Abstract

Visual arts and entertainment related industries are continuously looking at promising innovative technologies to improve users’ experience with state-of-the-art visualization platforms. This requires further developments on pixel resolution and device miniaturization which can be achieved, for instance, with high contrast materials, such as crystalline silicon (c-Si). Here, a new broadband stereoscopic hologram metasurface is introduced, where independent phase control is achieved for two orthogonal polarizations in the visible spectrum. The holograms are fabricated with a birefringent metasurface consisting of elliptical c-Si nanoposts on Sapphire substrate. Two holograms are combined on the same metasurface (one for each polarization) where each is encoded with four phase levels. The theoretical bandwidth is 110 nm with a signal to noise ratio (SNR) >15 dB. The stereoscopic view is obtained with a pair of cross-polarized filters in front of the observers’ eyes. The measured transmission and diffraction efficiencies are about 70% and 15%, respectively, at 532 nm (the design wavelength). The metasurfaces are also investigated at 444.9 nm and 635 nm to experimentally assess their bandwidth performance. The stereoscopic effect is surprisingly good at 444.9 nm (and less so at 635 nm) with transmission and diffraction efficiencies around 70% and 18%, respectively.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2018 (7)

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

G. Yoon, D. Lee, K. T. Nam, and J. Rho, “Pragmatic metasurface hologram at visible wavelength: the balance between diffraction efficiency and fabrication compatibility,” ACS Photonics 5(5), 1643–1647 (2018).

Y. Deng, X. Wang, Z. Gong, K. Dong, S. Lou, N. Pégard, K. B. Tom, F. Yang, Z. You, L. Waller, and J. Yao, “All-Silicon Broadband Ultraviolet Metasurfaces,” Adv. Mater. 30(38), e1802632 (2018).
[Crossref] [PubMed]

Z. Li, T. Zhang, Y. Wang, W. Kong, J. Zhang, Y. Huang, C. Wang, X. Li, M. Pu, and X. Luo, “Achromatic Broadband super‐resolution imaging by super‐oscillatory metasurface,” Laser Photonics Rev. 12(10), 1800064 (2018).

A. Martins, J. Li, A. F. da Mota, Y. Wang, L. G. Neto, J. P. do Carmo, F. L. Teixeira, E. R. Martins, and B. V. Borges, “Highly efficient holograms based on c-Si metasurfaces in the visible range,” Opt. Express 26(8), 9573–9583 (2018).
[Crossref] [PubMed]

F. F. Qin, Z. Z. Liu, Z. Zhang, Q. Zhang, and J. J. Xiao, “Broadband full-color multichannel hologram with geometric metasurface,” Opt. Express 26(9), 11577–11586 (2018).
[Crossref] [PubMed]

J. Deng, Z. Li, G. Zheng, J. Tao, Q. Dai, L. Deng, P. He, Q. Deng, and Q. Mao, “Depth perception based 3D holograms enabled with polarization-independent metasurfaces,” Opt. Express 26(9), 11843–11849 (2018).
[Crossref] [PubMed]

2017 (5)

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient silicon metasurfaces for visible light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Y. Kivshar and A. Miroshnichenko, “Meta-optics with Mie resonances,” Opt. Photonics News 28(1), 24–31 (2017).
[Crossref]

2016 (13)

W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ metasurface for high-efficiency hologram operating in transmission mode,” Sci. Rep. 6(1), 30613 (2016).
[Crossref] [PubMed]

S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
[Crossref]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W.-T. Chen, A. Y. Zhu, J. Oh, R. C. Devlin, D. Rousso, and F. Capasso, “Multispectral chiral imaging with a metalens,” Nano Lett. 16(7), 4595–4600 (2016).
[Crossref] [PubMed]

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

W. Wan, J. Gao, and X. Yang, “Full-color plasmonic metasurface holograms,” ACS Nano 10(12), 10671–10680 (2016).
[Crossref] [PubMed]

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi‐meta‐holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

W. Zhao, B. Liu, H. Jiang, J. Song, Y. Pei, and Y. Jiang, “Full-color hologram using spatial multiplexing of dielectric metasurface,” Opt. Lett. 41(1), 147–150 (2016).
[Crossref] [PubMed]

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

L. Wang, S. Kruk, H. Tang, T. Li, I. Kravchenko, D. N. Neshev, and Y. S. Kivshar, “Grayscale transparent metasurface holograms,” Optica 3(12), 1504–1505 (2016).
[Crossref] [PubMed]

2015 (13)

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6(1), 7069 (2015).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
[Crossref] [PubMed]

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6(1), 8241 (2015).
[Crossref] [PubMed]

Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Applied optics. Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref] [PubMed]

Y. F. Yu, A. Y. Zhu, R. Paniagua‐Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High‐transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

H. Pang, S. Yin, Q. Deng, Q. Qiu, and C. Du, “A novel method for the design of diffractive optical elements based on the Rayleigh–Sommerfeld integral,” Opt. Lasers Eng. 70, 38–44 (2015).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

2014 (4)

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Y. Zhao, X.-X. Liu, and A. Alù, “Recent advances on optical metasurfaces,” J. Opt. 16(12), 123001 (2014).
[Crossref]

Y. Yifat, M. Eitan, Z. Iluz, Y. Hanein, A. Boag, and J. Scheuer, “Highly efficient and broadband wide-angle holography using patch-dipole nanoantenna reflectarrays,” Nano Lett. 14(5), 2485–2490 (2014).
[Crossref] [PubMed]

2013 (2)

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. 4(1), 2807 (2013).
[Crossref]

2012 (2)

F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-plane reflection and refraction of light by anisotropic optical antenna metasurfaces with phase discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
[Crossref] [PubMed]

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

2011 (1)

E. Schonbrun, K. Seo, and K. B. Crozier, “Reconfigurable imaging systems using elliptical nanowires,” Nano Lett. 11(10), 4299–4303 (2011).
[Crossref] [PubMed]

1999 (1)

D. M. Whittaker and I. S. Culshaw, “Scattering-matrix treatment of patterned multilayer photonic structures,” Phys. Rev. B Condens. Matter Mater. Phys. 60(4), 2610–2618 (1999).
[Crossref]

1988 (1)

1983 (1)

D. E. Aspnes and A. Studna, “Dielectric functions and optical parameters of si, ge, gap, gaas, gasb, inp, inas, and insb from 1.5 to 6.0 ev,” Phys. Rev. B Condens. Matter 27(2), 985–1009 (1983).
[Crossref]

1972 (1)

R. W. Gerchberg and W. O. Saxton, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik (Stuttg.) 35, 237–246 (1972).

1962 (1)

Aieta, F.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Applied optics. Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-plane reflection and refraction of light by anisotropic optical antenna metasurfaces with phase discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
[Crossref] [PubMed]

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

Alù, A.

Y. Zhao, X.-X. Liu, and A. Alù, “Recent advances on optical metasurfaces,” J. Opt. 16(12), 123001 (2014).
[Crossref]

Arbabi, A.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6(1), 7069 (2015).
[Crossref] [PubMed]

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

Aspnes, D. E.

D. E. Aspnes and A. Studna, “Dielectric functions and optical parameters of si, ge, gap, gaas, gasb, inp, inas, and insb from 1.5 to 6.0 ev,” Phys. Rev. B Condens. Matter 27(2), 985–1009 (1983).
[Crossref]

Bagheri, M.

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6(1), 7069 (2015).
[Crossref] [PubMed]

Ball, A. J.

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6(1), 7069 (2015).
[Crossref] [PubMed]

Balthasar Mueller, J. P.

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

Blanchard, R.

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

Boag, A.

Y. Yifat, M. Eitan, Z. Iluz, Y. Hanein, A. Boag, and J. Scheuer, “Highly efficient and broadband wide-angle holography using patch-dipole nanoantenna reflectarrays,” Nano Lett. 14(5), 2485–2490 (2014).
[Crossref] [PubMed]

Boltasseva, A.

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Borges, B. V.

Brener, I.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

Briggs, D. P.

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

Briggs, R. M.

Bryngdahl, O.

Campione, S.

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Capasso, F.

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

M. Khorasaninejad, W.-T. Chen, A. Y. Zhu, J. Oh, R. C. Devlin, D. Rousso, and F. Capasso, “Multispectral chiral imaging with a metalens,” Nano Lett. 16(7), 4595–4600 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Applied optics. Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref] [PubMed]

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-plane reflection and refraction of light by anisotropic optical antenna metasurfaces with phase discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
[Crossref] [PubMed]

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

Chan, K.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6(1), 8241 (2015).
[Crossref] [PubMed]

Cheah, K. W.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6(1), 8241 (2015).
[Crossref] [PubMed]

Chen, B. H.

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chen, J.

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

Chen, J.-W.

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chen, M.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6(1), 8241 (2015).
[Crossref] [PubMed]

Chen, S.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6(1), 8241 (2015).
[Crossref] [PubMed]

Chen, W. T.

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

Chen, W.-T.

M. Khorasaninejad, W.-T. Chen, A. Y. Zhu, J. Oh, R. C. Devlin, D. Rousso, and F. Capasso, “Multispectral chiral imaging with a metalens,” Nano Lett. 16(7), 4595–4600 (2016).
[Crossref] [PubMed]

Chen, X.

D. Wen, F. Yue, G. Li, G. Zheng, K. Chan, S. Chen, M. Chen, K. F. Li, P. W. H. Wong, K. W. Cheah, E. Y. Pun, S. Zhang, and X. Chen, “Helicity multiplexed broadband metasurface holograms,” Nat. Commun. 6(1), 8241 (2015).
[Crossref] [PubMed]

Chen, Y. H.

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chong, K. E.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Chu, C. H.

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chu, W.

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

Crozier, K. B.

E. Schonbrun, K. Seo, and K. B. Crozier, “Reconfigurable imaging systems using elliptical nanowires,” Nano Lett. 11(10), 4299–4303 (2011).
[Crossref] [PubMed]

Culshaw, I. S.

D. M. Whittaker and I. S. Culshaw, “Scattering-matrix treatment of patterned multilayer photonic structures,” Phys. Rev. B Condens. Matter Mater. Phys. 60(4), 2610–2618 (1999).
[Crossref]

da Mota, A. F.

Dai, Q.

Decker, M.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

Deng, J.

Deng, L.

Deng, Q.

J. Deng, Z. Li, G. Zheng, J. Tao, Q. Dai, L. Deng, P. He, Q. Deng, and Q. Mao, “Depth perception based 3D holograms enabled with polarization-independent metasurfaces,” Opt. Express 26(9), 11843–11849 (2018).
[Crossref] [PubMed]

H. Pang, S. Yin, Q. Deng, Q. Qiu, and C. Du, “A novel method for the design of diffractive optical elements based on the Rayleigh–Sommerfeld integral,” Opt. Lasers Eng. 70, 38–44 (2015).
[Crossref]

Deng, Y.

Y. Deng, X. Wang, Z. Gong, K. Dong, S. Lou, N. Pégard, K. B. Tom, F. Yang, Z. You, L. Waller, and J. Yao, “All-Silicon Broadband Ultraviolet Metasurfaces,” Adv. Mater. 30(38), e1802632 (2018).
[Crossref] [PubMed]

Devlin, R.

Devlin, R. C.

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

M. Khorasaninejad, W.-T. Chen, A. Y. Zhu, J. Oh, R. C. Devlin, D. Rousso, and F. Capasso, “Multispectral chiral imaging with a metalens,” Nano Lett. 16(7), 4595–4600 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

do Carmo, J. P.

Dominguez, J.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

Dong, F.

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

Dong, K.

Y. Deng, X. Wang, Z. Gong, K. Dong, S. Lou, N. Pégard, K. B. Tom, F. Yang, Z. You, L. Waller, and J. Yao, “All-Silicon Broadband Ultraviolet Metasurfaces,” Adv. Mater. 30(38), e1802632 (2018).
[Crossref] [PubMed]

Dong, Z.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi‐meta‐holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

Doshay, S.

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
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W. Wan, J. Gao, and X. Yang, “Full-color plasmonic metasurface holograms,” ACS Nano 10(12), 10671–10680 (2016).
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Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
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H. Pang, S. Yin, Q. Deng, Q. Qiu, and C. Du, “A novel method for the design of diffractive optical elements based on the Rayleigh–Sommerfeld integral,” Opt. Lasers Eng. 70, 38–44 (2015).
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Figures (8)

Fig. 1
Fig. 1 (a) Schematic of the unit cell for high birefringent contrast grating (not to scale). Transmission efficiency (b) (dimensionless) and relative phase maps (c) in units of rad/2π of the c-Si nanopost array as function of the structure’s semi-axes for light polarized along x. (d) and (e) represent analogous results for light polarized along y. The transmitted phase difference (Φx - Φy) in units of rad/2π is shown in (f). The operating wavelength is 532 nm in all cases. The colored symbols represent the map boundaries for achieving four phase levels. Their correspondences are listed in Table 1. The stars mark the chosen structures inside each region.
Fig. 2
Fig. 2 Averaged phase (a) [(c)] and transmission (b) [(d)] of the unperturbed [perturbed, semi-axes reduced by 20 nm] structures designed to give relative phase levels of 0 (red), 0.25 (blue), 0.5 (black) and 0.75 (green) rad(2π)−1. The average is taken over the spectra of metasurfaces that provide the same phase level Φx (a similar plot can be obtained for Φy) at 532 nm according to Table 2. The error bars indicate the phase and transmission standard deviations of the average values.
Fig. 3
Fig. 3 (a) and (b) show the measurement setup used for the holograms’ image reconstruction and power measurements, respectively. Note in (a) that the lenses L1 and L2 are arranged as a Keplerian telescope. (c) and (d) are the metasurface’s SEM micrographs, whose scale bars represent 200 nm and 500 nm, respectively.
Fig. 4
Fig. 4 Concept of the two birefringent c-Si metasurfaces. Design 1 consists of two different target images (A encoded for x- and B for y-polarization) with the purpose of accessing the efficiency and polarization cross talk of both images. Design 2 consists of two similar parallax-separated images (C encoded for x- and D for y-polarization) for 3D stereoscopic reconstruction.
Fig. 5
Fig. 5 (a) and (b) show the Transmission (dashed lines) and diffraction efficiencies spectra (continuous and dotted lines for CGH A and B, respectively) with (a) referring to the unperturbed design and (b) to the design reduced by 20 nm. The transmission efficiency spectra of A and B are overlapped. SNR of the unperturbed (c) and reduced (d) designs. The continuous and dotted lines refer to the result of CGHs A and B, respectively.
Fig. 6
Fig. 6 Experimental reconstructions of metasurfaces D1 for (a) x- and (d) y- polarized light. (b) and (e) [(c) and (f)] show the numerical reconstructions of the unperturbed [perturbed] metasurface. The reconstructions are taken 20 cm away from the metasurface. These images are not stereoscopic and are used to assess polarization cross-talk. The operating wavelength is 532 nm.
Fig. 7
Fig. 7 Experimental reconstructions of each image from the holographic stereogram for (a) x- and (b) y-polarized light. The reconstructions are taken 20 cm away from the metasurface. The operating wavelength is 532 nm.
Fig. 8
Fig. 8 Experimental reconstructions for x- (first row) and y- (second row) polarized light at 444.9 nm (first two columns) and 635 nm (last two columns). The reconstructions are taken 20 cm away from the metasurface. (a), (e), (c) and (g) are not stereoscopic and are used to assess polarization cross-talk. (b), (f), (d) and (h) are obtained from the holographic stereogram.

Tables (4)

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Table 1 Symbol definition relative to Figs. 2(b) –2(f). Each color (symbol) corresponds to a relative phase level obtained for electric field polarized along x or y direction.

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Table 2 Target and obtained phase and transmission values of each pixel with four phase level control at 532 nm. The chosen structures are marked with white stars in Figs. 1(b)-1(f).

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Table 3 Measured (calculated for the design reduced by 20 nm) efficiencies at the holograms’ reconstruction plane operating at 532 nm.

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Table 4 Measured (calculated for the design reduced by 20 nm) efficiencies at the holograms’ reconstruction plane at 444.9 nm and 635 nm.