Abstract

A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al2O3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This enables to electrically switch the wavelength of a mode over ~50 nm with a potential modulation frequency above 2 MHz. These results pave the way to reliable nano-mechanical sensors and optical switches.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]

2017 (1)

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

2016 (3)

F. Chollet, “Devices based on co-integrated MEMS actuators and optical waveguide: A review,” Micromachines (Basel) 7(2), 18 (2016).
[Crossref]

H. Du, F. S. Chau, and G. Zhou, “Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuator,” Micromachines (Basel) 7(4), 69 (2016).
[Crossref]

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits,” Laser Photonics Rev. 10(6), 870–894 (2016).
[Crossref]

2015 (2)

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

P. Lodahl, S. Mahmoodian, and S. Stobbe, “Interfacing single photons and single quantum dots with photonic nanostructures,” Rev. Mod. Phys. 87(2), 347–400 (2015).
[Crossref]

2014 (3)

L. Midolo and A. Fiore, “Design and optical properties of electromechanical double-membrane photonic crystal cavities,” IEEE J. Quantum Electron. 50(6), 404–414 (2014).
[Crossref]

W. M. Zhang, H. Yan, Z. K. Peng, and G. Meng, “Electrostatic pull-in instability in MEMS/NEMS: A review,” Sens. Actuators A Phys. 214, 187–218 (2014).
[Crossref]

T. Süss, P. Braeuninger-Weimer, and C. Hierold, “Stress reduction in ultra-small thin film Al2O3 diaphragms by atomic layer deposition,” Sens. Actuators A Phys. 212, 159–164 (2014).
[Crossref]

2012 (3)

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

G. Dingemans and W. M. M. Kessels, “Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells,” J. Vac. Sci. Technol. A 30(4), 040802 (2012).
[Crossref]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

2011 (2)

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

L. Midolo, P. J. van Veldhoven, M. A. Dündar, R. Nötzel, and A. Fiore, “Electromechanical wavelength tuning of double-membrane photonic crystal cavities,” Appl. Phys. Lett. 98(21), 211120 (2011).
[Crossref]

2010 (3)

2003 (1)

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

2000 (1)

R. Maboudian, W. R. Ashurst, and C. Carraro, “Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments,” Sens. Actuators A Phys. 82(1–3), 219–223 (2000).
[Crossref]

Alegre, T. M.

R. Perahia, J. D. Cohen, S. Meenehan, T. M. Alegre, and O. Painter, “Electrostatically tunable optomechanical “zipper” cavity laser,” Appl. Phys. Lett. 97(19), 191112 (2010).
[Crossref]

Ashurst, W. R.

R. Maboudian, W. R. Ashurst, and C. Carraro, “Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments,” Sens. Actuators A Phys. 82(1–3), 219–223 (2000).
[Crossref]

Balet, L.

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Birindelli, S.

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

Braeuninger-Weimer, P.

T. Süss, P. Braeuninger-Weimer, and C. Hierold, “Stress reduction in ultra-small thin film Al2O3 diaphragms by atomic layer deposition,” Sens. Actuators A Phys. 212, 159–164 (2014).
[Crossref]

Bright, V. M.

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

Carraro, C.

R. Maboudian, W. R. Ashurst, and C. Carraro, “Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments,” Sens. Actuators A Phys. 82(1–3), 219–223 (2000).
[Crossref]

Chau, F. S.

H. Du, F. S. Chau, and G. Zhou, “Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuator,” Micromachines (Basel) 7(4), 69 (2016).
[Crossref]

X. Chew, G. Zhou, F. S. Chau, J. Deng, X. Tang, and Y. C. Loke, “Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities,” Opt. Lett. 35(15), 2517–2519 (2010).
[Crossref] [PubMed]

Chew, X.

Cho, Y.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

Chollet, F.

F. Chollet, “Devices based on co-integrated MEMS actuators and optical waveguide: A review,” Micromachines (Basel) 7(2), 18 (2016).
[Crossref]

Cohen, J. D.

R. Perahia, J. D. Cohen, S. Meenehan, T. M. Alegre, and O. Painter, “Electrostatically tunable optomechanical “zipper” cavity laser,” Appl. Phys. Lett. 97(19), 191112 (2010).
[Crossref]

Cotrufo, M.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

Deng, J.

Deotare, P. B.

Dietrich, C. P.

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits,” Laser Photonics Rev. 10(6), 870–894 (2016).
[Crossref]

Dingemans, G.

G. Dingemans and W. M. M. Kessels, “Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells,” J. Vac. Sci. Technol. A 30(4), 040802 (2012).
[Crossref]

Du, H.

H. Du, F. S. Chau, and G. Zhou, “Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuator,” Micromachines (Basel) 7(4), 69 (2016).
[Crossref]

Dündar, M. A.

L. Midolo, P. J. van Veldhoven, M. A. Dündar, R. Nötzel, and A. Fiore, “Electromechanical wavelength tuning of double-membrane photonic crystal cavities,” Appl. Phys. Lett. 98(21), 211120 (2011).
[Crossref]

Elam, J. W.

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

Fiore, A.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits,” Laser Photonics Rev. 10(6), 870–894 (2016).
[Crossref]

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

L. Midolo and A. Fiore, “Design and optical properties of electromechanical double-membrane photonic crystal cavities,” IEEE J. Quantum Electron. 50(6), 404–414 (2014).
[Crossref]

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

L. Midolo, P. J. van Veldhoven, M. A. Dündar, R. Nötzel, and A. Fiore, “Electromechanical wavelength tuning of double-membrane photonic crystal cavities,” Appl. Phys. Lett. 98(21), 211120 (2011).
[Crossref]

Francardi, M.

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Frank, I. W.

George, S. M.

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

Gerardino, A.

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Hierold, C.

T. Süss, P. Braeuninger-Weimer, and C. Hierold, “Stress reduction in ultra-small thin film Al2O3 diaphragms by atomic layer deposition,” Sens. Actuators A Phys. 212, 159–164 (2014).
[Crossref]

Hoang, T. B.

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

Höfling, S.

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits,” Laser Photonics Rev. 10(6), 870–894 (2016).
[Crossref]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

Hoivik, N. D.

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

Kamp, M.

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits,” Laser Photonics Rev. 10(6), 870–894 (2016).
[Crossref]

Kessels, W. M. M.

G. Dingemans and W. M. M. Kessels, “Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells,” J. Vac. Sci. Technol. A 30(4), 040802 (2012).
[Crossref]

Kiravittaya, S.

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Lee, H. S.

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Lee, Y. C.

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

Leijssen, R.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

Lermer, M.

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

Li, L. H.

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Linderman, R. J.

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

Linfield, E. H.

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

Lodahl, P.

P. Lodahl, S. Mahmoodian, and S. Stobbe, “Interfacing single photons and single quantum dots with photonic nanostructures,” Rev. Mod. Phys. 87(2), 347–400 (2015).
[Crossref]

Loke, Y. C.

Loncar, M.

Maboudian, R.

R. Maboudian, W. R. Ashurst, and C. Carraro, “Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments,” Sens. Actuators A Phys. 82(1–3), 219–223 (2000).
[Crossref]

Mahmoodian, S.

P. Lodahl, S. Mahmoodian, and S. Stobbe, “Interfacing single photons and single quantum dots with photonic nanostructures,” Rev. Mod. Phys. 87(2), 347–400 (2015).
[Crossref]

McCutcheon, M. W.

Meenehan, S.

R. Perahia, J. D. Cohen, S. Meenehan, T. M. Alegre, and O. Painter, “Electrostatically tunable optomechanical “zipper” cavity laser,” Appl. Phys. Lett. 97(19), 191112 (2010).
[Crossref]

Meng, G.

W. M. Zhang, H. Yan, Z. K. Peng, and G. Meng, “Electrostatic pull-in instability in MEMS/NEMS: A review,” Sens. Actuators A Phys. 214, 187–218 (2014).
[Crossref]

Midolo, L.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

L. Midolo and A. Fiore, “Design and optical properties of electromechanical double-membrane photonic crystal cavities,” IEEE J. Quantum Electron. 50(6), 404–414 (2014).
[Crossref]

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

L. Midolo, P. J. van Veldhoven, M. A. Dündar, R. Nötzel, and A. Fiore, “Electromechanical wavelength tuning of double-membrane photonic crystal cavities,” Appl. Phys. Lett. 98(21), 211120 (2011).
[Crossref]

Nötzel, R.

L. Midolo, P. J. van Veldhoven, M. A. Dündar, R. Nötzel, and A. Fiore, “Electromechanical wavelength tuning of double-membrane photonic crystal cavities,” Appl. Phys. Lett. 98(21), 211120 (2011).
[Crossref]

Pagliano, F.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

Pagliano, F. M.

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

Painter, O.

R. Perahia, J. D. Cohen, S. Meenehan, T. M. Alegre, and O. Painter, “Electrostatically tunable optomechanical “zipper” cavity laser,” Appl. Phys. Lett. 97(19), 191112 (2010).
[Crossref]

Peng, Z. K.

W. M. Zhang, H. Yan, Z. K. Peng, and G. Meng, “Electrostatic pull-in instability in MEMS/NEMS: A review,” Sens. Actuators A Phys. 214, 187–218 (2014).
[Crossref]

Perahia, R.

R. Perahia, J. D. Cohen, S. Meenehan, T. M. Alegre, and O. Painter, “Electrostatically tunable optomechanical “zipper” cavity laser,” Appl. Phys. Lett. 97(19), 191112 (2010).
[Crossref]

Petruzzella, M.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

Rastelli, A.

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Schmidt, O. G.

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

Stobbe, S.

P. Lodahl, S. Mahmoodian, and S. Stobbe, “Interfacing single photons and single quantum dots with photonic nanostructures,” Rev. Mod. Phys. 87(2), 347–400 (2015).
[Crossref]

Süss, T.

T. Süss, P. Braeuninger-Weimer, and C. Hierold, “Stress reduction in ultra-small thin film Al2O3 diaphragms by atomic layer deposition,” Sens. Actuators A Phys. 212, 159–164 (2014).
[Crossref]

Tang, X.

Thompson, M. G.

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits,” Laser Photonics Rev. 10(6), 870–894 (2016).
[Crossref]

van der Heijden, R. W.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

van Otten, F. W.

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

van Otten, F. W. M.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

van Veldhoven, P. J.

L. Midolo, P. J. van Veldhoven, M. A. Dündar, R. Nötzel, and A. Fiore, “Electromechanical wavelength tuning of double-membrane photonic crystal cavities,” Appl. Phys. Lett. 98(21), 211120 (2011).
[Crossref]

Verhagen, E.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

Xia, T.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

L. Midolo, S. N. Yoon, F. Pagliano, T. Xia, F. W. van Otten, M. Lermer, S. Höfling, and A. Fiore, “Electromechanical tuning of vertically-coupled photonic crystal nanobeams,” Opt. Express 20(17), 19255–19263 (2012).
[Crossref] [PubMed]

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

Yan, H.

W. M. Zhang, H. Yan, Z. K. Peng, and G. Meng, “Electrostatic pull-in instability in MEMS/NEMS: A review,” Sens. Actuators A Phys. 214, 187–218 (2014).
[Crossref]

Yoon, S. N.

Zhang, W. M.

W. M. Zhang, H. Yan, Z. K. Peng, and G. Meng, “Electrostatic pull-in instability in MEMS/NEMS: A review,” Sens. Actuators A Phys. 214, 187–218 (2014).
[Crossref]

Zhou, G.

H. Du, F. S. Chau, and G. Zhou, “Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuator,” Micromachines (Basel) 7(4), 69 (2016).
[Crossref]

X. Chew, G. Zhou, F. S. Chau, J. Deng, X. Tang, and Y. C. Loke, “Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities,” Opt. Lett. 35(15), 2517–2519 (2010).
[Crossref] [PubMed]

Zobenica, Z.

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

Zobenica, Ž.

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

Appl. Phys. Lett. (4)

L. Midolo, F. M. Pagliano, T. B. Hoang, T. Xia, F. W. van Otten, L. H. Li, E. H. Linfield, M. Lermer, S. Höfling, and A. Fiore, “Spontaneous emission control of single quantum dots by electromechanical tuning of a photonic crystal cavity,” Appl. Phys. Lett. 101(9), 091106 (2012).
[Crossref]

M. Petruzzella, T. Xia, F. M. Pagliano, S. Birindelli, L. Midolo, Z. Zobenica, L. H. Li, E. H. Linfield, and A. Fiore, “Fully tuneable, Purcell-enhanced solid-state quantum emitters,” Appl. Phys. Lett. 107(14), 141109 (2015).
[Crossref]

R. Perahia, J. D. Cohen, S. Meenehan, T. M. Alegre, and O. Painter, “Electrostatically tunable optomechanical “zipper” cavity laser,” Appl. Phys. Lett. 97(19), 191112 (2010).
[Crossref]

L. Midolo, P. J. van Veldhoven, M. A. Dündar, R. Nötzel, and A. Fiore, “Electromechanical wavelength tuning of double-membrane photonic crystal cavities,” Appl. Phys. Lett. 98(21), 211120 (2011).
[Crossref]

IEEE J. Quantum Electron. (1)

L. Midolo and A. Fiore, “Design and optical properties of electromechanical double-membrane photonic crystal cavities,” IEEE J. Quantum Electron. 50(6), 404–414 (2014).
[Crossref]

J. Appl. Phys. (1)

S. Kiravittaya, H. S. Lee, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, A. Rastelli, and O. G. Schmidt, “Tuning optical modes in slab photonic crystal by atomic layer deposition and laser-assisted oxidation,” J. Appl. Phys. 109(5), 053115 (2011).
[Crossref]

J. Vac. Sci. Technol. A (1)

G. Dingemans and W. M. M. Kessels, “Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells,” J. Vac. Sci. Technol. A 30(4), 040802 (2012).
[Crossref]

Laser Photonics Rev. (1)

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: Towards compact and multi‐functional quantum photonic integrated circuits,” Laser Photonics Rev. 10(6), 870–894 (2016).
[Crossref]

Micromachines (Basel) (2)

F. Chollet, “Devices based on co-integrated MEMS actuators and optical waveguide: A review,” Micromachines (Basel) 7(2), 18 (2016).
[Crossref]

H. Du, F. S. Chau, and G. Zhou, “Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuator,” Micromachines (Basel) 7(4), 69 (2016).
[Crossref]

Nat. Commun. (1)

Ž. Zobenica, R. W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y. Cho, F. W. M. van Otten, E. Verhagen, and A. Fiore, “Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology,” Nat. Commun. 8(1), 2216 (2017).
[Crossref] [PubMed]

Opt. Express (2)

Opt. Lett. (1)

Rev. Mod. Phys. (1)

P. Lodahl, S. Mahmoodian, and S. Stobbe, “Interfacing single photons and single quantum dots with photonic nanostructures,” Rev. Mod. Phys. 87(2), 347–400 (2015).
[Crossref]

Sens. Actuators A Phys. (4)

W. M. Zhang, H. Yan, Z. K. Peng, and G. Meng, “Electrostatic pull-in instability in MEMS/NEMS: A review,” Sens. Actuators A Phys. 214, 187–218 (2014).
[Crossref]

R. Maboudian, W. R. Ashurst, and C. Carraro, “Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments,” Sens. Actuators A Phys. 82(1–3), 219–223 (2000).
[Crossref]

N. D. Hoivik, J. W. Elam, R. J. Linderman, V. M. Bright, S. M. George, and Y. C. Lee, “Atomic layer deposited protective coatings for micro-electromechanical systems,” Sens. Actuators A Phys. 103(1–2), 100–108 (2003).
[Crossref]

T. Süss, P. Braeuninger-Weimer, and C. Hierold, “Stress reduction in ultra-small thin film Al2O3 diaphragms by atomic layer deposition,” Sens. Actuators A Phys. 212, 159–164 (2014).
[Crossref]

Other (1)

F. W. DelRio, C. F. Herrmann, N. Hoivik, S. M. George, V. M. Bright, J. L. Ebel, R. E. Strawser, R. Cortez, and K. D. Leedy, “Atomic layer deposition of Al2O3/ZnO nano-scale films for gold RF MEMS,” Microwave Symposium Digest, I.E.E.E. M.T.T.S. Int. Microw. Symp. 3, 1923–1926 (2004).

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Figures (6)

Fig. 1
Fig. 1 Artistic sketches of the uncoated (a) and coated (b) NOEMS composed of two vertically-coupled PhC membranes. (c) Calculated effective refractive index of the symmetric (s) and anti-symmetric (as) modes, with (‘o’ superscript) and without (‘c’ superscript) coating. (d) Measured effect of the alumina coating on the optical properties of the photonic crystal cavity (device A). A red-shift with a different magnitude is observed for the fundamental s- and as- modes.
Fig. 2
Fig. 2 Electromechanical tuning of the dual-membrane PhC cavity (device B). The cavity voltage is varied from 0 to −8.5 V and then back (label ‘R’) to 0 V. The pull-in instability appears as a jump in the photo-luminesce spectra at VCAV = −7.5 V. The device can be operated back to the normal actuation when VCAV = −5 V. The dashed lines are guides for the eye.
Fig. 3
Fig. 3 Investigation of the static pull-in via cross-section scanning electron images analysis. (a) Tilted SEM view of the device along with a pair of needles employed for the cavity actuation. (b) and (c) SEM cross-sections, when VCAV is set to 0 V and −14 V, respectively. (e) and (f) cross-sectional SEM images, after opening a large cut at the center of bridge (d) when the device C is operated from −13 V to 0 V, respectively. The red arrows indicate the positions of the membranes. Note, that the layer of alumina is visible and thicker than the one measured by ellipsometry due the re-deposition of this material during the FIB cut.
Fig. 4
Fig. 4 (Top) Optical microscope images of the device A when it is actuated from 0 V (release) to −10 V (pull-in) with a period T = 1s. (Bottom) PL spectra of the L3 cavity after 0, 2, 50 and 1000 cycles.
Fig. 5
Fig. 5 Operation of the PhC NOEMS (device B) as a digital switch between two opto-mechanical states. (left) PhC modes during the static actuation. The blue and the red curves correspond to the PL spectra acquired at V CAV =5 V and V CAV =10 V, respectively, while the black curve represents their sum.(right) PL spectra from pull-in to release status integrated over 500,000 cycles with a modulation frequency of 100 kHz.
Fig. 6
Fig. 6 Dynamical modulation experiment carried on a coated (a,b) and an uncoated (c,d) NOEMS. (a) and (c) photo-luminescence color-coded map obtained under the application of an AC bias for a coated and uncoated device, respectively.(b) and (d) normalized PL spectra of the unbiased coated and uncoated devices, respectively, collected after the modulation experiment.

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