Abstract

A monolithic diamond photodetector with microlenses is fabricated by etching microlens arrays (MLAs) on single crystal diamond surface and patterning tungsten electrode strips on the edge of these arrays. Firstly, compact MLAs are etched on half of diamond sample surface by thermal reflow method. Secondly, via magnetron sputtering technique, two sets of interdigitated tungsten electrodes are patterned on the sample surface, one set is on the edge of MLAs, the other set is on the planar area. The optoelectronic performances of photodetectors have been investigated and indicated that the photocurrent of microlens photodetector increases by 74.8 percent at 10 V under 220 nm UV light illumination by comparing with that in planar case. Simulations of photodetectors' electrical and optical properties have been carried out, illustrating an improvement of charge collection ability and light absorption efficiency in microlens case. Furthermore, the present device structure can be extended to other semiconductor photodetectors.

© 2017 Optical Society of America

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  6. J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).
  7. M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).
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  10. H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
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  25. A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).
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2017 (4)

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

2016 (5)

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

2015 (1)

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

2014 (2)

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

2013 (2)

L. Sang, M. Liao, and M. Sumiya, “A comprehensive review of semiconductor ultraviolet photodetectors: from thin film to one-dimensional nanostructures,” Sensors (Basel) 13(8), 10482–10518 (2013).
[PubMed]

B. Caylar, M. Pomorski, and P. Bergonzo, “Laser-processed three dimensional graphitic electrodes for diamond radiation detectors,” Appl. Phys. Lett. 103, 043504 (2013).

2012 (1)

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

2010 (2)

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

M. Liao, X. Wang, T. Teraji, S. Koizumi, and Y. Koide, “Light intensity dependence of photocurrent gain in single-crystal diamond detectors,” Phys. Rev. B 81, 033304 (2010).

2008 (1)

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

2007 (1)

M. Liao, Y. Koide, and J. Alvarez, “Schottky-barrier photodiode with interdigitated-finger geometry: Application to diamond,” Appl. Phys. Lett. 90, 123507 (2007).

2006 (1)

C. Lee, H. Choi, E. Gu, M. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Related Materials 15, 725–728 (2006).

2005 (2)

M. Liao, Y. Koide, and J. Alvarez, “Thermally stable visible-blind diamond photodiode using tungsten carbide Schottky contact,” Appl. Phys. Lett. 87, 022105 (2005).

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

2004 (1)

D. S. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond,” Diamond Related Materials 13, 2207–2210 (2004).

2003 (2)

M. Karlsson and F. Nikolajeff, “Diamond micro-optics: microlenses and antireflection structured surfaces for the infrared spectral region,” Opt. Express 11(5), 502–507 (2003).
[PubMed]

E. Monroy, F. Omnès, and F. Calle, “Wide-bandgap semiconductor ultraviolet photodetectors,” Semicond. Sci. Technol. 18, R33 (2003).

1999 (1)

F. E. H. Tay, J. Xu, Y. Liang, V. J. Logeeswaran, and Y. Yao, “The effects of non-parallel plates in a differential capacitive microaccelerometer,” J. Micromech. Microeng. 9, 283 (1999).

1997 (1)

S. I. Parker, C. J. Kenney, and J. Segal, “3D — A proposed new architecture for solid-state radiation detectors,” Nucl. Instrum. Methods in Phys. Rese. A 395, 328–343 (1997).

Alvarez, J.

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

M. Liao, Y. Koide, and J. Alvarez, “Schottky-barrier photodiode with interdigitated-finger geometry: Application to diamond,” Appl. Phys. Lett. 90, 123507 (2007).

M. Liao, Y. Koide, and J. Alvarez, “Thermally stable visible-blind diamond photodiode using tungsten carbide Schottky contact,” Appl. Phys. Lett. 87, 022105 (2005).

Ao, J.-P.

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Babinec, T. M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Balducci, A.

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

Barkad, H. A.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Benetti, M.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

BenMoussa, A.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Bergonzo, P.

B. Caylar, M. Pomorski, and P. Bergonzo, “Laser-processed three dimensional graphitic electrodes for diamond radiation detectors,” Appl. Phys. Lett. 103, 043504 (2013).

Bolsee, D.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Bu, R.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

Calle, F.

E. Monroy, F. Omnès, and F. Calle, “Wide-bandgap semiconductor ultraviolet photodetectors,” Semicond. Sci. Technol. 18, R33 (2003).

Cannata, D.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Caylar, B.

B. Caylar, M. Pomorski, and P. Bergonzo, “Laser-processed three dimensional graphitic electrodes for diamond radiation detectors,” Appl. Phys. Lett. 103, 043504 (2013).

Chen, K.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Cheng, S.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Cheong, H.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Choi, H.

C. Lee, H. Choi, E. Gu, M. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Related Materials 15, 725–728 (2006).

Choi, S. K.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Choi, S.-M.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Dai, B.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Dawson, M.

C. Lee, H. Choi, E. Gu, M. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Related Materials 15, 725–728 (2006).

Dejaeger, J. C.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Dong, J.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Du, J.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Fan, H.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Forneris, J.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Fu, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

Fujimori, N.

D. S. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond,” Diamond Related Materials 13, 2207–2210 (2004).

Gao, G.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Gao, H.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Ge, C.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Giudice, A. L.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Gu, E.

C. Lee, H. Choi, E. Gu, M. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Related Materials 15, 725–728 (2006).

Haenen, K.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Han, C.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Hao, H.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Hausmann, B. J. M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Hemmer, P. R.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Hermans, C.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Hou, X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Hwang, D. S.

D. S. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond,” Diamond Related Materials 13, 2207–2210 (2004).

Imura, M.

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

Karlsson, M.

Kenney, C. J.

S. I. Parker, C. J. Kenney, and J. Segal, “3D — A proposed new architecture for solid-state radiation detectors,” Nucl. Instrum. Methods in Phys. Rese. A 395, 328–343 (1997).

Khan, M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Kim, J.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Kim, M.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Koide, Y.

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

M. Liao, X. Wang, T. Teraji, S. Koizumi, and Y. Koide, “Light intensity dependence of photocurrent gain in single-crystal diamond detectors,” Phys. Rev. B 81, 033304 (2010).

M. Liao, Y. Koide, and J. Alvarez, “Schottky-barrier photodiode with interdigitated-finger geometry: Application to diamond,” Appl. Phys. Lett. 90, 123507 (2007).

M. Liao, Y. Koide, and J. Alvarez, “Thermally stable visible-blind diamond photodiode using tungsten carbide Schottky contact,” Appl. Phys. Lett. 87, 022105 (2005).

Koizumi, S.

M. Liao, X. Wang, T. Teraji, S. Koizumi, and Y. Koide, “Light intensity dependence of photocurrent gain in single-crystal diamond detectors,” Phys. Rev. B 81, 033304 (2010).

Krishnamoorthy, S.

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

Kroth, U.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Lee, C.

C. Lee, H. Choi, E. Gu, M. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Related Materials 15, 725–728 (2006).

Lee, J.-U.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Lee, S. W.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Li, D.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Li, F.

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Li, H.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Liang, Y.

F. E. H. Tay, J. Xu, Y. Liang, V. J. Logeeswaran, and Y. Yao, “The effects of non-parallel plates in a differential capacitive microaccelerometer,” J. Micromech. Microeng. 9, 283 (1999).

Liao, M.

L. Sang, M. Liao, and M. Sumiya, “A comprehensive review of semiconductor ultraviolet photodetectors: from thin film to one-dimensional nanostructures,” Sensors (Basel) 13(8), 10482–10518 (2013).
[PubMed]

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

M. Liao, X. Wang, T. Teraji, S. Koizumi, and Y. Koide, “Light intensity dependence of photocurrent gain in single-crystal diamond detectors,” Phys. Rev. B 81, 033304 (2010).

M. Liao, Y. Koide, and J. Alvarez, “Schottky-barrier photodiode with interdigitated-finger geometry: Application to diamond,” Appl. Phys. Lett. 90, 123507 (2007).

M. Liao, Y. Koide, and J. Alvarez, “Thermally stable visible-blind diamond photodiode using tungsten carbide Schottky contact,” Appl. Phys. Lett. 87, 022105 (2005).

Lin, F.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

Liu, H.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Liu, J.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Liu, K.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Liu, P.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Liu, Z.

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Logeeswaran, V. J.

F. E. H. Tay, J. Xu, Y. Liang, V. J. Logeeswaran, and Y. Yao, “The effects of non-parallel plates in a differential capacitive microaccelerometer,” J. Micromech. Microeng. 9, 283 (1999).

Loncar, M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Lu, L.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Lupina, G.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Lupina, L.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Ma, J.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Ma, M.

Ma, P.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Marco, M.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Marinellia, M.

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

Martinick, K.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Mazur, M.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Mccutcheon, M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Milani, E.

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

Monroy, E.

E. Monroy, F. Omnès, and F. Calle, “Wide-bandgap semiconductor ultraviolet photodetectors,” Semicond. Sci. Technol. 18, R33 (2003).

Morgada, M. E.

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

Mortet, V.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Muralidharan, R.

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

Murphy, H.

C. Lee, H. Choi, E. Gu, M. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Related Materials 15, 725–728 (2006).

Nath, D. N.

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

Nikolajeff, F.

Olivero, P.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Omnès, F.

E. Monroy, F. Omnès, and F. Calle, “Wide-bandgap semiconductor ultraviolet photodetectors,” Semicond. Sci. Technol. 18, R33 (2003).

Pan, Y.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Parker, S. I.

S. I. Parker, C. J. Kenney, and J. Segal, “3D — A proposed new architecture for solid-state radiation detectors,” Nucl. Instrum. Methods in Phys. Rese. A 395, 328–343 (1997).

Picollo, F.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Pietrantonio, F. D.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Pomorski, M.

B. Caylar, M. Pomorski, and P. Bergonzo, “Laser-processed three dimensional graphitic electrodes for diamond radiation detectors,” Appl. Phys. Lett. 103, 043504 (2013).

Pompili, F.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Pratiyush, A. S.

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

Quan, B.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Rajan, S.

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

Ralchenko, V.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Re, A.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Richter, M.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Rinati, G. V.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Saito, T.

D. S. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond,” Diamond Related Materials 13, 2207–2210 (2004).

Sang, D.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Sang, L.

L. Sang, M. Liao, and M. Sumiya, “A comprehensive review of semiconductor ultraviolet photodetectors: from thin film to one-dimensional nanostructures,” Sensors (Basel) 13(8), 10482–10518 (2013).
[PubMed]

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

Schroeder, T.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Schubert, M.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Segal, J.

S. I. Parker, C. J. Kenney, and J. Segal, “3D — A proposed new architecture for solid-state radiation detectors,” Nucl. Instrum. Methods in Phys. Rese. A 395, 328–343 (1997).

Shu, G.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Solanke, S. V.

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

Soltani, A.

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Son, Y.-W.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Storck, P.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Sumiya, M.

L. Sang, M. Liao, and M. Sumiya, “A comprehensive review of semiconductor ultraviolet photodetectors: from thin film to one-dimensional nanostructures,” Sensors (Basel) 13(8), 10482–10518 (2013).
[PubMed]

Sun, M.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Szyszka, A.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Tay, F. E. H.

F. E. H. Tay, J. Xu, Y. Liang, V. J. Logeeswaran, and Y. Yao, “The effects of non-parallel plates in a differential capacitive microaccelerometer,” J. Micromech. Microeng. 9, 283 (1999).

Teraji, T.

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

M. Liao, X. Wang, T. Teraji, S. Koizumi, and Y. Koide, “Light intensity dependence of photocurrent gain in single-crystal diamond detectors,” Phys. Rev. B 81, 033304 (2010).

Thapa, S.

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

Tucciarone, A.

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

Verona, C.

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

Verona-Rinati, G.

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

Wang, H.-X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Wang, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Wang, Q.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Wang, S.

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Wang, W.

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Wang, X.

M. Liao, X. Wang, T. Teraji, S. Koizumi, and Y. Koide, “Light intensity dependence of photocurrent gain in single-crystal diamond detectors,” Phys. Rev. B 81, 033304 (2010).

Wen, F.

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Xia, Y.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Xia, Z.

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

Xing, J.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Xu, J.

F. E. H. Tay, J. Xu, Y. Liang, V. J. Logeeswaran, and Y. Yao, “The effects of non-parallel plates in a differential capacitive microaccelerometer,” J. Micromech. Microeng. 9, 283 (1999).

Xue, X.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Yang, L.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Yao, Y.

F. E. H. Tay, J. Xu, Y. Liang, V. J. Logeeswaran, and Y. Yao, “The effects of non-parallel plates in a differential capacitive microaccelerometer,” J. Micromech. Microeng. 9, 283 (1999).

Yin, M.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Yoon, H. A.

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Zhang, J.

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

Zhang, M.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Zhang, X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Zhang, Y.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

Zhao, J.

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Zheng, Z.

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Zhu, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

Zhu, T.-F.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185–1192 (2017).
[PubMed]

Zhu, X.

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Appl. Phys. Lett. (7)

A. S. Pratiyush, S. Krishnamoorthy, S. V. Solanke, Z. Xia, R. Muralidharan, S. Rajan, and D. N. Nath, “High responsivity in molecular beam epitaxy grown β-Ga2O3 metal semiconductor metal solar blind deep-UV photodetector,” Appl. Phys. Lett. 110, 221107 (2017).

A. Szyszka, L. Lupina, G. Lupina, M. Mazur, M. Schubert, P. Storck, S. Thapa, and T. Schroeder, “Enhanced ultraviolet GaN photo-detector response on Si (111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors,” Appl. Phys. Lett. 104, 011106 (2014).

M. Liao, Y. Koide, and J. Alvarez, “Schottky-barrier photodiode with interdigitated-finger geometry: Application to diamond,” Appl. Phys. Lett. 90, 123507 (2007).

Z. Liu, J.-P. Ao, F. Li, W. Wang, J. Wang, J. Zhang, and H.-X. Wang, “Fabrication of three dimensional diamond ultraviolet photodetector through down-top method,” Appl. Phys. Lett. 109, 153507 (2016).

B. Caylar, M. Pomorski, and P. Bergonzo, “Laser-processed three dimensional graphitic electrodes for diamond radiation detectors,” Appl. Phys. Lett. 103, 043504 (2013).

M. Liao, Y. Koide, and J. Alvarez, “Thermally stable visible-blind diamond photodiode using tungsten carbide Schottky contact,” Appl. Phys. Lett. 87, 022105 (2005).

A. Balducci, M. Marinellia, E. Milani, M. E. Morgada, A. Tucciarone, and G. Verona-Rinati, “Extreme ultraviolet single-crystal diamond detectors by chemical vapor deposition,” Appl. Phys. Lett. 86, 193509 (2005).

Carbon (1)

M. Kim, S.-M. Choi, H. A. Yoon, S. K. Choi, J.-U. Lee, J. Kim, S. W. Lee, Y.-W. Son, and H. Cheong, “Photocurrent generation at ABA/ABC lateral junction in tri-layer graphene photodetector,” Carbon 96, 454–458 (2016).

Diamond Related Materials (4)

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. Mccutcheon, P. R. Hemmer, and M. Lončar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Related Materials 19, 621–629 (2010).

D. S. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond,” Diamond Related Materials 13, 2207–2210 (2004).

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Related Materials 80, 54–58 (2017).

C. Lee, H. Choi, E. Gu, M. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Related Materials 15, 725–728 (2006).

Europhys. Lett. (1)

J. Forneris, A. L. Giudice, P. Olivero, F. Picollo, A. Re, M. Marco, F. Pompili, C. Verona, G. V. Rinati, M. Benetti, D. Cannata, and F. D. Pietrantonio, “A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors,” Europhys. Lett. 108, 18001 (2014).

J. Micromech. Microeng. (1)

F. E. H. Tay, J. Xu, Y. Liang, V. J. Logeeswaran, and Y. Yao, “The effects of non-parallel plates in a differential capacitive microaccelerometer,” J. Micromech. Microeng. 9, 283 (1999).

J. Phys. D Appl. Phys. (1)

J. Du, J. Xing, C. Ge, H. Liu, P. Liu, H. Hao, J. Dong, Z. Zheng, and H. Gao, “Highly sensitive and ultrafast deep UV photodetector based on a β-Ga2O3 nanowire network grown by CVD,” J. Phys. D Appl. Phys. 49, 425105 (2016).

Jpn. J. Appl. Phys. (1)

M. Liao, L. Sang, T. Teraji, M. Imura, J. Alvarez, and Y. Koide, “Comprehensive Investigation of Single Crystal Diamond Deep-Ultraviolet Detectors,” Jpn. J. Appl. Phys. 51, 090115 (2012).

MRS Adv. (1)

Z. Liu, F. Li, W. Wang, J. Zhang, F. Lin, and H.-X. Wang, “Effect of depth of Buried-In Tungsten Electrodes on Single Crystal Diamond Photodetector,” MRS Adv. 1, 1099–1104 (2016).

Nanotechnology (1)

H. Fan, M. Sun, P. Ma, M. Yin, L. Lu, X. Xue, X. Zhu, D. Li, and J. Ma, “UV photodetectors based on 3D periodic Au-decorated nanocone ZnO films,” Nanotechnology 27(36), 365303 (2016).
[PubMed]

Nucl. Instrum. Methods in Phys. Rese. A (1)

S. I. Parker, C. J. Kenney, and J. Segal, “3D — A proposed new architecture for solid-state radiation detectors,” Nucl. Instrum. Methods in Phys. Rese. A 395, 328–343 (1997).

Opt. Express (2)

Phys. Rev. B (1)

M. Liao, X. Wang, T. Teraji, S. Koizumi, and Y. Koide, “Light intensity dependence of photocurrent gain in single-crystal diamond detectors,” Phys. Rev. B 81, 033304 (2010).

RSC Advances (1)

D. Sang, H. Li, S. Cheng, Q. Wang, J. Liu, Q. Wang, S. Wang, C. Han, K. Chen, and Y. Pan, “Ultraviolet photoelectrical properties of a n-ZnO nanorods/p-diamond heterojunction,” RSC Advances 5, 49211–49215 (2015).

Semicond. Sci. Technol. (2)

E. Monroy, F. Omnès, and F. Calle, “Wide-bandgap semiconductor ultraviolet photodetectors,” Semicond. Sci. Technol. 18, R33 (2003).

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H. A. Barkad, D. Bolsee, C. Hermans, M. Richter, and J. C. Dejaeger, “New developments on diamond photodetector for VUV solar observations,” Semicond. Sci. Technol. 23, 035026 (2008).

Sens. Actuators A Phys. (1)

K. Liu, B. Dai, V. Ralchenko, Y. Xia, B. Quan, J. Zhao, G. Shu, M. Sun, G. Gao, and L. Yang, “Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity,” Sens. Actuators A Phys. 259, 121–126 (2017).

Sensors (Basel) (1)

L. Sang, M. Liao, and M. Sumiya, “A comprehensive review of semiconductor ultraviolet photodetectors: from thin film to one-dimensional nanostructures,” Sensors (Basel) 13(8), 10482–10518 (2013).
[PubMed]

Other (2)

A. M. Zaitsev, Optical properties of diamond: A data handbook (Springer Science & Business Media, 2013).

R. S. Sussmann, CVD Diamond for Electronic Devices and Sensors (Wiley, 2009).

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Figures (7)

Fig. 1
Fig. 1 Schematic of photodetectors fabrication process and characterization.
Fig. 2
Fig. 2 (a) SEM image of fabricated microlens photodetector. (b, c) SEM images of fabricated microlens before and after electrode deposition with high magnification, dashed line is guide to emphasize the geometry of microlens. (d) Three dimensional LCSM images of fabricated microlens photodetector, black dash lines are guide to emphasize electrodes.
Fig. 3
Fig. 3 LCSM measured surface profiles of (a) planar and (b) microlens photodetectors.
Fig. 4
Fig. 4 I-V characteristics of diamond photodetectors. (a) Dark currents and (b) photocurrents under illumination of 220 nm light of microlens and planar diamond photodetectors. The incident light power density is 742 nW/mm2.
Fig. 5
Fig. 5 Spectral responsivity of microlens and planar photodetector measured at 10 V reverse bias.
Fig. 6
Fig. 6 Electric field simulations in (a) microlens and (b) planar geometry. Insets: top view of simulated configurations. (c) Electric field intensity versus depth along red dash lines as shown in 6(a) and 6(b).
Fig. 7
Fig. 7 (a) Light distribution simulation of microlens and planar diamond photodetectors. (b) Light intensity versus depth along red solid lines as shown in 7(a).

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

ROC= ( h 2 + r 2 ) 2h
f= ROC n1
F 1 β 2
E= F q
I=ηqGN

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