Abstract

Cavity Resonator Grating Filters (CRIGFs) working in the Mid-Infrared are reported, with narrow-band resonant reflectivity peaks around 2200 cm−1 (4.6 µm). They are fabricated in the GaAs/AlGaAs material system that can potentially cover the whole [1-12] µm spectral range. TE-polarized peak reflectivity is 30% with a 4 cm−1 full width at half maximum.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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High-order modes in cavity-resonator-integrated guided-mode resonance filters (CRIGFs)

R. Laberdesque, O. Gauthier-Lafaye, H. Camon, A. Monmayrant, M. Petit, O. Demichel, and B. Cluzel
J. Opt. Soc. Am. A 32(11) 1973-1981 (2015)

Cavity-resonator-integrated guided-mode resonance filter for aperture miniaturization

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References

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  1. K. Kintaka, T. Majima, J. Inoue, K. Hatanaka, J. Nishii, and S. Ura, “Cavity-resonator-integrated guided-mode resonance filter for aperture miniaturization,” Opt. Express 20, 1444–1449 (2012).
    [Crossref] [PubMed]
  2. S. Tibuleac and R. Magnusson, “Reflection and transmission guided-mode resonance filters,” J. Opt. Soc. Am. A 14, 1617–1626 (1997).
    [Crossref]
  3. R. Laberdesque, O. Gauthier-Lafaye, H. Camon, A. Monmayrant, M. Petit, O. Demichel, and B. Cluzel, “High-order modes in cavity-resonator-integrated guided-mode resonance filters (crigfs),” J. Opt. Soc. Am. A 32, 1973–1981 (2015).
    [Crossref]
  4. N. Rassem, A.-L. Fehrembach, and E. Popov, “Waveguide mode in the box with an extraordinary flat dispersion curve,” J. Opt. Soc. Am. A 32, 420 (2015).
    [Crossref]
  5. X. Buet, E. Daran, D. Belharet, F. Lozes-Dupuy, A. Monmayrant, and O. Gauthier-Lafaye, “High angular tolerance and reflectivity with narrow bandwidth cavity-resonator-integrated guided-mode resonance filter,” Opt. Express 20, 9322–9327 (2012).
    [Crossref] [PubMed]
  6. K. Kintaka, K. Shimizu, Y. Kita, S. Kawanami, J. Inoue, S. Ura, and J. Nishii, “Potential characterization of free-space-wave drop demultiplexer using cavity-resonator-integrated grating input/output coupler,” Opt. Express 18, 25108 (2010).
    [Crossref] [PubMed]
  7. S. Ura, K. Shimizu, Y. Kita, K. Kintaka, J. Inoue, and Y. Awatsuji, “Integrated-optic free-space-wave coupler for package-level on-board optical interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 590–596 (2011).
    [Crossref]
  8. X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
    [Crossref]
  9. K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).
  10. N. Rassem, E. Popov, and A.-L. Fehrembach, “Numerical modeling of long sub-wavelength patterned structures,” Opt. Quantum Electron. 47, 3171–3180 (2015).
    [Crossref]
  11. S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
    [Crossref]
  12. A. Yariv, “Universal relations for coupling of optical power between microresonators and dielectric waveguides,” Electron. Lett. 36, 321 (2000).
    [Crossref]

2015 (3)

2012 (3)

2011 (1)

S. Ura, K. Shimizu, Y. Kita, K. Kintaka, J. Inoue, and Y. Awatsuji, “Integrated-optic free-space-wave coupler for package-level on-board optical interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 590–596 (2011).
[Crossref]

2010 (1)

2000 (1)

A. Yariv, “Universal relations for coupling of optical power between microresonators and dielectric waveguides,” Electron. Lett. 36, 321 (2000).
[Crossref]

1997 (1)

Arguel, P.

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

Augé, S.

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

Awatsuji, Y.

S. Ura, K. Shimizu, Y. Kita, K. Kintaka, J. Inoue, and Y. Awatsuji, “Integrated-optic free-space-wave coupler for package-level on-board optical interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 590–596 (2011).
[Crossref]

Belharet, D.

Bonnefont, S.

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

Buet, X.

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

X. Buet, E. Daran, D. Belharet, F. Lozes-Dupuy, A. Monmayrant, and O. Gauthier-Lafaye, “High angular tolerance and reflectivity with narrow bandwidth cavity-resonator-integrated guided-mode resonance filter,” Opt. Express 20, 9322–9327 (2012).
[Crossref] [PubMed]

Calvez, S.

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

Camon, H.

R. Laberdesque, O. Gauthier-Lafaye, H. Camon, A. Monmayrant, M. Petit, O. Demichel, and B. Cluzel, “High-order modes in cavity-resonator-integrated guided-mode resonance filters (crigfs),” J. Opt. Soc. Am. A 32, 1973–1981 (2015).
[Crossref]

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

Chan Shin Yu, K.

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

Cluzel, B.

Daran, E.

Demichel, O.

Doucet, J.-B.

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

Fehrembach, A. -.

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

Fehrembach, A.-L.

N. Rassem, E. Popov, and A.-L. Fehrembach, “Numerical modeling of long sub-wavelength patterned structures,” Opt. Quantum Electron. 47, 3171–3180 (2015).
[Crossref]

N. Rassem, A.-L. Fehrembach, and E. Popov, “Waveguide mode in the box with an extraordinary flat dispersion curve,” J. Opt. Soc. Am. A 32, 420 (2015).
[Crossref]

Gauthier-Lafaye, O.

R. Laberdesque, O. Gauthier-Lafaye, H. Camon, A. Monmayrant, M. Petit, O. Demichel, and B. Cluzel, “High-order modes in cavity-resonator-integrated guided-mode resonance filters (crigfs),” J. Opt. Soc. Am. A 32, 1973–1981 (2015).
[Crossref]

X. Buet, E. Daran, D. Belharet, F. Lozes-Dupuy, A. Monmayrant, and O. Gauthier-Lafaye, “High angular tolerance and reflectivity with narrow bandwidth cavity-resonator-integrated guided-mode resonance filter,” Opt. Express 20, 9322–9327 (2012).
[Crossref] [PubMed]

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

Guelmami, A.

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

Hatanaka, K.

Héliot, A.

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

Inoue, J.

Kawanami, S.

Kintaka, K.

Kita, Y.

S. Ura, K. Shimizu, Y. Kita, K. Kintaka, J. Inoue, and Y. Awatsuji, “Integrated-optic free-space-wave coupler for package-level on-board optical interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 590–596 (2011).
[Crossref]

K. Kintaka, K. Shimizu, Y. Kita, S. Kawanami, J. Inoue, S. Ura, and J. Nishii, “Potential characterization of free-space-wave drop demultiplexer using cavity-resonator-integrated grating input/output coupler,” Opt. Express 18, 25108 (2010).
[Crossref] [PubMed]

Laberdesque, R.

Lozes-Dupuy, F.

X. Buet, E. Daran, D. Belharet, F. Lozes-Dupuy, A. Monmayrant, and O. Gauthier-Lafaye, “High angular tolerance and reflectivity with narrow bandwidth cavity-resonator-integrated guided-mode resonance filter,” Opt. Express 20, 9322–9327 (2012).
[Crossref] [PubMed]

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

Magnusson, R.

Majima, T.

Monmayrant, A.

R. Laberdesque, O. Gauthier-Lafaye, H. Camon, A. Monmayrant, M. Petit, O. Demichel, and B. Cluzel, “High-order modes in cavity-resonator-integrated guided-mode resonance filters (crigfs),” J. Opt. Soc. Am. A 32, 1973–1981 (2015).
[Crossref]

X. Buet, E. Daran, D. Belharet, F. Lozes-Dupuy, A. Monmayrant, and O. Gauthier-Lafaye, “High angular tolerance and reflectivity with narrow bandwidth cavity-resonator-integrated guided-mode resonance filter,” Opt. Express 20, 9322–9327 (2012).
[Crossref] [PubMed]

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

Nishii, J.

Pelloquin, S.

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

Petit, M.

Popov, E.

N. Rassem, A.-L. Fehrembach, and E. Popov, “Waveguide mode in the box with an extraordinary flat dispersion curve,” J. Opt. Soc. Am. A 32, 420 (2015).
[Crossref]

N. Rassem, E. Popov, and A.-L. Fehrembach, “Numerical modeling of long sub-wavelength patterned structures,” Opt. Quantum Electron. 47, 3171–3180 (2015).
[Crossref]

Rassem, N.

N. Rassem, E. Popov, and A.-L. Fehrembach, “Numerical modeling of long sub-wavelength patterned structures,” Opt. Quantum Electron. 47, 3171–3180 (2015).
[Crossref]

N. Rassem, A.-L. Fehrembach, and E. Popov, “Waveguide mode in the box with an extraordinary flat dispersion curve,” J. Opt. Soc. Am. A 32, 420 (2015).
[Crossref]

Sentenac, A.

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

Sharshavina, K.

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

Shimizu, K.

S. Ura, K. Shimizu, Y. Kita, K. Kintaka, J. Inoue, and Y. Awatsuji, “Integrated-optic free-space-wave coupler for package-level on-board optical interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 590–596 (2011).
[Crossref]

K. Kintaka, K. Shimizu, Y. Kita, S. Kawanami, J. Inoue, S. Ura, and J. Nishii, “Potential characterization of free-space-wave drop demultiplexer using cavity-resonator-integrated grating input/output coupler,” Opt. Express 18, 25108 (2010).
[Crossref] [PubMed]

Tibuleac, S.

Tourte, C.

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

Ura, S.

Yariv, A.

A. Yariv, “Universal relations for coupling of optical power between microresonators and dielectric waveguides,” Electron. Lett. 36, 321 (2000).
[Crossref]

Electron. Lett. (2)

X. Buet, A. Guelmami, A. Monmayrant, S. Calvez, C. Tourte, F. Lozes-Dupuy, and O. Gauthier-Lafaye, “Wavelengthstabilised external-cavity laser diode using cavity resonator integrated guided mode filter,” Electron. Lett. 48, 1619–1621 (2012).
[Crossref]

A. Yariv, “Universal relations for coupling of optical power between microresonators and dielectric waveguides,” Electron. Lett. 36, 321 (2000).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

S. Ura, K. Shimizu, Y. Kita, K. Kintaka, J. Inoue, and Y. Awatsuji, “Integrated-optic free-space-wave coupler for package-level on-board optical interconnects,” IEEE J. Sel. Top. Quantum Electron. 17, 590–596 (2011).
[Crossref]

J. Opt. Soc. Am. A (3)

Opt. Express (3)

Opt. Quantum Electron. (1)

N. Rassem, E. Popov, and A.-L. Fehrembach, “Numerical modeling of long sub-wavelength patterned structures,” Opt. Quantum Electron. 47, 3171–3180 (2015).
[Crossref]

Other (2)

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, and O. Gauthier-Lafaye, “Soft mold nanoimprint lithography: a versatile tool for sub-wavelength grating applications,” Microsystem Technologies, in press (2018).
[Crossref]

K. Chan Shin Yu, A. -. Fehrembach, O. Gauthier-Lafaye, A. Monmayrant, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “Design of a mid infrared resonant grating filter,” CAS 2010 Proceedings (International Semiconductor Conference) 01, 151–154 (2010).

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Figures (5)

Fig. 1
Fig. 1 MIR CRIGF schematic, with side DRBs (red), phase shifting sections (PS, green) and central grating coupler (GC, blue). The structures as optimized numerically and as fabricated only differ by the composition and thickness of the low-index buffer layer.
Fig. 2
Fig. 2 (a) Calculated spectral reflection (red) and transmission (green) for the fabricated structure; (b) FIBE cut of the fabricated sample. The top platinum layer (Pt) is added during the cut and is not part of the final sample.
Fig. 3
Fig. 3 (a) Experimental spectral reflectivity of the same CRIGF, under TE illumination, for the 3 refractive objectives 18 mm (green), 12 mm (red), 6 mm (gray) together with a reference for a closed diaphragm (blue); (b) Experimental spectral reflectivity for TM-polarized (gray) and TE-polarized (green) incident beam using the 18-mm objective. The CRIGF is designed for TE polarization. Inset: zoom on the resonant peak. For both (a) and (b), the CRIGF geometry is ΛGC =1.44 µm, fGC =0.72, L PS =1.125 × Λ GC .
Fig. 4
Fig. 4 (a) Experimental spectral reflectivity for 3 CRIGFs with respective base period of 1.44, 1.46 and 1.48µm (fGC = 0.72, LPS = 1.125 Λ GC ); (b) Experimental spectral reflectivity for 3 CRIGFs with varying filling factors ×of the grating coupler. The CRIGF geometry is Λ GC = 1.44 µm, L PS = 1.125 × Λ GC . The 18-mm objective was used.
Fig. 5
Fig. 5 (a) SEM image of the sample and (b) map of the spatial reflectivity showing a localized mode under the grating coupler of the CRIGF (the white dashed rectangle is a guide to the eye for the grating coupler boundaries).

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