Abstract

Fabrication errors pose significant challenges on silicon photonics, promoting post-fabrication trimming technologies to ensure device performance. Conventional approaches involve multiple trimming and characterization steps, impacting overall fabrication complexity. Here we demonstrate a highly accurate trimming method combining laser annealing of germanium implanted silicon waveguide and real-time monitoring of device performance. Direct feedback of the trimming process is facilitated by a differential spectroscopic technique based on photomodulation. The resonant wavelength trimming accuracy is better than 0.15 nm for ring resonators with 20-µm radius. We also realize operating point trimming of Mach-Zehnder interferometers with germanium implanted arms. A phase shift of 1.2π is achieved by annealing a 7-μm implanted segment.

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  1. S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
    [Crossref] [PubMed]
  2. C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
    [Crossref] [PubMed]
  3. L. C. Kimerling, D. L. Kwong, and K. Wada, “Scaling computation with silicon photonics,” MRS Bull. 39(8), 687–695 (2014).
    [Crossref]
  4. K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
    [Crossref] [PubMed]
  5. M. C. Estevez, M. Alvarez, and L. M. Lechuga, “Integrated optical devices for lab-on-a-chip biosensing applications,” Laser Photonics Rev. 6(4), 463–487 (2012).
    [Crossref]
  6. R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
    [Crossref]
  7. L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
    [Crossref] [PubMed]
  8. B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
    [Crossref] [PubMed]
  9. Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
    [Crossref]
  10. N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
    [Crossref]
  11. B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
    [Crossref] [PubMed]
  12. R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
    [Crossref]
  13. J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
    [Crossref] [PubMed]
  14. W. A. Zortman, D. C. Trotter, and M. R. Watts, “Silicon photonics manufacturing,” Opt. Express 18(23), 23598–23607 (2010).
    [Crossref] [PubMed]
  15. P. Dong, W. Qian, H. Liang, R. Shafiiha, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Thermally tunable silicon racetrack resonators with ultralow tuning power,” Opt. Express 18(19), 20298–20304 (2010).
    [Crossref] [PubMed]
  16. K. Padmaraju and K. Bergman, “Resolving the thermal challenges for silicon microring resonator devices,” Nanophotonics 3(4–5), 269–281 (2014).
  17. J. Schrauwen, D. Van Thourhout, and R. Baets, “Trimming of silicon ring resonator by electron beam induced compaction and strain,” Opt. Express 16(6), 3738–3743 (2008).
    [Crossref] [PubMed]
  18. A. Canciamilla, F. Morichetti, S. Grillanda, P. Velha, M. Sorel, V. Singh, A. Agarwal, L. C. Kimerling, and A. Melloni, “Photo-induced trimming of chalcogenide-assisted silicon waveguides,” Opt. Express 20(14), 15807–15817 (2012).
    [Crossref] [PubMed]
  19. A. H. Atabaki, A. A. Eftekhar, M. Askari, and A. Adibi, “Accurate post-fabrication trimming of ultra-compact resonators on silicon,” Opt. Express 21(12), 14139–14145 (2013).
    [Crossref] [PubMed]
  20. A. P. Knights, Z. Wang, D. Paez, and L. Dow, “Electrical trimming of the resonance of a silicon micro-ring resonator,” in 2017IEEE 14th International Conference on Group IV Photonics (GFP) (IEEE 2017), pp. 29–30.
    [Crossref]
  21. X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
    [Crossref]
  22. M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
    [Crossref]
  23. R. Topley, L. O’Faolain, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “Planar surface implanted diffractive grating couplers in SOI,” Opt. Express 22(1), 1077–1084 (2014).
    [Crossref] [PubMed]
  24. R. Topley, G. Martinez-Jimenez, L. O’Faolain, N. Healy, S. Mailis, D. J. Thomson, F. Y. Gardes, A. C. Peacock, D. N. R. Payne, G. Z. Mashanovich, and G. T. Reed, “Locally Erasable Couplers for Optical Device Testing in Silicon on Insulator,” J. Lightwave Technol. 32(12), 2248–2253 (2014).
    [Crossref]
  25. T. Guo, M. Zhang, Y. Yin, and D. Dai, “A Laser-Trimming-Assist Wavelength-Alignment Technique for Silicon Microdonut Resonators,” IEEE Photonics Technol. Lett. 29(5), 419–422 (2017).
    [Crossref]
  26. D. Bachman, Z. Chen, C. Wang, R. Fedosejevs, Y. Y. Tsui, and V. Van, “Postfabrication Phase Error Correction of Silicon Photonic Circuits by Single Femtosecond Laser Pulses,” J. Lightwave Technol. 35(4), 588–595 (2017).
    [Crossref]
  27. R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
    [Crossref]
  28. A. C. Turner-Foster, M. A. Foster, J. S. Levy, C. B. Poitras, R. Salem, A. L. Gaeta, and M. Lipson, “Ultrashort free-carrier lifetime in low-loss silicon nanowaveguides,” Opt. Express 18(4), 3582–3591 (2010).
    [Crossref] [PubMed]

2018 (3)

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

2017 (7)

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

T. Guo, M. Zhang, Y. Yin, and D. Dai, “A Laser-Trimming-Assist Wavelength-Alignment Technique for Silicon Microdonut Resonators,” IEEE Photonics Technol. Lett. 29(5), 419–422 (2017).
[Crossref]

D. Bachman, Z. Chen, C. Wang, R. Fedosejevs, Y. Y. Tsui, and V. Van, “Postfabrication Phase Error Correction of Silicon Photonic Circuits by Single Femtosecond Laser Pulses,” J. Lightwave Technol. 35(4), 588–595 (2017).
[Crossref]

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
[Crossref] [PubMed]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

2016 (1)

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

2015 (3)

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

2014 (5)

R. Topley, L. O’Faolain, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “Planar surface implanted diffractive grating couplers in SOI,” Opt. Express 22(1), 1077–1084 (2014).
[Crossref] [PubMed]

R. Topley, G. Martinez-Jimenez, L. O’Faolain, N. Healy, S. Mailis, D. J. Thomson, F. Y. Gardes, A. C. Peacock, D. N. R. Payne, G. Z. Mashanovich, and G. T. Reed, “Locally Erasable Couplers for Optical Device Testing in Silicon on Insulator,” J. Lightwave Technol. 32(12), 2248–2253 (2014).
[Crossref]

K. Padmaraju and K. Bergman, “Resolving the thermal challenges for silicon microring resonator devices,” Nanophotonics 3(4–5), 269–281 (2014).

L. C. Kimerling, D. L. Kwong, and K. Wada, “Scaling computation with silicon photonics,” MRS Bull. 39(8), 687–695 (2014).
[Crossref]

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

2013 (1)

2012 (2)

2010 (4)

2008 (1)

Acín, A.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Adibi, A.

Agarwal, A.

Alloatti, L.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Alonso-Ramos, C.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Alvarez, M.

M. C. Estevez, M. Alvarez, and L. M. Lechuga, “Integrated optical devices for lab-on-a-chip biosensing applications,” Laser Photonics Rev. 6(4), 463–487 (2012).
[Crossref]

Amann, M. C.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Asanovic, K.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Asghari, M.

Askari, M.

Assefa, S.

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[Crossref] [PubMed]

Atabaki, A. H.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

A. H. Atabaki, A. A. Eftekhar, M. Askari, and A. Adibi, “Accurate post-fabrication trimming of ultra-compact resonators on silicon,” Opt. Express 21(12), 14139–14145 (2013).
[Crossref] [PubMed]

Augusiak, R.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Avizienis, R. R.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Bacco, D.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Bachman, D.

Baehr-Jones, T.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Baets, R.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

J. Schrauwen, D. Van Thourhout, and R. Baets, “Trimming of silicon ring resonator by electron beam induced compaction and strain,” Opt. Express 16(6), 3738–3743 (2008).
[Crossref] [PubMed]

Bergman, K.

K. Padmaraju and K. Bergman, “Resolving the thermal challenges for silicon microring resonator devices,” Nanophotonics 3(4–5), 269–281 (2014).

Bienstman, P.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Bock, P. J.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Boehm, G.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Bonneau, D.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Bruck, R.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

Bunandar, D.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Canciamilla, A.

Cao, W.

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

Cheben, P.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Chen, B.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
[Crossref] [PubMed]

Chen, C.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Chen, X.

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

Chen, Y. H.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Chen, Z.

Cook, H. M.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Cunningham, J. E.

Dai, D.

T. Guo, M. Zhang, Y. Yin, and D. Dai, “A Laser-Trimming-Assist Wavelength-Alignment Technique for Silicon Microdonut Resonators,” IEEE Photonics Technol. Lett. 29(5), 419–422 (2017).
[Crossref]

B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
[Crossref] [PubMed]

Dai, D. X.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Dambre, J.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Ding, Y.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Dong, P.

Eftekhar, A. A.

Englund, D.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Estevez, M. C.

M. C. Estevez, M. Alvarez, and L. M. Lechuga, “Integrated optical devices for lab-on-a-chip biosensing applications,” Laser Photonics Rev. 6(4), 463–487 (2012).
[Crossref]

Fedosejevs, R.

Feng, D.

Feng, L. T.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Fiers, M.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Foster, M. A.

Franz, Y.

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

Gaeta, A. L.

Gardes, F. Y.

Georgas, M. S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Gong, Q.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Grillanda, S.

Guo, G. C.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Guo, G. P.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Guo, T.

T. Guo, M. Zhang, Y. Yin, and D. Dai, “A Laser-Trimming-Assist Wavelength-Alignment Technique for Silicon Microdonut Resonators,” IEEE Photonics Technol. Lett. 29(5), 419–422 (2017).
[Crossref]

Halir, R.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Harris, N. C.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Healy, N.

Hochberg, M.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Hu, Y.

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

Janz, S.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Khokhar, A. Z.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

Kimerling, L. C.

Krishnamoorthy, A. V.

Kumar, R.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Kwong, D. L.

L. C. Kimerling, D. L. Kwong, and K. Wada, “Scaling computation with silicon photonics,” MRS Bull. 39(8), 687–695 (2014).
[Crossref]

Lahini, Y.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Laing, A.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Lapointe, J.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Larochelle, H.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Lechuga, L. M.

M. C. Estevez, M. Alvarez, and L. M. Lechuga, “Integrated optical devices for lab-on-a-chip biosensing applications,” Laser Photonics Rev. 6(4), 463–487 (2012).
[Crossref]

Lee, Y.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Leu, J. C.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Levy, J. S.

Li, G.

Li, M.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Liang, H.

Lin, S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Lipson, M.

Littlejohns, C. G.

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

Lloyd, S.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Mailis, S.

Malik, A.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Mancinska, L.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Martinez-Jimenez, G.

Mashanovich, G. Z.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

R. Topley, G. Martinez-Jimenez, L. O’Faolain, N. Healy, S. Mailis, D. J. Thomson, F. Y. Gardes, A. C. Peacock, D. N. R. Payne, G. Z. Mashanovich, and G. T. Reed, “Locally Erasable Couplers for Optical Device Testing in Silicon on Insulator,” J. Lightwave Technol. 32(12), 2248–2253 (2014).
[Crossref]

R. Topley, L. O’Faolain, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “Planar surface implanted diffractive grating couplers in SOI,” Opt. Express 22(1), 1077–1084 (2014).
[Crossref] [PubMed]

Mechet, P.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Melloni, A.

Mills, B.

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

Milosevic, M. M.

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

Molina-Fernández, Í.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Morichetti, F.

Morthier, G.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Moss, B. R.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Mower, J.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Muneeb, M.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Muskens, O. L.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

O’Brien, J. L.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

O’Faolain, L.

Orcutt, J. S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Ortega-Moñux, A.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Ou, A. J.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Oxenløwe, L. K.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Padmaraju, K.

K. Padmaraju and K. Bergman, “Resolving the thermal challenges for silicon microring resonator devices,” Nanophotonics 3(4–5), 269–281 (2014).

Paesani, S.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Passaro, V. M. N.

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

Pavanello, F.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Payne, D. N. R.

Peacock, A. C.

Poitras, C. B.

Popovic, M. A.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Prabhu, M.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Qian, W.

Ram, R. J.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Reed, G. T.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

R. Topley, G. Martinez-Jimenez, L. O’Faolain, N. Healy, S. Mailis, D. J. Thomson, F. Y. Gardes, A. C. Peacock, D. N. R. Payne, G. Z. Mashanovich, and G. T. Reed, “Locally Erasable Couplers for Optical Device Testing in Silicon on Insulator,” J. Lightwave Technol. 32(12), 2248–2253 (2014).
[Crossref]

R. Topley, L. O’Faolain, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “Planar surface implanted diffractive grating couplers in SOI,” Opt. Express 22(1), 1077–1084 (2014).
[Crossref] [PubMed]

Ren, X. F.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Reynolds, S.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

Roelkens, G.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Rottwitt, K.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Runge, A. F. J.

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

Salavrakos, A.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Salem, R.

Santagati, R.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Schmid, J. H.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Schrauwen, B.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Schrauwen, J.

Shafiiha, R.

Shainline, J. M.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Shen, Y.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Shi, B. S.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Silverstone, J. W.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Šimonyte, I.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Singh, V.

Skirlo, S.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Skrzypczyk, P.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Soljacic, M.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Sorel, M.

Sprengel, S.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Steinbrecher, G. R.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Stojanovic, V. M.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Sun, C.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Sun, X.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Thompson, M. G.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Thomson, D. J.

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. J. Runge, S. Mailis, A. C. Peacock, and G. T. Reed, “Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides,” Photon. Res. 5(6), 578–582 (2017).
[Crossref]

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

R. Topley, G. Martinez-Jimenez, L. O’Faolain, N. Healy, S. Mailis, D. J. Thomson, F. Y. Gardes, A. C. Peacock, D. N. R. Payne, G. Z. Mashanovich, and G. T. Reed, “Locally Erasable Couplers for Optical Device Testing in Silicon on Insulator,” J. Lightwave Technol. 32(12), 2248–2253 (2014).
[Crossref]

R. Topley, L. O’Faolain, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “Planar surface implanted diffractive grating couplers in SOI,” Opt. Express 22(1), 1077–1084 (2014).
[Crossref] [PubMed]

Tong, L.

B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
[Crossref] [PubMed]

Topley, R.

Traviss, D.

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

Troia, B.

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

Trotter, D. C.

Tsui, Y. Y.

Tura, J.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Turner-Foster, A. C.

Van, V.

Van Thourhout, D.

Van Vaerenbergh, T.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Vandoorne, K.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Vasiliev, A.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Velha, P.

Verstraeten, D.

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

Vizbaras, A.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Vizbaras, K.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Vlasov, Y. A.

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[Crossref] [PubMed]

Wada, K.

L. C. Kimerling, D. L. Kwong, and K. Wada, “Scaling computation with silicon photonics,” MRS Bull. 39(8), 687–695 (2014).
[Crossref]

Wade, M. T.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Wang, C.

Wang, J.

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Wang, R.

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Wangüemert-Pérez, J. G.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Waterman, A. S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Watts, M. R.

Wong, F. N. C.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

Wu, H.

B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
[Crossref] [PubMed]

Xia, F.

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[Crossref] [PubMed]

Xin, C.

B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
[Crossref] [PubMed]

Xiong, X.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Xu, D.-X.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Yin, Y.

T. Guo, M. Zhang, Y. Yin, and D. Dai, “A Laser-Trimming-Assist Wavelength-Alignment Technique for Silicon Microdonut Resonators,” IEEE Photonics Technol. Lett. 29(5), 419–422 (2017).
[Crossref]

Yu, L.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Zhang, M.

T. Guo, M. Zhang, Y. Yin, and D. Dai, “A Laser-Trimming-Assist Wavelength-Alignment Technique for Silicon Microdonut Resonators,” IEEE Photonics Technol. Lett. 29(5), 419–422 (2017).
[Crossref]

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Zhao, S.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

Zhou, Z. Y.

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

Zortman, W. A.

IEEE J. Sel. Top. Quantum Electron. (1)

M. M. Milosevic, X. Chen, W. Cao, A. F. J. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, and G. T. Reed, “Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators,” IEEE J. Sel. Top. Quantum Electron. 24(4), 8200107 (2018).
[Crossref]

IEEE Photonics Technol. Lett. (1)

T. Guo, M. Zhang, Y. Yin, and D. Dai, “A Laser-Trimming-Assist Wavelength-Alignment Technique for Silicon Microdonut Resonators,” IEEE Photonics Technol. Lett. 29(5), 419–422 (2017).
[Crossref]

J. Lightwave Technol. (2)

Laser Photonics Rev. (2)

M. C. Estevez, M. Alvarez, and L. M. Lechuga, “Integrated optical devices for lab-on-a-chip biosensing applications,” Laser Photonics Rev. 6(4), 463–487 (2012).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

MRS Bull. (1)

L. C. Kimerling, D. L. Kwong, and K. Wada, “Scaling computation with silicon photonics,” MRS Bull. 39(8), 687–695 (2014).
[Crossref]

Nano Lett. (1)

B. Chen, R. Bruck, D. Traviss, A. Z. Khokhar, S. Reynolds, D. J. Thomson, G. Z. Mashanovich, G. T. Reed, and O. L. Muskens, “Hybrid Photon-Plasmon Coupling and Ultrafast Control of Nanoantennas on a Silicon Photonic Chip,” Nano Lett. 18(1), 610–617 (2018).
[Crossref] [PubMed]

Nanophotonics (1)

K. Padmaraju and K. Bergman, “Resolving the thermal challenges for silicon microring resonator devices,” Nanophotonics 3(4–5), 269–281 (2014).

Nat. Commun. (3)

K. Vandoorne, P. Mechet, T. Van Vaerenbergh, M. Fiers, G. Morthier, D. Verstraeten, B. Schrauwen, J. Dambre, and P. Bienstman, “Experimental demonstration of reservoir computing on a silicon photonics chip,” Nat. Commun. 5(1), 3541 (2014).
[Crossref] [PubMed]

L. T. Feng, M. Zhang, Z. Y. Zhou, M. Li, X. Xiong, L. Yu, B. S. Shi, G. P. Guo, D. X. Dai, X. F. Ren, and G. C. Guo, “On-chip coherent conversion of photonic quantum entanglement between different degrees of freedom,” Nat. Commun. 7, 11985 (2016).
[Crossref] [PubMed]

B. Chen, H. Wu, C. Xin, D. Dai, and L. Tong, “Flexible integration of free-standing nanowires into silicon photonics,” Nat. Commun. 8(1), 20 (2017).
[Crossref] [PubMed]

Nat. Photonics (3)

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljacic, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11(7), 441–446 (2017).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11(7), 447–452 (2017).
[Crossref]

R. Bruck, B. Mills, B. Troia, D. J. Thomson, F. Y. Gardes, Y. Hu, G. Z. Mashanovich, V. M. N. Passaro, G. T. Reed, and O. L. Muskens, “Device-level characterization of the flow of light in integrated photonic circuits using ultrafast photomodulation spectroscopy,” Nat. Photonics 9(1), 54–60 (2015).
[Crossref]

Nature (2)

S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature 464(7285), 80–84 (2010).
[Crossref] [PubMed]

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Opt. Express (7)

J. Schrauwen, D. Van Thourhout, and R. Baets, “Trimming of silicon ring resonator by electron beam induced compaction and strain,” Opt. Express 16(6), 3738–3743 (2008).
[Crossref] [PubMed]

A. Canciamilla, F. Morichetti, S. Grillanda, P. Velha, M. Sorel, V. Singh, A. Agarwal, L. C. Kimerling, and A. Melloni, “Photo-induced trimming of chalcogenide-assisted silicon waveguides,” Opt. Express 20(14), 15807–15817 (2012).
[Crossref] [PubMed]

A. H. Atabaki, A. A. Eftekhar, M. Askari, and A. Adibi, “Accurate post-fabrication trimming of ultra-compact resonators on silicon,” Opt. Express 21(12), 14139–14145 (2013).
[Crossref] [PubMed]

A. C. Turner-Foster, M. A. Foster, J. S. Levy, C. B. Poitras, R. Salem, A. L. Gaeta, and M. Lipson, “Ultrashort free-carrier lifetime in low-loss silicon nanowaveguides,” Opt. Express 18(4), 3582–3591 (2010).
[Crossref] [PubMed]

W. A. Zortman, D. C. Trotter, and M. R. Watts, “Silicon photonics manufacturing,” Opt. Express 18(23), 23598–23607 (2010).
[Crossref] [PubMed]

P. Dong, W. Qian, H. Liang, R. Shafiiha, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Thermally tunable silicon racetrack resonators with ultralow tuning power,” Opt. Express 18(19), 20298–20304 (2010).
[Crossref] [PubMed]

R. Topley, L. O’Faolain, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “Planar surface implanted diffractive grating couplers in SOI,” Opt. Express 22(1), 1077–1084 (2014).
[Crossref] [PubMed]

Photon. Res. (1)

Science (1)

J. Wang, S. Paesani, Y. Ding, R. Santagati, P. Skrzypczyk, A. Salavrakos, J. Tura, R. Augusiak, L. Mančinska, D. Bacco, D. Bonneau, J. W. Silverstone, Q. Gong, A. Acín, K. Rottwitt, L. K. Oxenløwe, J. L. O’Brien, A. Laing, and M. G. Thompson, “Multidimensional quantum entanglement with large-scale integrated optics,” Science 360(6386), 285–291 (2018).
[Crossref] [PubMed]

Sensors (Basel) (1)

R. Wang, A. Vasiliev, M. Muneeb, A. Malik, S. Sprengel, G. Boehm, M. C. Amann, I. Šimonytė, A. Vizbaras, K. Vizbaras, R. Baets, and G. Roelkens, “III–V-on-Silicon Photonic Integrated Circuits for Spectroscopic Sensing in the 2–4 um Wavelength Range,” Sensors (Basel) 17(8), 1788 (2017).
[Crossref]

Other (1)

A. P. Knights, Z. Wang, D. Paez, and L. Dow, “Electrical trimming of the resonance of a silicon micro-ring resonator,” in 2017IEEE 14th International Conference on Group IV Photonics (GFP) (IEEE 2017), pp. 29–30.
[Crossref]

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Figures (4)

Fig. 1
Fig. 1 Laser annealing of Ge-implanted ring resonator with real-time spectrum monitoring. (a) Optical micrograph of the ring with 30 μm radius. The dashed curves schematically indicate the implanted section on the ring. (b) Experiment setup scheme for laser annealing of implanted ring resonators with real-time spectrum monitoring. (c) Measured resonant wavelength shift of the ring as a function of annealing length. (d) Extracted resonant wavelength shift in the range from 1540 to 1560 nm normaliszed to the FSR as annealing length was varied. (d) Measurement spectrum of the last annealed point before and after cooling-down.
Fig. 2
Fig. 2 Laser annealing with real-time differential transmission monitoring of Ge-implanted ring resonator. (a) Schematic spectra showing the transmission T of a ring resonance blue-shifting from blue, red to black curves. The corresponding arrows indicate the probe output change due to the shifting. (b) derivative T’ of the black resonance in (a). (c) Schematic of the experimental setup used for laser annealing of implanted ring resonators with the ability of differential transmission ΔT extraction. (d) Measured signal for ΔT from a 20-μm-radius ring with annealed segment length increasing. Inset shows the corresponding T signal which shares the same labels and units of the axes with the main figure. The two blue arrows mark the ΔT = 0 position at 4.01 μm. (e) Measured transmission spectra of a tested ring resonator before and after laser annealing. (f) Variation between actual trimmed resonances and target wavelength 1550 nm normalized to the FSR of all 12 samples. The obtained standard variation σ = 3% corresponds to 0.15 nm in wavelength.
Fig. 3
Fig. 3 Photomodulation maps of T (a), ΔT (b) and ΔT/T (c) from a Ge-implanted segment of a ring with 20-μm radius. These results were obtained from one scanning run. Inset of (a) and (b) give the profiles along the straight grey arrows across the waveguide, respectively. The units of the vertical axes are the same as that of the color bar. The curved dashed lines outline the position of the waveguide. The thin grey arrows in (a) and (b) indicate a scanning along the radial direction when the probe wavelength is near the resonance peak. Rectangle dashed Frame (i) shows the area of ΔT = 0 around the resonance peak while dashed Frame (ii) shows the ΔT = 0 area around the resonance valley.
Fig. 4
Fig. 4 Laser annealing of the Ge-implanted MZI with real-time monitoring. (a) Experiment schematic of the laser annealing with an illustrated layout of an MZI. The inset shows an optical micrograph of the two implanted arms. (b) Measured transmission (T) signal dependent on the pump spot position during the scanning along the whole 7-μm implanted section. (c) Corresponding measured ΔT signal dependent on the pump spot position. (d) and (e) Resulting values of T and ΔT for four subsequent annealing cycles, labelled 1-4 in (d), with red dot corresponding to balanced working point as determined from minimum in ΔT of (c). (f) and (g) Ultrafast photomodulation maps of the implanted sections on the two arms before and after laser annealing, respectively, showing sign reversal of the differential response.

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