T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
K. Debnath, T. Domínguez Bucio, A. Al-Attili, A. Z. Khokhar, S. Saito, and F. Y. Gardes, “Photonic crystal waveguides on silicon rich nitride platform,” Opt. Express 25, 3214–3221 (2017).
[Crossref]
[PubMed]
P. Dong, “Silicon photonic integrated circuits for wavelength-division multiplexing applications,” IEEE J. Sel. Top. Quantum Electron. 22, 370–378 (2016).
[Crossref]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
K. Wörhoff, R. G. Heideman, A. Leinse, and M. Hoekman, “TriPleX: a versatile dielectric photonic platform,” Adv. Opt. Technol. 4, 189–207 (2015).
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
Y. Hu, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “The evolution of angled MMI structure on the SOI platform,” Proc. SPIE 8990, 89900E (2014).
Y. Hu, F. Y. Gardes, D. J. Thomson, G. Z. Mashanovich, and G. T. Reed, “Coarse wavelength division (de)multiplexer using an interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102, 7–11 (2013).
[Crossref]
A. Arbabi and L. L. Goddard, “Measurements of the refractive indices and thermo-optic coefficients of Si3N4 and SiO(x) using microring resonances,” Opt. Lett. 38, 3878–3881 (2013).
[Crossref]
[PubMed]
F. Qiu, A. M. Spring, F. Yu, and S. Yokoyama, “Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators,” Appl. Phys. Lett. 102, 051106 (2013).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
Y. Hu, R. M. Jenkins, F. Y. Gardes, E. D. Finlayson, G. Z. Mashanovich, and G. T. Reed, “Wavelength division (de) multiplexing based on dispersive self-imaging,” Opt. Lett. 36, 4488–4490 (2011).
[Crossref]
[PubMed]
D. Dai, Z. Wang, J. F. Bauters, M.-C. Tien, M. J. R. Heck, D. J. Blumenthal, and J. E. Bowers, “Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides,” Opt. Express 19, 14130–14136 (2011).
[Crossref]
[PubMed]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16, 316–324 (2010).
[Crossref]
N. Rouger, L. Chrostowski, and R. Vafaei, “Temperature effects on silicon-on-insulator (SOI) racetrack resonators: a coupled analytic and 2-D finite difference approach,” J. Lightwave Technol. 28, 1380–1391 (2010).
[Crossref]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
M. Uenuma and T. Motooka, “Temperature-independent silicon waveguide optical filter,” Opt. Lett. 34, 599–601 (2009).
[Crossref]
[PubMed]
J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, “Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer,” J. Light. Technol. 25, 2236–2243 (2007).
[Crossref]
J. Soole, M. Schlax, C. Narayanan, and R. Pafchek, “Athermalisation of silica arrayed waveguide grating multiplexers,” Electron. Lett. 39, 1182 (2003).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5, 1227–1236 (1999).
[Crossref]
J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, “Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer,” J. Light. Technol. 25, 2236–2243 (2007).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16, 316–324 (2010).
[Crossref]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16, 316–324 (2010).
[Crossref]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
K. Debnath, T. Domínguez Bucio, A. Al-Attili, A. Z. Khokhar, S. Saito, and F. Y. Gardes, “Photonic crystal waveguides on silicon rich nitride platform,” Opt. Express 25, 3214–3221 (2017).
[Crossref]
[PubMed]
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
P. Dong, “Silicon photonic integrated circuits for wavelength-division multiplexing applications,” IEEE J. Sel. Top. Quantum Electron. 22, 370–378 (2016).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16, 316–324 (2010).
[Crossref]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
K. Debnath, T. Domínguez Bucio, A. Al-Attili, A. Z. Khokhar, S. Saito, and F. Y. Gardes, “Photonic crystal waveguides on silicon rich nitride platform,” Opt. Express 25, 3214–3221 (2017).
[Crossref]
[PubMed]
Y. Hu, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “The evolution of angled MMI structure on the SOI platform,” Proc. SPIE 8990, 89900E (2014).
Y. Hu, F. Y. Gardes, D. J. Thomson, G. Z. Mashanovich, and G. T. Reed, “Coarse wavelength division (de)multiplexer using an interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102, 7–11 (2013).
[Crossref]
Y. Hu, R. M. Jenkins, F. Y. Gardes, E. D. Finlayson, G. Z. Mashanovich, and G. T. Reed, “Wavelength division (de) multiplexing based on dispersive self-imaging,” Opt. Lett. 36, 4488–4490 (2011).
[Crossref]
[PubMed]
A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5, 1227–1236 (1999).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
K. Wörhoff, R. G. Heideman, A. Leinse, and M. Hoekman, “TriPleX: a versatile dielectric photonic platform,” Adv. Opt. Technol. 4, 189–207 (2015).
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
K. Wörhoff, R. G. Heideman, A. Leinse, and M. Hoekman, “TriPleX: a versatile dielectric photonic platform,” Adv. Opt. Technol. 4, 189–207 (2015).
Y. Hu, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “The evolution of angled MMI structure on the SOI platform,” Proc. SPIE 8990, 89900E (2014).
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
Y. Hu, F. Y. Gardes, D. J. Thomson, G. Z. Mashanovich, and G. T. Reed, “Coarse wavelength division (de)multiplexer using an interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102, 7–11 (2013).
[Crossref]
Y. Hu, R. M. Jenkins, F. Y. Gardes, E. D. Finlayson, G. Z. Mashanovich, and G. T. Reed, “Wavelength division (de) multiplexing based on dispersive self-imaging,” Opt. Lett. 36, 4488–4490 (2011).
[Crossref]
[PubMed]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5, 1227–1236 (1999).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
K. Debnath, T. Domínguez Bucio, A. Al-Attili, A. Z. Khokhar, S. Saito, and F. Y. Gardes, “Photonic crystal waveguides on silicon rich nitride platform,” Opt. Express 25, 3214–3221 (2017).
[Crossref]
[PubMed]
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, “Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer,” J. Light. Technol. 25, 2236–2243 (2007).
[Crossref]
J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, “Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer,” J. Light. Technol. 25, 2236–2243 (2007).
[Crossref]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, “Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer,” J. Light. Technol. 25, 2236–2243 (2007).
[Crossref]
K. Wörhoff, R. G. Heideman, A. Leinse, and M. Hoekman, “TriPleX: a versatile dielectric photonic platform,” Adv. Opt. Technol. 4, 189–207 (2015).
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
Y. Hu, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “The evolution of angled MMI structure on the SOI platform,” Proc. SPIE 8990, 89900E (2014).
Y. Hu, F. Y. Gardes, D. J. Thomson, G. Z. Mashanovich, and G. T. Reed, “Coarse wavelength division (de)multiplexer using an interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102, 7–11 (2013).
[Crossref]
Y. Hu, R. M. Jenkins, F. Y. Gardes, E. D. Finlayson, G. Z. Mashanovich, and G. T. Reed, “Wavelength division (de) multiplexing based on dispersive self-imaging,” Opt. Lett. 36, 4488–4490 (2011).
[Crossref]
[PubMed]
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
J. Soole, M. Schlax, C. Narayanan, and R. Pafchek, “Athermalisation of silica arrayed waveguide grating multiplexers,” Electron. Lett. 39, 1182 (2003).
[Crossref]
A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5, 1227–1236 (1999).
[Crossref]
J. Soole, M. Schlax, C. Narayanan, and R. Pafchek, “Athermalisation of silica arrayed waveguide grating multiplexers,” Electron. Lett. 39, 1182 (2003).
[Crossref]
J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, “Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer,” J. Light. Technol. 25, 2236–2243 (2007).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
F. Qiu, A. M. Spring, F. Yu, and S. Yokoyama, “Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators,” Appl. Phys. Lett. 102, 051106 (2013).
[Crossref]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
Y. Hu, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “The evolution of angled MMI structure on the SOI platform,” Proc. SPIE 8990, 89900E (2014).
Y. Hu, F. Y. Gardes, D. J. Thomson, G. Z. Mashanovich, and G. T. Reed, “Coarse wavelength division (de)multiplexer using an interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102, 7–11 (2013).
[Crossref]
Y. Hu, R. M. Jenkins, F. Y. Gardes, E. D. Finlayson, G. Z. Mashanovich, and G. T. Reed, “Wavelength division (de) multiplexing based on dispersive self-imaging,” Opt. Lett. 36, 4488–4490 (2011).
[Crossref]
[PubMed]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
J. Soole, M. Schlax, C. Narayanan, and R. Pafchek, “Athermalisation of silica arrayed waveguide grating multiplexers,” Electron. Lett. 39, 1182 (2003).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16, 316–324 (2010).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
J. Soole, M. Schlax, C. Narayanan, and R. Pafchek, “Athermalisation of silica arrayed waveguide grating multiplexers,” Electron. Lett. 39, 1182 (2003).
[Crossref]
F. Qiu, A. M. Spring, F. Yu, and S. Yokoyama, “Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators,” Appl. Phys. Lett. 102, 051106 (2013).
[Crossref]
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).
A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5, 1227–1236 (1999).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
Y. Hu, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “The evolution of angled MMI structure on the SOI platform,” Proc. SPIE 8990, 89900E (2014).
Y. Hu, F. Y. Gardes, D. J. Thomson, G. Z. Mashanovich, and G. T. Reed, “Coarse wavelength division (de)multiplexer using an interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102, 7–11 (2013).
[Crossref]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16, 316–324 (2010).
[Crossref]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
K. Wörhoff, R. G. Heideman, A. Leinse, and M. Hoekman, “TriPleX: a versatile dielectric photonic platform,” Adv. Opt. Technol. 4, 189–207 (2015).
A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5, 1227–1236 (1999).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
F. Qiu, A. M. Spring, F. Yu, and S. Yokoyama, “Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators,” Appl. Phys. Lett. 102, 051106 (2013).
[Crossref]
F. Qiu, A. M. Spring, F. Yu, and S. Yokoyama, “Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators,” Appl. Phys. Lett. 102, 051106 (2013).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
K. Wörhoff, R. G. Heideman, A. Leinse, and M. Hoekman, “TriPleX: a versatile dielectric photonic platform,” Adv. Opt. Technol. 4, 189–207 (2015).
L. Wang, W. Bogaerts, P. Dumon, S. K. Selvaraja, J. Teng, S. Pathak, X. Han, J. Wang, X. Jian, M. Zhao, R. Baets, and G. Morthier, “Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed arrayed waveguides,” Appl. Opt. 51, 1251–1256 (2012).
[Crossref]
[PubMed]
Y. Hu, F. Y. Gardes, D. J. Thomson, G. Z. Mashanovich, and G. T. Reed, “Coarse wavelength division (de)multiplexer using an interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102, 7–11 (2013).
[Crossref]
F. Qiu, A. M. Spring, F. Yu, and S. Yokoyama, “Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators,” Appl. Phys. Lett. 102, 051106 (2013).
[Crossref]
N. Keil, H. Yao, C. Zawadzki, J. Bauer, M. Bauer, C. Dreyer, and J. Schneider, “Athermal all-polymer arrayed-waveguide grating multiplexer,” Electron. Lett. 37, 579 (2001).
[Crossref]
J. Soole, M. Schlax, C. Narayanan, and R. Pafchek, “Athermalisation of silica arrayed waveguide grating multiplexers,” Electron. Lett. 39, 1182 (2003).
[Crossref]
S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16, 316–324 (2010).
[Crossref]
P. Dong, “Silicon photonic integrated circuits for wavelength-division multiplexing applications,” IEEE J. Sel. Top. Quantum Electron. 22, 370–378 (2016).
[Crossref]
A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5, 1227–1236 (1999).
[Crossref]
W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. D. Vos, D. V. Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology,” IEEE J. Sel. Top. Quantum Electron. 16, 33–44 (2010).
[Crossref]
J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, “Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer,” J. Light. Technol. 25, 2236–2243 (2007).
[Crossref]
T. Domínguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, and F. Y. Gardes, “Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications,” J. Phys. D. Appl. Phys. 50, 025106 (2017).
[Crossref]
J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators byoverlaying a polymer cladding on narrowedwaveguides,” Opt. Express 17, 14627–14633 (2009).
[Crossref]
[PubMed]
K. Debnath, T. Domínguez Bucio, A. Al-Attili, A. Z. Khokhar, S. Saito, and F. Y. Gardes, “Photonic crystal waveguides on silicon rich nitride platform,” Opt. Express 25, 3214–3221 (2017).
[Crossref]
[PubMed]
D. Dai, Z. Wang, J. F. Bauters, M.-C. Tien, M. J. R. Heck, D. J. Blumenthal, and J. E. Bowers, “Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides,” Opt. Express 19, 14130–14136 (2011).
[Crossref]
[PubMed]
M. Uenuma and T. Motooka, “Temperature-independent silicon waveguide optical filter,” Opt. Lett. 34, 599–601 (2009).
[Crossref]
[PubMed]
A. Arbabi and L. L. Goddard, “Measurements of the refractive indices and thermo-optic coefficients of Si3N4 and SiO(x) using microring resonances,” Opt. Lett. 38, 3878–3881 (2013).
[Crossref]
[PubMed]
Y. Hu, T. Li, D. J. Thomson, X. Chen, J. S. Penades, a. Z. Khokhar, C. J. Mitchell, G. T. Reed, and G. Z. Mashanovich, “Mid-infrared wavelength division (de)multiplexer using an interleaved angled multimode interferometer on the silicon-on-insulator platform,” Opt. Lett. 39, 1406–1409 (2014).
[Crossref]
[PubMed]
Y. Hu, R. M. Jenkins, F. Y. Gardes, E. D. Finlayson, G. Z. Mashanovich, and G. T. Reed, “Wavelength division (de) multiplexing based on dispersive self-imaging,” Opt. Lett. 36, 4488–4490 (2011).
[Crossref]
[PubMed]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer Systems Based on Silicon Photonic Interconnects,” Proc. IEEE 97, 1337–1361 (2009).
[Crossref]
Y. Hu, D. J. Thomson, F. Y. Gardes, G. Z. Mashanovich, and G. T. Reed, “The evolution of angled MMI structure on the SOI platform,” Proc. SPIE 8990, 89900E (2014).
C. Lacava, S. Stankovic, A. Z. Khokhar, T. D. Bucio, F. Gardes, G. T. Reed, D. J. Richardson, and P. Petropoulos, “Si-rich Silicon Nitride for Nonlinear Signal Processing Applications,” Sci. Rep. 7, 22 (2016).