Abstract

We demonstrate monolithically defined grating couplers in Z-cut lithium niobate on insulator for efficient vertical coupling between an optical fiber and a single mode waveguide. The grating couplers exhibit ∼ 44.6%/coupler and ∼ 19.4%/coupler coupling efficiency for TE and TM polarized light respectively. Taperless grating couplers are investigated to realize a more compact design.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
  2. C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
    [Crossref] [PubMed]
  3. A. J. Mercante, S. Shi, P. Yao, L. Xie, R. M. Weikle, and D. W. Prather, “Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth,” Opt. Express 26, 14810–14816 (2018).
    [Crossref] [PubMed]
  4. C. Wang, M. Zhang, B. Stern, M. Lipson, and M. Lončar, “Nanophotonic lithium niobate electro-optic modulators,” Opt. Express 26, 1547–1555 (2018).
    [Crossref] [PubMed]
  5. I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Large free spectral range microring resonators in lithium niobate on insulator,” arXiv preprint arXiv:1807.06531 (2018).
  6. S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib Microring Resonators in Lithium Niobate on Insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2015).
  7. C. Wang, C. Langrock, A. Marandi, M. Jankowski, M. Zhang, B. Desiatov, M. M. Fejer, and M. Lončar, “Ultrahigh-efficiency wavelength conversion in nanophotonic periodically poled lithium niobate waveguides,” Optica 5, 1438–1441 (2018).
    [Crossref]
  8. S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
    [Crossref]
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    [Crossref]
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    [Crossref]
  14. T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
    [Crossref]
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  16. I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Nanostructuring of lnoi for efficient edge coupling,” arXiv preprint arXiv:1902.07394 (2019).
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    [Crossref]
  18. Y. Ding, C. Peucheret, H. Ou, and K. Yvind, “Fully etched apodized grating coupler on the SOI platform with −0.58 dB coupling efficiency,” Opt. Lett. 39, 5348–5350 (2014).
    [Crossref]
  19. M. Sodagar, R. Pourabolghasem, A. A. Eftekhar, and A. Adibi, “High-efficiency and wideband interlayer grating couplers in multilayer Si/SiO2/SiN platform for 3D integration of optical functionalities,” Opt. Express 22, 16767–16777 (2014).
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    [Crossref]
  21. Z. Chen, R. Peng, Y. Wang, H. Zhu, and H. Hu, “Grating coupler on lithium niobate thin film waveguide with a metal bottom reflector,” Opt. Mater. Express 7, 4010–4017 (2017).
    [Crossref]
  22. J. Jian, P. Xu, H. Chen, M. He, Z. Wu, L. Zhou, L. Liu, C. Yang, and S. Yu, “High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides,” Opt. Express 26, 29651–29658 (2018).
    [Crossref] [PubMed]
  23. I. Krasnokutska, J.-L. J. Tambasco, X. Li, and A. Peruzzo, “Ultra-low loss photonic circuits in lithium niobate on insulator,” Opt. Express 26, 897–904 (2018).
    [Crossref] [PubMed]

2018 (7)

C. Wang, C. Langrock, A. Marandi, M. Jankowski, M. Zhang, B. Desiatov, M. M. Fejer, and M. Lončar, “Ultrahigh-efficiency wavelength conversion in nanophotonic periodically poled lithium niobate waveguides,” Optica 5, 1438–1441 (2018).
[Crossref]

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

A. J. Mercante, S. Shi, P. Yao, L. Xie, R. M. Weikle, and D. W. Prather, “Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth,” Opt. Express 26, 14810–14816 (2018).
[Crossref] [PubMed]

C. Wang, M. Zhang, B. Stern, M. Lipson, and M. Lončar, “Nanophotonic lithium niobate electro-optic modulators,” Opt. Express 26, 1547–1555 (2018).
[Crossref] [PubMed]

J. Jian, P. Xu, H. Chen, M. He, Z. Wu, L. Zhou, L. Liu, C. Yang, and S. Yu, “High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides,” Opt. Express 26, 29651–29658 (2018).
[Crossref] [PubMed]

I. Krasnokutska, J.-L. J. Tambasco, X. Li, and A. Peruzzo, “Ultra-low loss photonic circuits in lithium niobate on insulator,” Opt. Express 26, 897–904 (2018).
[Crossref] [PubMed]

2017 (2)

2016 (1)

W. C. Jiang and Q. Lin, “Chip-scale cavity optomechanics in lithium niobate,” Sci. Reports 6, 1391 (2016).

2015 (1)

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib Microring Resonators in Lithium Niobate on Insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2015).

2014 (4)

2013 (1)

2010 (1)

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283, 3678–3682 (2010).
[Crossref]

2009 (1)

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

2007 (1)

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

2006 (1)

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Adibi, A.

Aghaeimeibodi, S.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Ayre, M.

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Baets, R.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Bertrand, M.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

Bienstman, P.

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Bogaerts, W.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Bolten, J.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

Buyukkaya, M. A.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Chandrasekhar, S.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

Chen, H.

Chen, X.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

Chen, Z.

Cheng, R.

Chu, T.

Claes, T.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

Danner, A. J.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib Microring Resonators in Lithium Niobate on Insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2015).

Desiatov, B.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

C. Wang, C. Langrock, A. Marandi, M. Jankowski, M. Zhang, B. Desiatov, M. M. Fejer, and M. Lončar, “Ultrahigh-efficiency wavelength conversion in nanophotonic periodically poled lithium niobate waveguides,” Optica 5, 1438–1441 (2018).
[Crossref]

Ding, Y.

Eftekhar, A. A.

Fejer, M. M.

Först, M.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

Fu, Y.

He, L.

L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, and M. Loncar, “Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits,” arXiv preprint arXiv:1902.08969 (2019).

He, M.

Hu, H.

Hvam, J. M.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283, 3678–3682 (2010).
[Crossref]

Jankowski, M.

Jian, J.

Jiang, W. C.

W. C. Jiang and Q. Lin, “Chip-scale cavity optomechanics in lithium niobate,” Sci. Reports 6, 1391 (2016).

Joo, J.

Karasahin, A.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Kim, G.

Kim, J.-H.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Kim, S.

Krasnokutska, I.

I. Krasnokutska, J.-L. J. Tambasco, X. Li, and A. Peruzzo, “Ultra-low loss photonic circuits in lithium niobate on insulator,” Opt. Express 26, 897–904 (2018).
[Crossref] [PubMed]

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Nanostructuring of lnoi for efficient edge coupling,” arXiv preprint arXiv:1902.07394 (2019).

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Large free spectral range microring resonators in lithium niobate on insulator,” arXiv preprint arXiv:1807.06531 (2018).

Kurz, H.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

Laere, F. V.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Langrock, C.

Leavitt, R. P.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Lee, C.-M.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Li, X.

Lin, Q.

W. C. Jiang and Q. Lin, “Chip-scale cavity optomechanics in lithium niobate,” Sci. Reports 6, 1391 (2016).

Lipson, M.

Liu, L.

J. Jian, P. Xu, H. Chen, M. He, Z. Wu, L. Zhou, L. Liu, C. Yang, and S. Yu, “High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides,” Opt. Express 26, 29651–29658 (2018).
[Crossref] [PubMed]

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283, 3678–3682 (2010).
[Crossref]

Loncar, M.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

C. Wang, C. Langrock, A. Marandi, M. Jankowski, M. Zhang, B. Desiatov, M. M. Fejer, and M. Lončar, “Ultrahigh-efficiency wavelength conversion in nanophotonic periodically poled lithium niobate waveguides,” Optica 5, 1438–1441 (2018).
[Crossref]

C. Wang, M. Zhang, B. Stern, M. Lipson, and M. Lončar, “Nanophotonic lithium niobate electro-optic modulators,” Opt. Express 26, 1547–1555 (2018).
[Crossref] [PubMed]

M. Zhang, C. Wang, R. Cheng, A. Shams-Ansari, and M. Lončar, “Monolithic ultra-high-Q lithium niobate microring resonator,” Optica 4, 1536–1537 (2017).
[Crossref]

L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, and M. Loncar, “Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits,” arXiv preprint arXiv:1902.08969 (2019).

Marandi, A.

Menon, R.

Mercante, A. J.

Mollenhauer, T.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

O’Faolain, L.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

Ou, H.

Y. Ding, C. Peucheret, H. Ou, and K. Yvind, “Fully etched apodized grating coupler on the SOI platform with −0.58 dB coupling efficiency,” Opt. Lett. 39, 5348–5350 (2014).
[Crossref]

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283, 3678–3682 (2010).
[Crossref]

Park, H.

Park, J.

Peng, R.

Peruzzo, A.

I. Krasnokutska, J.-L. J. Tambasco, X. Li, and A. Peruzzo, “Ultra-low loss photonic circuits in lithium niobate on insulator,” Opt. Express 26, 897–904 (2018).
[Crossref] [PubMed]

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Nanostructuring of lnoi for efficient edge coupling,” arXiv preprint arXiv:1902.07394 (2019).

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Large free spectral range microring resonators in lithium niobate on insulator,” arXiv preprint arXiv:1807.06531 (2018).

Peucheret, C.

Polson, R.

Pourabolghasem, R.

Prather, D. W.

Pu, M.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283, 3678–3682 (2010).
[Crossref]

Richardson, C. J. K.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Saha, S. S.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib Microring Resonators in Lithium Niobate on Insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2015).

Scheerlinck, S.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

Schrauwen, J.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

Shams-Ansari, A.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

M. Zhang, C. Wang, R. Cheng, A. Shams-Ansari, and M. Lončar, “Monolithic ultra-high-Q lithium niobate microring resonator,” Optica 4, 1536–1537 (2017).
[Crossref]

L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, and M. Loncar, “Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits,” arXiv preprint arXiv:1902.08969 (2019).

Shen, B.

Shi, S.

Siew, S. Y.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib Microring Resonators in Lithium Niobate on Insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2015).

Sodagar, M.

Stern, B.

Taillaert, D.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Tambasco, J.-L. J.

I. Krasnokutska, J.-L. J. Tambasco, X. Li, and A. Peruzzo, “Ultra-low loss photonic circuits in lithium niobate on insulator,” Opt. Express 26, 897–904 (2018).
[Crossref] [PubMed]

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Nanostructuring of lnoi for efficient edge coupling,” arXiv preprint arXiv:1902.07394 (2019).

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Large free spectral range microring resonators in lithium niobate on insulator,” arXiv preprint arXiv:1807.06531 (2018).

Tang, W.

Thourhout, D. V.

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Tsai, W. S.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

Tsang, M.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib Microring Resonators in Lithium Niobate on Insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2015).

Wahlbrink, T.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

Waks, E.

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

Waldow, M.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

Wang, C.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

C. Wang, M. Zhang, B. Stern, M. Lipson, and M. Lončar, “Nanophotonic lithium niobate electro-optic modulators,” Opt. Express 26, 1547–1555 (2018).
[Crossref] [PubMed]

C. Wang, C. Langrock, A. Marandi, M. Jankowski, M. Zhang, B. Desiatov, M. M. Fejer, and M. Lončar, “Ultrahigh-efficiency wavelength conversion in nanophotonic periodically poled lithium niobate waveguides,” Optica 5, 1438–1441 (2018).
[Crossref]

M. Zhang, C. Wang, R. Cheng, A. Shams-Ansari, and M. Lončar, “Monolithic ultra-high-Q lithium niobate microring resonator,” Optica 4, 1536–1537 (2017).
[Crossref]

L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, and M. Loncar, “Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits,” arXiv preprint arXiv:1902.08969 (2019).

Wang, P.

Wang, Y.

Weikle, R. M.

Winzer, P.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

Wu, Z.

Xie, L.

Xu, P.

Yang, C.

Yao, P.

Ye, T.

Yu, S.

Yvind, K.

Y. Ding, C. Peucheret, H. Ou, and K. Yvind, “Fully etched apodized grating coupler on the SOI platform with −0.58 dB coupling efficiency,” Opt. Lett. 39, 5348–5350 (2014).
[Crossref]

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283, 3678–3682 (2010).
[Crossref]

Zhang, M.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

C. Wang, M. Zhang, B. Stern, M. Lipson, and M. Lončar, “Nanophotonic lithium niobate electro-optic modulators,” Opt. Express 26, 1547–1555 (2018).
[Crossref] [PubMed]

C. Wang, C. Langrock, A. Marandi, M. Jankowski, M. Zhang, B. Desiatov, M. M. Fejer, and M. Lončar, “Ultrahigh-efficiency wavelength conversion in nanophotonic periodically poled lithium niobate waveguides,” Optica 5, 1438–1441 (2018).
[Crossref]

M. Zhang, C. Wang, R. Cheng, A. Shams-Ansari, and M. Lončar, “Monolithic ultra-high-Q lithium niobate microring resonator,” Optica 4, 1536–1537 (2017).
[Crossref]

L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, and M. Loncar, “Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits,” arXiv preprint arXiv:1902.08969 (2019).

Zhou, L.

Zhu, H.

Zhu, R.

L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, and M. Loncar, “Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits,” arXiv preprint arXiv:1902.08969 (2019).

Appl. Phys. Lett. (1)

S. Aghaeimeibodi, B. Desiatov, J.-H. Kim, C.-M. Lee, M. A. Buyukkaya, A. Karasahin, C. J. K. Richardson, R. P. Leavitt, M. Lončar, and E. Waks, “Integration of quantum dots with lithium niobate photonics,” Appl. Phys. Lett. 113, 221102 (2018).
[Crossref]

IEEE Photonics Technol. Lett. (2)

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib Microring Resonators in Lithium Niobate on Insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2015).

F. V. Laere, T. Claes, J. Schrauwen, S. Scheerlinck, W. Bogaerts, D. Taillaert, L. O’Faolain, D. V. Thourhout, and R. Baets, “Compact focusing grating couplers for silicon-on-insulator integrated circuits,” IEEE Photonics Technol. Lett. 19, 1919–1921 (2007).
[Crossref]

Jpn. J. Appl. Phys. (1)

D. Taillaert, F. V. Laere, M. Ayre, W. Bogaerts, D. V. Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45, 6071 (2006).
[Crossref]

Microelectron. Eng. (1)

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86, 1117–1119 (2009).
[Crossref]

Nature (1)

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562, 101–104 (2018).
[Crossref] [PubMed]

Opt. Commun. (1)

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283, 3678–3682 (2010).
[Crossref]

Opt. Express (7)

Opt. Lett. (1)

Opt. Mater. Express (1)

Optica (2)

Photon. Res. (1)

Sci. Reports (1)

W. C. Jiang and Q. Lin, “Chip-scale cavity optomechanics in lithium niobate,” Sci. Reports 6, 1391 (2016).

Other (3)

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Large free spectral range microring resonators in lithium niobate on insulator,” arXiv preprint arXiv:1807.06531 (2018).

L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, and M. Loncar, “Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits,” arXiv preprint arXiv:1902.08969 (2019).

I. Krasnokutska, J.-L. J. Tambasco, and A. Peruzzo, “Nanostructuring of lnoi for efficient edge coupling,” arXiv preprint arXiv:1902.07394 (2019).

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Figures (2)

Fig. 1
Fig. 1 (a) A schematic representation of the fabricated sample cross-section, where Λ is the grating coupler period, w is the tooth width and D = w/Λ is the grating duty cycle. (b) Semi-analytic calculation of the grating period and duty cycle for TE and TM polarization to couple 1500 nm, 1550 nm and 1600 nm wavelengths. Scanning electron microscope images of fabricated grating couplers on Z-cut LNOI taken at a 40° tilt with light-blue false coloring to highlight the fabricated structures: (c) grating couplers with mode-matching tapers; (d) close-up of an etched grating with period Λ = 0.96 μm and duty cycle D = 40%; (e) close-up of the lower corner of a grating coupler. (f) An optical micrograph showing three entire grating coupler structures.
Fig. 2
Fig. 2 Simulated and measured transmission spectrum of the grating couplers for the TE (a), and TM (b) polarization. Simulations of the induced losses due to gold layer cavity are reported in the insets. Data for the straight (curved) gratings are plot in blue (red) color. (c) False-color SEM pictures of straight and curved gratings.

Equations (1)

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Λ = 2 π O β k 0 n inc sin ( θ inc )

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