Abstract

We demonstrate a photonic integrated Mach-Zehnder interferometric sensor, utilizing a plasmonic stripe waveguide in the sensing branch and a photonic variable optical attenuator and a phase shifter in the reference arm to optimize the interferometer operation. The plasmonic sensor is used to detect changes in the refractive index of the surrounding medium exploiting the accumulated phase change of the propagating Surface-Plasmon-Polariton (SPP) mode that is fully exposed in an aqueous buffer solution. The variable optical attenuation stage is incorporated in the reference Si3N4 branch, as the means to counter-balance the optical losses introduced by the plasmonic branch and optimize interference at the sensor output. Bulk sensitivity values of 1930 nm/RIU were experimentally measured for a Mach Zehnder Interferometer (MZI) with a Free Spectral Range of 24.8 nm, along with extinction ratio of more than 35 dB, demonstrating the functional benefits of the co-integration of plasmonic and photonic waveguides.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
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2018 (6)

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

J. Liu, A. S. Raja, M. H. P. Pfeiffer, C. Herkommer, H. Guo, M. Zervas, M. Geiselmann, and T. J. Kippenberg, “Double inverse nanotapers for efficient light coupling to integrated photonic devices,” Opt. Lett. 43(14), 3200–3203 (2018).
[Crossref] [PubMed]

2017 (3)

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

G. A. Lopez, M. Estevez, M. Soler, and L. M. Lechuga, “Recent advances in nanoplasmonic biosensors: applications and lab-on-a-chip integration,” Nanophotonics 6(1), 123–136 (2017).
[Crossref]

X. Sun, L. Thylén, and L. Wosinski, “Hollow hybrid plasmonic Mach-Zehnder sensor,” Opt. Lett. 42(4), 807–810 (2017).
[Crossref] [PubMed]

2016 (2)

2015 (2)

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “Double-slot hybrid plasmonic ring resonator used for optical sensors and modulators,” Photonics 2(4), 1116–1130 (2015).
[Crossref]

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide,” Opt. Express 23(20), 25688–25699 (2015).
[Crossref] [PubMed]

2013 (5)

A. Khan, O. Krupin, E. Lisicka-Skrzek, and P. Berini, “Mach-Zehnder refractometric sensor using long-range surface plasmon waveguides,” Appl. Phys. Lett. 103(11), 111108 (2013).
[Crossref]

S. Zhu, G. Q. Lo, and D. L. Kwong, “Silicon nitride based plasmonic components for CMOS back-end-of-line integration,” Opt. Express 21(20), 23376–23390 (2013).
[Crossref] [PubMed]

F. Liang, N. Clarke, P. Patel, M. Loncar, and Q. Quan, “Scalable photonic crystal chips for high sensitivity protein detection,” Opt. Express 21(26), 32306–32312 (2013).
[Crossref] [PubMed]

S. Hamed Mirsadeghi, E. Schelew, and J. F. Young, “Photonic crystal slot-microcavity circuit implemented in silicon-on-insulator: High Q operation in solvent without undercutting,” Appl. Phys. Lett. 102(13), 131115 (2013).
[Crossref]

Y. Gao, Z. Xin, Q. Gan, X. Cheng, and F. J. Bartoli, “Plasmonic interferometers for label-free multiplexed sensing,” Opt. Express 21(5), 5859–5871 (2013).
[Crossref] [PubMed]

2012 (3)

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
[Crossref]

2011 (1)

Y. Gao, Q. Gan, Z. Xin, X. Cheng, and F. J. Bartoli, “Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing,” ACS Nano 5(12), 9836–9844 (2011).
[Crossref] [PubMed]

2010 (5)

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Z. Han, A. Y. Elezzabi, and V. Van, “Experimental realization of subwavelength plasmonic slot waveguides on a silicon platform,” Opt. Lett. 35(4), 502–504 (2010).
[Crossref] [PubMed]

S. Sederberg, V. Van, and A. Y. Elezzabi, “Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform,” Appl. Phys. Lett. 96(12), 121101 (2010).
[Crossref]

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, “Efficient Coupling between Dielectric-Loaded Plasmonic and Silicon Photonic Waveguides,” Nano Lett. 10(12), 4851–4857 (2010).
[Crossref] [PubMed]

2009 (2)

R. Wan, F. Liu, X. Tang, Y. Huang, and J. Peng, “Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode,” Appl. Phys. Lett. 94(14), 141104 (2009).
[Crossref]

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

2008 (1)

J. Homola, “Surface plasmon resonance sensors for detection of chemical and biological species,” Chem. Rev. 108(2), 462–493 (2008).
[Crossref] [PubMed]

2007 (1)

2006 (1)

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Apostolopoulos, D.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Atwater, H. A.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, “Efficient Coupling between Dielectric-Loaded Plasmonic and Silicon Photonic Waveguides,” Nano Lett. 10(12), 4851–4857 (2010).
[Crossref] [PubMed]

Avramopoulos, H.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Barrios, C. A.

Bartoli, F. J.

Y. Gao, Z. Xin, Q. Gan, X. Cheng, and F. J. Bartoli, “Plasmonic interferometers for label-free multiplexed sensing,” Opt. Express 21(5), 5859–5871 (2013).
[Crossref] [PubMed]

Y. Gao, Q. Gan, Z. Xin, X. Cheng, and F. J. Bartoli, “Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing,” ACS Nano 5(12), 9836–9844 (2011).
[Crossref] [PubMed]

Baus, M.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Berini, P.

Blaize, S.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

Bozhevolnyi, S.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Bozhevolnyi, S. I.

Briggs, R. M.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, “Efficient Coupling between Dielectric-Loaded Plasmonic and Silicon Photonic Waveguides,” Nano Lett. 10(12), 4851–4857 (2010).
[Crossref] [PubMed]

Bruyant, A.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

Burgos, S. P.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, “Efficient Coupling between Dielectric-Loaded Plasmonic and Silicon Photonic Waveguides,” Nano Lett. 10(12), 4851–4857 (2010).
[Crossref] [PubMed]

Casquel, R.

Chatzianagnostou, E.

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
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Cheben, P.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Chelnokov, A.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

Cheng, X.

Y. Gao, Z. Xin, Q. Gan, X. Cheng, and F. J. Bartoli, “Plasmonic interferometers for label-free multiplexed sensing,” Opt. Express 21(5), 5859–5871 (2013).
[Crossref] [PubMed]

Y. Gao, Q. Gan, Z. Xin, X. Cheng, and F. J. Bartoli, “Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing,” ACS Nano 5(12), 9836–9844 (2011).
[Crossref] [PubMed]

Chmielak, B.

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Chmielak, T.

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Clarke, N.

Dabos, G.

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Dai, D.

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “Double-slot hybrid plasmonic ring resonator used for optical sensors and modulators,” Photonics 2(4), 1116–1130 (2015).
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X. Sun, D. Dai, L. Thylén, and L. Wosinski, “High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide,” Opt. Express 23(20), 25688–25699 (2015).
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Delacour, C.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

Delge, A.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Densmore, A.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Dereux, A.

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Dereux, A. L.

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Dündar, M. A.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
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Elezzabi, A. Y.

S. Sederberg, V. Van, and A. Y. Elezzabi, “Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform,” Appl. Phys. Lett. 96(12), 121101 (2010).
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Z. Han, A. Y. Elezzabi, and V. Van, “Experimental realization of subwavelength plasmonic slot waveguides on a silicon platform,” Opt. Lett. 35(4), 502–504 (2010).
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G. A. Lopez, M. Estevez, M. Soler, and L. M. Lechuga, “Recent advances in nanoplasmonic biosensors: applications and lab-on-a-chip integration,” Nanophotonics 6(1), 123–136 (2017).
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Fan, B. Y.

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
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Fan, H.

Fedeli, J. M.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

Feigenbaum, E.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, “Efficient Coupling between Dielectric-Loaded Plasmonic and Silicon Photonic Waveguides,” Nano Lett. 10(12), 4851–4857 (2010).
[Crossref] [PubMed]

Gan, Q.

Y. Gao, Z. Xin, Q. Gan, X. Cheng, and F. J. Bartoli, “Plasmonic interferometers for label-free multiplexed sensing,” Opt. Express 21(5), 5859–5871 (2013).
[Crossref] [PubMed]

Y. Gao, Q. Gan, Z. Xin, X. Cheng, and F. J. Bartoli, “Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing,” ACS Nano 5(12), 9836–9844 (2011).
[Crossref] [PubMed]

Gao, Y.

Y. Gao, Z. Xin, Q. Gan, X. Cheng, and F. J. Bartoli, “Plasmonic interferometers for label-free multiplexed sensing,” Opt. Express 21(5), 5859–5871 (2013).
[Crossref] [PubMed]

Y. Gao, Q. Gan, Z. Xin, X. Cheng, and F. J. Bartoli, “Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing,” ACS Nano 5(12), 9836–9844 (2011).
[Crossref] [PubMed]

Geiselmann, M.

Giannoulis, G.

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Giesecke, A. L.

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Giesecke, A.-L.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
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Giesecke, C.

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Grandidier, J.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, “Efficient Coupling between Dielectric-Loaded Plasmonic and Silicon Photonic Waveguides,” Nano Lett. 10(12), 4851–4857 (2010).
[Crossref] [PubMed]

Griol, A.

Grosse, P.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
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Guo, H.

Gylfason, K. B.

Hamed Mirsadeghi, S.

S. Hamed Mirsadeghi, E. Schelew, and J. F. Young, “Photonic crystal slot-microcavity circuit implemented in silicon-on-insulator: High Q operation in solvent without undercutting,” Appl. Phys. Lett. 102(13), 131115 (2013).
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Han, Z.

Hassan, K.

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

He, S.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
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F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
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R. Wan, F. Liu, X. Tang, Y. Huang, and J. Peng, “Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode,” Appl. Phys. Lett. 94(14), 141104 (2009).
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Huang, Y. D.

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
[Crossref]

Janz, S.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Kalavrouziotis, D.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
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Karl, M.

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Karouta, F.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Ketzaki, D.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

Khan, A.

A. Khan, O. Krupin, E. Lisicka-Skrzek, and P. Berini, “Mach-Zehnder refractometric sensor using long-range surface plasmon waveguides,” Appl. Phys. Lett. 103(11), 111108 (2013).
[Crossref]

Kippenberg, T. J.

Kriezis, E. E.

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Krupin, O.

A. Khan, O. Krupin, E. Lisicka-Skrzek, and P. Berini, “Mach-Zehnder refractometric sensor using long-range surface plasmon waveguides,” Appl. Phys. Lett. 103(11), 111108 (2013).
[Crossref]

Kumar, A.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Kwong, D. L.

Lamontagne, B.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Lapointe, J.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Lechuga, L. M.

G. A. Lopez, M. Estevez, M. Soler, and L. M. Lechuga, “Recent advances in nanoplasmonic biosensors: applications and lab-on-a-chip integration,” Nanophotonics 6(1), 123–136 (2017).
[Crossref]

Lerondel, G.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

Li, Y.

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

Li, Y. X.

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
[Crossref]

Liang, F.

Lisicka-Skrzek, E.

A. Khan, O. Krupin, E. Lisicka-Skrzek, and P. Berini, “Mach-Zehnder refractometric sensor using long-range surface plasmon waveguides,” Appl. Phys. Lett. 103(11), 111108 (2013).
[Crossref]

Liu, F.

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
[Crossref]

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

R. Wan, F. Liu, X. Tang, Y. Huang, and J. Peng, “Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode,” Appl. Phys. Lett. 94(14), 141104 (2009).
[Crossref]

Liu, J.

Lo, G. Q.

Loncar, M.

Lopez, G. A.

G. A. Lopez, M. Estevez, M. Soler, and L. M. Lechuga, “Recent advances in nanoplasmonic biosensors: applications and lab-on-a-chip integration,” Nanophotonics 6(1), 123–136 (2017).
[Crossref]

Manolis, A.

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Markey, L.

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Miura, Y.

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
[Crossref]

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

Nötzel, R.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Ohnishi, D.

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
[Crossref]

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

Papaioannou, S.

Patel, P.

Peng, J.

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

R. Wan, F. Liu, X. Tang, Y. Huang, and J. Peng, “Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode,” Appl. Phys. Lett. 94(14), 141104 (2009).
[Crossref]

Pfeiffer, M. H. P.

Pitilakis, A.

Pitilakis, A. K.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Pleros, N.

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Porschatis, B.

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Porschatis, C.

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Post, E.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Quan, Q.

Raja, A. S.

Rochracher,

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Rusakov, D.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

Salas-Montiel, R.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

Sánchez, B.

Schelew, E.

S. Hamed Mirsadeghi, E. Schelew, and J. F. Young, “Photonic crystal slot-microcavity circuit implemented in silicon-on-insulator: High Q operation in solvent without undercutting,” Appl. Phys. Lett. 102(13), 131115 (2013).
[Crossref]

Schmid, J. H.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Sederberg, S.

S. Sederberg, V. Van, and A. Y. Elezzabi, “Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform,” Appl. Phys. Lett. 96(12), 121101 (2010).
[Crossref]

Sohlström, H.

Soler, M.

G. A. Lopez, M. Estevez, M. Soler, and L. M. Lechuga, “Recent advances in nanoplasmonic biosensors: applications and lab-on-a-chip integration,” Nanophotonics 6(1), 123–136 (2017).
[Crossref]

Sun, X.

Tang, X.

R. Wan, F. Liu, X. Tang, Y. Huang, and J. Peng, “Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode,” Appl. Phys. Lett. 94(14), 141104 (2009).
[Crossref]

Tekin, T.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Thylén, L.

Tsilipakos, O.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Tsiokos, D.

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Van, V.

S. Sederberg, V. Van, and A. Y. Elezzabi, “Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform,” Appl. Phys. Lett. 96(12), 121101 (2010).
[Crossref]

Z. Han, A. Y. Elezzabi, and V. Van, “Experimental realization of subwavelength plasmonic slot waveguides on a silicon platform,” Opt. Lett. 35(4), 502–504 (2010).
[Crossref] [PubMed]

van der Heijden, R. W.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Vyrsokinos, K.

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

Wahlbrink, K.

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Wahlbrink, T.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Waldron, P.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Wan, R.

R. Wan, F. Liu, X. Tang, Y. Huang, and J. Peng, “Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode,” Appl. Phys. Lett. 94(14), 141104 (2009).
[Crossref]

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

Wang, B.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Weeber, J. C.

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

Weeber, J. -C.

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Weeber, J.-C.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

Wosinski, L.

Xin, Z.

Y. Gao, Z. Xin, Q. Gan, X. Cheng, and F. J. Bartoli, “Plasmonic interferometers for label-free multiplexed sensing,” Opt. Express 21(5), 5859–5871 (2013).
[Crossref] [PubMed]

Y. Gao, Q. Gan, Z. Xin, X. Cheng, and F. J. Bartoli, “Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing,” ACS Nano 5(12), 9836–9844 (2011).
[Crossref] [PubMed]

Xu, D.-X.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Young, J. F.

S. Hamed Mirsadeghi, E. Schelew, and J. F. Young, “Photonic crystal slot-microcavity circuit implemented in silicon-on-insulator: High Q operation in solvent without undercutting,” Appl. Phys. Lett. 102(13), 131115 (2013).
[Crossref]

Zervas, M.

Zhu, S.

ACS Nano (1)

Y. Gao, Q. Gan, Z. Xin, X. Cheng, and F. J. Bartoli, “Plasmonic Mach-Zehnder interferometer for ultrasensitive on-chip biosensing,” ACS Nano 5(12), 9836–9844 (2011).
[Crossref] [PubMed]

Appl. Phys. Lett. (7)

A. Khan, O. Krupin, E. Lisicka-Skrzek, and P. Berini, “Mach-Zehnder refractometric sensor using long-range surface plasmon waveguides,” Appl. Phys. Lett. 103(11), 111108 (2013).
[Crossref]

S. Hamed Mirsadeghi, E. Schelew, and J. F. Young, “Photonic crystal slot-microcavity circuit implemented in silicon-on-insulator: High Q operation in solvent without undercutting,” Appl. Phys. Lett. 102(13), 131115 (2013).
[Crossref]

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

S. Sederberg, V. Van, and A. Y. Elezzabi, “Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform,” Appl. Phys. Lett. 96(12), 121101 (2010).
[Crossref]

R. Wan, F. Liu, X. Tang, Y. Huang, and J. Peng, “Vertical coupling between short range surface plasmon polariton mode and dielectric waveguide mode,” Appl. Phys. Lett. 94(14), 141104 (2009).
[Crossref]

F. Liu, R. Wan, Y. Li, Y. Huang, Y. Miura, D. Ohnishi, and J. Peng, “Extremely high efficient coupling between long range surface plasmon polariton and dielectric waveguide mode,” Appl. Phys. Lett. 95(9), 091104 (2009).
[Crossref]

B. Y. Fan, F. Liu, Y. X. Li, Y. D. Huang, Y. Miura, and D. Ohnishi, “Refractive index sensor based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide,” Appl. Phys. Lett. 100(11), 111108 (2012).
[Crossref]

Chem. Rev. (1)

J. Homola, “Surface plasmon resonance sensors for detection of chemical and biological species,” Chem. Rev. 108(2), 462–493 (2008).
[Crossref] [PubMed]

IEEE Photonics Technol. Lett. (2)

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

G. Giannoulis, D. Kalavrouziotis, D. Apostolopoulos, S. Papaioannou, A. Kumar, S. Bozhevolnyi, L. Markey, K. Hassan, J.-C. Weeber, A. Dereux, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. K. Pitilakis, E. E. Kriezis, K. Vyrsokinos, H. Avramopoulos, and N. Pleros, “Data Transmission and Thermo-Optic Tuning Performance of Dielectric-Loaded Plasmonic Structures Hetero-Integrated on a Silicon Chip,” IEEE Photonics Technol. Lett. 24(5), 374–376 (2012).
[Crossref]

J. Lightwave Technol. (1)

J. Opt. Soc. Am. B (1)

Nano Lett. (2)

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref] [PubMed]

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, “Efficient Coupling between Dielectric-Loaded Plasmonic and Silicon Photonic Waveguides,” Nano Lett. 10(12), 4851–4857 (2010).
[Crossref] [PubMed]

Nanophotonics (1)

G. A. Lopez, M. Estevez, M. Soler, and L. M. Lechuga, “Recent advances in nanoplasmonic biosensors: applications and lab-on-a-chip integration,” Nanophotonics 6(1), 123–136 (2017).
[Crossref]

Opt. Commun. (1)

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Opt. Express (6)

S. Zhu, G. Q. Lo, and D. L. Kwong, “Silicon nitride based plasmonic components for CMOS back-end-of-line integration,” Opt. Express 21(20), 23376–23390 (2013).
[Crossref] [PubMed]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469–12478 (2018).
[Crossref] [PubMed]

F. Liang, N. Clarke, P. Patel, M. Loncar, and Q. Quan, “Scalable photonic crystal chips for high sensitivity protein detection,” Opt. Express 21(26), 32306–32312 (2013).
[Crossref] [PubMed]

Y. Gao, Z. Xin, Q. Gan, X. Cheng, and F. J. Bartoli, “Plasmonic interferometers for label-free multiplexed sensing,” Opt. Express 21(5), 5859–5871 (2013).
[Crossref] [PubMed]

D. Kalavrouziotis, S. Papaioannou, G. Giannoulis, D. Apostolopoulos, K. Hassan, L. Markey, J.-C. Weeber, A. Dereux, A. Kumar, S. I. Bozhevolnyi, M. Baus, M. Karl, T. Tekin, O. Tsilipakos, A. Pitilakis, E. E. Kriezis, H. Avramopoulos, K. Vyrsokinos, and N. Pleros, “0.48Tb/s (12x40Gb/s) WDM transmission and high-quality thermo-optic switching in dielectric loaded plasmonics,” Opt. Express 20(7), 7655–7662 (2012).
[Crossref] [PubMed]

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide,” Opt. Express 23(20), 25688–25699 (2015).
[Crossref] [PubMed]

Opt. Lett. (4)

Photonics (1)

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “Double-slot hybrid plasmonic ring resonator used for optical sensors and modulators,” Photonics 2(4), 1116–1130 (2015).
[Crossref]

Photonics J. (2)

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic stripes in aqueous environment co-integrated with Si3N4 photonics,” Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” Photonics J. 10(3), 1–8 (2018).
[Crossref]

Proc. SPIE (1)

D. Tsiokos, G. Dabos, D. Ketzaki, J. -C. Weeber, L. Markey, A. L. Dereux, C. Giesecke, B. Porschatis, T. Chmielak, K. Wahlbrink, Rochracher, and N. Pleros, “Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS-compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab project approach,” Proc. SPIE 10249, 1024902 (2018).

Sci. Rep. (1)

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J.-C. Weeber, A. Dereux, A.-L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref] [PubMed]

Other (2)

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Figures (7)

Fig. 1
Fig. 1 (a) Conceptual schematic of the plasmo-photonic sensor, showing the fiber-to-chip coupling. (b) Schematic of the plasmonic sensing area. (c) Cross-sectional dimensions for the photonic and the plasmonic waveguides across the direction of propagation.
Fig. 2
Fig. 2 (a) Mask layout of the plasmo-photonic sensor. (b) Photo of the fabricated sensor chip illustrating the fluidic tubes glued on top of the chip. (c) Cross-sectional SEM image of the photonic waveguide. (d) Angled SEM image of the etched cavity (red dashed line) and the Si3N4 tapers (white dashed line) before the plasmonic waveguide deposition. (e) SEM top-view image of the gold plasmonic waveguide recessed in the cavity.
Fig. 3
Fig. 3 (a) Mask layout of the 1x1 MZI structure. (b) Measured optical attenuation with varying electrical power on the thermo-optic phase shifter of the MZI.
Fig. 4
Fig. 4 (a) Measured sensor spectral response with varying electrical power on the thermo-optic VOA. (b) MZI blue-shift for two power dissipation levels on the thermo-optic phase shifter.
Fig. 5
Fig. 5 (a). Sensor spectral response obtained when injecting 4 different buffer solutions. (b) Enlarged plots of the sensor spectral response, revealing the high ER value of 37 dB.
Fig. 6
Fig. 6 (a)-(c) Enlarged plots of the sensor spectral response experimentally obtained when injecting buffer solutions with different refractive indices revealing a red shift of the resonance wavelength. (d)-(f) Resonance shift versus refractive index of the buffer solutions, illustrating linear fitting plots for each of the three dips, for calculating the sensitivity of the sensor.
Fig. 7
Fig. 7 Bulk refractive index sensitivity as a function of wavelength.

Equations (1)

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FOM= S dλ

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