Abstract

Transmissive subtractive color filters are proposed and demonstrated that take advantage of an all-dielectric metasurface based on a lattice of TiO2 nanopillars (NPs), rendering a high transmission efficiency that exceeds 90%. TiO2 NP elements have been created that exhibit a high aspect ratio. Specifically, a series of lithographic processes are conducted to form a narrow and deep hole in the photoresist, which is accompanied by atomic layer deposition of TiO2. A broad palette of vivid colors encompassing the visible band has been obtained by adjusting the NP diameter for a constant duty ratio of 0.35. For the NP resonator, the electric and magnetic field profiles in conjunction with the scattering cross-sections have been meticulously investigated to theoretically validate that the resonant transmission dips are primarily governed by the simultaneous excitation of an electric dipole and a magnetic dipole via Mie scattering.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2018 (2)

D. P. Langley, E. Balaur, Y. Hwang, C. Sadatnajafi, and B. Abbey, “Optical chemical barcoding based on polarization controlled plasmonic nanopixels,” Adv. Funct. Mater. 28(4), 1704842 (2018).
[Crossref]

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

2017 (6)

A. Garcia-Etxarri, “Optical polarization mobius strips on all-dielectric optical scatterers,” ACS Photonics 4(5), 1159–1164 (2017).
[Crossref]

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors,” Laser Photonics Rev. 11(3), 1600285 (2017).
[Crossref]

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

2016 (7)

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), 2472 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

2015 (2)

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

2014 (2)

K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Strong resonance effect in a lossy medium-based optical cavity for angle robust spectrum filters,” Adv. Mater. 26(36), 6324-6328 (2014).
[Crossref] [PubMed]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

2013 (3)

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4(1527), 1527 (2013).
[Crossref] [PubMed]

J. van de Groep and A. Polman, “Designing dielectric resonators on substrates: combining magnetic and electric resonances,” Opt. Express 21(22), 26285–26302 (2013).
[Crossref] [PubMed]

2012 (2)

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref] [PubMed]

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

2011 (4)

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

S. Kruk and Y. Kivshar, “Functional meta-optics and nanophotonics governed by mie resonances,” ACS Photonics 4(11), 2638–2649 (2011).
[Crossref]

2006 (1)

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

2005 (2)

S. Kinoshita and S. Yoshioka, “Structural colors in nature: the role of regularity and irregularity in the structure,” ChemPhysChem 6(8), 1442–1459 (2005).
[Crossref] [PubMed]

J. S. King, E. Graugnard, and C. J. Summers, “TiO2 inverse opals fabricated using low‐temperature atomic layer deposition,” Adv. Mater. 17(8), 1010-1013 (2005).
[Crossref]

2004 (1)

M. S. Sander, M. J. Cote, W. Gu, B. M. Kile, and C. P. Tripp, “Template‐assisted fabrication of dense, aligned arrays of titania nanotubes with well‐controlled dimensions on substrates,” Adv. Mater. 16(22), 2052-2057 (2004).
[Crossref]

1983 (1)

Abbey, B.

D. P. Langley, E. Balaur, Y. Hwang, C. Sadatnajafi, and B. Abbey, “Optical chemical barcoding based on polarization controlled plasmonic nanopixels,” Adv. Funct. Mater. 28(4), 1704842 (2018).
[Crossref]

Anwar, M. S.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Arbabi, A.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Atwater, H. A.

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref] [PubMed]

Bagheri, M.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Balaur, E.

D. P. Langley, E. Balaur, Y. Hwang, C. Sadatnajafi, and B. Abbey, “Optical chemical barcoding based on polarization controlled plasmonic nanopixels,” Adv. Funct. Mater. 28(4), 1704842 (2018).
[Crossref]

Bhaskaran, M.

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

Brener, I.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Brongersma, M. L.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), 2472 (2016).
[Crossref] [PubMed]

Burgos, S. P.

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref] [PubMed]

Capasso, F.

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

Chen, S.

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

Chen, W. T.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

Chen, Y.

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

Cheng, H.

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

Choi, D. Y.

W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors,” Laser Photonics Rev. 11(3), 1600285 (2017).
[Crossref]

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

Cote, M. J.

M. S. Sander, M. J. Cote, W. Gu, B. M. Kile, and C. P. Tripp, “Template‐assisted fabrication of dense, aligned arrays of titania nanotubes with well‐controlled dimensions on substrates,” Adv. Mater. 16(22), 2052-2057 (2004).
[Crossref]

Crozier, K. B.

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

Dai, P.

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

Dan, Y.

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
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Decker, M.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Devlin, R. C.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

Dominguez, J.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Doshay, S.

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

Duan, H.

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Duan, Z.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Ellenbogen, T.

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

Falkner, M.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

Fan, J. A.

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

Faraon, A.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Fofang, N. T.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Fu, Y. H.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4(1527), 1527 (2013).
[Crossref] [PubMed]

Fumeaux, C.

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

Gao, S.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors,” Laser Photonics Rev. 11(3), 1600285 (2017).
[Crossref]

Gao, Y.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Garcia-Etxarri, A.

A. Garcia-Etxarri, “Optical polarization mobius strips on all-dielectric optical scatterers,” ACS Photonics 4(5), 1159–1164 (2017).
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Giles, C. L.

Gonzales, E.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Graugnard, E.

J. S. King, E. Graugnard, and C. J. Summers, “TiO2 inverse opals fabricated using low‐temperature atomic layer deposition,” Adv. Mater. 17(8), 1010-1013 (2005).
[Crossref]

Gu, W.

M. S. Sander, M. J. Cote, W. Gu, B. M. Kile, and C. P. Tripp, “Template‐assisted fabrication of dense, aligned arrays of titania nanotubes with well‐controlled dimensions on substrates,” Adv. Mater. 16(22), 2052-2057 (2004).
[Crossref]

Guo, L. J.

K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Strong resonance effect in a lossy medium-based optical cavity for angle robust spectrum filters,” Adv. Mater. 26(36), 6324-6328 (2014).
[Crossref] [PubMed]

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

Gutruf, P.

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

Hegde, R. S.

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Horie, Y.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Hwang, Y.

D. P. Langley, E. Balaur, Y. Hwang, C. Sadatnajafi, and B. Abbey, “Optical chemical barcoding based on polarization controlled plasmonic nanopixels,” Adv. Funct. Mater. 28(4), 1704842 (2018).
[Crossref]

Kaplan, A. F.

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

Kerker, M.

Khorasaninejad, M.

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Kile, B. M.

M. S. Sander, M. J. Cote, W. Gu, B. M. Kile, and C. P. Tripp, “Template‐assisted fabrication of dense, aligned arrays of titania nanotubes with well‐controlled dimensions on substrates,” Adv. Mater. 16(22), 2052-2057 (2004).
[Crossref]

Kim, E. S.

W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors,” Laser Photonics Rev. 11(3), 1600285 (2017).
[Crossref]

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

Kim, I.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

King, J. S.

J. S. King, E. Graugnard, and C. J. Summers, “TiO2 inverse opals fabricated using low‐temperature atomic layer deposition,” Adv. Mater. 17(8), 1010-1013 (2005).
[Crossref]

Kinoshita, S.

S. Kinoshita and S. Yoshioka, “Structural colors in nature: the role of regularity and irregularity in the structure,” ChemPhysChem 6(8), 1442–1459 (2005).
[Crossref] [PubMed]

Kivshar, Y.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

S. Kruk and Y. Kivshar, “Functional meta-optics and nanophotonics governed by mie resonances,” ACS Photonics 4(11), 2638–2649 (2011).
[Crossref]

Kivshar, Y. S.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), 2472 (2016).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

Koh, S. C.

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Kruk, S.

S. Kruk and Y. Kivshar, “Functional meta-optics and nanophotonics governed by mie resonances,” ACS Photonics 4(11), 2638–2649 (2011).
[Crossref]

Kumar, K.

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Kuznetsov, A. I.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), 2472 (2016).
[Crossref] [PubMed]

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4(1527), 1527 (2013).
[Crossref] [PubMed]

Langley, D. P.

D. P. Langley, E. Balaur, Y. Hwang, C. Sadatnajafi, and B. Abbey, “Optical chemical barcoding based on polarization controlled plasmonic nanopixels,” Adv. Funct. Mater. 28(4), 1704842 (2018).
[Crossref]

Ledbetter, A.

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

Lee, D.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Lee, J. Y.

K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Strong resonance effect in a lossy medium-based optical cavity for angle robust spectrum filters,” Adv. Mater. 26(36), 6324-6328 (2014).
[Crossref] [PubMed]

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

Lee, K. T.

K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Strong resonance effect in a lossy medium-based optical cavity for angle robust spectrum filters,” Adv. Mater. 26(36), 6324-6328 (2014).
[Crossref] [PubMed]

Lee, S. S.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors,” Laser Photonics Rev. 11(3), 1600285 (2017).
[Crossref]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

Li, Z.

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Liu, S.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Liu, W.

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

Luk, T. S.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Luk’yanchuk, B.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), 2472 (2016).
[Crossref] [PubMed]

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4(1527), 1527 (2013).
[Crossref] [PubMed]

Mehmood, M. Q.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Miroshnichenko, A. E.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), 2472 (2016).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4(1527), 1527 (2013).
[Crossref] [PubMed]

Mishra, I.

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

Nam, K. T.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Neshev, D. N.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Oh, J.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

Ok, J. G.

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

Park, C. S.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

Park, H. J.

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

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J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
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Pertsch, T.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

Polman, A.

Qiu, C. W.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Rho, J.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Roques-Carmes, C.

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

Sadatnajafi, C.

D. P. Langley, E. Balaur, Y. Hwang, C. Sadatnajafi, and B. Abbey, “Optical chemical barcoding based on polarization controlled plasmonic nanopixels,” Adv. Funct. Mater. 28(4), 1704842 (2018).
[Crossref]

Saleem, M.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Sander, M. S.

M. S. Sander, M. J. Cote, W. Gu, B. M. Kile, and C. P. Tripp, “Template‐assisted fabrication of dense, aligned arrays of titania nanotubes with well‐controlled dimensions on substrates,” Adv. Mater. 16(22), 2052-2057 (2004).
[Crossref]

Schonbrun, E.

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

Schurig, D.

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

Sell, D.

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

Seo, K.

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

Seo, S.

K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Strong resonance effect in a lossy medium-based optical cavity for angle robust spectrum filters,” Adv. Mater. 26(36), 6324-6328 (2014).
[Crossref] [PubMed]

Shi, H.

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

Shrestha, V. R.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

Smith, D. R.

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

Song, Q.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Sriram, S.

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

Staude, I.

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Steinvurzel, P.

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

Summers, C. J.

J. S. King, E. Graugnard, and C. J. Summers, “TiO2 inverse opals fabricated using low‐temperature atomic layer deposition,” Adv. Mater. 17(8), 1010-1013 (2005).
[Crossref]

Sun, S.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Tian, J.

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

Tripp, C. P.

M. S. Sander, M. J. Cote, W. Gu, B. M. Kile, and C. P. Tripp, “Template‐assisted fabrication of dense, aligned arrays of titania nanotubes with well‐controlled dimensions on substrates,” Adv. Mater. 16(22), 2052-2057 (2004).
[Crossref]

van de Groep, J.

Wang, D. S.

Wang, Y.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

Wei, J. N.

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Withayachumnankul, W.

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

Wober, M.

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

Wu, Y. K.

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

Xiao, S.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Xu, T.

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

Yang, B.

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

Yang, J.

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

Yang, J. K.

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

Yang, Z.

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

Yokogawa, S.

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref] [PubMed]

Yoshioka, S.

S. Kinoshita and S. Yoshioka, “Structural colors in nature: the role of regularity and irregularity in the structure,” ChemPhysChem 6(8), 1442–1459 (2005).
[Crossref] [PubMed]

Yu, Y. F.

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4(1527), 1527 (2013).
[Crossref] [PubMed]

Yue, W.

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors,” Laser Photonics Rev. 11(3), 1600285 (2017).
[Crossref]

Zhang, C.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Zhang, K.

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

Zhang, L.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Zhang, S.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Zhang, Z.

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

Zheng, G.

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

Zhou, Y.

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

Zhou, Z.

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

Zhu, A. Y.

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

Zhu, X.

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Zou, C.

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

ACS Nano (5)

H. J. Park, T. Xu, J. Y. Lee, A. Ledbetter, and L. J. Guo, “Photonic color filters integrated with organic solar cells for energy harvesting,” ACS Nano 5(9), 7055–7060 (2011).
[Crossref] [PubMed]

Z. Li, I. Kim, L. Zhang, M. Q. Mehmood, M. S. Anwar, M. Saleem, D. Lee, K. T. Nam, S. Zhang, B. Luk’yanchuk, Y. Wang, G. Zheng, J. Rho, and C. W. Qiu, “Dielectric meta-holograms enabled with dual magnetic resonances in visible light,” ACS Nano 11(9), 9382–9389 (2017).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

P. Gutruf, C. Zou, W. Withayachumnankul, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Mechanically tunable dielectric resonator metasurfaces at visible frequencies,” ACS Nano 10(1), 133–141 (2016).
[Crossref] [PubMed]

S. Sun, Z. Zhou, C. Zhang, Y. Gao, Z. Duan, S. Xiao, and Q. Song, “All-dielectric full-color printing with TiO2 metasurfaces,” ACS Nano 11(5), 4445–4452 (2017).
[Crossref] [PubMed]

ACS Photonics (3)

D. Sell, J. Yang, S. Doshay, K. Zhang, and J. A. Fan, “Visible light metasurfaces based on single-crystal silicon,” ACS Photonics 3(10), 1919–1925 (2016).
[Crossref]

A. Garcia-Etxarri, “Optical polarization mobius strips on all-dielectric optical scatterers,” ACS Photonics 4(5), 1159–1164 (2017).
[Crossref]

S. Kruk and Y. Kivshar, “Functional meta-optics and nanophotonics governed by mie resonances,” ACS Photonics 4(11), 2638–2649 (2011).
[Crossref]

Adv. Funct. Mater. (1)

D. P. Langley, E. Balaur, Y. Hwang, C. Sadatnajafi, and B. Abbey, “Optical chemical barcoding based on polarization controlled plasmonic nanopixels,” Adv. Funct. Mater. 28(4), 1704842 (2018).
[Crossref]

Adv. Mater. (3)

K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Strong resonance effect in a lossy medium-based optical cavity for angle robust spectrum filters,” Adv. Mater. 26(36), 6324-6328 (2014).
[Crossref] [PubMed]

M. S. Sander, M. J. Cote, W. Gu, B. M. Kile, and C. P. Tripp, “Template‐assisted fabrication of dense, aligned arrays of titania nanotubes with well‐controlled dimensions on substrates,” Adv. Mater. 16(22), 2052-2057 (2004).
[Crossref]

J. S. King, E. Graugnard, and C. J. Summers, “TiO2 inverse opals fabricated using low‐temperature atomic layer deposition,” Adv. Mater. 17(8), 1010-1013 (2005).
[Crossref]

Adv. Opt. Mater (1)

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective color filters and monolithic color printing based on asymmetric Fabry–Perot cavities using nickel as a broadband absorber,” Adv. Opt. Mater 4(8), 1196–1202 (2016).
[Crossref]

Adv. Opt. Mater. (3)

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic interference full-color printing using grayscale-patterned Fabry–Perot resonance cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization‐sensitive structural colors with hue‐and‐saturation tuning based on all‐dielectric nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High‐efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813-820 (2015).
[Crossref]

ChemPhysChem (1)

S. Kinoshita and S. Yoshioka, “Structural colors in nature: the role of regularity and irregularity in the structure,” ChemPhysChem 6(8), 1442–1459 (2005).
[Crossref] [PubMed]

J. Opt. Soc. Am. (1)

Laser Photonics Rev. (1)

W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Highly reflective subtractive color filters capitalizing on a silicon metasurface integrated with nanostructured aluminum mirrors,” Laser Photonics Rev. 11(3), 1600285 (2017).
[Crossref]

Nano Lett. (4)

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, and K. B. Crozier, “Multicolored vertical silicon nanowires,” Nano Lett. 11(4), 1851–1856 (2011).
[Crossref] [PubMed]

V. R. Shrestha, S. S. Lee, E. S. Kim, and D. Y. Choi, “Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array,” Nano Lett. 14(11), 6672–6678 (2014).
[Crossref] [PubMed]

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref] [PubMed]

Nat. Commun. (1)

Y. H. Fu, A. I. Kuznetsov, A. E. Miroshnichenko, Y. F. Yu, and B. Luk’yanchuk, “Directional visible light scattering by silicon nanoparticles,” Nat. Commun. 4(1527), 1527 (2013).
[Crossref] [PubMed]

Nat. Nanotechnol. (2)

K. Kumar, H. Duan, R. S. Hegde, S. C. Koh, J. N. Wei, and J. K. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Opt. Express (1)

Proc. Natl. Acad. Sci. U.S.A. (1)

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

Sci. Rep. (1)

C. S. Park, V. R. Shrestha, W. Yue, S. Gao, S. S. Lee, E. S. Kim, and D. Y. Choi, “Structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks,” Sci. Rep. 7(1), 2556 (2017).
[Crossref] [PubMed]

Science (3)

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), 2472 (2016).
[Crossref] [PubMed]

Small (1)

T. Xu, H. Shi, Y. K. Wu, A. F. Kaplan, J. G. Ok, and L. J. Guo, “Structural colors: from plasmonic to carbon nanostructures,” Small 7(22), 3128–3136 (2011).
[Crossref] [PubMed]

Other (1)

Lumerical Solutions Inc, “FDTD Solutions,” https://www.lumerical.com/tcad-products/fdtd/ .

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Figures (7)

Fig. 1
Fig. 1 (a) Schematic of the proposed transmissive color filters based on a metasurface incorporating TiO2 nanopillars, where cyan, magenta, and yellow colors are filtered when white light is incident on the device. (b) Nanofabrication steps for creating the device.
Fig. 2
Fig. 2 SEM pictures for the (a) top view and (b) angle view (52°) of the fabricated filters with a footprint of (40 µm x 40 µm) producing vivid yellow, magenta, and cyan color images as shown in the insets for D = (140, 175, and 210) nm, respectively. Some of the fallen NPs are revealed for the yellow case. A FIB image revealing the height of the fabricated NPs is included in the inset of angle view for the magenta filter.
Fig. 3
Fig. 3 (a) Simulated and measured transmission spectra for the three primary subtractive colors of yellow, magenta, and cyan. (b) Corresponding CIE 1931 chromaticity color response for both the simulated and measured spectra.
Fig. 4
Fig. 4 (a) (i) Simulated and (ii) measured transmission spectra for the color filter with D = (126 to 224) nm in steps of 7 nm. The resonant transmission dips correspond to the ED and MD modes that are traced by black and blue dashed lines, respectively. Inset of (ii) shows the captured vivid color images for the devices of concern. (b) CIE 1931 chromaticity color response for the (i) simulated and (ii) measured transmission spectra.
Fig. 5
Fig. 5 (a) (i) Simulated transmission spectra with resonant dips and (ii) Calculated scattering cross-sections. The positions of ED and MD on the spectrum are pointed with arrows. The cross-section associated with the electric and magnetic field profiles for the (b) ED resonance at λ = 530 nm and (c) MD resonance at λ = 560 nm, for the color filter with D = 175 nm.
Fig. 6
Fig. 6 Calculated transmission spectra for (a) angular performance for TE polarization, (b) angular performance for TM polarization, and (c) effect of height for both TE and TM polarizations, for a typical filter with the D = 175 nm.
Fig. 7
Fig. 7 Dispersion characteristics of the TiO2 deposited by atomic layer deposition (ALD) technique.

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