Abstract

Ridge waveguides provide a large refractive index contrast and thus strong mode confinement, making them highly attractive for building compact photonic integrated circuits. However, ridge waveguides suffer from scattering losses. We demonstrate scattering-loss reduction of ridge waveguides made of lithium-niobate-on-insulator (LNOI) substrates by more than one order of magnitude. This is achieved by gently polishing of the ridge’s sidewalls and simultaneous protection of the top surfaces by a metal layer. Whispering-gallery-resonator loss measurements reveal ultra-low losses down to 0.04 dB/cm of the processed waveguides. Our approach pushes ridge waveguides further towards their fundamental absorption-loss limit, enabling highly efficient integrated devices.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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2018 (1)

2017 (5)

2016 (5)

M. F. Volk, S. Suntsov, C. E. Rüter, and D. Kip, “Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing,” Opt. Express 24, 1386–1391 (2016).
[Crossref] [PubMed]

L. Chang, Y. Li, N. Volet, L. Wang, J. Peters, and J. E. Bowers, “Thin film wavelength converters for photonic integrated circuits,” Optica 3, 531–535 (2016).
[Crossref]

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib microring resonators in lithium niobate on insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2016).
[Crossref]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

2015 (2)

2014 (2)

2013 (1)

D. J. Moss, R. Morandotti, A. L. Gaeta, and M. Lipson, “New CMOS-compatible platforms based on silicon nitride and hydex for nonlinear optics,” Nat. Photonics 7, 597–607 (2013).
[Crossref]

2012 (2)

G. Poberaj, H. Hu, W. Sohler, and P. Günter, “Lithium niobate on insulator (LNOI) for micro-photonic devices,” Laser & Photonics Rev. 6, 488–503 (2012).
[Crossref]

F. Vollmer and L. Yang, “Label-free detection with high-Q microcavities: A review of biosensing mechanisms for integrated devices,” Nanophotonics. 1, 267–291 (2012).
[Crossref] [PubMed]

2010 (1)

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4, 535–544 (2010).
[Crossref]

2007 (1)

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

1981 (1)

J. L. Jackel, “Reactive ion etching of LiNbO3,” Appl. Phys. Lett. 38, 907–909 (1981).
[Crossref]

Asano, T.

Atikian, H. A.

Bo, F.

Boeuf, F.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Bowers, J. E.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

L. Chang, Y. Li, N. Volet, L. Wang, J. Peters, and J. E. Bowers, “Thin film wavelength converters for photonic integrated circuits,” Optica 3, 531–535 (2016).
[Crossref]

Breunig, I.

Burek, M. J.

Buse, K.

Cassan, E.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Chang, L.

Cheng, R.

Cheng, Y.

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

Chu, W.

Danner, A. J.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib microring resonators in lithium niobate on insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2016).
[Crossref]

Degl’Innocenti, R.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Fang, W.

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

Fang, Z.

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

Fang, Z.-W.

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

Fédéli, J.-M.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Fieberg, S.

Freude, W.

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4, 535–544 (2010).
[Crossref]

Gaeta, A. L.

D. J. Moss, R. Morandotti, A. L. Gaeta, and M. Lipson, “New CMOS-compatible platforms based on silicon nitride and hydex for nonlinear optics,” Nat. Photonics 7, 597–607 (2013).
[Crossref]

Gao, F.

Guarino, A.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Günter, P.

G. Poberaj, H. Hu, W. Sohler, and P. Günter, “Lithium niobate on insulator (LNOI) for micro-photonic devices,” Laser & Photonics Rev. 6, 488–503 (2012).
[Crossref]

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Hartmann, J.-M.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

He, Y.

Higurashi, E.

Hu, H.

G. Poberaj, H. Hu, W. Sohler, and P. Günter, “Lithium niobate on insulator (LNOI) for micro-photonic devices,” Laser & Photonics Rev. 6, 488–503 (2012).
[Crossref]

Huang, I.-C.

Jackel, J. L.

J. L. Jackel, “Reactive ion etching of LiNbO3,” Appl. Phys. Lett. 38, 907–909 (1981).
[Crossref]

Jiang, H.

Kawanishi, T.

Kip, D.

Komljenovic, T.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Koos, C.

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4, 535–544 (2010).
[Crossref]

Krasnokutska, I.

Kühnemann, F.

Leidinger, M.

Leuthold, J.

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4, 535–544 (2010).
[Crossref]

Li, J.

Li, W.

Li, X.

Li, Y.

Liang, H.

Liao, Y.

Lin, J.

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

Lin, J.-T.

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

Lin, Q.

Lin, Z.

Lipson, M.

D. J. Moss, R. Morandotti, A. L. Gaeta, and M. Lipson, “New CMOS-compatible platforms based on silicon nitride and hydex for nonlinear optics,” Nat. Photonics 7, 597–607 (2013).
[Crossref]

Liu, Z.-M.

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

Loncar, M.

Luo, R.

Marris-Morini, D.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Mashanovich, G. Z.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Morandotti, R.

D. J. Moss, R. Morandotti, A. L. Gaeta, and M. Lipson, “New CMOS-compatible platforms based on silicon nitride and hydex for nonlinear optics,” Nat. Photonics 7, 597–607 (2013).
[Crossref]

Moss, D. J.

D. J. Moss, R. Morandotti, A. L. Gaeta, and M. Lipson, “New CMOS-compatible platforms based on silicon nitride and hydex for nonlinear optics,” Nat. Photonics 7, 597–607 (2013).
[Crossref]

Nedeljkovic, M.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Ni, J.

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

O’Brien, P.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Peruzzo, A.

Peters, J.

Poberaj, G.

G. Poberaj, H. Hu, W. Sohler, and P. Günter, “Lithium niobate on insulator (LNOI) for micro-photonic devices,” Laser & Photonics Rev. 6, 488–503 (2012).
[Crossref]

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Qiao, L.

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

Qiao, L.-L.

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

Reed, G. T.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Rezzonico, D.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Rogers, S.

Rüter, C. E.

Saha, S. S.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib microring resonators in lithium niobate on insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2016).
[Crossref]

Schmid, J. H.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Shams-Ansari, A.

Siew, S. Y.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib microring resonators in lithium niobate on insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2016).
[Crossref]

Sohler, W.

G. Poberaj, H. Hu, W. Sohler, and P. Günter, “Lithium niobate on insulator (LNOI) for micro-photonic devices,” Laser & Photonics Rev. 6, 488–503 (2012).
[Crossref]

Stark, P.

Suntsov, S.

Takigawa, R.

Tambasco, J.-L. J.

Thomson, D.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
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Tsang, M.

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib microring resonators in lithium niobate on insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2016).
[Crossref]

Venkataraman, V.

Virot, L.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Vivien, L.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Volet, N.

Volk, M. F.

Vollmer, F.

F. Vollmer and L. Yang, “Label-free detection with high-Q microcavities: A review of biosensing mechanisms for integrated devices,” Nanophotonics. 1, 267–291 (2012).
[Crossref] [PubMed]

Waasem, N.

Wan, S.

Wang, C.

Wang, J.

Wang, L.

Wang, M.

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

Wang, P.

Wolf, R.

Xu, D.-X.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Xu, J.

Xu, Y.

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

Xu, Y.-X.

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

Yang, L.

F. Vollmer and L. Yang, “Label-free detection with high-Q microcavities: A review of biosensing mechanisms for integrated devices,” Nanophotonics. 1, 267–291 (2012).
[Crossref] [PubMed]

Zappe, H.

Zhang, G.

Zhang, M.

Zilkie, A.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Appl. Phys. Lett. (1)

J. L. Jackel, “Reactive ion etching of LiNbO3,” Appl. Phys. Lett. 38, 907–909 (1981).
[Crossref]

IEEE Photonics Technol. Lett. (1)

S. Y. Siew, S. S. Saha, M. Tsang, and A. J. Danner, “Rib microring resonators in lithium niobate on insulator,” IEEE Photonics Technol. Lett. 28, 573–576 (2016).
[Crossref]

J. Opt. (1)

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Laser & Photonics Rev. (1)

G. Poberaj, H. Hu, W. Sohler, and P. Günter, “Lithium niobate on insulator (LNOI) for micro-photonic devices,” Laser & Photonics Rev. 6, 488–503 (2012).
[Crossref]

Nanophotonics. (1)

F. Vollmer and L. Yang, “Label-free detection with high-Q microcavities: A review of biosensing mechanisms for integrated devices,” Nanophotonics. 1, 267–291 (2012).
[Crossref] [PubMed]

Nat. Photonics (3)

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4, 535–544 (2010).
[Crossref]

D. J. Moss, R. Morandotti, A. L. Gaeta, and M. Lipson, “New CMOS-compatible platforms based on silicon nitride and hydex for nonlinear optics,” Nat. Photonics 7, 597–607 (2013).
[Crossref]

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1, 407–410 (2007).
[Crossref]

Opt. Commun. (1)

M. Wang, J.-T. Lin, Y.-X. Xu, Z.-W. Fang, L.-L. Qiao, Z.-M. Liu, W. Fang, and Y. Cheng, “Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications,” Opt. Commun. 395, 249–260 (2017).
[Crossref]

Opt. Express (9)

M. F. Volk, S. Suntsov, C. E. Rüter, and D. Kip, “Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing,” Opt. Express 24, 1386–1391 (2016).
[Crossref] [PubMed]

R. Takigawa, E. Higurashi, T. Kawanishi, and T. Asano, “Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method,” Opt. Express 22, 27733–27738 (2014).
[Crossref] [PubMed]

I. Krasnokutska, J.-L. J. Tambasco, X. Li, and A. Peruzzo, “Ultra-low loss photonic circuits in lithium niobate on insulator,” Opt. Express 26, 897–904 (2018).
[Crossref] [PubMed]

M. Leidinger, S. Fieberg, N. Waasem, F. Kühnemann, K. Buse, and I. Breunig, “Comparative study on three highly sensitive absorption measurement techniques characterizing lithium niobate over its entire transparent spectral range,” Opt. Express 23, 21690–21705 (2015).
[Crossref] [PubMed]

R. Luo, H. Jiang, S. Rogers, H. Liang, Y. He, and Q. Lin, “On-chip second-harmonic generation and broadband parametric down-conversion in a lithium niobate microresonator,” Opt. Express 25, 24531–24539 (2017).
[Crossref] [PubMed]

R. Wolf, I. Breunig, H. Zappe, and K. Buse, “Cascaded second-order optical nonlinearities in on-chip micro rings,” Opt. Express 25, 29927–29933 (2017).
[Crossref] [PubMed]

J. Wang, F. Bo, S. Wan, W. Li, F. Gao, J. Li, G. Zhang, and J. Xu, “High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation,” Opt. Express 23, 23072–23078 (2015).
[Crossref] [PubMed]

M. Wang, Y. Xu, Z. Fang, Y. Liao, P. Wang, W. Chu, L. Qiao, J. Lin, W. Fang, and Y. Cheng, “On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes,” Opt. Express 25, 124–129 (2017).
[Crossref] [PubMed]

C. Wang, M. J. Burek, Z. Lin, H. A. Atikian, V. Venkataraman, I.-C. Huang, P. Stark, and M. Loncar, “Integrated high quality factor lithium niobate microdisk resonators,” Opt. Express 22, 30924–30933 (2014).
[Crossref]

Optica (2)

Phys. Rev. Appl. (1)

J. Lin, Y. Xu, J. Ni, M. Wang, Z. Fang, L. Qiao, W. Fang, and Y. Cheng, “Phase-matched second-harmonic generation in an on-chip LiNbO3 microresonator,” Phys. Rev. Appl. 6, 014002 (2016).
[Crossref]

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Figures (5)

Fig. 1
Fig. 1 LN ridge waveguide fabrication steps (a–c) and schematic of polishing postprocess (d).
Fig. 2
Fig. 2 Colored SEM images (red: chromium; yellow: LN; gray: SiO2). (a) overview of microring resonator and zoomed views of ridge sidewalls (b)+(c). (b) shows detach of LN-layer and polishing residues. (c) perfect, cleaned sample.
Fig. 3
Fig. 3 (a) Colored SEM image of polished waveguides and (b–d) zoomed view of the sidewall (red box of (a)) of polished samples (yellow: LN; gray: SiO2) applying different products of polishing time and pressure tpol p.
Fig. 4
Fig. 4 Optical setup for whispering-gallery-resonator loss measurement.
Fig. 5
Fig. 5 (a) Q-factors vs. product of polishing time and pressure tpol × p. (b) Q-factors and corresponding losses at different wavelengths. Insets: Scans over a WGM of a high (orange) and low (green) polished sample.

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