Abstract

We develop a novel concept for ultra-high speed cleaving of crystalline materials with femtosecond lasers. Using Bessel beams in single shot, fracture planes can be induced nearly all along the Bessel zone in sapphire. For the first time, we show that only for a pulse duration below 650 fs, a single fracture can be induced in sapphire, while above this duration, cracks appear in all crystallographic orientations. We determine the influential parameters which are polarization direction, crystallographic axes and scanning direction. This is applied to cleave sapphire with a spacing as high as 25 μm between laser impacts.

© 2017 Optical Society of America

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References

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  1. E. R. Dobrovinskaya, L. A. Lytvynov, and V. Pishchik, Sapphire: Material, Manufacturing, Applications (Springer Science & Business Media, 2009).
  2. D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
    [Crossref]
  3. E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
    [Crossref]
  4. G. Lott, N. Falletto, P.-J. Devilder, and R. Kling, “Optimizing the processing of sapphire with ultrashort laser pulses,” Journal of Laser Applications 28, 022206 (2016).
    [Crossref]
  5. K. Sugioka and Y. Cheng, “Ultrafast lasers—reliable tools for advanced materials processing,” Light: Science & Applications 3, e149 (2014).
    [Crossref]
  6. M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
    [Crossref]
  7. E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
    [Crossref]
  8. S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
    [Crossref] [PubMed]
  9. L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
    [Crossref] [PubMed]
  10. F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
    [Crossref]
  11. F. Ahmed, M. S. Ahsan, M. S. Lee, and M. B. G. Jun, “Near-field modification of femtosecond laser beam to enhance single-shot pulse filamentation in glass medium,” Appl. Phys. A 114, 1161 (2013).
    [Crossref]
  12. M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
    [Crossref]
  13. F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125 (2016).
    [Crossref]
  14. J. Dudutis, P. Gečys, and G. Račiukaitis, “Non-ideal axicon-generated bessel beam application for intra-volume glass modification,” Opt. Express 24, 28433 (2016).
    [Crossref] [PubMed]
  15. S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
    [Crossref]
  16. C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).
  17. M. Sakakura, Y. Ishiguro, N. Fukuda, Y. Shimotsuma, and K. Miura, “Modulation of laser induced-cracks inside a LiF single crystal by fs laser irradiation at multiple points,” Opt. Express 21, 26921 (2013).
    [Crossref] [PubMed]
  18. L. Froehly, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators,” J. Opt. Soc. Am. A 31, 790 (2014).
    [Crossref]

2016 (4)

G. Lott, N. Falletto, P.-J. Devilder, and R. Kling, “Optimizing the processing of sapphire with ultrashort laser pulses,” Journal of Laser Applications 28, 022206 (2016).
[Crossref]

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125 (2016).
[Crossref]

J. Dudutis, P. Gečys, and G. Račiukaitis, “Non-ideal axicon-generated bessel beam application for intra-volume glass modification,” Opt. Express 24, 28433 (2016).
[Crossref] [PubMed]

2015 (1)

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

2014 (2)

L. Froehly, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators,” J. Opt. Soc. Am. A 31, 790 (2014).
[Crossref]

K. Sugioka and Y. Cheng, “Ultrafast lasers—reliable tools for advanced materials processing,” Light: Science & Applications 3, e149 (2014).
[Crossref]

2013 (2)

M. Sakakura, Y. Ishiguro, N. Fukuda, Y. Shimotsuma, and K. Miura, “Modulation of laser induced-cracks inside a LiF single crystal by fs laser irradiation at multiple points,” Opt. Express 21, 26921 (2013).
[Crossref] [PubMed]

F. Ahmed, M. S. Ahsan, M. S. Lee, and M. B. G. Jun, “Near-field modification of femtosecond laser beam to enhance single-shot pulse filamentation in glass medium,” Appl. Phys. A 114, 1161 (2013).
[Crossref]

2010 (1)

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

2008 (1)

F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
[Crossref]

2007 (1)

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

2006 (1)

C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).

2005 (1)

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

2004 (1)

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

2001 (1)

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

1997 (1)

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
[Crossref]

Ahmed, F.

F. Ahmed, M. S. Ahsan, M. S. Lee, and M. B. G. Jun, “Near-field modification of femtosecond laser beam to enhance single-shot pulse filamentation in glass medium,” Appl. Phys. A 114, 1161 (2013).
[Crossref]

F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
[Crossref]

Ahsan, M. S.

F. Ahmed, M. S. Ahsan, M. S. Lee, and M. B. G. Jun, “Near-field modification of femtosecond laser beam to enhance single-shot pulse filamentation in glass medium,” Appl. Phys. A 114, 1161 (2013).
[Crossref]

Aprea, A.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Ashkenasi, D.

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
[Crossref]

Bergé, L.

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Bhuyan, M. K.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

Bollani, M.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Campbell, E.

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
[Crossref]

Cheng, Y.

K. Sugioka and Y. Cheng, “Ultrafast lasers—reliable tools for advanced materials processing,” Light: Science & Applications 3, e149 (2014).
[Crossref]

Choi, H.

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Couairon, A.

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125 (2016).
[Crossref]

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Courvoisier, F.

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125 (2016).
[Crossref]

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

L. Froehly, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators,” J. Opt. Soc. Am. A 31, 790 (2014).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

Dawson, M.

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Devilder, P.-J.

G. Lott, N. Falletto, P.-J. Devilder, and R. Kling, “Optimizing the processing of sapphire with ultrashort laser pulses,” Journal of Laser Applications 28, 022206 (2016).
[Crossref]

Dobrovinskaya, E. R.

E. R. Dobrovinskaya, L. A. Lytvynov, and V. Pishchik, Sapphire: Material, Manufacturing, Applications (Springer Science & Business Media, 2009).

Dudley, J. M.

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

L. Froehly, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators,” J. Opt. Soc. Am. A 31, 790 (2014).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

Dudutis, J.

Falletto, N.

G. Lott, N. Falletto, P.-J. Devilder, and R. Kling, “Optimizing the processing of sapphire with ultrashort laser pulses,” Journal of Laser Applications 28, 022206 (2016).
[Crossref]

Franco, M.

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Froehly, L.

Fujita, K.

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Fukuda, N.

Furfaro, L.

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

Gecys, P.

Giust, R.

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

Gu, E.

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Guanghua, C.

C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).

Guofu, C.

C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).

Hirao, K.

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Ikuhara, Y.

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Illy, E.

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Ishiguro, Y.

Jacquot, M.

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

L. Froehly, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators,” J. Opt. Soc. Am. A 31, 790 (2014).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

Jedrkiewicz, O.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Jeon, C.

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Jun, M. B. G.

F. Ahmed, M. S. Ahsan, M. S. Lee, and M. B. G. Jun, “Near-field modification of femtosecond laser beam to enhance single-shot pulse filamentation in glass medium,” Appl. Phys. A 114, 1161 (2013).
[Crossref]

Kamata, M.

F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
[Crossref]

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

Kanehira, S.

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Kling, R.

G. Lott, N. Falletto, P.-J. Devilder, and R. Kling, “Optimizing the processing of sapphire with ultrashort laser pulses,” Journal of Laser Applications 28, 022206 (2016).
[Crossref]

Knowles, M.

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Lacourt, P. A.

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

L. Froehly, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators,” J. Opt. Soc. Am. A 31, 790 (2014).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

Lee, M.

F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
[Crossref]

Lee, M. S.

F. Ahmed, M. S. Ahsan, M. S. Lee, and M. B. G. Jun, “Near-field modification of femtosecond laser beam to enhance single-shot pulse filamentation in glass medium,” Appl. Phys. A 114, 1161 (2013).
[Crossref]

Lott, G.

G. Lott, N. Falletto, P.-J. Devilder, and R. Kling, “Optimizing the processing of sapphire with ultrashort laser pulses,” Journal of Laser Applications 28, 022206 (2016).
[Crossref]

Lytvynov, L. A.

E. R. Dobrovinskaya, L. A. Lytvynov, and V. Pishchik, Sapphire: Material, Manufacturing, Applications (Springer Science & Business Media, 2009).

Meyer, R.

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

Mikutis, M.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Miura, K.

M. Sakakura, Y. Ishiguro, N. Fukuda, Y. Shimotsuma, and K. Miura, “Modulation of laser induced-cracks inside a LiF single crystal by fs laser irradiation at multiple points,” Opt. Express 21, 26921 (2013).
[Crossref] [PubMed]

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Mysyrowicz, A.

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Obara, M.

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

Pishchik, V.

E. R. Dobrovinskaya, L. A. Lytvynov, and V. Pishchik, Sapphire: Material, Manufacturing, Applications (Springer Science & Business Media, 2009).

Prade, B.

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Qing, L.

C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).

Raciukaitis, G.

Rapp, L.

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

Recchia, S.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Rice, G.

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Rosenfeld, A.

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
[Crossref]

Sabonis, V.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Sakakura, M.

Salut, R.

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

Sekita, H.

F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
[Crossref]

Shibata, N.

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Shimotsuma, Y.

Si, J.

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Stoian, R.

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125 (2016).
[Crossref]

Sudrie, L.

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Sugioka, K.

K. Sugioka and Y. Cheng, “Ultrafast lasers—reliable tools for advanced materials processing,” Light: Science & Applications 3, e149 (2014).
[Crossref]

Sumiyoshi, T.

F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
[Crossref]

Toratani, E.

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

Trapani, P. D.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Tzortzakis, S.

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Varel, H.

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
[Crossref]

Wähmer, M.

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
[Crossref]

Wei, Z.

C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).

Yishan, W.

C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).

Acta Phot. Sin. (1)

C. Guanghua, W. Yishan, Z. Wei, C. Guofu, and L. Qing, “Structural characteristics induced by nanosecond, picosecond, and femtosecond laser pulse in sapphire,” Acta Phot. Sin. 35, 1121 (2006).

Appl. Phys. A (3)

F. Ahmed, M. Lee, H. Sekita, T. Sumiyoshi, and M. Kamata, “Display glass cutting by femtosecond laser induced single shot periodic void array,” Appl. Phys. A 93, 189 (2008).
[Crossref]

F. Ahmed, M. S. Ahsan, M. S. Lee, and M. B. G. Jun, “Near-field modification of femtosecond laser beam to enhance single-shot pulse filamentation in glass medium,” Appl. Phys. A 114, 1161 (2013).
[Crossref]

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. D. Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond bessel beams,” Appl. Phys. A 120, 443 (2015).
[Crossref]

Appl. Phys. Lett. (3)

M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, L. Furfaro, and J. M. Dudley, “High aspect ratio nanochannel machining using single shot femtosecond bessel beams,” Appl. Phys. Lett. 97, 081102 (2010).
[Crossref]

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

S. Kanehira, K. Miura, K. Fujita, K. Hirao, J. Si, N. Shibata, and Y. Ikuhara, “Optically produced cross patterning based on local dislocations inside MgO single crystals,” Appl. Phys. Lett. 90, 163110 (2007).
[Crossref]

Applied Surface Science (1)

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. Campbell, “Laser processing of sapphire with picosecond and sub-picosecond pulses,” Applied Surface Science 120, 65 (1997).
[Crossref]

J. Opt. Soc. Am. A (1)

Journal of Laser Applications (1)

G. Lott, N. Falletto, P.-J. Devilder, and R. Kling, “Optimizing the processing of sapphire with ultrashort laser pulses,” Journal of Laser Applications 28, 022206 (2016).
[Crossref]

Light: Science & Applications (1)

K. Sugioka and Y. Cheng, “Ultrafast lasers—reliable tools for advanced materials processing,” Light: Science & Applications 3, e149 (2014).
[Crossref]

Opt. Express (2)

Opt. Laser Technol. (1)

F. Courvoisier, R. Stoian, and A. Couairon, “Ultrafast laser micro- and nano-processing with nondiffracting and curved beams,” Opt. Laser Technol. 80, 125 (2016).
[Crossref]

Phys. Rev. Lett. (1)

S. Tzortzakis, L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, A. Couairon, and L. Bergé, “Self-guided propagation of ultrashort IR laser pulses in fused silica,” Phys. Rev. Lett. 87, 213902 (2001).
[Crossref] [PubMed]

Scientific Reports (1)

L. Rapp, R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, “High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond bessel beams,” Scientific Reports 6, 34286 (2016).
[Crossref] [PubMed]

Thin Solid Films (1)

E. Gu, C. Jeon, H. Choi, G. Rice, M. Dawson, E. Illy, and M. Knowles, “Micromachining and dicing of sapphire, gallium nitride and micro led devices with uv copper vapour laser,” Thin Solid Films 453, 462 (2004).
[Crossref]

Other (1)

E. R. Dobrovinskaya, L. A. Lytvynov, and V. Pishchik, Sapphire: Material, Manufacturing, Applications (Springer Science & Business Media, 2009).

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Figures (5)

Fig. 1
Fig. 1

Concept. The Bessel beam creates a crack extending all along the length of the Bessel zone. In the ultrashort pulse regime, this generates a fracture along a plane with a single pulse. We show how these can be aligned to form a cleavage plane along the full sample or wafer. The crystallographic axes A1,A2,A3 are shown as solid black lines, as defined in reference [1].

Fig. 2
Fig. 2

Evolution of the crack morphology with pulse duration. The pulse energy is 20 μJ, the shot to shot separation is 30 μm. The laser polarization and crystallographic axes are oriented as in Fig. 1.

Fig. 3
Fig. 3

Influence of the polarization and crystalline axes directions. Optical microscopy view of the cracks generated for 140 fs, 20μJ pulses with polarization orientation of 90 deg in (a)and (d), 0 deg in (b)and (e) and 120 deg in (c) and (f) with respect to x axis, shown in Fig. 1. In (a),(b),(c) the main axes are oriented as in Fig. 1, while in (d),(e),(f), the sample was rotated by 90 degrees.

Fig. 4
Fig. 4

Dependence of the crack morphology with spacing and pulse energy. The pulse duration is 140 fs. Polarization and crystallographic axes are oriented as in Fig. 1.

Fig. 5
Fig. 5

Scanning Electron Microscopy (SEM) imaging of a cleaved sample (a) Top view (b) Side view. The pulse separation is 25 μm. The energy per pulse is 20 μJ. Polarization and crystallographic axes are oriented as in Fig. 1. (c) Triangular cut out of a sapphire wafer observed by optical microscopy. (d),(e),(f) show different views of triangular sample under SEM imaging.