Abstract

We have fabricated and characterized 10,000 and 20,440 pixel Microwave Kinetic Inductance Detector (MKID) arrays for the Dark-speckle Near-IR Energy-resolved Superconducting Spectrophotometer (DARKNESS) and the MKID Exoplanet Camera (MEC). These instruments are designed to sit behind adaptive optics systems with the goal of directly imaging exoplanets in a 800–1400 nm band. Previous large optical and near-IR MKID arrays were fabricated using substoichiometric titanium nitride (TiN) on a silicon substrate. These arrays, however, suffered from severe non-uniformities in the TiN critical temperature, causing resonances to shift away from their designed values and lowering usable detector yield. We have begun fabricating DARKNESS and MEC arrays using platinum silicide (PtSi) on sapphire instead of TiN. Not only do these arrays have much higher uniformity than the TiN arrays, resulting in higher pixel yields, they have demonstrated better spectral resolution than TiN MKIDs of similar design. PtSi MKIDs also do not display the hot pixel effects seen when illuminating TiN on silicon MKIDs with photons with wavelengths shorter than 1 µm.

© 2017 Optical Society of America

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References

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  1. K. D. Irwin, G. C. Hilton, D. A. Wollman, and J. M. Martinis, “X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback,” Appl. Phys. Lett. 69, 1945–1947 (1996).
    [Crossref]
  2. K. Irwin and G. Hilton, “Transition-edge sensors,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 63–150.
  3. A. Fleischmann, C. Enss, and G. Seidel, “Metallic magnetic calorimeters,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 151–216.
  4. L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).
  5. A. Peacock, P. Verhoeve, N. Rando, A. Van Dordrecht, and et al., “Single optical photon detection with a superconducting tunnel junction,” Nature 381, 135–137 (1996).
    [Crossref]
  6. P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
    [Crossref] [PubMed]
  7. J. Zmuidzinas, “Superconducting microresonators: Physics and applications,” Annual Rev. Condensed Matt. Phys. 3, 169–214 (2012).
    [Crossref]
  8. D. C. Mattis and J. Bardeen, “Theory of the anomalous skin effect in normal and superconducting metals,” Phys. Rev. 111, 412–417 (1958).
    [Crossref]
  9. S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
    [Crossref] [PubMed]
  10. M. J. Strader, “Digital readout for microwave kinetic inductance detectors and applications in high time resolution astronomy,” Ph.D. thesis, University of California, Santa Barbara (2016).
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    [Crossref]
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    [Crossref]
  13. A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
    [Crossref]
  14. J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
    [Crossref]
  15. S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).
  16. J. Gao, “The physics of superconducting microwave resonators,” Ph.D. thesis, California Institute of Technology (2008).
  17. P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
    [Crossref]
  18. J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
    [Crossref]
  19. A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
    [Crossref]
  20. G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).
  21. J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
    [Crossref]

2016 (2)

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

2015 (1)

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

2013 (1)

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

2012 (2)

J. Zmuidzinas, “Superconducting microresonators: Physics and applications,” Annual Rev. Condensed Matt. Phys. 3, 169–214 (2012).
[Crossref]

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

2010 (1)

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

2009 (1)

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

2008 (2)

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

2003 (1)

P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
[Crossref] [PubMed]

1996 (2)

K. D. Irwin, G. C. Hilton, D. A. Wollman, and J. M. Martinis, “X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback,” Appl. Phys. Lett. 69, 1945–1947 (1996).
[Crossref]

A. Peacock, P. Verhoeve, N. Rando, A. Van Dordrecht, and et al., “Single optical photon detection with a superconducting tunnel junction,” Nature 381, 135–137 (1996).
[Crossref]

1958 (1)

D. C. Mattis and J. Bardeen, “Theory of the anomalous skin effect in normal and superconducting metals,” Phys. Rev. 111, 412–417 (1958).
[Crossref]

Adane, A.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Ansmann, M.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Backer, D.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Bardeen, J.

D. C. Mattis and J. Bardeen, “Theory of the anomalous skin effect in normal and superconducting metals,” Phys. Rev. 111, 412–417 (1958).
[Crossref]

Benoit, A.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Bialczak, R. C.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Bockstiegel, C.

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

Bourrion, O.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Bumble, B.

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

Burck, A.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Calvo, M.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Catalano, A.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Chang, C.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Chapman, D.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Chen, H.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Cleland, A. N.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Coiffard, G.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).

Crescini, P.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Daal, M.

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).

Day, P. K.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
[Crossref] [PubMed]

de Jesus, C.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Dick, C.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Domesle, C.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Droz, P.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Duan, R.

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

Duggan, G. E.

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

Enss, C.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

A. Fleischmann, C. Enss, and G. Seidel, “Metallic magnetic calorimeters,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 151–216.

Eom, B. H.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

Eyken, J. C. v.

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
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L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

A. Fleischmann, C. Enss, and G. Seidel, “Metallic magnetic calorimeters,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 151–216.

Fleischmann, L.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Gao, J.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
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J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
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J. Gao, “The physics of superconducting microwave resonators,” Ph.D. thesis, California Institute of Technology (2008).

Golwala, S.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
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J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
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K. Irwin and G. Hilton, “Transition-edge sensors,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 63–150.

Hilton, G. C.

K. D. Irwin, G. C. Hilton, D. A. Wollman, and J. M. Martinis, “X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback,” Appl. Phys. Lett. 69, 1945–1947 (1996).
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Hoarau, C.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
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Hofheinz, M.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
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K. Irwin and G. Hilton, “Transition-edge sensors,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 63–150.

Irwin, K. D.

K. D. Irwin, G. C. Hilton, D. A. Wollman, and J. M. Martinis, “X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback,” Appl. Phys. Lett. 69, 1945–1947 (1996).
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Jensen-Clem, R.

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

Johnson, M.

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
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Katz, N.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Kempf, S.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Kumar, S.

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

Leclercq, S.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Leduc, H. G.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
[Crossref] [PubMed]

Lin, Y.

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

Linck, M.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Lucero, E.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Macias-Perez, J.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

MacMahon, D.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
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Marsden, D.

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

Martinis, J. M.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

K. D. Irwin, G. C. Hilton, D. A. Wollman, and J. M. Martinis, “X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback,” Appl. Phys. Lett. 69, 1945–1947 (1996).
[Crossref]

Mattis, D. C.

D. C. Mattis and J. Bardeen, “Theory of the anomalous skin effect in normal and superconducting metals,” Phys. Rev. 111, 412–417 (1958).
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Mazin, B. A.

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
[Crossref] [PubMed]

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).

McHugh, S.

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

McKenney, C.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Meder, K.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Meeker, S.

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

Meeker, S. R.

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

Merrill, A.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

Mock, J.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Monfardini, A.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Moore, D. C.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

Nagpal, V.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Neeley, M.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Nikolic, B.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Noroozian, O.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

O’Brien, K.

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

O’Connell, A. D.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Pabinger, A.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Parsa, A.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Parsons, A.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
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Peacock, A.

A. Peacock, P. Verhoeve, N. Rando, A. Van Dordrecht, and et al., “Single optical photon detection with a superconducting tunnel junction,” Nature 381, 135–137 (1996).
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Peck, I.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Pies, C.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Porst, J.-P.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Raffanti, R.

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

Rando, N.

A. Peacock, P. Verhoeve, N. Rando, A. Van Dordrecht, and et al., “Single optical photon detection with a superconducting tunnel junction,” Nature 381, 135–137 (1996).
[Crossref]

Rice, N. K.

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

Richards, B.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Rodrigues, M.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Rotzinger, H.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Sadoulet, B.

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

Schäfer, S.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Schuster, K.

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Seidel, G.

A. Fleischmann, C. Enss, and G. Seidel, “Metallic magnetic calorimeters,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 151–216.

Seidel, G. M.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Serfass, B.

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

Siemion, A.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Stoughton, C.

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

Strader, M. J.

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

M. J. Strader, “Digital readout for microwave kinetic inductance detectors and applications in high time resolution astronomy,” Ph.D. thesis, University of California, Santa Barbara (2016).

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

Sueur, H. Le

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

Szypryt, P.

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).

Turner, A. D.

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

Ulbricht, G.

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).

Van Dordrecht, A.

A. Peacock, P. Verhoeve, N. Rando, A. Van Dordrecht, and et al., “Single optical photon detection with a superconducting tunnel junction,” Nature 381, 135–137 (1996).
[Crossref]

van Eyken, J. C.

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

Vayonakis, A.

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
[Crossref] [PubMed]

Verhoeve, P.

A. Peacock, P. Verhoeve, N. Rando, A. Van Dordrecht, and et al., “Single optical photon detection with a superconducting tunnel junction,” Nature 381, 135–137 (1996).
[Crossref]

Walter, A. B.

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

Wang, H.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Wawrzynek, J.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Weig, E. M.

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

Weldle, R.

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Werthimer, D.

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Wollman, D. A.

K. D. Irwin, G. C. Hilton, D. A. Wollman, and J. M. Martinis, “X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback,” Appl. Phys. Lett. 69, 1945–1947 (1996).
[Crossref]

Wright, M.

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

Zmuidzinas, J.

J. Zmuidzinas, “Superconducting microresonators: Physics and applications,” Annual Rev. Condensed Matt. Phys. 3, 169–214 (2012).
[Crossref]

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
[Crossref] [PubMed]

Zobrist, N.

G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).

Annual Rev. Condensed Matt. Phys. (1)

J. Zmuidzinas, “Superconducting microresonators: Physics and applications,” Annual Rev. Condensed Matt. Phys. 3, 169–214 (2012).
[Crossref]

Appl. Phys. Lett. (5)

K. D. Irwin, G. C. Hilton, D. A. Wollman, and J. M. Martinis, “X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback,” Appl. Phys. Lett. 69, 1945–1947 (1996).
[Crossref]

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Titanium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97, 102509 (2010).
[Crossref]

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109, 151102 (2016).
[Crossref]

A. D. O’Connell, M. Ansmann, R. C. Bialczak, M. Hofheinz, N. Katz, E. Lucero, C. McKenney, M. Neeley, H. Wang, E. M. Weig, A. N. Cleland, and J. M. Martinis, “Microwave dielectric loss at single photon energies and millikelvin temperatures,” Appl. Phys. Lett. 92, 112903 (2008).
[Crossref]

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92, 152505 (2008).
[Crossref]

Astrophys. J. Supp (1)

J. C. van Eyken, M. J. Strader, A. B. Walter, S. R. Meeker, P. Szypryt, C. Stoughton, K. O’Brien, D. Marsden, N. K. Rice, Y. Lin, and B. A. Mazin, “The ARCONS pipeline: Data reduction for MKID arrays,” Astrophys. J. Supp 219, 14 (2015).
[Crossref]

J. Low Temp. Phys. (1)

J. Goupy, A. Adane, A. Benoit, O. Bourrion, M. Calvo, A. Catalano, G. Coiffard, C. Hoarau, S. Leclercq, H. Le Sueur, J. Macias-Perez, A. Monfardini, I. Peck, and K. Schuster, “Microfabrication technology for large LEKID arrays: From NIKA2 to future applications,” J. Low Temp. Phys. 184, 661–667 (2016).
[Crossref]

J. Phys.: Conf. Series (1)

L. Fleischmann, M. Linck, A. Burck, C. Domesle, S. Kempf, M. Rodrigues, A. Pabinger, C. Pies, J.-P. Porst, H. Rotzinger, S. Schäfer, R. Weldle, A. Fleischmann, C. Enss, and G. M. Seidel, “Physics and applications of metallic magnetic calorimeters for particle detection,” J. Phys.: Conf. Series 150, 012013 (2009).

Nature (2)

A. Peacock, P. Verhoeve, N. Rando, A. Van Dordrecht, and et al., “Single optical photon detection with a superconducting tunnel junction,” Nature 381, 135–137 (1996).
[Crossref]

P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425, 817–821 (2003).
[Crossref] [PubMed]

Phys. Rev. (1)

D. C. Mattis and J. Bardeen, “Theory of the anomalous skin effect in normal and superconducting metals,” Phys. Rev. 111, 412–417 (1958).
[Crossref]

Pub. Astronomical Soc. Pacific (1)

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. v. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, M. Johnson, B. Bumble, K. O’Brien, and C. Stoughton, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub. Astronomical Soc. Pacific 125, pp. 1348–1361 (2013).
[Crossref]

Rev. Sci. Instrum. (1)

S. McHugh, B. A. Mazin, B. Serfass, S. Meeker, K. O’Brien, R. Duan, R. Raffanti, and D. Werthimer, “A readout for large arrays of microwave kinetic inductance detectors,” Rev. Sci. Instrum. 83, 044702 (2012).
[Crossref] [PubMed]

Other (7)

M. J. Strader, “Digital readout for microwave kinetic inductance detectors and applications in high time resolution astronomy,” Ph.D. thesis, University of California, Santa Barbara (2016).

K. Irwin and G. Hilton, “Transition-edge sensors,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 63–150.

A. Fleischmann, C. Enss, and G. Seidel, “Metallic magnetic calorimeters,” in Cryogenic Particle Detection, C. Enss, ed. (Springer, 2005), pp. 151–216.

G. Coiffard, B. A. Mazin, M. Daal, P. Szypryt, G. Ulbricht, and N. Zobrist, “Parallel plate microwave kinetic inductance detectors,” Appl. Phys. Lett.submitted (2017).

S. R. Meeker, B. A. Mazin, R. Jensen-Clem, A. B. Walter, P. Szypryt, M. J. Strader, and C. Bockstiegel, “Design and development status of mkid integral field spectrographs for high contrast imaging,” in Adaptive Optics for Extremely Large Telescopes 4 - Conference Proceedings (2015).

J. Gao, “The physics of superconducting microwave resonators,” Ph.D. thesis, California Institute of Technology (2008).

A. Parsons, D. Backer, C. Chang, D. Chapman, H. Chen, P. Crescini, C. de Jesus, C. Dick, P. Droz, D. MacMahon, K. Meder, J. Mock, V. Nagpal, B. Nikolic, A. Parsa, B. Richards, A. Siemion, J. Wawrzynek, D. Werthimer, and M. Wright, “Petaop/second fpga signal processing for seti and radio astronomy,” in 2006 Fortieth Asilomar Conference on Signals, Systems and Computers, (2006), pp. 2031–2035.
[Crossref]

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Figures (8)

Fig. 1
Fig. 1 DARKNESS (top) and MEC (bottom) arrays after they have been mounted in their sample boxes and wire bond connections have been made. The size of the DARKNESS array is 13.5 cm × 20.3 cm whereas the MEC array is 24.6 cm × 22.5 cm.
Fig. 2
Fig. 2 Resonators were simulated at 185 different capacitor leg lengths. The resulting frequency versus leg length curve was fit to a sixth order polynomial and the residuals of this fit as a function of frequency are shown in the plot above. A similar fit (with 15 simulations, shown approximately by the green points) was used to place frequencies on the DARKNESS array, resulting in errors of up to 15 MHz. In addition to the large scale sinusoidal feature not captured by the fit, most of the old simulations were done for total capacitor leg lengths where each leg was either fully extended or fully contracted (legs are varied one at a time to achieve a desired total capacitance). The variation in the frequency versus leg length curve as an individual leg is grown/shrunk was not accounted for (these are the humps between the green points). For the MEC array design, capacitor leg length was mapped to frequency by interpolating between fine simulations (blue points).
Fig. 3
Fig. 3 Fabrication cross-sections. A. Box outlines etch. B. Transmission lines and ground plane lift-off. C. Dielectric pads lift-off. D. Crossovers and coupling bars lift-off. E. Gold bond pads lift-off. F. Resonators etch.
Fig. 4
Fig. 4 D3 microscope images at the end of each step. Images in the panels have been taken at different magnifications. For a sense of scale, the pixel pitch (distance between boxes or resonators) of the array is 150 µm. A. Box outlines etch. B. Transmission lines and ground plane lift-off. C. Dielectric pads lift-off. D. Crossovers and coupling bars lift-off. E. Gold bond pads lift-off. F. Resonators etch.
Fig. 5
Fig. 5 Microscope image of DARKNESS array at the end of fabrication.
Fig. 6
Fig. 6 (Left) Histogram of Qi values for the best performing DARKNESS device, split between the lower and upper halves of the total frequency space. (Right) Plot of median Qi in a 50 MHz bin versus frequency for the same device. This device has its frequencies shifted away from the designed values due to a PtSi film with higher than expected sheet inductance.
Fig. 7
Fig. 7 (Left) Histogram of Qi values for the most recent MEC device, split between the lower and upper halves of the total frequency space. (Right) Plot of median Qi in a 100 MHz bin versus frequency for the same device. This device had a slight increase in resonant frequencies due to having a sheet inductance smaller than designed.
Fig. 8
Fig. 8 Histogram of photon wavelengths measured using three laser peaks at 1310, 980, and 808 nm. The spectral resolution in the locations of these three peaks was 5.8, 6.3, and 8.1, respectively.

Tables (1)

Tables Icon

Table 1 DARKNESS and MEC Resonator Design Parameters

Metrics