Abstract

The high-frequency aberrations (HIFAs) that are corresponding to the actuator array have been reported to exist on the initial surface shape of many deformable mirrors (DMs), such as the bimorph DM, the unimorph DM, the monomorph DM, and the membrane DM. This actuator-corresponding high-frequency aberration (AC-HIFA) could not be corrected effectively by the DM and would limit the correction ability of the DM. In this paper, we presented the AC-HIFA in a stacked array piezoelectric (PZT) DM, which may result in ghost damage that is dangerous in the high power laser system. More importantly, we investigated a solution through simulation and experiment that by using a mirror plate and a long thin post array, which were machined integrally from a piece of BK7 glass, the AC-HIFA could be eliminated completely. In addition, the structural parameters’ influences on the AC-HIFA were investigated in the simulation, which could help other researchers to determine appropriate parameters of the mirror and the posts and to make a fine surface shape in their own DMs.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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2018 (1)

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

2017 (3)

L. Sun, L. Huang, M. Yan, J. Fan, Y. Zheng, and C. Sun, “Simulational and experimental investigation on the dynamic high frequency aberration of the deformable mirror,” Opt. Express 25(26), 32853–32866 (2017).
[Crossref]

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

K. F. Tehrani, P. Kner, and L. J. Mortensen, “Characterization of wavefront errors in mouse cranial bone using second-harmonic generation,” J. Biomed. Opt. 22(3), 36012 (2017).
[Crossref] [PubMed]

2015 (3)

P. Rausch, S. Verpoort, and U. Wittrock, “Unimorph deformable mirror for space telescopes: design and manufacturing,” Opt. Express 23(15), 19469–19477 (2015).
[Crossref] [PubMed]

Q. Bian, L. Huang, X. Wang, X. Ma, P. Yan, and M. Gong, “Experimental investigation on the beam quality improvement of the fiber laser by adaptive optics,” Laser Phys. 25(12), 125101 (2015).
[Crossref]

M. Abouhamzeh, J. Sinke, K. M. B. Jansen, and R. Benedictus, “Kinetic and thermo-viscoelastic characterisation of the epoxy adhesive in GLARE,” Compos. Struct. 124, 19–28 (2015).
[Crossref]

2014 (1)

2013 (3)

2011 (2)

J. Ma, Y. Liu, T. He, B. Li, and J. Chu, “Double drive modes unimorph deformable mirror for low-cost adaptive optics,” Appl. Opt. 50(29), 5647–5654 (2011).
[Crossref] [PubMed]

G. Vdovin, O. Soloviev, M. Loktev, S. Savenko, and L. Dziechciarczyk, “Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors,” Proc. SPIE 8165, 81650W (2011).

2010 (1)

L. Wang, Z. Shen, and Y. Ji, “Calculation and simulation of the uniformity of grinding removal in ring polishing,” Proc. SPIE 7655, 765521 (2010).
[Crossref]

2007 (1)

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

2006 (1)

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

2004 (1)

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

2003 (1)

2002 (2)

M. J. Booth, M. A. A. Neil, R. Juskaitis, and T. Wilson, “Adaptive aberration correction in a confocal microscope,” Proc. Natl. Acad. Sci. U.S.A. 99(9), 5788–5792 (2002).
[Crossref] [PubMed]

Z. Sun, W. Huang, Y. Jiang, and L. Luo, “Evolution of residual-inplane stress during adhesive curing and recuring in chip-on-board packages,” J. Electron. Mater. 31(8), 887–894 (2002).
[Crossref]

2000 (2)

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Winsor, A. Sivaramakrishnan, and R. Makidon, “Low cost membrane type deformable mirror with high density actuator spacing,” SPIE 4007, 563–572 (2000).

1999 (2)

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

X. Bozec, R. M. Ythier, J. L. Care, P. Coustal, and J. L. Michelin, “Preliminary design of the cavity end deformable mirror of the Laser MégaJoule,” Proc. SPIE 3492, 693–701 (1999).
[Crossref]

1997 (1)

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

1995 (1)

H. Kinder, P. Berberich, B. Utz, and W. Prusseit, “Double sided YBCO films on 4” substrates by thermal reactive evaporation,” IEEE Trans. Appl. Supercon. 5(2), 1575–1580 (1995).
[Crossref]

Abouhamzeh, M.

M. Abouhamzeh, J. Sinke, K. M. B. Jansen, and R. Benedictus, “Kinetic and thermo-viscoelastic characterisation of the epoxy adhesive in GLARE,” Compos. Struct. 124, 19–28 (2015).
[Crossref]

Alaluf, D.

An, J.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Avicola, K.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Bastaits, R.

Beeman, B. V.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Benedictus, R.

M. Abouhamzeh, J. Sinke, K. M. B. Jansen, and R. Benedictus, “Kinetic and thermo-viscoelastic characterisation of the epoxy adhesive in GLARE,” Compos. Struct. 124, 19–28 (2015).
[Crossref]

Berberich, P.

H. Kinder, P. Berberich, B. Utz, and W. Prusseit, “Double sided YBCO films on 4” substrates by thermal reactive evaporation,” IEEE Trans. Appl. Supercon. 5(2), 1575–1580 (1995).
[Crossref]

Bian, Q.

Q. Bian, L. Huang, X. Wang, X. Ma, P. Yan, and M. Gong, “Experimental investigation on the beam quality improvement of the fiber laser by adaptive optics,” Laser Phys. 25(12), 125101 (2015).
[Crossref]

Bissinger, H. D.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Bliss, E.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Booth, M. J.

M. J. Booth, M. A. A. Neil, R. Juskaitis, and T. Wilson, “Adaptive aberration correction in a confocal microscope,” Proc. Natl. Acad. Sci. U.S.A. 99(9), 5788–5792 (2002).
[Crossref] [PubMed]

Bouchez, A. H.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Bozec, X.

X. Bozec, R. M. Ythier, J. L. Care, P. Coustal, and J. L. Michelin, “Preliminary design of the cavity end deformable mirror of the Laser MégaJoule,” Proc. SPIE 3492, 693–701 (1999).
[Crossref]

Brase, J. M.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Brown, C. G.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Bruns, D. G.

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Burda, I.

Burgy, F.

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

Burns, D.

Campbell, R. D.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Care, J. L.

X. Bozec, R. M. Ythier, J. L. Care, P. Coustal, and J. L. Michelin, “Preliminary design of the cavity end deformable mirror of the Laser MégaJoule,” Proc. SPIE 3492, 693–701 (1999).
[Crossref]

Chazallet, F.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Cheriaux, G.

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

Chin, J. C. Y.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Chu, J.

Contos, A. R.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Coustal, P.

X. Bozec, R. M. Ythier, J. L. Care, P. Coustal, and J. L. Michelin, “Preliminary design of the cavity end deformable mirror of the Laser MégaJoule,” Proc. SPIE 3492, 693–701 (1999).
[Crossref]

Dai, W.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Danforth, P. M.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Deng, W.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Deng, X.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Devilliers, C.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Dziechciarczyk, L.

G. Vdovin, O. Soloviev, M. Loktev, S. Savenko, and L. Dziechciarczyk, “Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors,” Proc. SPIE 8165, 81650W (2011).

Erbert, G. V.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Fan, J.

Feldman, M.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Feng, Z.

Ferrari, M.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Friedman, H. W.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Gavel, D. T.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Girkin, J.

Gong, M.

Q. Bian, L. Huang, X. Wang, X. Ma, P. Yan, and M. Gong, “Experimental investigation on the beam quality improvement of the fiber laser by adaptive optics,” Laser Phys. 25(12), 125101 (2015).
[Crossref]

Q. Xue, L. Huang, P. Yan, M. Gong, Z. Feng, Y. Qiu, T. Li, and G. Jin, “Research on the particular temperature-induced surface shape of a National Ignition Facility deformable mirror,” Appl. Opt. 52(2), 280–287 (2013).
[Crossref] [PubMed]

Grey, A.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Guillemard, C.

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

Hartman, S. K.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

He, T.

Henesian, M.

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Henesian, M. A.

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Honig,

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Horodinca, M.

Hourtoule, C.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Hu, D.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Huang, L.

Huang, W.

Z. Sun, W. Huang, Y. Jiang, and L. Luo, “Evolution of residual-inplane stress during adhesive curing and recuring in chip-on-board packages,” J. Electron. Mater. 31(8), 887–894 (2002).
[Crossref]

Hugot, E.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Jansen, K. M. B.

M. Abouhamzeh, J. Sinke, K. M. B. Jansen, and R. Benedictus, “Kinetic and thermo-viscoelastic characterisation of the epoxy adhesive in GLARE,” Compos. Struct. 124, 19–28 (2015).
[Crossref]

Ji, Y.

L. Wang, Z. Shen, and Y. Ji, “Calculation and simulation of the uniformity of grinding removal in ring polishing,” Proc. SPIE 7655, 765521 (2010).
[Crossref]

Jiang, Y.

Z. Sun, W. Huang, Y. Jiang, and L. Luo, “Evolution of residual-inplane stress during adhesive curing and recuring in chip-on-board packages,” J. Electron. Mater. 31(8), 887–894 (2002).
[Crossref]

Jin, G.

Jing, F.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Johansson, E. M.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Juskaitis, R.

M. J. Booth, M. A. A. Neil, R. Juskaitis, and T. Wilson, “Adaptive aberration correction in a confocal microscope,” Proc. Natl. Acad. Sci. U.S.A. 99(9), 5788–5792 (2002).
[Crossref] [PubMed]

Kanz, K.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Kinder, H.

H. Kinder, P. Berberich, B. Utz, and W. Prusseit, “Double sided YBCO films on 4” substrates by thermal reactive evaporation,” IEEE Trans. Appl. Supercon. 5(2), 1575–1580 (1995).
[Crossref]

Kner, P.

K. F. Tehrani, P. Kner, and L. J. Mortensen, “Characterization of wavefront errors in mouse cranial bone using second-harmonic generation,” J. Biomed. Opt. 22(3), 36012 (2017).
[Crossref] [PubMed]

Koch, J.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Lafiandra, C.

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Lafon, R. E.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Laslandes, M.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Lawson, J.

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Lewis, H.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Li, B.

Li, T.

Liu, M. C.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Liu, Y.

Loktev, M.

G. Vdovin, O. Soloviev, M. Loktev, S. Savenko, and L. Dziechciarczyk, “Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors,” Proc. SPIE 8165, 81650W (2011).

Lopez, C.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Luo, L.

Z. Sun, W. Huang, Y. Jiang, and L. Luo, “Evolution of residual-inplane stress during adhesive curing and recuring in chip-on-board packages,” J. Electron. Mater. 31(8), 887–894 (2002).
[Crossref]

Lurçon, J.-M.

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

Ma, J.

Ma, X.

Q. Bian, L. Huang, X. Wang, X. Ma, P. Yan, and M. Gong, “Experimental investigation on the beam quality improvement of the fiber laser by adaptive optics,” Laser Phys. 25(12), 125101 (2015).
[Crossref]

Macintosh, B.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Makidon, R.

R. Winsor, A. Sivaramakrishnan, and R. Makidon, “Low cost membrane type deformable mirror with high density actuator spacing,” SPIE 4007, 563–572 (2000).

Manes, K. R.

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Marsh, P.

Martic, G.

Max, C. E.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Meeker, S. R.

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Michelin, J. L.

X. Bozec, R. M. Ythier, J. L. Care, P. Coustal, and J. L. Michelin, “Preliminary design of the cavity end deformable mirror of the Laser MégaJoule,” Proc. SPIE 3492, 693–701 (1999).
[Crossref]

Mignant, D. L.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Mortensen, L. J.

K. F. Tehrani, P. Kner, and L. J. Mortensen, “Characterization of wavefront errors in mouse cranial bone using second-harmonic generation,” J. Biomed. Opt. 22(3), 36012 (2017).
[Crossref] [PubMed]

Neeb, K. P.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Neil, M. A. A.

M. J. Booth, M. A. A. Neil, R. Juskaitis, and T. Wilson, “Adaptive aberration correction in a confocal microscope,” Proc. Natl. Acad. Sci. U.S.A. 99(9), 5788–5792 (2002).
[Crossref] [PubMed]

Olivier, S. S.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Patience, J.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Patterson, K.

Pellegrino, S.

Pennington, D. M.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Prada, C. M.

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Preumont, A.

Prusseit, W.

H. Kinder, P. Berberich, B. Utz, and W. Prusseit, “Double sided YBCO films on 4” substrates by thermal reactive evaporation,” IEEE Trans. Appl. Supercon. 5(2), 1575–1580 (1995).
[Crossref]

Qiu, Y.

Rausch, P.

Roberts, L. C.

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Rodrigues, G.

Romanescu, I.

Rousseau, J.-P.

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

Sacks, R.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Salmon, T.

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Savenko, S.

G. Vdovin, O. Soloviev, M. Loktev, S. Savenko, and L. Dziechciarczyk, “Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors,” Proc. SPIE 8165, 81650W (2011).

Shelton, J. C.

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Shen, Z.

L. Wang, Z. Shen, and Y. Ji, “Calculation and simulation of the uniformity of grinding removal in ring polishing,” Proc. SPIE 7655, 765521 (2010).
[Crossref]

Singer, C.

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Sinke, J.

M. Abouhamzeh, J. Sinke, K. M. B. Jansen, and R. Benedictus, “Kinetic and thermo-viscoelastic characterisation of the epoxy adhesive in GLARE,” Compos. Struct. 124, 19–28 (2015).
[Crossref]

Sinquin, J.-C.

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

Sivaramakrishnan, A.

R. Winsor, A. Sivaramakrishnan, and R. Makidon, “Low cost membrane type deformable mirror with high density actuator spacing,” SPIE 4007, 563–572 (2000).

Soloviev, O.

G. Vdovin, O. Soloviev, M. Loktev, S. Savenko, and L. Dziechciarczyk, “Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors,” Proc. SPIE 8165, 81650W (2011).

Spaeth, M. L.

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Stolz, C.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

Stomski, P. J.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Stowers, I. F.

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Summers, D. M.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Sun, C.

Sun, L.

Sun, Z.

Z. Sun, W. Huang, Y. Jiang, and L. Luo, “Evolution of residual-inplane stress during adhesive curing and recuring in chip-on-board packages,” J. Electron. Mater. 31(8), 887–894 (2002).
[Crossref]

Tehrani, K. F.

K. F. Tehrani, P. Kner, and L. J. Mortensen, “Characterization of wavefront errors in mouse cranial bone using second-harmonic generation,” J. Biomed. Opt. 22(3), 36012 (2017).
[Crossref] [PubMed]

Toeppen, J.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Utz, B.

H. Kinder, P. Berberich, B. Utz, and W. Prusseit, “Double sided YBCO films on 4” substrates by thermal reactive evaporation,” IEEE Trans. Appl. Supercon. 5(2), 1575–1580 (1995).
[Crossref]

Van Atta, L.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

van Dam, M. A.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Vdovin, G.

G. Vdovin, O. Soloviev, M. Loktev, S. Savenko, and L. Dziechciarczyk, “Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors,” Proc. SPIE 8165, 81650W (2011).

Verpoort, S.

Waltjen, K. E.

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

Wang, D.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Wang, L.

L. Wang, Z. Shen, and Y. Ji, “Calculation and simulation of the uniformity of grinding removal in ring polishing,” Proc. SPIE 7655, 765521 (2010).
[Crossref]

Wang, X.

Q. Bian, L. Huang, X. Wang, X. Ma, P. Yan, and M. Gong, “Experimental investigation on the beam quality improvement of the fiber laser by adaptive optics,” Laser Phys. 25(12), 125101 (2015).
[Crossref]

Wang, Y.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Wei, X.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Whitman, P. K.

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Widmayer, C. C.

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Williams, W. H.

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

Wilson, T.

M. J. Booth, M. A. A. Neil, R. Juskaitis, and T. Wilson, “Adaptive aberration correction in a confocal microscope,” Proc. Natl. Acad. Sci. U.S.A. 99(9), 5788–5792 (2002).
[Crossref] [PubMed]

Winsor, R.

R. Winsor, A. Sivaramakrishnan, and R. Makidon, “Low cost membrane type deformable mirror with high density actuator spacing,” SPIE 4007, 563–572 (2000).

Winters, S.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Wittrock, U.

Wizinowich, P. L.

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Woods, B.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Wu, X.

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Wu, Y.

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Xue, Q.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Q. Xue, L. Huang, P. Yan, M. Gong, Z. Feng, Y. Qiu, T. Li, and G. Jin, “Research on the particular temperature-induced surface shape of a National Ignition Facility deformable mirror,” Appl. Opt. 52(2), 280–287 (2013).
[Crossref] [PubMed]

Yan, M.

Yan, P.

Q. Bian, L. Huang, X. Wang, X. Ma, P. Yan, and M. Gong, “Experimental investigation on the beam quality improvement of the fiber laser by adaptive optics,” Laser Phys. 25(12), 125101 (2015).
[Crossref]

Q. Xue, L. Huang, P. Yan, M. Gong, Z. Feng, Y. Qiu, T. Li, and G. Jin, “Research on the particular temperature-induced surface shape of a National Ignition Facility deformable mirror,” Appl. Opt. 52(2), 280–287 (2013).
[Crossref] [PubMed]

Yang, Y.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Yao, L.

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Ythier, R. M.

X. Bozec, R. M. Ythier, J. L. Care, P. Coustal, and J. L. Michelin, “Preliminary design of the cavity end deformable mirror of the Laser MégaJoule,” Proc. SPIE 3492, 693–701 (1999).
[Crossref]

Yuan, Q.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Zacharias, R.

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

Zhang, X.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Zhao, J.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Zheng, W.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Zheng, Y.

Zhou, W.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Zhu, Q.

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Appl. Opt. (4)

Compos. Struct. (1)

M. Abouhamzeh, J. Sinke, K. M. B. Jansen, and R. Benedictus, “Kinetic and thermo-viscoelastic characterisation of the epoxy adhesive in GLARE,” Compos. Struct. 124, 19–28 (2015).
[Crossref]

IEEE Trans. Appl. Supercon. (1)

H. Kinder, P. Berberich, B. Utz, and W. Prusseit, “Double sided YBCO films on 4” substrates by thermal reactive evaporation,” IEEE Trans. Appl. Supercon. 5(2), 1575–1580 (1995).
[Crossref]

J. Biomed. Opt. (1)

K. F. Tehrani, P. Kner, and L. J. Mortensen, “Characterization of wavefront errors in mouse cranial bone using second-harmonic generation,” J. Biomed. Opt. 22(3), 36012 (2017).
[Crossref] [PubMed]

J. Electron. Mater. (1)

Z. Sun, W. Huang, Y. Jiang, and L. Luo, “Evolution of residual-inplane stress during adhesive curing and recuring in chip-on-board packages,” J. Electron. Mater. 31(8), 887–894 (2002).
[Crossref]

Laser Phys. (1)

Q. Bian, L. Huang, X. Wang, X. Ma, P. Yan, and M. Gong, “Experimental investigation on the beam quality improvement of the fiber laser by adaptive optics,” Laser Phys. 25(12), 125101 (2015).
[Crossref]

Opt. Commun. (1)

D. Wang, D. Hu, Q. Yuan, Q. Xue, W. Zhou, Y. Yang, X. Zhang, X. Deng, Y. Wang, J. Zhao, W. Deng, X. Wei, W. Dai, F. Jing, Q. Zhu, and W. Zheng, “Wavefront control of main-amplifier system in the SG-III laser facility,” Opt. Commun. 394, 92–97 (2017).
[Crossref]

Opt. Eng. (2)

M. L. Spaeth, K. R. Manes, C. C. Widmayer, W. H. Williams, P. K. Whitman, M. A. Henesian, and I. F. Stowers, and J Honig, “National Ignition Facility wavefront requirements and optical architecture,” Opt. Eng. 43(12), 2854–2865 (2004).
[Crossref]

M. Laslandes, E. Hugot, M. Ferrari, C. Hourtoule, C. Singer, C. Devilliers, C. Lopez, and F. Chazallet, “Mirror actively deformed and regulated for applications in space: design and performance,” Opt. Eng. 52(9), 091803 (2013).
[Crossref]

Opt. Express (3)

PASP (1)

P. L. Wizinowich, D. L. Mignant, A. H. Bouchez, R. D. Campbell, J. C. Y. Chin, A. R. Contos, M. A. van Dam, S. K. Hartman, E. M. Johansson, R. E. Lafon, H. Lewis, P. J. Stomski, D. M. Summers, C. G. Brown, P. M. Danforth, C. E. Max, and D. M. Pennington, “The W. M. Keck Observatory laser guide star adaptive optics system: overview,” PASP 118(840), 297–309 (2006).
[Crossref]

Proc. Natl. Acad. Sci. U.S.A. (1)

M. J. Booth, M. A. A. Neil, R. Juskaitis, and T. Wilson, “Adaptive aberration correction in a confocal microscope,” Proc. Natl. Acad. Sci. U.S.A. 99(9), 5788–5792 (2002).
[Crossref] [PubMed]

Proc. SPIE (7)

R. Zacharias, E. Bliss, S. Winters, R. Sacks, M. Feldman, A. Grey, J. Koch, C. Stolz, J. Toeppen, L. Van Atta, and B. Woods, “Wavefront control of high-power laser beams in the National Ignition Facility (NIF),” Proc. SPIE 3889, 332–343 (2000).
[Crossref]

R. Zacharias, E. Bliss, M. Feldman, A. Grey, M. Henesian, J. Koch, J. Lawson, R. Sacks, T. Salmon, J. Toeppen, L. Van Atta, S. Winters, B. Woods, C. Lafiandra, and D. G. Bruns, “The National Ignition Facility(NIF) wavefront control system,” Proc. SPIE 3492, 678–692 (1999).
[Crossref]

G. Vdovin, O. Soloviev, M. Loktev, S. Savenko, and L. Dziechciarczyk, “Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors,” Proc. SPIE 8165, 81650W (2011).

G. Cheriaux, J.-P. Rousseau, F. Burgy, J.-C. Sinquin, J.-M. Lurçon, and C. Guillemard, “Monomorph large aperture adaptive optics for high peak-power femtosecond lasers,” Proc. SPIE 6584, 658405 (2007).

L. Wang, Z. Shen, and Y. Ji, “Calculation and simulation of the uniformity of grinding removal in ring polishing,” Proc. SPIE 7655, 765521 (2010).
[Crossref]

X. Bozec, R. M. Ythier, J. L. Care, P. Coustal, and J. L. Michelin, “Preliminary design of the cavity end deformable mirror of the Laser MégaJoule,” Proc. SPIE 3492, 693–701 (1999).
[Crossref]

L. C. Roberts, C. M. Prada, J. C. Shelton, S. R. Meeker, L. Yao, Y. Wu, and X. Wu, “Testing and characterization of deformable mirrors testing and characterization of deformable mirrors,” Proc. SPIE 10703, 1070375 (2018).

Science (1)

C. E. Max, S. S. Olivier, H. W. Friedman, J. An, K. Avicola, B. V. Beeman, H. D. Bissinger, J. M. Brase, G. V. Erbert, D. T. Gavel, K. Kanz, M. C. Liu, B. Macintosh, K. P. Neeb, J. Patience, and K. E. Waltjen, “Image improvement from a sodium-layer laser guide star adaptive optics system,” Science 277(5332), 1649–1652 (1997).
[Crossref]

SPIE (1)

R. Winsor, A. Sivaramakrishnan, and R. Makidon, “Low cost membrane type deformable mirror with high density actuator spacing,” SPIE 4007, 563–572 (2000).

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Figures (31)

Fig. 1
Fig. 1 A lab-manufactured 116-actuator DM with a conventional mirror plate. (a) The photo. (b) The structure sketch. HG is the mirror thickness.
Fig. 2
Fig. 2 Interferometer measurement results of the conventional DM. PV = 731.75nm. (a) Two-dimensional color temperature diagram. (b) Three-dimensional color temperature diagram. (c) Interference fringe diagram.
Fig. 3
Fig. 3 Sketch of a laser radiation experiment. The incident beam is represented by the pink color. The reflected beam is represented by the blue color.
Fig. 4
Fig. 4 Calibration result by an optical flat. (a) CCD image without the lenslet array. (b) CCD image with the lenslet array.
Fig. 5
Fig. 5 CCD images with the conventional DM. (a) Without the lenslet array. (b) With the lenslet array. (c) With the lenslet array. The red circles are used to identify a hexagonally distributed dark-hole array from Fig. 5(b).
Fig. 6
Fig. 6 Simulational result of the lab-manufactured conventional DM in Fig. 1. (HG = 1mm, S = 10MPa). S represents the residual stress of the cured adhesive. (a) Two-dimensional initial surface shape. (b) Three-dimensional initial surface shape. (c) Residual surface shape.
Fig. 7
Fig. 7 Initial surface shape with a varying mirror thickness (HG) in a conventional DM. (a) HG = 1mm. (b) HG = 2mm. (c) HG = 3mm. (d) HG = 4mm. (e) HG = 5mm. (S = 10MPa).
Fig. 8
Fig. 8 (a) PV values of the initial and the residual surface shape with varying mirror thickness in a conventional DM. (b) Zernike coefficient of the initial surface shape for HG = 1mm. (c) Zernike coefficient of the initial surface shape for HG = 5mm.
Fig. 9
Fig. 9 Residual surface shape with a varying mirror thickness (HG) in a conventional DM. (a) HG = 1mm. (b) HG = 2mm. (c) HG = 3mm. (d) HG = 4mm. (e) HG = 5mm. (S = 10MPa).
Fig. 10
Fig. 10 Initial surface shape with varying stress (S) in a conventional DM. (a) S = 2MPa. (b) S = 4MPa. (c) S = 6MPa. (d) S = 8MPa. (e) S = 10MPa. (HG = 1mm).
Fig. 11
Fig. 11 (a) PV values of the initial and the residual surface shape with varying stress in a conventional DM. (b) Zernike coefficient of the initial surface shape for S = 2MPa. (c) Zernike coefficient of the initial surface shape for S = 10MPa.
Fig. 12
Fig. 12 Residual surface shape with varying stress (S) in a conventional DM. (a) S = 2MPa. (b) S = 4MPa. (c) S = 6MPa. (d) S = 8MPa. (e) S = 10MPa. (HG = 1mm).
Fig. 13
Fig. 13 Schematic diagram of the adhesive influence on different mirror structures. (a) Conventional mirror without a post. (b) Mirror with a short and wide post. (c) Mirror with a long and thin post.
Fig. 14
Fig. 14 (a) Structure sketch of the improved DM with a post array. (b) Distribution of the post array.
Fig. 15
Fig. 15 Initial surface shape with varying post length HH. (a) HH = 1mm. (b) HH = 1.5mm. (c) HH = 2mm. (d) HH = 2.5mm. (e) HH = 3mm. (HG = 1mm, DH = 3mm, S = 10MPa).
Fig. 16
Fig. 16 (a) PV values of the initial and the residual surface shape with varying post length. (b) Zernike coefficient of the initial surface shape for HH = 1mm. (c) Zernike coefficient of the initial surface shape for HH = 3mm.
Fig. 17
Fig. 17 Residual surface shape with varying post length HH. (a) HH = 1mm. (b) HH = 1.5mm. (c) HH = 2mm. (d) HH = 2.5mm. (e) HH = 3mm. (HG = 1mm, DH = 3mm, S = 10MPa).
Fig. 18
Fig. 18 Initial surface shape with varying post diameter DH. (a) DH = 2mm. (b) DH = 2.5mm. (c) DH = 3mm. (d) DH = 3.5mm. (e) DH = 4mm. (HG = 1mm, HH = 2mm, S = 10MPa).
Fig. 19
Fig. 19 (a) PV values of the initial and the residual surface shape with varying post diameter. (b) Zernike coefficient of the initial surface shape for DH = 2mm. (c) Zernike coefficient of the initial surface shape for DH = 4mm.
Fig. 20
Fig. 20 Residual surface shape with varying post diameter DH. (a) DH = 2mm. (b) DH = 2.5mm. (c) DH = 3mm. (d) DH = 3.5mm. (e) DH = 4mm. (HG = 1mm, HH = 2mm, S = 10MPa).
Fig. 21
Fig. 21 Initial surface shape with varying mirror thickness HG in the improved DM. (a) HG = 1mm. (b) HG = 2mm. (c) HG = 3mm. (d) HG = 4mm. (e) HG = 5mm. (HH = 2mm, DH = 2mm, S = 10MPa).
Fig. 22
Fig. 22 (a) PV values of the initial and the residual surface shape with varying mirror thickness in an improved DM. (b) Zernike coefficient of the initial surface shape for HG = 1mm. (c) Zernike coefficient of the initial surface shape for HG = 5mm.
Fig. 23
Fig. 23 Residual surface shape with varying mirror thickness HG in the improved DM. (a) HG = 1mm. (b) HG = 2mm. (c) HG = 3mm. (d) HG = 4mm. (e) HG = 5mm. (HH = 2mm, DH = 2mm, S = 10MPa).
Fig. 24
Fig. 24 Initial surface shape with varying stress S in the improved DM. (a) S = 10MPa. (b) S = 20MPa. (c) S = 30MPa. (d) S = 40MPa. (e) S = 50MPa. (HG = 1mm, HH = 3mm, DH = 3mm).
Fig. 25
Fig. 25 (a) PV values of the initial and the residual surface shape with varying residual stress in an improved DM. (b) Zernike coefficient of the initial surface shape for S = 10MPa. (c) Zernike coefficient of the initial surface shape for S = 50MPa.
Fig. 26
Fig. 26 Residual surface shape with varying stress S in the improved DM. (a) S = 10MPa. (b) S = 20MPa. (c) S = 30MPa. (d) S = 40MPa. (e) S = 50MPa. (HG = 1mm, HH = 3mm, DH = 3mm).
Fig. 27
Fig. 27 Simulation result of the improved DM. (a) Two-dimensional initial surface shape. (b) Three-dimensional initial surface shape. (c) Residual surface shape.
Fig. 28
Fig. 28 Mirror surface shape under a voltage of 20 V applied to the central PZT. (a) HG = 5mm. PV = 1.35μm. (b) HG = 2.5mm, PV = 3.64μm. (HH = 3mm, DH = 3mm)
Fig. 29
Fig. 29 The lab-made 116-actuator improved DM with a post array. (a) Before assembly. (b) After assembly.
Fig. 30
Fig. 30 Interferometer measurement result of the improved DM. PV = 207.55nm. (a) Two-dimensional color temperature diagram. (b) Three-dimensional color temperature diagram. (c) Interference fringe diagram.
Fig. 31
Fig. 31 CCD images with the improved DM. (a) Without the lenslet array. (b) With the lenslet array.

Tables (4)

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Table 1 Parameters of the conventional DM in the experiment

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Table 2 Material parameters in finite element simulation

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Table 3 Parameters and symbols in the simulation

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Table 4 Final parameters of the improved DM

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