Abstract

Large-area micro/nanolithography of transparent thin films is critical for metasurface-based optical elements, where the feature size of micro/nanostructures is generally required to be submicrometer or even nanoscale. In this work, micro/nanolith`ography through laser-induced release of phase-transition latent-heat is proposed. AgInSbTe and ZnS-SiO2 are chosen as light absorption layer and transparent thin film layer, respectively. The theoretical simulation reveals that the release of phase-transition latent-heat of AgInSbTe can heat the ZnS-SiO2 thin film to above the temperature of structural change and form micro/nanopatterns, and the thermal threshold effect of AgInSbTe thin film can confine the pattern to submicrometer or even nanoscale. The micro/nanopatterns on ZnS-SiO2 thin films can be further etched into micro/nanostructures in hydrofluoric acid solution. Using a GaN-diode-based direct laser writing lithography system, the minimum lithographic linewidth can experimentally be as low as 120 nm, which is only about 1/7 the writing spot size. The edge of obtained lithographic structure is steep and the surface is also smooth, and arbitrary lithographic structures have also been fabricated. The laser-induced release of phase-transition latent-heat is a good pathway to micro/nanolithography of transparent thin films, and has potential application in the fabrication of metasurface-based optical element.

© 2017 Optical Society of America

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  1. Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).
  2. X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).
  3. S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).
  4. Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).
  5. H. H. Hsiao, C. H. Chu, and D. P. Tsai, “Fundamentals and applications of metasurfaces,” Small Methods 1, 1600064 (2017).
  6. D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
    [PubMed]
  7. X. Tian and Z. Li, “Visible-infrared ultra-broadband polarization-independent metamaterial perfect absorber involving phase-change materials,” Photonics Res. 4, 146–152 (2016).
  8. B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
    [PubMed]
  9. R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
    [PubMed]
  10. R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2, 219–225 (2008).
  11. M. Beresna, M. Gecevičius, and P. G. Kazansky, “Ultrafast laser direct writing and nanostructuring in transparent materials,” Adv. Opt. Photonics 6, 293–339 (2014).
  12. D. Tan, K. N. Sharafudeen, Y. Yue, and J. Qiu, “Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications,” Prog. Mater. Sci. 76, 154–228 (2016).
  13. Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
    [PubMed]
  14. Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).
  15. D. T. T. Nguyen, Q. C. Tong, I. Ledoux-Rak, and N. D. Lai, “One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect,” J. Appl. Phys. 119, 013101 (2016).
  16. K. Zhang, Z. Chen, Y. Geng, Y. Wang, and Y. Wu, “Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime,” Chin. Opt. Lett. 14, 051401 (2016).
  17. J. Wei, Y. Wang, and Y. Wu, “Manipulation of heat-diffusion channel in laser thermal lithography,” Opt. Express 22(26), 32470–32481 (2014).
    [PubMed]
  18. Y. Cao and M. Gu, “Silver nanodots fabricated by direct laser writing through highly sensitive two-photon photoreduction,” Appl. Phys. Lett. 103, 213104 (2013).
  19. M. T. Do, T. T. Nguyen, Q. Li, H. Benisty, I. Ledoux-Rak, and N. D. Lai, “Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing,” Opt. Express 21(18), 20964–20973 (2013).
    [PubMed]
  20. J. Liu and J. Wei, “Optical nonlinear absorption characteristics of AgInSbTe phase change thin films,” J. Appl. Phys. 106, 083112 (2009).
  21. J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
    [PubMed]
  22. P. K. Bhatnagar, G. Mongia, and P. C. Mathur, “Optical properties and average flow of energy in AgInSbTe films used for phase change optical recording,” Opt. Eng. 42(11), 3274 (2003).
  23. M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).
  24. X. Jiao, J. Wei, F. Gan, and M. Xiao, “Temperature Dependence of Thermal Properties of Ag8In14Sb55Te23 Phase-Change Memory Materials,” Appl. Phys., A Mater. Sci. Process. 94, 627–631 (2009).
  25. L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).
  26. H. Li, Y. Geng, and Y. Wu, “Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography,” Appl. Phys., A Mater. Sci. Process. 107, 221–225 (2012).
  27. C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).
  28. S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
    [PubMed]
  29. R. Marqués, J. Martel, F. Mesa, and F. Medina, “Left-handed-media simulation and transmission of EM waves in subwavelength split-ring-resonator-loaded metallic waveguides,” Phys. Rev. Lett. 89(18), 183901 (2002).
    [PubMed]
  30. F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
    [PubMed]

2017 (2)

H. H. Hsiao, C. H. Chu, and D. P. Tsai, “Fundamentals and applications of metasurfaces,” Small Methods 1, 1600064 (2017).

J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
[PubMed]

2016 (10)

D. Tan, K. N. Sharafudeen, Y. Yue, and J. Qiu, “Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications,” Prog. Mater. Sci. 76, 154–228 (2016).

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

D. T. T. Nguyen, Q. C. Tong, I. Ledoux-Rak, and N. D. Lai, “One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect,” J. Appl. Phys. 119, 013101 (2016).

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).

X. Tian and Z. Li, “Visible-infrared ultra-broadband polarization-independent metamaterial perfect absorber involving phase-change materials,” Photonics Res. 4, 146–152 (2016).

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[PubMed]

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

K. Zhang, Z. Chen, Y. Geng, Y. Wang, and Y. Wu, “Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime,” Chin. Opt. Lett. 14, 051401 (2016).

2015 (3)

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

2014 (3)

M. Beresna, M. Gecevičius, and P. G. Kazansky, “Ultrafast laser direct writing and nanostructuring in transparent materials,” Adv. Opt. Photonics 6, 293–339 (2014).

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[PubMed]

J. Wei, Y. Wang, and Y. Wu, “Manipulation of heat-diffusion channel in laser thermal lithography,” Opt. Express 22(26), 32470–32481 (2014).
[PubMed]

2013 (3)

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Y. Cao and M. Gu, “Silver nanodots fabricated by direct laser writing through highly sensitive two-photon photoreduction,” Appl. Phys. Lett. 103, 213104 (2013).

M. T. Do, T. T. Nguyen, Q. Li, H. Benisty, I. Ledoux-Rak, and N. D. Lai, “Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing,” Opt. Express 21(18), 20964–20973 (2013).
[PubMed]

2012 (2)

H. Li, Y. Geng, and Y. Wu, “Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography,” Appl. Phys., A Mater. Sci. Process. 107, 221–225 (2012).

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

2009 (2)

X. Jiao, J. Wei, F. Gan, and M. Xiao, “Temperature Dependence of Thermal Properties of Ag8In14Sb55Te23 Phase-Change Memory Materials,” Appl. Phys., A Mater. Sci. Process. 94, 627–631 (2009).

J. Liu and J. Wei, “Optical nonlinear absorption characteristics of AgInSbTe phase change thin films,” J. Appl. Phys. 106, 083112 (2009).

2008 (1)

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2, 219–225 (2008).

2004 (1)

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

2003 (1)

P. K. Bhatnagar, G. Mongia, and P. C. Mathur, “Optical properties and average flow of energy in AgInSbTe films used for phase change optical recording,” Opt. Eng. 42(11), 3274 (2003).

2002 (2)

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

R. Marqués, J. Martel, F. Mesa, and F. Medina, “Left-handed-media simulation and transmission of EM waves in subwavelength split-ring-resonator-loaded metallic waveguides,” Phys. Rev. Lett. 89(18), 183901 (2002).
[PubMed]

Aieta, F.

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

Atoda, N.

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

Averitt, R. D.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Baena, J. D.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Bai, Z.

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

Belov, P. A.

S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).

Benisty, H.

Beresna, M.

M. Beresna, M. Gecevičius, and P. G. Kazansky, “Ultrafast laser direct writing and nanostructuring in transparent materials,” Adv. Opt. Photonics 6, 293–339 (2014).

Beruete, M.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Bhatnagar, P. K.

P. K. Bhatnagar, G. Mongia, and P. C. Mathur, “Optical properties and average flow of energy in AgInSbTe films used for phase change optical recording,” Opt. Eng. 42(11), 3274 (2003).

Bohn, B. J.

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

Bonache, J.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Brongersma, M. L.

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[PubMed]

Cao, Y.

Y. Cao and M. Gu, “Silver nanodots fabricated by direct laser writing through highly sensitive two-photon photoreduction,” Appl. Phys. Lett. 103, 213104 (2013).

Capasso, F.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[PubMed]

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

Charmasson, L.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Chen, J.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Chen, T.-Y.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Chen, W. T.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[PubMed]

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Chen, Y.

Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).

Chen, Y.-H.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Chen, Z.

Chu, C. H.

H. H. Hsiao, C. H. Chu, and D. P. Tsai, “Fundamentals and applications of metasurfaces,” Small Methods 1, 1600064 (2017).

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Delaporte, P.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Devlin, R. C.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[PubMed]

Do, M. T.

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

M. T. Do, T. T. Nguyen, Q. Li, H. Benisty, I. Ledoux-Rak, and N. D. Lai, “Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing,” Opt. Express 21(18), 20964–20973 (2013).
[PubMed]

Duan, G. W.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Falcone, F.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Fan, K. B.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Fan, P.

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[PubMed]

Fu, Y. H.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

Gan, F.

X. Jiao, J. Wei, F. Gan, and M. Xiao, “Temperature Dependence of Thermal Properties of Ag8In14Sb55Te23 Phase-Change Memory Materials,” Appl. Phys., A Mater. Sci. Process. 94, 627–631 (2009).

Gattass, R. R.

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2, 219–225 (2008).

Gecevicius, M.

M. Beresna, M. Gecevičius, and P. G. Kazansky, “Ultrafast laser direct writing and nanostructuring in transparent materials,” Adv. Opt. Photonics 6, 293–339 (2014).

Geng, Y.

K. Zhang, Z. Chen, Y. Geng, Y. Wang, and Y. Wu, “Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime,” Chin. Opt. Lett. 14, 051401 (2016).

H. Li, Y. Geng, and Y. Wu, “Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography,” Appl. Phys., A Mater. Sci. Process. 107, 221–225 (2012).

Glybovski, S. B.

S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).

Grojo, D.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Gu, M.

Y. Cao and M. Gu, “Silver nanodots fabricated by direct laser writing through highly sensitive two-photon photoreduction,” Appl. Phys. Lett. 103, 213104 (2013).

Guo, G. Y.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Hasman, E.

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[PubMed]

He, Q.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Hillenbrand, R.

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

Hong, M.

Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).

Hsiao, H. H.

H. H. Hsiao, C. H. Chu, and D. P. Tsai, “Fundamentals and applications of metasurfaces,” Small Methods 1, 1600064 (2017).

Hsieh, W. T.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Jiao, X.

X. Jiao, J. Wei, F. Gan, and M. Xiao, “Temperature Dependence of Thermal Properties of Ag8In14Sb55Te23 Phase-Change Memory Materials,” Appl. Phys., A Mater. Sci. Process. 94, 627–631 (2009).

Journet, B.

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

Juan, T. K.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Kallepalli, L. N. D.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Kats, M. A.

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

Kazansky, P. G.

M. Beresna, M. Gecevičius, and P. G. Kazansky, “Ultrafast laser direct writing and nanostructuring in transparent materials,” Adv. Opt. Photonics 6, 293–339 (2014).

Khorasaninejad, M.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[PubMed]

Kivshar, Y. S.

S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).

Kung, W. T.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Kuwahara, M.

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

Kuznetsov, A. I.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

Lai, N. D.

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

D. T. T. Nguyen, Q. C. Tong, I. Ledoux-Rak, and N. D. Lai, “One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect,” J. Appl. Phys. 119, 013101 (2016).

M. T. Do, T. T. Nguyen, Q. Li, H. Benisty, I. Ledoux-Rak, and N. D. Lai, “Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing,” Opt. Express 21(18), 20964–20973 (2013).
[PubMed]

Laso, M. A. G.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Ledoux-Rak, I.

D. T. T. Nguyen, Q. C. Tong, I. Ledoux-Rak, and N. D. Lai, “One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect,” J. Appl. Phys. 119, 013101 (2016).

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

M. T. Do, T. T. Nguyen, Q. Li, H. Benisty, I. Ledoux-Rak, and N. D. Lai, “Submicrometer 3D structures fabrication enabled by one-photon absorption direct laser writing,” Opt. Express 21(18), 20964–20973 (2013).
[PubMed]

Li, H.

H. Li, Y. Geng, and Y. Wu, “Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography,” Appl. Phys., A Mater. Sci. Process. 107, 221–225 (2012).

Li, J.

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

Li, Q.

Li, X.

Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).

Li, Z.

X. Tian and Z. Li, “Visible-infrared ultra-broadband polarization-independent metamaterial perfect absorber involving phase-change materials,” Photonics Res. 4, 146–152 (2016).

Liang, X.

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

Liao, C. Y.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Lin, D.

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[PubMed]

Liu, J.

J. Liu and J. Wei, “Optical nonlinear absorption characteristics of AgInSbTe phase change thin films,” J. Appl. Phys. 106, 083112 (2009).

Lopetegi, T.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Luk’yanchuk, B.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

Luo, X.

Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).

Luong, M. H.

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

Maier, S. A.

Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).

Marqués, R.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

R. Marqués, J. Martel, F. Mesa, and F. Medina, “Left-handed-media simulation and transmission of EM waves in subwavelength split-ring-resonator-loaded metallic waveguides,” Phys. Rev. Lett. 89(18), 183901 (2002).
[PubMed]

Martel, J.

R. Marqués, J. Martel, F. Mesa, and F. Medina, “Left-handed-media simulation and transmission of EM waves in subwavelength split-ring-resonator-loaded metallic waveguides,” Phys. Rev. Lett. 89(18), 183901 (2002).
[PubMed]

Martín, F.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Mathur, P. C.

P. K. Bhatnagar, G. Mongia, and P. C. Mathur, “Optical properties and average flow of energy in AgInSbTe films used for phase change optical recording,” Opt. Eng. 42(11), 3274 (2003).

Mazur, E.

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2, 219–225 (2008).

Medina, F.

R. Marqués, J. Martel, F. Mesa, and F. Medina, “Left-handed-media simulation and transmission of EM waves in subwavelength split-ring-resonator-loaded metallic waveguides,” Phys. Rev. Lett. 89(18), 183901 (2002).
[PubMed]

Merlen, A.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Mesa, F.

R. Marqués, J. Martel, F. Mesa, and F. Medina, “Left-handed-media simulation and transmission of EM waves in subwavelength split-ring-resonator-loaded metallic waveguides,” Phys. Rev. Lett. 89(18), 183901 (2002).
[PubMed]

Metcalfe, G. D.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Mihalcea, C.

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

Mongia, G.

P. K. Bhatnagar, G. Mongia, and P. C. Mathur, “Optical properties and average flow of energy in AgInSbTe films used for phase change optical recording,” Opt. Eng. 42(11), 3274 (2003).

Nguyen, D. T. T.

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

D. T. T. Nguyen, Q. C. Tong, I. Ledoux-Rak, and N. D. Lai, “One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect,” J. Appl. Phys. 119, 013101 (2016).

Nguyen, T. T.

Oh, J.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[PubMed]

Paniagua-Dominguez, R.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

Qiu, J.

D. Tan, K. N. Sharafudeen, Y. Yue, and J. Qiu, “Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications,” Prog. Mater. Sci. 76, 154–228 (2016).

Sangar, A.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Schnell, M.

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

Sharafudeen, K. N.

D. Tan, K. N. Sharafudeen, Y. Yue, and J. Qiu, “Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications,” Prog. Mater. Sci. 76, 154–228 (2016).

Shi, L. P.

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

Simovski, C. R.

S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).

Sorolla, M.

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Sun, G.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Sun, S.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Tan, D.

D. Tan, K. N. Sharafudeen, Y. Yue, and J. Qiu, “Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications,” Prog. Mater. Sci. 76, 154–228 (2016).

Tian, X.

X. Tian and Z. Li, “Visible-infrared ultra-broadband polarization-independent metamaterial perfect absorber involving phase-change materials,” Photonics Res. 4, 146–152 (2016).

Tominaga, J.

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

Tong, Q. C.

D. T. T. Nguyen, Q. C. Tong, I. Ledoux-Rak, and N. D. Lai, “One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect,” J. Appl. Phys. 119, 013101 (2016).

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

Torchio, P.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Tretyakov, S. A.

S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).

Tsai, D. P.

H. H. Hsiao, C. H. Chu, and D. P. Tsai, “Fundamentals and applications of metasurfaces,” Small Methods 1, 1600064 (2017).

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Tseng, M. L.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Utéza, O.

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Wang, C. M.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Wang, H.-C.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Wang, R.

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

Wang, Y.

Wei, J.

J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
[PubMed]

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

J. Wei, Y. Wang, and Y. Wu, “Manipulation of heat-diffusion channel in laser thermal lithography,” Opt. Express 22(26), 32470–32481 (2014).
[PubMed]

J. Liu and J. Wei, “Optical nonlinear absorption characteristics of AgInSbTe phase change thin films,” J. Appl. Phys. 106, 083112 (2009).

X. Jiao, J. Wei, F. Gan, and M. Xiao, “Temperature Dependence of Thermal Properties of Ag8In14Sb55Te23 Phase-Change Memory Materials,” Appl. Phys., A Mater. Sci. Process. 94, 627–631 (2009).

Wei, T.

J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
[PubMed]

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

Wraback, M.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Wu, H. J.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Wu, P. C.

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Wu, Y.

J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
[PubMed]

K. Zhang, Z. Chen, Y. Geng, Y. Wang, and Y. Wu, “Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime,” Chin. Opt. Lett. 14, 051401 (2016).

J. Wei, Y. Wang, and Y. Wu, “Manipulation of heat-diffusion channel in laser thermal lithography,” Opt. Express 22(26), 32470–32481 (2014).
[PubMed]

H. Li, Y. Geng, and Y. Wu, “Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography,” Appl. Phys., A Mater. Sci. Process. 107, 221–225 (2012).

Xiao, M.

J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
[PubMed]

X. Jiao, J. Wei, F. Gan, and M. Xiao, “Temperature Dependence of Thermal Properties of Ag8In14Sb55Te23 Phase-Change Memory Materials,” Appl. Phys., A Mater. Sci. Process. 94, 627–631 (2009).

Xiao, S.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Yang, K. Y.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Yu, Y. F.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

Yue, Y.

D. Tan, K. N. Sharafudeen, Y. Yue, and J. Qiu, “Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications,” Prog. Mater. Sci. 76, 154–228 (2016).

Zhang, J. D.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Zhang, K.

J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
[PubMed]

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

K. Zhang, Z. Chen, Y. Geng, Y. Wang, and Y. Wu, “Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime,” Chin. Opt. Lett. 14, 051401 (2016).

Zhang, X.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Zhao, X. G.

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Zhou, L.

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Zhu, A. Y.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

Adv. Opt. Photonics (1)

M. Beresna, M. Gecevičius, and P. G. Kazansky, “Ultrafast laser direct writing and nanostructuring in transparent materials,” Adv. Opt. Photonics 6, 293–339 (2014).

Appl. Phys. Lett. (2)

Q. C. Tong, D. T. T. Nguyen, M. T. Do, M. H. Luong, B. Journet, I. Ledoux-Rak, and N. D. Lai, “Direct laser writing of polymeric nanostructures via optically induced local thermal effect,” Appl. Phys. Lett. 108, 183104 (2016).

Y. Cao and M. Gu, “Silver nanodots fabricated by direct laser writing through highly sensitive two-photon photoreduction,” Appl. Phys. Lett. 103, 213104 (2013).

Appl. Phys., A Mater. Sci. Process. (2)

X. Jiao, J. Wei, F. Gan, and M. Xiao, “Temperature Dependence of Thermal Properties of Ag8In14Sb55Te23 Phase-Change Memory Materials,” Appl. Phys., A Mater. Sci. Process. 94, 627–631 (2009).

H. Li, Y. Geng, and Y. Wu, “Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography,” Appl. Phys., A Mater. Sci. Process. 107, 221–225 (2012).

Chin. Opt. Lett. (1)

J. Appl. Phys. (2)

D. T. T. Nguyen, Q. C. Tong, I. Ledoux-Rak, and N. D. Lai, “One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect,” J. Appl. Phys. 119, 013101 (2016).

J. Liu and J. Wei, “Optical nonlinear absorption characteristics of AgInSbTe phase change thin films,” J. Appl. Phys. 106, 083112 (2009).

J. Phys. D Appl. Phys. (1)

L. N. D. Kallepalli, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, A. Merlen, A. Sangar, and P. Torchio, “Long range nanostructuring of silicon surfaces by photonic nanojets from microsphere Langmuir films,” J. Phys. D Appl. Phys. 46, 145102 (2013).

Jpn. J. Appl. Phys. (1)

M. Kuwahara, J. Li, C. Mihalcea, N. Atoda, J. Tominaga, and L. P. Shi, “Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam,” Jpn. J. Appl. Phys. 41, L1022–L1024 (2002).

Laser Photonics Rev. (2)

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase‐change medium,” Laser Photonics Rev. 10(6), 986–994 (2016).

Y. F. Yu, A. Y. Zhu, R. Paniagua-Dominguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2 phase control at visible wavelengths,” Laser Photonics Rev. 9, 412–418 (2015).

Nano Lett. (2)

B. J. Bohn, M. Schnell, M. A. Kats, F. Aieta, R. Hillenbrand, and F. Capasso, “Near-field imaging of phased array metasurfaces,” Nano Lett. 15(6), 3851–3858 (2015).
[PubMed]

S. Sun, K. Y. Yang, C. M. Wang, T. K. Juan, W. T. Chen, C. Y. Liao, Q. He, S. Xiao, W. T. Kung, G. Y. Guo, L. Zhou, and D. P. Tsai, “High-efficiency broadband anomalous reflection by gradient meta-surfaces,” Nano Lett. 12(12), 6223–6229 (2012).
[PubMed]

Nat. Photonics (1)

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2, 219–225 (2008).

Opt. Eng. (1)

P. K. Bhatnagar, G. Mongia, and P. C. Mathur, “Optical properties and average flow of energy in AgInSbTe films used for phase change optical recording,” Opt. Eng. 42(11), 3274 (2003).

Opt. Express (2)

Photonics Res. (3)

X. Tian and Z. Li, “Visible-infrared ultra-broadband polarization-independent metamaterial perfect absorber involving phase-change materials,” Photonics Res. 4, 146–152 (2016).

X. G. Zhao, J. D. Zhang, K. B. Fan, G. W. Duan, G. D. Metcalfe, M. Wraback, X. Zhang, and R. D. Averitt, “Nonlinear Terahertz Metamaterial Perfect Absorbers Using GaAs,” Photonics Res. 4, A16–A21 (2016).

Y. Chen, X. Li, X. Luo, S. A. Maier, and M. Hong, “Tunable near-infrared plasmonic perfect absorber based on phase-change materials,” Photonics Res. 3, 54–57 (2015).

Phys. Rep. (1)

S. B. Glybovski, S. A. Tretyakov, P. A. Belov, Y. S. Kivshar, and C. R. Simovski, “Metasurfaces: From Microwaves to Visible,” Phys. Rep. 634, 1–72 (2016).

Phys. Rev. Lett. (2)

R. Marqués, J. Martel, F. Mesa, and F. Medina, “Left-handed-media simulation and transmission of EM waves in subwavelength split-ring-resonator-loaded metallic waveguides,” Phys. Rev. Lett. 89(18), 183901 (2002).
[PubMed]

F. Falcone, T. Lopetegi, M. A. G. Laso, J. D. Baena, J. Bonache, M. Beruete, R. Marqués, F. Martín, and M. Sorolla, “Babinet principle applied to the design of metasurfaces and metamaterials,” Phys. Rev. Lett. 93(19), 197401 (2004).
[PubMed]

Proc. Natl. Acad. Sci. U.S.A. (1)

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[PubMed]

Prog. Mater. Sci. (1)

D. Tan, K. N. Sharafudeen, Y. Yue, and J. Qiu, “Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications,” Prog. Mater. Sci. 76, 154–228 (2016).

Rev. Sci. Instrum. (1)

Z. Bai, J. Wei, X. Liang, K. Zhang, T. Wei, and R. Wang, “High-Speed Laser Writing of Arbitrary Patterns in Polar Coordinate System,” Rev. Sci. Instrum. 87(12), 125118 (2016).
[PubMed]

Sci. Rep. (1)

J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, and M. Xiao, “High-speed maskless nanolithography with visible light based on photothermal localization,” Sci. Rep. 7, 43892 (2017).
[PubMed]

Science (1)

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[PubMed]

Small Methods (1)

H. H. Hsiao, C. H. Chu, and D. P. Tsai, “Fundamentals and applications of metasurfaces,” Small Methods 1, 1600064 (2017).

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Figures (8)

Fig. 1
Fig. 1 Physical picture of micro/nanolithography of transparent thin films through laser-induced release of phase-transition latent-heat. (a) Schematic of laser-induced local phase-transition of the light absorption thin film. The left inset is the spot intensity profile. The right is the change of structural networks, accompanied with the release of latent-heat. (b) The transparent thin film is locally heated via phase-transition latent-heat released by light absorption thin film. (c) Generation of micro/nanopatterns on transparent thin film by spot scanning the sample. (d) The micro/nanopatterns are further changed into micro/nanostructures after wet-etching.

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Fig. 2
Fig. 2 DSC curves of (a) AIST thin film and (b) ZnS-SiO2 thin film.

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Fig. 3
Fig. 3 Temperature profile of AIST thin film. (a) Three-dimensional (3-D) profile, and (b) two-dimensional (2-D) profile.

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Fig. 4
Fig. 4 Temperature profile of ZnS-SiO2 thin film. (a) Without considering the latent-heat release of AIST, and (b) with considering latent-heat release of AIST.

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Fig. 5
Fig. 5 (a) XRD curves of AIST thin film of as-deposited and laser-written samples, and (b) optical image of the written sample. The writing laser power is 1.15 mW.

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Fig. 6
Fig. 6 (a) 2-D AFM image, (b) 3-D AFM image of lithographic structures with rapidly tuning laser power and writing speed of 4 m/s,. (c) Influence of laser power on lithographic linewidth, where the writing speed is fixed at 1 m/s.

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Fig. 7
Fig. 7 AFM images of micro/nano-structures obtained under different laser powers. Laser power of 1.10 mW (a) 2-D and (b) 3-D morphologies; laser power of 1.18 mW (c) 2-D and (d) 3-D morphologies; laser power of 1.20 mW (e) 2-D and (f) 3-D morphologies.

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Fig. 8
Fig. 8 SEM images of (a) nanorod antennas and (b) split-ring structures fabricated on transparent ZnS-SiO2 thin films. The inset of (a) is AFM image of nanorod antenna unit cell and inset of (b) is AFM image of split-ring unit cell.

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Equations (5)

Equations on this page are rendered with MathJax. Learn more.

D= κ AIST ρ AIST C P−AIST
L= ( Dt )
ΔT=( Δ H AIST m AIST )/( C p ZnS−SiO2 m ZnS−SiO2 )
m AIST = 1 4 π ( d AIST ) 2 ρ AIST h AIST
m ZnS−SiO2 = 1 4 π ( d ZnS−SiO2 ) 2 ρ ZnS−SiO2 h ZnS−SiO2

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