Abstract

Efficient collection of fluorescence from nitrogen vacancy (NV) centers in diamond underlies the spin-dependent optical read-out that is necessary for quantum information processing and enhanced sensing applications. The optical collection efficiency from NVs within diamond substrates is limited primarily due to the high refractive index of diamond and the non-directional dipole emission. Here we introduce a light collection strategy based on chirped, circular dielectric gratings that can be fabricated on a bulk diamond substrate to modify an emitter’s far-field radiation pattern. Using a genetic optimization algorithm, these grating designs achieve 98.9% collection efficiency for the NV zero-phonon emission line, collected from the back surface of the diamond with an objective of aperture 0.9. Across the broadband emission spectrum of the NV (600–800 nm), the chirped grating achieves 82.2% collection efficiency into a numerical aperture of 1.42, corresponding to an oil immersion objective again on the back side of the diamond. Our proposed bulk-dielectric grating structures are applicable to other optically active solid state quantum emitters in high index host materials.

© 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2017 (4)

B. Pingault, D.-D. Jarausch, C. Hepp, L. Klintberg, J. N. Becker, M. Markham, C. Becher, and M. Atatüre, “Coherent control of the silicon-vacancy spin in diamond,” Nat. Commun. 8, 15579 (2017).
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T. Schröder, M. E. Trusheim, M. Walsh, L. Li, J. Zheng, M. Schukraft, A. Sipahigil, R. E. Evans, D. D. Sukachev, C. T. Nguyen, J. L. Pacheco, R. M. Camacho, E. S. Bielejec, M. D. Lukin, and D. Englund, “Scalable focused ion beam creation of nearly lifetime-limited single quantum emitters in diamond nanostructures,” Nat. Commun. 8, 15376 (2017).
[Crossref] [PubMed]

T. Schröder, M. Walsh, J. Zheng, S. Mouradian, L. Li, G. Malladi, H. Bakhru, M. Lu, A. Stein, M. Heuck, and D. Englund, “Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation,” Opt. Mater. Express 7, 1514–1524 (2017).
[Crossref]

A. M. Berhane, K.-Y. Jeong, Z. Bodrog, S. Fiedler, T. Schröder, N. V. Triviño, T. Palacios, A. Gali, M. Toth, D. Englund, and I. Aharonovich, “Bright Room-Temperature Single-Photon Emission from Defects in Gallium Nitride,” Adv. Mater. 29, 1605092 (2017).
[PubMed]

2016 (9)

B. Lienhard, T. Schröder, S. Mouradian, F. Dolde, T. T. Tran, I. Aharonovich, and D. Englund, “Bright and photostable single-photon emitter in silicon carbide,” Optica 3, 768–774 (2016).
[Crossref]

T. Schröder, S. L. Mouradian, J. Zheng, M. E. Trusheim, M. Walsh, E. H. Chen, L. Li, I. Bayn, and D. Englund, “Quantum nanophotonics in diamond [Invited],” J. Opt. Soc. Am. B,  33, B65–B83 (2016).
[Crossref]

F. T. Rabouw, N. M. B. Cogan, A. C. Berends, W. v. d. Stam, D. Vanmaekelbergh, A. F. Koenderink, T. D. Krauss, and C. d. M. Donega, “Non-blinking single-photon emitters in silica,” Sci. Rep. 6, 21187 (2016).
[Crossref] [PubMed]

X. Ding, Y. He, Z.-C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref] [PubMed]

A. H. Piracha, P. Rath, K. Ganesan, S. Kühn, W. H. P. Pernice, and S. Prawer, “Scalable fabrication of integrated nanophotonic circuits on arrays of thin single crystal diamond membrane windows,” Nano Lett. 16, 3341–3347 (2016).
[Crossref] [PubMed]

T. Jung, L. Kreiner, C. Pauly, F. Mücklich, A. M. Edmonds, M. Markham, and C. Becher, “Reproducible fabrication and characterization of diamond membranes for photonic crystal cavities,” Phys. Status Solidi 213, 3254–3264 (2016).
[Crossref]

M. Schukraft, J. Zheng, T. Schröder, S. L. Mouradian, M. Walsh, M. E. Trusheim, H. Bakhru, and D. R. Englund, “Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides,” APL Photonics 1, 020801 (2016).
[Crossref]

J. Cramer, N. Kalb, M. A. Rol, B. Hensen, M. S. Blok, M. Markham, D. J. Twitchen, R. Hanson, and T. H. Taminiau, “Repeated quantum error correction on a continuously encoded qubit by real-time feedback,” Nat. Commun. 7, 11526 (2016).
[Crossref] [PubMed]

R. N. Patel, T. Schröder, N. Wan, L. Li, S. L. Mouradian, E. H. Chen, and D. R. Englund, “Efficient photon coupling from a diamond nitrogen vacancy center by integration with silica fiber,” Light: Sci. Appl. 5, e16032 (2016).
[Crossref]

2015 (8)

A. Laraoui, H. Aycock-Rizzo, Y. Gao, X. Lu, E. Riedo, and C. A. Meriles, “Imaging thermal conductivity with nanoscale resolution using a scanning spin probe,” Nat. Commun. 6, 8954 (2015).
[Crossref] [PubMed]

S. A. Wolf, I. Rosenberg, R. Rapaport, and N. Bar-Gill, “Purcell-enhanced optical spin readout of nitrogen-vacancy centers in diamond,” Phys. Rev. B 92, 235410 (2015).
[Crossref]

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
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T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-Vacancy single color centers in diamond,” Sci. Rep. 5, 12882 (2015).
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L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
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L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
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S. F. Preble, M. L. Fanto, J. A. Steidle, C. C. Tison, G. A. Howland, Z. Wang, and P. M. Alsing, “On-Chip Quantum Interference from a Single Silicon Ring-Resonator Source,” Phys. Rev. Appl. 4, 021001 (2015).
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2014 (15)

J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
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A. Tallaire, J. Achard, A. Boussadi, O. Brinza, A. Gicquel, I. Kupriyanov, Y. Palyanov, G. Sakr, and J. Barjon, “High quality thick {CVD} diamond films homoepitaxially grown on (111)-oriented substrates,” Diamond Related Mater. 41, 34–40 (2014).
[Crossref]

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. J. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
[Crossref]

J. Zheng, R. A. Barton, and D. Englund, “Broadband coherent absorption in chirped-planar-dielectric cavities for 2d-material-based photovoltaics and photodetectors,” ACS Photonics 1, 768–774 (2014).
[Crossref]

Y. Chu, N. de Leon, B. Shields, B. Hausmann, R. Evans, E. Togan, M. J. Burek, M. Markham, A. Stacey, A. Zibrov, A. Yacoby, D. Twitchen, M. Lončar, H. Park, P. Maletinsky, and M. Lukin, “Coherent optical transitions in implanted nitrogen vacancy centers,” Nano Lett. 14, 1982–1986 (2014).
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M. Widmann, S.-Y. Lee, T. Rendler, N. T. Son, H. Fedder, S. Paik, L.-P. Yang, N. Zhao, S. Yang, I. Booker, A. Denisenko, M. Jamali, S. A. Momenzadeh, I. Gerhardt, T. Ohshima, A. Gali, E. Janzén, and J. Wrachtrup, “Coherent control of single spins in silicon carbide at room temperature,” Nat. Mater. 14, 16 (2014).
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T. Müller, C. Hepp, B. Pingault, E. Neu, S. Gsell, M. Schreck, H. Sternschulte, D. Steinmüller-Nethl, C. Becher, and M. Atatüre, “Optical signatures of silicon-vacancy spins in diamond,” Nat. Commun. 5, 3328 (2014).
[Crossref] [PubMed]

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref] [PubMed]

B. Pingault, J. N. Becker, C. H. H. Schulte, C. Arend, C. Hepp, T. Godde, A. I. Tartakovskii, M. Markham, C. Becher, and M. Atatüre, “All-optical formation of coherent dark states of silicon-vacancy spins in diamond,” Phys. Rev. Lett. 113, 263601 (2014).
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C. Ju, C. Lei, X. Xu, D. Culcer, Z. Zhang, and J. Du, “NV-center-based digital quantum simulation of a quantum phase transition in topological insulators,” Phys. Rev. B 89, 045432 (2014).
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N. H. Nickerson, J. F. Fitzsimons, and S. C. Benjamin, “Freely scalable quantum technologies using cells of 5-to-50 qubits with very lossy and noisy photonic links,” Phys. Rev. X 4, 041041 (2014).

K. Nemoto, M. Trupke, S. J. Devitt, A. M. Stephens, B. Scharfenberger, K. Buczak, T. Nöbauer, M. S. Everitt, J. Schmiedmayer, and W. J. Munro, “Photonic architecture for scalable quantum information processing in diamond,” Phys. Rev. X 4, 031022 (2014).

A. W. Schell, T. Neumer, Q. Shi, J. Kaschke, J. Fischer, M. Wegener, and O. Benson, “Laser-written parabolic micro-antennas for efficient photon collection,” Appl. Phys. Lett. 105, 231117 (2014).
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N. M. Israelsen, S. Kumar, M. Tawfieq, J. S. Neergaard-Nielsen, A. Huck, and U. L. Andersen, “Increasing the photon collection rate from a single nv center with a silver mirror,” J. Opt. 16, 114017 (2014).
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2013 (4)

S. Hong, M. S. Grinolds, L. M. Pham, D. L. Sage, L. Luan, R. L. Walsworth, and A. Yacoby, “Nanoscale magnetometry with nv centers in diamond,” MRS Bulletin 38, 155–161 (2013).
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M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, and L. C. L. Hollenberg, “The nitrogen-vacancy colour centre in diamond,” Phys. Rep. 528, 1–45 (2013).
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J. T. Choy, I. Bulu, B. J. M. Hausmann, E. Janitz, I.-C. Huang, and M. Lončar, “Spontaneous emission and collection efficiency enhancement of single emitters in diamond via plasmonic cavities and gratings,” Appl. Phys. Lett. 103, 161101 (2013).
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P. Neumann, I. Jakobi, F. Dolde, C. Burk, R. Reuter, G. Waldherr, J. Honert, T. Wolf, A. Brunner, J. H. Shim, D. Suter, H. Sumiya, J. Isoya, and J. Wrachtrup, “High-precision nanoscale temperature sensing using single defects in diamond,” Nano Lett. 13, 2738–2742 (2013).
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2012 (5)

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
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B. K. Ofori-Okai, S. Pezzagna, K. Chang, M. Loretz, R. Schirhagl, Y. Tao, B. A. Moores, K. Groot-Berning, J. Meijer, and C. L. Degen, “Spin properties of very shallow nitrogen vacancy defects in diamond,” Phys. Rev. B 86, 081406 (2012).
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J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV− spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
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S. Ateş, L. Sapienza, M. Davanço, A. Badolato, and K. Srinivasan, “Bright single-photon emission from a quantum dot in a circular Bragg grating microcavity,” IEEE J. Sel. Top. Quantum Electron. 18, 1711–1721 (2012).
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K. Y. Han, D. Wildanger, E. Rittweger, J. Meijer, S. Pezzagna, S. W. Hell, and C. Eggeling, “Dark state photophysics of nitrogen-vacancy centres in diamond,” New J. Phys. 14, 123002 (2012).
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2011 (7)

T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
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N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: Generalized laws of reflection and refraction,” Science 334, 333–337 (2011).
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K. G. Lee, X. W. Chen, H. Eghlidi, P. Kukura, R. Lettow, A. Renn, V. Sandoghdar, and S. Götzinger, “A planar dielectric antenna for directional single-photon emission and near-unity collection efficiency,” Nat. Photonics 5, 166 (2011).
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M. Davanço, M. Rakher, D. Schuh, A. Badolato, and K. Srinivasan, “A circular dielectric grating for vertical extraction of single quantum dot emission,” Appl. Phys. Lett. 99, 041102 (2011).
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L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
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J. T. Choy, B. J. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

E. Neu, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Fluorescence and polarization spectroscopy of single silicon vacancy centers in heteroepitaxial nanodiamonds on iridium,” Phys. Rev. B 84, 205211 (2011).
[Crossref]

2010 (4)

I. Aharonovich, S. Castelletto, D. A. Simpson, A. D. Greentree, and S. Prawer, “Photophysics of chromium-related diamond single-photon emitters,” Phys. Rev. A 81, 043813 (2010).
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T. M. Babinec, B. J. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
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J. Hadden, J. Harrison, A. Stanley-Clarke, L. Marseglia, Y.-L. Ho, B. Patton, J. O’Brien, and J. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).
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J. F. Ziegler, M. D. Ziegler, and J. P. Biersack, “SRIM – the stopping and range of ions in matter (2010),” Nuclear Instrum. Methods Phys. Res. B 268, 1818–1823 (2010).
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2008 (2)

M. Agrawal and P. Peumans, “Broadband optical absorption enhancement through coherent light trapping in thin-film photovoltaic cells,” Opt. Express 16, 5385–5396 (2008).
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J. Taylor, P. Cappellaro, L. Childress, L. Jiang, D. Budker, P. Hemmer, A. Yacoby, R. Walsworth, and M. Lukin, “High-sensitivity diamond magnetometer with nanoscale resolution,” Nat. Phys. 4, 810–816 (2008).
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2007 (1)

D. Budker and M. Romalis, “Optical magnetometry,” Nat. Phys. 3, 227 (2007).
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2005 (1)

R. J. Epstein, F. M. Mendoza, Y. K. Kato, and D. D. Awschalom, “Anisotropic interactions of a single spin and dark-spin spectroscopy in diamond,” Nat. Phys. 1, 94 (2005).
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2004 (2)

J. Scheuer and A. Yariv, “Circular photonic crystal resonators,” Phys. Rev. E 70, 036603 (2004).
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T. Gaebel, I. Popa, A. Gruber, M. Domhan, F. Jelezko, and J. Wrachtrup, “Stable single-photon source in the near infrared,” New J. Phys. 6, 98 (2004).
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1997 (1)

Abellán, C.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
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Achard, J.

A. Tallaire, J. Achard, A. Boussadi, O. Brinza, A. Gicquel, I. Kupriyanov, Y. Palyanov, G. Sakr, and J. Barjon, “High quality thick {CVD} diamond films homoepitaxially grown on (111)-oriented substrates,” Diamond Related Mater. 41, 34–40 (2014).
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Agrawal, M.

Aharonovich, I.

A. M. Berhane, K.-Y. Jeong, Z. Bodrog, S. Fiedler, T. Schröder, N. V. Triviño, T. Palacios, A. Gali, M. Toth, D. Englund, and I. Aharonovich, “Bright Room-Temperature Single-Photon Emission from Defects in Gallium Nitride,” Adv. Mater. 29, 1605092 (2017).
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B. Lienhard, T. Schröder, S. Mouradian, F. Dolde, T. T. Tran, I. Aharonovich, and D. Englund, “Bright and photostable single-photon emitter in silicon carbide,” Optica 3, 768–774 (2016).
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I. Aharonovich, S. Castelletto, D. A. Simpson, A. D. Greentree, and S. Prawer, “Photophysics of chromium-related diamond single-photon emitters,” Phys. Rev. A 81, 043813 (2010).
[Crossref]

Aieta, F.

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: Generalized laws of reflection and refraction,” Science 334, 333–337 (2011).
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Akimov, A.

S. Bogdanov, M. Y. Shalaginov, A. Akimov, A. S. Lagutchev, P. Kapitanova, J. Liu, D. Woods, M. Ferrera, P. Belov, J. Irudayaraj, A. Boltasseva, and V. M. Shalaev, “Electron spin contrast of purcell-enhanced nitrogen-vacancy ensembles in nanodiamonds,” arXiv: 1703.06991 (2017).

Allegri, S.

J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV− spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
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Alsing, P. M.

S. F. Preble, M. L. Fanto, J. A. Steidle, C. C. Tison, G. A. Howland, Z. Wang, and P. M. Alsing, “On-Chip Quantum Interference from a Single Silicon Ring-Resonator Source,” Phys. Rev. Appl. 4, 021001 (2015).
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Amaya, W.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
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Andersen, U. L.

N. M. Israelsen, S. Kumar, M. Tawfieq, J. S. Neergaard-Nielsen, A. Huck, and U. L. Andersen, “Increasing the photon collection rate from a single nv center with a silver mirror,” J. Opt. 16, 114017 (2014).
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Appel, P.

D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
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D. Riedel, D. Rohner, M. Ganzhorn, T. Kaldewey, P. Appel, E. Neu, R. J. Warburton, and P. Maletinsky, “Low-loss broadband antenna for efficient photon collection from a coherent spin in diamond,” Phys. Rev. Appl. 2, 064011 (2014).
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Arend, C.

B. Pingault, J. N. Becker, C. H. H. Schulte, C. Arend, C. Hepp, T. Godde, A. I. Tartakovskii, M. Markham, C. Becher, and M. Atatüre, “All-optical formation of coherent dark states of silicon-vacancy spins in diamond,” Phys. Rev. Lett. 113, 263601 (2014).
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Atatüre, M.

B. Pingault, D.-D. Jarausch, C. Hepp, L. Klintberg, J. N. Becker, M. Markham, C. Becher, and M. Atatüre, “Coherent control of the silicon-vacancy spin in diamond,” Nat. Commun. 8, 15579 (2017).
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C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
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T. Müller, C. Hepp, B. Pingault, E. Neu, S. Gsell, M. Schreck, H. Sternschulte, D. Steinmüller-Nethl, C. Becher, and M. Atatüre, “Optical signatures of silicon-vacancy spins in diamond,” Nat. Commun. 5, 3328 (2014).
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B. Pingault, J. N. Becker, C. H. H. Schulte, C. Arend, C. Hepp, T. Godde, A. I. Tartakovskii, M. Markham, C. Becher, and M. Atatüre, “All-optical formation of coherent dark states of silicon-vacancy spins in diamond,” Phys. Rev. Lett. 113, 263601 (2014).
[Crossref]

Ates, S.

S. Ateş, L. Sapienza, M. Davanço, A. Badolato, and K. Srinivasan, “Bright single-photon emission from a quantum dot in a circular Bragg grating microcavity,” IEEE J. Sel. Top. Quantum Electron. 18, 1711–1721 (2012).
[Crossref]

Awschalom, D. D.

R. J. Epstein, F. M. Mendoza, Y. K. Kato, and D. D. Awschalom, “Anisotropic interactions of a single spin and dark-spin spectroscopy in diamond,” Nat. Phys. 1, 94 (2005).
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Aycock-Rizzo, H.

A. Laraoui, H. Aycock-Rizzo, Y. Gao, X. Lu, E. Riedo, and C. A. Meriles, “Imaging thermal conductivity with nanoscale resolution using a scanning spin probe,” Nat. Commun. 6, 8954 (2015).
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Babinec, T. M.

J. T. Choy, B. J. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
[Crossref]

T. M. Babinec, B. J. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
[Crossref] [PubMed]

Badolato, A.

S. Ateş, L. Sapienza, M. Davanço, A. Badolato, and K. Srinivasan, “Bright single-photon emission from a quantum dot in a circular Bragg grating microcavity,” IEEE J. Sel. Top. Quantum Electron. 18, 1711–1721 (2012).
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M. Davanço, M. Rakher, D. Schuh, A. Badolato, and K. Srinivasan, “A circular dielectric grating for vertical extraction of single quantum dot emission,” Appl. Phys. Lett. 99, 041102 (2011).
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Bakhru, H.

T. Schröder, M. Walsh, J. Zheng, S. Mouradian, L. Li, G. Malladi, H. Bakhru, M. Lu, A. Stein, M. Heuck, and D. Englund, “Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation,” Opt. Mater. Express 7, 1514–1524 (2017).
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M. Schukraft, J. Zheng, T. Schröder, S. L. Mouradian, M. Walsh, M. E. Trusheim, H. Bakhru, and D. R. Englund, “Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides,” APL Photonics 1, 020801 (2016).
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J. S. Hodges, L. Li, M. Lu, E. H. Chen, M. E. Trusheim, S. Allegri, X. Yao, O. Gaathon, H. Bakhru, and D. Englund, “Long-lived NV− spin coherence in high-purity diamond membranes,” New J. Phys. 14, 093004 (2012).
[Crossref]

Banholzer, M. J.

T. Schröder, F. Gädeke, M. J. Banholzer, and O. Benson, “Ultrabright and efficient single-photon generation based on nitrogen-vacancy centres in nanodiamonds on a solid immersion lens,” New J. Phys. 13, 055017 (2011).
[Crossref]

Bar-Gill, N.

S. A. Wolf, I. Rosenberg, R. Rapaport, and N. Bar-Gill, “Purcell-enhanced optical spin readout of nitrogen-vacancy centers in diamond,” Phys. Rev. B 92, 235410 (2015).
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D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

Barjon, J.

A. Tallaire, J. Achard, A. Boussadi, O. Brinza, A. Gicquel, I. Kupriyanov, Y. Palyanov, G. Sakr, and J. Barjon, “High quality thick {CVD} diamond films homoepitaxially grown on (111)-oriented substrates,” Diamond Related Mater. 41, 34–40 (2014).
[Crossref]

Barton, R. A.

J. Zheng, R. A. Barton, and D. Englund, “Broadband coherent absorption in chirped-planar-dielectric cavities for 2d-material-based photovoltaics and photodetectors,” ACS Photonics 1, 768–774 (2014).
[Crossref]

Bayn, I.

T. Schröder, S. L. Mouradian, J. Zheng, M. E. Trusheim, M. Walsh, E. H. Chen, L. Li, I. Bayn, and D. Englund, “Quantum nanophotonics in diamond [Invited],” J. Opt. Soc. Am. B,  33, B65–B83 (2016).
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L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schröder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref] [PubMed]

Becher, C.

B. Pingault, D.-D. Jarausch, C. Hepp, L. Klintberg, J. N. Becker, M. Markham, C. Becher, and M. Atatüre, “Coherent control of the silicon-vacancy spin in diamond,” Nat. Commun. 8, 15579 (2017).
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T. Jung, L. Kreiner, C. Pauly, F. Mücklich, A. M. Edmonds, M. Markham, and C. Becher, “Reproducible fabrication and characterization of diamond membranes for photonic crystal cavities,” Phys. Status Solidi 213, 3254–3264 (2016).
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T. Müller, C. Hepp, B. Pingault, E. Neu, S. Gsell, M. Schreck, H. Sternschulte, D. Steinmüller-Nethl, C. Becher, and M. Atatüre, “Optical signatures of silicon-vacancy spins in diamond,” Nat. Commun. 5, 3328 (2014).
[Crossref] [PubMed]

C. Hepp, T. Müller, V. Waselowski, J. N. Becker, B. Pingault, H. Sternschulte, D. Steinmüller-Nethl, A. Gali, J. R. Maze, M. Atatüre, and C. Becher, “Electronic structure of the silicon vacancy color center in diamond,” Phys. Rev. Lett. 112, 036405 (2014).
[Crossref] [PubMed]

B. Pingault, J. N. Becker, C. H. H. Schulte, C. Arend, C. Hepp, T. Godde, A. I. Tartakovskii, M. Markham, C. Becher, and M. Atatüre, “All-optical formation of coherent dark states of silicon-vacancy spins in diamond,” Phys. Rev. Lett. 113, 263601 (2014).
[Crossref]

E. Neu, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “Fluorescence and polarization spectroscopy of single silicon vacancy centers in heteroepitaxial nanodiamonds on iridium,” Phys. Rev. B 84, 205211 (2011).
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Yu, N.

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: Generalized laws of reflection and refraction,” Science 334, 333–337 (2011).
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J. Michl, T. Teraji, S. Zaiser, I. Jakobi, G. Waldherr, F. Dolde, P. Neumann, M. W. Doherty, N. B. Manson, J. Isoya, and J. Wrachtrup, “Perfect alignment and preferential orientation of nitrogen-vacancy centers during chemical vapor deposition diamond growth on (111) surfaces,” Appl. Phys. Lett. 104, 102407 (2014).
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T. M. Babinec, B. J. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
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Zheng, J.

T. Schröder, M. Walsh, J. Zheng, S. Mouradian, L. Li, G. Malladi, H. Bakhru, M. Lu, A. Stein, M. Heuck, and D. Englund, “Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation,” Opt. Mater. Express 7, 1514–1524 (2017).
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J. F. Ziegler, M. D. Ziegler, and J. P. Biersack, “SRIM – the stopping and range of ions in matter (2010),” Nuclear Instrum. Methods Phys. Res. B 268, 1818–1823 (2010).
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ACS Photonics (1)

J. Zheng, R. A. Barton, and D. Englund, “Broadband coherent absorption in chirped-planar-dielectric cavities for 2d-material-based photovoltaics and photodetectors,” ACS Photonics 1, 768–774 (2014).
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A. M. Berhane, K.-Y. Jeong, Z. Bodrog, S. Fiedler, T. Schröder, N. V. Triviño, T. Palacios, A. Gali, M. Toth, D. Englund, and I. Aharonovich, “Bright Room-Temperature Single-Photon Emission from Defects in Gallium Nitride,” Adv. Mater. 29, 1605092 (2017).
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APL Photonics (1)

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Nano Lett. (5)

S. A. Momenzadeh, R. J. Stöhr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
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L. Li, E. H. Chen, J. Zheng, S. L. Mouradian, F. Dolde, T. Schröder, S. Karaveli, M. L. Markham, D. J. Twitchen, and D. Englund, “Efficient photon collection from a nitrogen vacancy center in a circular bullseye grating,” Nano Lett. 15, 1493–1497 (2015).
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Nat. Commun. (5)

T. Schröder, M. E. Trusheim, M. Walsh, L. Li, J. Zheng, M. Schukraft, A. Sipahigil, R. E. Evans, D. D. Sukachev, C. T. Nguyen, J. L. Pacheco, R. M. Camacho, E. S. Bielejec, M. D. Lukin, and D. Englund, “Scalable focused ion beam creation of nearly lifetime-limited single quantum emitters in diamond nanostructures,” Nat. Commun. 8, 15376 (2017).
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Nat. Mater. (1)

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T. M. Babinec, B. J. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Lončar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5, 195–199 (2010).
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Nat. Photonics (2)

J. T. Choy, B. J. Hausmann, T. M. Babinec, I. Bulu, M. Khan, P. Maletinsky, A. Yacoby, and M. Lončar, “Enhanced single-photon emission from a diamond-silver aperture,” Nat. Photonics 5, 738–743 (2011).
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Nuclear Instrum. Methods Phys. Res. B (1)

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Opt. Express (1)

Opt. Lett. (1)

Opt. Mater. Express (1)

Optica (1)

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Phys. Rev. A (1)

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S. F. Preble, M. L. Fanto, J. A. Steidle, C. C. Tison, G. A. Howland, Z. Wang, and P. M. Alsing, “On-Chip Quantum Interference from a Single Silicon Ring-Resonator Source,” Phys. Rev. Appl. 4, 021001 (2015).
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Phys. Rev. B (5)

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Figures (10)

Fig. 1
Fig. 1 (a) Ray optics simulation for diamond-air interface. Critical angle θTIR = sin−1 (1/ndiamond). (b) Chirped diamond grating, with NV location indicated as red dot. (c) Side view of optical mode |E|2 (in log10 scale). Inset: far-field pattern of the ZPL emission from Grating A, the dashed green line shows the extent of NA = 0.9.
Fig. 2
Fig. 2 For Grating A: (a) Broadband collection efficiency (NA = 0.9), without AR coating (blue line), with AR coating on bottom diamond surface (red line), and with 550 nm PEC-grating distance (yellow line). The pink shaded area indicates the wavelength range of PSB. (b) η(NA0=0.9) with PEC mirror over the top surface of Grating A at varying distance (with AR coating on the back diamond surface), for ZPL (blue) and PSB (red) emission. (c) Power angular dependence on the back diamond surface for ZPL emission. Left axis: Collected power in diamond medium (blue solid line), in air after transmission through bottom interface (blue dashed line), in air with an AR coating (blue crosses), in diamond medium but without Grating A (black solid line). The green shaded area indicates the collection window of an NA = 0.9 air objective. Inset: Collected power over 0–90° angular range. Right axis: Angular transmission coefficient for diamond-air interface without (red dashed line) and with (red solid line) an AR coating. (d) Same as (e), averaged power angular dependence over PSB.
Fig. 3
Fig. 3 For Grating B: (a). Spectrally integrated far-field pattern using oil collection. The dashed green circle indicates NA of 1.42. (b). Broadband collection efficiency η with NA = 1.42 oil objective lens, comparing between the emission power in diamond (solid line), collected power in oil without (dashed line) and with (dotted line) an AR coating. (c). Left axis: Power (for p polarization) angular dependance on the bottom diamond-air interface, comparing between the power in diamond (solid blue line), power collected in oil without (dashed blue line) and with (blue crosses) an AR coating. The green shaded area shows the angular extent of NA = 1.42. Inset: Power angular dependance over full 0–90° range. Right axis: Angular transmission coefficient for diamond-air interface without (red dashed line) and with (red solid line) an AR coating. (d). With PEC mirror over the grating at varying distance, maximal weighted collection efficiency η̄=82.2% is obtained at 200 nm. (e). For 200 nm case in (d), broadband Purcell factor Fp (upper panel), collection efficiency η (middle panel) and the predicted collected power (ηFpPNV, solid line in lower panel), PNV is the intrinsic NV spectrum (dotted line).
Fig. 4
Fig. 4 Effect of the NV’s lateral and vertical displacement from the center on the collection efficiency. The values are normalized to the point with maximal collection efficiency (η/ηmax)
Fig. 5
Fig. 5 (a) The simulated photon count rate from an NV as a function of laser pumping power; (b) The simulated NV pump rate as a function of laser pumping power; (c) The simulated ionization rate (rate of NV transferred to NV0 state) as a function of laser pumping power; (d) The simulated recombination rate (rate of NV0 transferred to NV state) as a function of laser pumping power.
Fig. 6
Fig. 6 NV dipole orientations and the 3D radiation profile: (a). Atomic illustration of NV center structure, NV emission is from the two cross polarized dipole moment Dx and Dx, both lying on the crystallographic (111) plane. (b) Radiation profile from the two dipoles with orientations indicated in (a). (c). Radiation profile for Dx dipole. (d) Radiation profile for Dy dipole. Viewing angle for the four subfigures are the same.
Fig. 7
Fig. 7 Theoretical calculations using dyadic Green’s function: (a). Far-field emission profiles of a dipole (assuming Dy) positioned 10 nm (red), 60 nm (green) and 200 nm (blue) below the diamond-air interface, which is indicated with the black solid line. (b). Purcell factor as a function of dipole depth from the diamond-air interface, solid lines are calculated using the dyadic Green’s function, whereas the triangular data points are obtained from FDTD simulations; (c). Collection efficiency (ηdipole) as a function of numerical aperture. The dashed lines are for the 200 nm dipole depth, whereas the solid lines are for 60 nm deep dipoles. The red and blue color lines correspond to vertical and horizontal dipoles, respectively. (d). Collection efficiency as a function of numerical aperture for different host material (n=1.5 (SiO2), n=2.4 (diamond), n=2.6 (SiC)), The red and blue color lines corresponds to vertical and horizontal dipoles, which are 60 nm deep.
Fig. 8
Fig. 8 Collection efficiency estimation based on wave optics: (a). Radiation pattern of a vertical polarized dipole. (b) Collection efficiency as a function of numerical aperture, using air objective (blue) or oil objective (red). Inset: Polar plot of power versus polar angle θ (0–90°), showing the intrinsic emission power (black, normalized to unity), collected power in air (blue) or oil (red). (c) and (d). Same as (a) and (b), but for horizontal dipole. Note that no polar plot is shown in (d), since its emission profile is not circularly symmetric.
Fig. 9
Fig. 9 (a). |E|2 side view in log10 scale, for in plane dipole. The dashed white line shows the outline of the diamond waveguide structure side view. (b). Far-field profile |E|2 for in plane dipole, for collection from the bottom side of the structure. (c). |E|2 side view in log10 scale, for out of plane dipole. (d). Far-field profile |E|2 for out of plane dipole, for collection from the bottom side of the structure.
Fig. 10
Fig. 10 Illustration for optimal etching depth limited by the coherent laser excitation to minimize the scattering.

Tables (1)

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Table 1 Three experimental schemes for the Bullseye gratings

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