Mesoscale laser 3D printing

Linas Jonušauskas; Darius Gailevičius; Sima Rekštytė; Tommaso Baldacchini; Saulius Juodkazis; Mangirdas Malinauskas

doi:10.1364/OE.27.015205

Mesoscale laser 3D printing

Linas Jonušauskas, Darius Gailevičius, Sima Rekštytė, Tommaso Baldacchini, Saulius Juodkazis, and Mangirdas Malinauskas

Optics Express
Vol. 27,
Issue 11,
pp. 15205-15221
(2019)
•https://doi.org/10.1364/OE.27.015205

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Linas Jonušauskas, Darius Gailevičius, Sima Rekštytė, Tommaso Baldacchini, Saulius Juodkazis, and Mangirdas Malinauskas, "Mesoscale laser 3D printing," Opt. Express 27, 15205-15221 (2019)

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Abstract

3D meso scale structures that can reach up to centimeters in overall size but retain micro- or nano-features, proved to be promising in various science fields ranging from micro-mechanical metamaterials to photonics and bio-medical scaffolds. In this work, we present synchronization of the linear and galvanometric scanners for efficient femtosecond 3D optical printing of objects at the meso-scale (from sub-μm to sub-cm spanning five orders of magnitude). In such configuration, the linear stages provide stitch-free structuring at nearly limitless (up to tens-of-cm) working area, while galvo-scanners allow to achieve translation velocities in the range of mm/s-cm/s without sacrificing nano-scale positioning accuracy and preserving the undistorted shape of the final print. The principle behind this approach is demonstrated, proving its inherent advantages in comparison to separate use of only linear stages or scanners. The printing rate is calculated in terms of voxels/s, showcasing the capability to maintain an optimal feature size while increasing throughput. Full capabilities of this approach are demonstrated by fabricating structures that reach millimeters in size but still retain sub-μm features: scaffolds for cell growth, microlenses, and photonic crystals. All this is combined into a benchmark structure: a meso-butterfly. Provided results show that synchronization of two scan modes is crucial for the end goal of industrial-scale implementation of this technology and makes the laser printing well aligned with similar approaches in nanofabrication by electron and ion beams.

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2019 (3)

M. Lebedevaitė, J. Ostrauskaitė, E. Skliutas, and M. Malinauskas, “Photoinitiator free resins composed of plant-derived monomers for the optical μ-3D printing of thermosets,” Polymers 11, 116 (2019).
[Crossref]

D. Gailevičius, V. Padolskytė, L. Mikoliūnaitė, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Additive-manufacturing of 3D glass-ceramics down to nanoscale resolution,” Nanoscale Horiz. 4, 647 (2019).
[Crossref]

A. Rodenas, M. Gu, G. Corrielli, P. Paie, S. John, A. Kar, and R. Osellame, “Three-dimensional femtosecond laser nanolithography of crystals,” Nature Photon. 13, 105–109 (2019).
[Crossref]

2018 (7)

S. Dehaeck, B. Scheid, and P. Lambert, “Adaptive stitching for meso-scale printing with two-photon lithography,” Addit. Manuf. 21, 589–597 (2018).
[Crossref]

H. Ni, G. Yuan, L. Sun, N. Chang, D. Zhang, R. Chen, L. Jiang, H. Chen, Z. Gu, and X. Zhao, “Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography,” RSC Advances 8, 20117–20123 (2018).
[Crossref]

A. Vyatskikh, S. Delalande, A. Kudo, X. Zhang, C. M. Portela, and J. R. Greer, “Additive manufacturing of 3D nano-architected metals,” Nat. Commun. 9, 593 (2018).
[Crossref] [PubMed]

J. Ai, M. Lv, M. Jiang, J. Liu, and X. Zeng, “Focused laser lithographic system for efficient and cross-scale fabrication of large-area and 3D micro-patterns,” Opt. Lasers Eng. 107, 335–341 (2018).
[Crossref]

X. Chen, W. Liu, B. Dong, J. Lee, H. O. T. Ware, H. F. Zhang, and C. Sun, “High-speed 3D printing of millimeter-size customized aspheric imaging lenses with sub 7 nm surface roughness,” Adv. Mater. 30, 1705683 (2018).
[Crossref]

L. Jonušauskas, S. Juodkazis, and M. Malinauskas, “Optical 3D printing: bridging the gaps in the mesoscale,” J. Opt. 20, 053001 (2018).
[Crossref]

P.-I. Dietrich, M. Blaicher, I. Reuter, M. Billah, T. Hoose, A. Hofmann, C. Caer, R. Dangel, B. Offrein, U. Troppenz, M. Moehrle, W. Freude, and C. Koos, “In situ 3D nanoprinting of free-form coupling elements for hybrid photonic integration,” Nat. Photonics 12, 241–247 (2018).
[Crossref]

2017 (11)

T. Koschny, C. M. Soukoulis, and M. Wegener, “Metamaterials in microwaves, optics, mechanics, thermodynamics, and transport,” J. Opt. 9, 084005 (2017).
[Crossref]

M. Garliauskas, E. Stankevičius, and G. Račiukaitis, “Laser intensity-based geometry control of periodic submicron polymer structures fabricated by laser interference lithography,” Opt. Express 7, 179–184 (2017).
[Crossref]

C. Barner-Kowollik, M. Bastmeyer, E. Blasco, G. Delaittre, P. Muller, B. Richter, and M. Wegener, “3D laser micro- and nanoprinting: Challenges for chemistry,” Angew. Chem. Int. Ed. 56, 15828–15845 (2017).
[Crossref]

T. Frenzel, M. Kadic, and M. Wegener, “Three-dimensional mechanical metamaterials with a twist,” Science 358, 1072–1074 (2017).
[Crossref] [PubMed]

B. Richter, V. Hahn, S. Bertels, T. K. Claus, M. Wegener, G. Delaittre, C. Barner-Kowollik, and M. Bastmeyer, “Guiding cell attachment in 3D microscaffolds selectively functionalized with two distinct adhesion proteins,” Adv. Mater. 29, 1604342 (2017).
[Crossref]

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically clear and resilient free-form μ-optics 3D-printed via ultrafast laser lithography,” Materials 10, 12 (2017).
[Crossref]

J. S. Oakdale, R. F. Smith, J.-B. Forien, W. L. Smith, S. J. Ali, L. B. Bayu Aji, T. M. Willey, J. Ye, A. W. van Buuren, M. A. Worthington, S. T. Prisbrey, H. S. Park, P. A. Amendt, T. F. Baumann, and J. Biener, “Direct laser writing of low-density interdigitated foams for plasma drive shaping,” Adv. Funct. Mater. 27, 1702425 (2017).
[Crossref]

A. Accardo, M.-C. Blatché, R. Courson, I. Loubinoux, C. Thibault, L. Malaquin, and C. Vieu, “Multiphoton direct laser writing and 3D imaging of polymeric freestanding architectures for cell colonization,” Small 13, 1700621 (2017).
[Crossref]

L. Jonušauskas, S. Rekštytė, R. Buividas, S. Butkus, R. Gadonas, S. Juodkazis, and M. Malinauskas, “Hybrid subtractive-additive-welding microfabrication for lab-on-chip (LOC) applications via single amplified femtosecond laser source,” Opt. Eng. 56, 094108 (2017).
[Crossref]

T. Tičkūnas, M. Perrenoud, S. Butkus, R. Gadonas, S. Rekštytė, M. Malinauskas, D. Paipulas, Y. Bellouard, and V. Sirutkaitis, “Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications,” Opt. Express 25, 26280–26288 (2017).
[Crossref]

W.-H. Hsu, F. C. P. Masim, A. Balčytis, S. Juodkazis, and K. Hatanaka, “Dynamic position shifts of X-ray emission from a water film induced by a pair of time-delayed femtosecond laser pulses,” Opt. Express 25, 24109–24118 (2017).
[Crossref] [PubMed]

2016 (7)

N. Alharbi, R. Osman, and D. Wismeijer, “Effects of build direction on the mechanical properties of 3D-printed complete coverage interim dental restorations,” J. Prosthet. Dent. 115, 760–767 (2016).
[Crossref] [PubMed]

S. Rekštytė, T. Jonavičius, D. Gailevičius, M. Malinauskas, V. Mizeikis, E. G. Gamaly, and S. Juodkazis, “Nanoscale precision of 3D polymerization via polarization control,” Adv. Opt. Mater. 4,1209–1214 (2016).
[Crossref]

E. Waller and G. Freymann, “Spatio-temporal proximity characteristics in 3D μ-printing via multi-photon absorption,” Polymers 8, 297 (2016).
[Crossref]

L. Jiang, W. Xiong, Y. Zhou, Y. Liu, X. Huang, D. Li, T. Baldacchini, L. Jiang, and Y. Lu, “Performance comparison of acrylic and thiol-acrylic resins in two-photon polymerization,” Opt. Express 24, 13687–13701 (2016).
[Crossref] [PubMed]

T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10, 554–560 (2016).
[Crossref]

M. Malinauskas, A. Žukauskas, S. Hasegawa, Y. Hayasaki, V. Mizeikis, R. Buividas, and S. Juodkazis, “Ultrafast laser processing of materials: from science to industry,” Light: Sci. Appl. 5, e16133 (2016).
[Crossref]

A. I. Aristov, M. Manousidaki, A. Danilov, K. Terzaki, C. Fotakis, M. Farsari, and A. V. Kabashin, “3D plasmonic crystal metamaterials for ultra-sensitive biosensing,” Sci. Rep. 6, 25380 (2016).
[Crossref] [PubMed]

2015 (3)

L. Yang, A. El-Tamer, U. Hinze, J. Li, Y. Hu, W. Huang, J. Chu, and B. N. Chichkov, “Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator,” Opt. Lasers Eng. 70, 26–32 (2015).
[Crossref]

J. Mačiulaitis, M. Deveikytė, S. Rekštytė, M. Bratchikov, and A. Darinskas, A. Šimbelytė, G. Daunoras, A. Laurinavičienė, A. Laurinavičius, R. Gudas, M. Malinauskas, and R. Mačiulaitis, “Preclinical study of SZ2080 material 3D microstructured scaffolds for cartilage tissue engineering made by femtosecond direct laser writing lithography,” Biofabrication 7, 015015 (2015).
[Crossref]

A. Žukauskas, I. Matulaitienė, D. Paipulas, G. Niaura, M. Malinauskas, and R. Gadonas, “Tuning the refractive index in 3D direct laser writing lithography: towards GRIN microoptics,” Laser Photonics Rev. 9, 706–712 (2015).
[Crossref]

2014 (4)

D. Wu, S.-Z. Wu, J. Xu, L.-G. Niu, K. Midorikawa, and K. Sugioka, “Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: the concept of ship-in-a-bottle biochip,” Laser Photonics Rev. 8, 458–467 (2014).
[Crossref]

H. Lasi, P. Fettke, H.G. Kemper, T. Feld, and M. Hoffman, “Industry 4.0,” Bus. Inf. Syst. Eng. 6, 239–242 (2014).
[Crossref]

L. Jonušauskas, S. Rekštytė, and M. Malinauskas, “Augmentation of direct laser writing fabrication throughput for three-dimensional structures by varying focusing conditions,” Opt. Eng. 53, 125102 (2014).
[Crossref]

Y.-L. Sun, W.-F. Dong, L.-G. Niu, T. Jiang, D.-X. Liu, L. Zhang, Y.-S. Wang, Q.-D. Chen, D.-P. Kim, and H.-B. Sun, “Protein-based soft micro-optics fabricated by femtosecond laser direct writing,” Light: Sci. Appl. 3, e129 (2014).
[Crossref]

2013 (1)

M. T. Do, T. T. N. Nguyen, Q. Li, H. Benisty, I. Ledoux-Rak, and N. D. Lai, “Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing,” Opt. Express 21, 20964–20973 (2013).
[Crossref] [PubMed]

2012 (3)

J. Torgersen, A. Ovsianikov, V. Mironov, N. Pucher, X. Qin, Z. Li, K. Cicha, T. Machacek, R. Liska, V. Jantsch, and J. Stampfl, “Photo-sensitive hydrogels for three-dimensional laser microfabrication in the presence of whole organisms,” J. Biomed. Opt. 17, 105008 (2012).
[Crossref] [PubMed]

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2011 (1)

M. Malinauskas, P. Danilevičius, and S. Juodkazis, “Three-dimensional micro-/nano-structuring via direct write polymerization with picosecond laser pulses,” Opt. Express 19, 5602–5610 (2011).
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2010 (5)

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A. Žukauskas, M. Malinauskas, L. Kontenis, V. Purlys, D. Paipulas, M. Vengris, and R. Gadonas, “Organic dye doped microstructures for optically active functional devices fabricated via two-photon polymerization technique,” Lith. J. Phys. 50, 55–61 (2010).
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2009 (1)

R. Nielson, B. Kaehr, and J. Shear, “Microreplication and design of biological architectures using dynamic-mask multiphoton lithography,” Small 5, 120–125 (2009).
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2008 (1)

A. Ovsianikov, J. Viertl, B. Chichkov, M. Oubaha, B. MacCraith, I. Sakellari, A. Giakoumaki, D. Gray, M. Vamvakakian, M. Farsari, and C. Fotakis, “Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication,” ACS Nano 2, 2257–2262 (2008).
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2006 (1)

L. Cunningham, M. Veilleux, and P. Campagnola, “Freeform multiphoton exicted microfabrication for biological applications using a rapid prototyping CAD-based approach,” Opt. Express 14, 8613–8621 (2006).
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Bellouard, Y.

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Chang, N.

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Y. L. Zhang, Q. D. Chen, H. Xia, and H. B. Sun, “Designable 3D nanofabrication by femtosecond laser direct writing,” NanoToday 5, 435–448 (2010).
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Chen, Q.-D.

Chen, R.

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Chu, J.

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T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10, 554–560 (2016).
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Gray, D.

Greer, J. R.

A. Vyatskikh, S. Delalande, A. Kudo, X. Zhang, C. M. Portela, and J. R. Greer, “Additive manufacturing of 3D nano-architected metals,” Nat. Commun. 9, 593 (2018).
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Gu, M.

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Jantsch, V.

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Jiang, T.

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A. Rodenas, M. Gu, G. Corrielli, P. Paie, S. John, A. Kar, and R. Osellame, “Three-dimensional femtosecond laser nanolithography of crystals,” Nature Photon. 13, 105–109 (2019).
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L. Jonušauskas, S. Juodkazis, and M. Malinauskas, “Optical 3D printing: bridging the gaps in the mesoscale,” J. Opt. 20, 053001 (2018).
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Kabouraki, E.

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T. Frenzel, M. Kadic, and M. Wegener, “Three-dimensional mechanical metamaterials with a twist,” Science 358, 1072–1074 (2017).
[Crossref] [PubMed]

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R. Nielson, B. Kaehr, and J. Shear, “Microreplication and design of biological architectures using dynamic-mask multiphoton lithography,” Small 5, 120–125 (2009).
[Crossref]

Kar, A.

A. Rodenas, M. Gu, G. Corrielli, P. Paie, S. John, A. Kar, and R. Osellame, “Three-dimensional femtosecond laser nanolithography of crystals,” Nature Photon. 13, 105–109 (2019).
[Crossref]

Karalekas, D.

Karaniauskas, A.

Kemper, H.G.

H. Lasi, P. Fettke, H.G. Kemper, T. Feld, and M. Hoffman, “Industry 4.0,” Bus. Inf. Syst. Eng. 6, 239–242 (2014).
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Kim, D.-P.

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T. Koschny, C. M. Soukoulis, and M. Wegener, “Metamaterials in microwaves, optics, mechanics, thermodynamics, and transport,” J. Opt. 9, 084005 (2017).
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A. Vyatskikh, S. Delalande, A. Kudo, X. Zhang, C. M. Portela, and J. R. Greer, “Additive manufacturing of 3D nano-architected metals,” Nat. Commun. 9, 593 (2018).
[Crossref] [PubMed]

Lai, N. D.

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A. Rodenas, M. Gu, G. Corrielli, P. Paie, S. John, A. Kar, and R. Osellame, “Three-dimensional femtosecond laser nanolithography of crystals,” Nature Photon. 13, 105–109 (2019).
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A. Vyatskikh, S. Delalande, A. Kudo, X. Zhang, C. M. Portela, and J. R. Greer, “Additive manufacturing of 3D nano-architected metals,” Nat. Commun. 9, 593 (2018).
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A. Rodenas, M. Gu, G. Corrielli, P. Paie, S. John, A. Kar, and R. Osellame, “Three-dimensional femtosecond laser nanolithography of crystals,” Nature Photon. 13, 105–109 (2019).
[Crossref]

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S. Dehaeck, B. Scheid, and P. Lambert, “Adaptive stitching for meso-scale printing with two-photon lithography,” Addit. Manuf. 21, 589–597 (2018).
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T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10, 554–560 (2016).
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van Buuren, A. W.

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Worthington, M. A.

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Y. L. Zhang, Q. D. Chen, H. Xia, and H. B. Sun, “Designable 3D nanofabrication by femtosecond laser direct writing,” NanoToday 5, 435–448 (2010).
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Xiong, W.

Xu, J.

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A. Vyatskikh, S. Delalande, A. Kudo, X. Zhang, C. M. Portela, and J. R. Greer, “Additive manufacturing of 3D nano-architected metals,” Nat. Commun. 9, 593 (2018).
[Crossref] [PubMed]

Zhang, Y. L.

Y. L. Zhang, Q. D. Chen, H. Xia, and H. B. Sun, “Designable 3D nanofabrication by femtosecond laser direct writing,” NanoToday 5, 435–448 (2010).
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ACS Nano (2)

Addit. Manuf. (1)

S. Dehaeck, B. Scheid, and P. Lambert, “Adaptive stitching for meso-scale printing with two-photon lithography,” Addit. Manuf. 21, 589–597 (2018).
[Crossref]

Adv. Funct. Mater. (1)

Adv. Mater. (2)

Adv. Opt. Mater. (1)

Angew. Chem. Int. Ed. (1)

Appl. Opt. (1)

C. Rensch, S. Hell, M. v. Schickfus, and S. Hunklinger, “Laser scanner for direct writing lithography,” Appl. Opt. 28, 3754–3758 (1989).
[Crossref] [PubMed]

Biofabrication (1)

Bus. Inf. Syst. Eng. (1)

H. Lasi, P. Fettke, H.G. Kemper, T. Feld, and M. Hoffman, “Industry 4.0,” Bus. Inf. Syst. Eng. 6, 239–242 (2014).
[Crossref]

Int. J. Adv. Manuf. Technol. (1)

J. Biomed. Opt. (1)

J. Opt. (3)

M. Farsari, M. Vamvakaki, and B. N. Chichkov, “Multiphoton polymerization of hybrid materials,” J. Opt. 12, 124001 (2010).
[Crossref]

L. Jonušauskas, S. Juodkazis, and M. Malinauskas, “Optical 3D printing: bridging the gaps in the mesoscale,” J. Opt. 20, 053001 (2018).
[Crossref]

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[Crossref]

J. Prosthet. Dent. (1)

Laser Photonics Rev. (2)

Light: Sci. Appl. (2)

Lith. J. Phys (1)

Lith. J. Phys. (1)

Mater. Sci. (1)

Materials (1)

Nanoscale Horiz. (1)

NanoToday (1)

Y. L. Zhang, Q. D. Chen, H. Xia, and H. B. Sun, “Designable 3D nanofabrication by femtosecond laser direct writing,” NanoToday 5, 435–448 (2010).
[Crossref]

Nat. Commun. (1)

A. Vyatskikh, S. Delalande, A. Kudo, X. Zhang, C. M. Portela, and J. R. Greer, “Additive manufacturing of 3D nano-architected metals,” Nat. Commun. 9, 593 (2018).
[Crossref] [PubMed]

Nat. Photonics (2)

T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10, 554–560 (2016).
[Crossref]

Nature Photon. (1)

A. Rodenas, M. Gu, G. Corrielli, P. Paie, S. John, A. Kar, and R. Osellame, “Three-dimensional femtosecond laser nanolithography of crystals,” Nature Photon. 13, 105–109 (2019).
[Crossref]

Opt. Eng. (2)

Opt. Express (7)

Opt. Lasers Eng. (2)

Polymers (2)

E. Waller and G. Freymann, “Spatio-temporal proximity characteristics in 3D μ-printing via multi-photon absorption,” Polymers 8, 297 (2016).
[Crossref]

RSC Advances (1)

Sci. Rep. (1)

Science (1)

T. Frenzel, M. Kadic, and M. Wegener, “Three-dimensional mechanical metamaterials with a twist,” Science 358, 1072–1074 (2017).
[Crossref] [PubMed]

Small (2)

R. Nielson, B. Kaehr, and J. Shear, “Microreplication and design of biological architectures using dynamic-mask multiphoton lithography,” Small 5, 120–125 (2009).
[Crossref]

Other (1)

E. G. Gamaly, Femtosecond Laser-Matter Interaction: Theory, Experiments and Applications (Pan Stanford, Singapore, 2011), 1st ed.
[Crossref]

Supplementary Material (1)

Name	Description
» Visualization 1	A video demonstrating continuous writing of a ~1.25 mm sized 3D hexagonal scaffold via linear stage and galvo-scanner synchronization. The structure is formed in layer-by-layer fashion using stl model with movement being optimized using traveling sal

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Fig. 1 Principle of producing structures using only galvanometric scanners (a), linear stages (b) and continuous scanning via synchronization of both (c). Applying only scanning leads to stitches (black lines on the finished structure) if thesize of a structure exceeds the working field of an objective (black square). Linear positioning leads to possible loss of shape (for instance, rounded corners instead of sharp ones) when translation velocity is high (1 mm/s and more) due to stage inertia. Synchronization of both allows to continuously move the working field in relation to the sample thus avoiding stitching yet still exploiting ultra-high speed and precision of structuring by employing scanner. All the given cases are illustrated by the structures fabricated in each regime at 1 cm/s translation velocities.

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Fig. 2 Schematics of the Laser Nanofactory setup used in this work. Here PP is a phase plate, P denotes thin film polarizers together with PP forming a power attenuation unit, M are the mirrors, RPM - removable power meter, T - telescope, expanding laser beam 3 times, Obj - objective lens. LED illuminates the sample for real-time monitoring of the fabrication process. For wavelength tuning second harmonic crystal, harmonic generator or a parametric generator can be used.

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Fig. 3 (a) The resolution bridge fabricated using different translation velocities v_t and measured line widths (b). A sharp decrease in line dimensions is observable. However, the aspect ratio of voxels remains in the 3-4 range. The slope = 1 isshown as an eye guide to illustrate that polymerisation of the voxel was following a sub-linear (slope <1) power (dose) dependence.

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Fig. 4 Plots representing E_t deposition during fs exposure throughout translation of the stages. It is acquired by adding all of the fluences of single pulses dependant on their position during translation and assuming Gaussian distribution. E_t in the centre of the line during formation at v_t of 1 μm/s and 10000 μm/s and 10% below the damage threshold of the polymer. A substantial difference in E_t and the resulting decrease in line width as v_t is higher.

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Fig. 5 (a) A schematic representation of a voxel, fabricated line, and definitions of D and L. (b)-(d) are voxel volume V_V, line volume V_l and voxels/second dependencies on the translation velocity v_t respectively. Slopes corresponding to a linear and diffusional spreading (slope = 0.5) of the voxel volume are shown as eye guides. The line volume was proportional (slope = 1) to the scan speed, hence, the exposure dose.

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Fig. 6 (a) SEM micrograph of 1 mm long gradient chain-mail (with support walls) showcasing the capability to produce a relatively smooth surface with features that range from μm to hundreds of μm. A single working field of 125 μm is added for the reference, showcasing that the biggest rings would not fit in it. (b) Focal point movements if only the rings would be fabricated. (c) Image showing all the movements needed to produce such structure, including ones with an open shutter (yellow) and with a closed shutter (red). As movements between different parts of the take up a significant portion of the laser beam repositioning between scanning, the time needed to create such structure is 26 minutes, in comparison to 3 and a half minute needed if only the volume will be filledblue.

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Fig. 7 (a) - 1.5 mm scaffold for cell growth made out of non-photosensitized SZ2080. (b) - demonstration of capabilities to produce complex bio-medicine oriented structures with on-demand scalability ( Visualization 1). (c) - SEM images of 0.5 and 1 mm lenses showing no noticeable surface or other defects, as 0.5 mm lens focuses light into a near-perfect Gaussian spot (d). (e) - photos of 1 mm sized photonic crystal before development at different angles in relation to white light illumination, which results in different colours being diffracted towards the photocamera. (f) - optical microscope image of the structure, revealing no defects in the lattice, which is further proved by predictable photonic crystal diffractive pattern projected onto a screen after illumination with HeNe laser beam.

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Fig. 8 A mesoscale butterfly, created to demonstrate true meso-scale capabilities of synchronized linear stages and galvanometric scanners. (a) - an overall SEM view with a naked-eye view in the inset. (b) - enlarged view of suspended antennas. (c) - eye microlens array. (d) shows embedded nanolattice with a single line width of 650 nm (e).

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Tables (1)

Table 1 Optimized parameters for fabrication of different parts of the meso-butterfly.

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Equations (4)

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V_{v} = \frac{4}{3} π a b c = \frac{4}{3} π \frac{D}{2} \frac{D}{2} \frac{L}{2} = \frac{1}{6} π D^{2} L

{(Δ ε_{d})}_{i m} ≃ \frac{ω_{p e}^{2}}{ω^{2}} \frac{ν_{e}}{ω} = \frac{n_{e}}{n_{c r}} \frac{ν_{e}}{ω},

l_{a b s} = \frac{λ}{2 π κ} = \frac{n_{0} λ}{π {(Δ ε_{d})}_{i m}} = \frac{2 c n_{0}}{ν_{e}} \frac{n_{c r}}{n_{e}}

W_{a b s} = A_{0} \frac{ν_{e}}{c n_{0}} \frac{n_{e}}{n_{c r}} F_{p} \propto \frac{n_{e}}{n_{c r}} F_{p},

Part	I	v_t	Slicing	Hatching
Head and top of the body	12.7 TW/cm $^{2}$	1 cm/s	0.5 μm	0.2 μm
Body	12.7 TW/cm $^{2}$	1 cm/s	2 μm	0.3 μm
Woodpile	12.7 TW/cm $^{2}$	1 cm/s	2 μm	2 μm

Darius Gailevičius	https://orcid.org/0000-0002-1453-3276
Saulius Juodkazis	https://orcid.org/0000-0003-3542-3874
Mangirdas Malinauskas	https://orcid.org/0000-0002-6937-4284