Zhang, J. Du, and W. Yu, “Subtle control on hierarchic reflow for the simple and massive fabrication of biomimetic compound eye arrays in polymers for imaging at a large field of view,” J. Mater. Chem. C 4, 108–112 (2016).
[Crossref]

J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. (1)

H. Liu, J. Herrnsdorf, E. Gu, and M. D. Dawson, “Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Materials, Process. Meas. Phenom. 34, 021602 (2016).

Opt Express (2)

T. F. Zhu, Z. Liu, Z. Liu, F. Li, M. Zhang, W. Wang, F. Wen, J. Wang, R. Bu, J. Zhang, and H. X. Wang, “Fabrication of monolithic diamond photodetector with microlenses,” Opt Express 25, 31586–31594 (2017).
[Crossref] [PubMed]

P. Qu, F. Chen, H. Liu, Q. Yang, J. Lu, J. Si, Y. Wang, and X. Hou, “A simple route to fabricate artificial compound eye structures,” Opt Express 20, 5775–5782 (2012).
[Crossref] [PubMed]

Opt. Commun. (1)

S. Huang, M. Li, L. Shen, J. Qiu, and Y. Zhou, “Flexible fabrication of biomimetic compound eye array via two-step thermal reflow of simply pre-modeled hierarchic microstructures,” Opt. Commun. 393, 213–218 (2017).
[Crossref]

Opt. Express (1)

Opt. Lett. (1)

Opt. letters (1)

T. Wang, W. Yu, C. Li, H. Zhang, Z. Xu, Z. Lu, and Q. Sun, “Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces,” Opt. letters 37, 2397–2399 (2012).
[Crossref]

Opt. Mater. (1)

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32, 1123–1129 (2010).
[Crossref]

RSC Adv. (1)

T.-F. Zhu, J. Fu, Z. Liu, Y. Liang, W. Wang, F. Wen, J. Zhang, and H.-X. Wang, “Investigation of the occupancy ratio dependence for microlens arrays on diamond,” RSC Adv. 8, 29544–29547 (2018).
[Crossref]

Science (1)

K.-H. Jeong, J. Kim, and L. P. Lee, “Biologically inspired artificial compound eyes,” Science 312, 557–561 (2006).
[Crossref] [PubMed]

Other (2)

A. M. Zaitsev, Optical Properties of Diamond: A Data Handbook (Springer, 2013).

J. Xiao, Y. M. Song, Y. Xie, V. Malyarchuk, I. Jung, K.-J. Choi, Z. Liu, H. Park, C. Lu, and R.-H. Kim, “Bio-inspired hemispherical compound eye camera,” in Bioinspired, Biointegrated, Bioengineered Photonic Devices II, vol. 8958 (International Society for Optics and Photonics, 2014), p. 89580A.

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Figures (7)

Fig. 1
Fig. 1 Schematic illustration of the diamond BCE fabrication process.
Fig. 2
Fig. 2 OM images of (a) the PR spherical segment, (b) the diamond spherical substrate, (c) the PR ommatidia on the curved surface and (d) the fabricated diamond BCE.
Fig. 3
Fig. 3 SEM images (tilt 45°) of the fabricated BCE: (a) overall morphology; (b) zoom-in picture of ommatidia.
Fig. 4
Fig. 4 AFM images of different areas on fabricated diamond BCE sample with area of 10 × 10 μm2: (a) planar area; (b) curved area between ommatidia after flattening (the curved surface as the reference background has been substrated); (c) ommatidium area; (d) ommatidium area after flattening (the curved surface as the reference background has been substrated).
Fig. 5
Fig. 5 (a) Image of the fabricated diamond BCE with laser scanning confocal microscope measurement. (b) Cross-sectional profiles in the center of the PR spherical segment and the diamond spherical substrate. (c) Cross-sectional profiles in the center of the diamond BCE micro-structure. (d) Cross-sectional profiles of a single ommatidium of BCE in the box in Fig. 5 (c).
Fig. 6
Fig. 6 PSF test of fabricated diamond BCE: (a) configuration of the test setup; (b) 2D PSFs of the ommatidia.
Fig. 7
Fig. 7 (a) Simplified setup for the projection measurements. (b) Images are projected by the ommatidia of BCE through the objective lens with a magnification of ×20 and ×50.

Equations (2)

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ROC = h 2 + r 2 2 h
f = ROC n 1

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