High frequency optomechanical disk resonators in III&#x02013;V ternary semiconductors

Biswarup Guha; Silvia Mariani; Aristide Lemaître; Sylvain Combrié; Giuseppe Leo; Ivan Favero

doi:10.1364/OE.25.024639

High frequency optomechanical disk resonators in III–V ternary semiconductors

Biswarup Guha, Silvia Mariani, Aristide Lemaître, Sylvain Combrié, Giuseppe Leo, and Ivan Favero

Optics Express
Vol. 25,
Issue 20,
pp. 24639-24649
(2017)
•https://doi.org/10.1364/OE.25.024639

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Biswarup Guha, Silvia Mariani, Aristide Lemaître, Sylvain Combrié, Giuseppe Leo, and Ivan Favero, "High frequency optomechanical disk resonators in III–V ternary semiconductors," Opt. Express 25, 24639-24649 (2017)

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Related Topics
Table of Contents Category
- Integrated Optics
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Optomechanics (120.4880)
- Semiconductors (130.5990)
- Microcavities (140.3945)
- Resonators (230.5750)

About this Article
History
- Original Manuscript: August 3, 2017
- Revised Manuscript: September 14, 2017
- Manuscript Accepted: September 16, 2017
- Published: September 27, 2017

Accessible

Open Access

Abstract

Optomechanical systems based on nanophotonics are advancing the field of precision motion measurement, quantum control and nanomechanical sensing. In this context III–V semiconductors offer original assets like the heteroepitaxial growth of optimized metamaterials for photon/phonon interactions. GaAs has already demonstrated high performances in optomechanics but suffers from two photon absorption (TPA) at the telecom wavelength, which can limit the cooperativity. Here, we investigate TPA-free III–V semiconductor materials for optomechanics applications: GaAs lattice-matched In_0.5Ga_0.5P and Al_0.4Ga_0.6As. We report on the fabrication and optical characterization of high frequency (500–700 MHz) optomechanical disks made out of these two materials, demonstrating high optical and mechanical Q in ambient conditions. Finally we achieve operating these new devices as laser-sustained optomechanical self-oscillators, and draw a first comparative study with existing GaAs systems.

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References

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Publication

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photon. 3(4), 201–205 (2009).
[Crossref]
M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391 (2014).
[Crossref]
L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]
S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]
F. Liu, S. Alaie, Z. C. Leseman, and M. Hossein-Zadeh, “Sub-pg mass sensing and measurement with optomechanical oscillator,” Opt. Express 21(17), 19555–19567 (2013).
[Crossref] [PubMed]
W. Yu, W.C. Jiang, Q. Lin, and T. Lu, “Cavity optomechanical spring sensing of single molecules,” Nat. Commun. 7, 12311 (2016).
[Crossref] [PubMed]
E. Gil-Santos, C. Baker, D.T. Nguyen, W. Hease, C. Gomez, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High-frequency nano-optomechanical disk resonators in liquids,” Nat. Nanotechnol. 10, 810–816 (2015).
[Crossref] [PubMed]
J. Teufel, T. Donner, D. Li, J. Harlow, M. Allman, K. Cicak, A. Sirois, J. D. Whittaker, K. Lehnert, and R. W. Simmonds, “Sideband cooling of micromechanical motion to the quantum ground state,” Nature 475(7356), 359–363 (2011).
[Crossref] [PubMed]
M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]
C. Metzger, M. Ludwig, C. Neuenhahn, A. Ortlieb, I. Favero, K. Karrai, and F. Marquardt, “Self-Induced Oscillations in an Optomechanical System Driven by Bolometric Backaction,” Phys. Rev. Lett. 101(13), 133903 (2008).
[Crossref] [PubMed]
G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462, 633–636 (2009).
[Crossref] [PubMed]
C. Baker, S. Stapfner, D. Parrain, S. Ducci, G. Leo, E. M. Weig, and I. Favero, “Optical instability and self-pulsing in silicon nitride whispering gallery resonators,” Opt. Express 20(27), 29076–29089 (2012).
[Crossref] [PubMed]
C. Baker, W. Hease, D.T. Nguyen, A. Andronico, S. Ducci, G. Leo, and I. Favero, “Photoelastic coupling in gallium arsenide optomechanical disk resonators,” Opt. Express 22(12), 14072–14086 (2014).
[Crossref] [PubMed]
B. Guha, F. Marsault, F. Cadiz, L. Morgenroth, V. Ulin, V. Berkovitz, A. Lemaître, C. Gomez, A. Amo, S. Combrié, B. Gerard, G. Leo, and I. Favero, “Surface-enhanced gallium arsenide photonic resonator with quality factor of 6 × 106,” Optica 4(2), 218–221 (2017).
[Crossref]
B. Jusserand, A. N. Poddubny, A. V. Poshakinskiy, A. Fainstein, and A. Lemaître, “Polariton resonances for ultrastrong coupling cavity optomechanics in GaAs/AlAs multiple quantum wells,” Phys. Rev. Lett. 115(26), 267402 (2015).
[Crossref]
T. J. Johnson, M. Borselli, and O. Painter, “Self-induced optical modulation of the transmission through a high-Q silicon microdisk resonator,” Opt. Express 14(2), 817–831 (2006).
[Crossref] [PubMed]
D. Parrain, C. Baker, G. Wang, B. Guha, E. G. Santos, A. Lemaître, P. Senellart, G. Leo, S. Ducci, and I. Favero, “Origin of optical losses in gallium arsenide disk whispering gallery resonators,” Opt. Express 23(15), 19656–19672 (2015).
[Crossref] [PubMed]
S. Combrié, Q. V. Tran, A. De Rossi, C. Husko, and P. Colman, “High quality GaInP nonlinear photonic crystals with minimized nonlinear absorption,” Appl. Phys. Lett. 95(22), 1108 (2009).
[Crossref]
S. Mariani, A. Andronico, A. Lemaître, I. Favero, S. Ducci, and G. Leo, “Second-harmonic generation in AlGaAs microdisks in the telecom range,” Opt. Lett. 39(10), 3062–3065 (2014).
[Crossref] [PubMed]
G. D. Cole, P-L. Yu, C. Gärtner, K. Siquans, R. M. Nia, J. Schmöle, J. Hoelscher-Obermaier, T. P. Purdy, W. Wieczorek, C. A. Regal, and M. Aspelmeyer, “Tensile-strained InxGa1-xP membranes for cavity optomechanics,” Appl. Phys. Lett. 104(20), 201908 (2014).
[Crossref]
S. Mariani, A. Andronico, O. Mauguin, A. Lemaître, I. Favero, S. Ducci, and G. Leo, “AlGaAs microdisk cavities for second-harmonic generation,” Opt. Lett. 38(19), 3965–3968 (2013).
[Crossref] [PubMed]
S. Mariani, “Three-wave mixing in semiconductor whispering gallery mode microcavities,” PhD thesis Université Paris Diderot, (2014).
L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[Crossref]
J. C. L. Ding, C. Baker, A. Andronico, D. Parrain, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “Gallium arsenide disk optomechanical resonators,” in Handbook of Optical Microcavities, Anthony H. W. Choi, ed. (PanStanford, 2014).
L. Ding, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “GaAs micro-nanodisks probed by a looped fiber taper for optomechanics applications,” Proc. SPIE 7712(4), 771211 (2010).
[Crossref]
T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal behaviour of radiation pressure induced vibrations of an optical microcavity phonon mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[Crossref] [PubMed]
T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12(20), 4742–4750 (2004).
[Crossref] [PubMed]
V. R. Almeida and M. Lipson, “Optical bistability on a silicon chip,” Opt. Lett. 29(20), 2387–2389 (2004).
[Crossref] [PubMed]
E. Weidner, S. Combrié, A. de Rossi, N-V-Q. Tran, and S. Cassette, “Nonlinear and bistable behavior of an ultrahigh-Q GaAs photonic crystal nanocavity,” Appl. Phys. Lett. 90(10), 101118 (2007).
[Crossref]
J. Blakemore, “Semiconducting and other major properties of gallium arsenide,” J. Appl. Phys. 53(10), R123–R181 (1982).
[Crossref]
F. Della Corte, G. Cocorullo, M. Iodice, and I. Rendina, “Temperature dependence of the thermo-optic coefficient of InP, GaAs, and SiC from room temperature to 600 K at the wavelength of 1.5 µ m,” Appl. Phys. Lett. 77(11), 1614–1616 (2000).
[Crossref]
S. Adachi, “GaAs, AlAs, and Alx Ga1−x As material parameters for use in research and device applications,” J. Appl. Phys. 58(3), R1–R29 (1985).
[Crossref]
Ioffe Institute, “Physical Properties of Semiconductor”, http://www.ioffe.ru/SVA/NSM/Semicond/index.html
W. M. Haynes, D. R. Lide, and T. J. Bruno, CRC handbook of chemistry and physics. CRC Press, 2012.
S. Adachi, Physical properties of III–V semiconductor compounds, John Wiley & Sons, 1992.
[Crossref]
M. Gandomkar and V. Ahmadi, “Thermo-optical switching enhanced with second harmonic generation in microring resonators,” Opt. Lett. 36(19), 3825–3827 (2011).
[Crossref] [PubMed]
S. Sokolov, J. Lian, S. Combrié, A. De Rossi, and A. P. Mosk, “Measurement of the linear thermo-optical coefficient of Ga0.51In0.49P using photonic crystal nanocavities,” Appl. Opt. 56(11), 3219–3222 (2017).
[Crossref] [PubMed]
C. Baker, On-chip nano-optomechanical whispering gallery resonators, PhD thesis, Université Paris Diderot, 2013.

2017 (2)

B. Guha, F. Marsault, F. Cadiz, L. Morgenroth, V. Ulin, V. Berkovitz, A. Lemaître, C. Gomez, A. Amo, S. Combrié, B. Gerard, G. Leo, and I. Favero, “Surface-enhanced gallium arsenide photonic resonator with quality factor of 6 × 106,” Optica 4(2), 218–221 (2017).
[Crossref]

S. Sokolov, J. Lian, S. Combrié, A. De Rossi, and A. P. Mosk, “Measurement of the linear thermo-optical coefficient of Ga0.51In0.49P using photonic crystal nanocavities,” Appl. Opt. 56(11), 3219–3222 (2017).
[Crossref] [PubMed]

2016 (1)

W. Yu, W.C. Jiang, Q. Lin, and T. Lu, “Cavity optomechanical spring sensing of single molecules,” Nat. Commun. 7, 12311 (2016).
[Crossref] [PubMed]

2015 (3)

E. Gil-Santos, C. Baker, D.T. Nguyen, W. Hease, C. Gomez, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High-frequency nano-optomechanical disk resonators in liquids,” Nat. Nanotechnol. 10, 810–816 (2015).
[Crossref] [PubMed]

B. Jusserand, A. N. Poddubny, A. V. Poshakinskiy, A. Fainstein, and A. Lemaître, “Polariton resonances for ultrastrong coupling cavity optomechanics in GaAs/AlAs multiple quantum wells,” Phys. Rev. Lett. 115(26), 267402 (2015).
[Crossref]

D. Parrain, C. Baker, G. Wang, B. Guha, E. G. Santos, A. Lemaître, P. Senellart, G. Leo, S. Ducci, and I. Favero, “Origin of optical losses in gallium arsenide disk whispering gallery resonators,” Opt. Express 23(15), 19656–19672 (2015).
[Crossref] [PubMed]

2014 (4)

G. D. Cole, P-L. Yu, C. Gärtner, K. Siquans, R. M. Nia, J. Schmöle, J. Hoelscher-Obermaier, T. P. Purdy, W. Wieczorek, C. A. Regal, and M. Aspelmeyer, “Tensile-strained InxGa1-xP membranes for cavity optomechanics,” Appl. Phys. Lett. 104(20), 201908 (2014).
[Crossref]

S. Mariani, A. Andronico, A. Lemaître, I. Favero, S. Ducci, and G. Leo, “Second-harmonic generation in AlGaAs microdisks in the telecom range,” Opt. Lett. 39(10), 3062–3065 (2014).
[Crossref] [PubMed]

C. Baker, W. Hease, D.T. Nguyen, A. Andronico, S. Ducci, G. Leo, and I. Favero, “Photoelastic coupling in gallium arsenide optomechanical disk resonators,” Opt. Express 22(12), 14072–14086 (2014).
[Crossref] [PubMed]

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391 (2014).
[Crossref]

J. Teufel, T. Donner, D. Li, J. Harlow, M. Allman, K. Cicak, A. Sirois, J. D. Whittaker, K. Lehnert, and R. W. Simmonds, “Sideband cooling of micromechanical motion to the quantum ground state,” Nature 475(7356), 359–363 (2011).
[Crossref] [PubMed]

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett. 98(11), 113108 (2011).
[Crossref]

2010 (2)

L. Ding, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “GaAs micro-nanodisks probed by a looped fiber taper for optomechanics applications,” Proc. SPIE 7712(4), 771211 (2010).
[Crossref]

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

2009 (5)

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462, 633–636 (2009).
[Crossref] [PubMed]

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photon. 3(4), 201–205 (2009).
[Crossref]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]

S. Combrié, Q. V. Tran, A. De Rossi, C. Husko, and P. Colman, “High quality GaInP nonlinear photonic crystals with minimized nonlinear absorption,” Appl. Phys. Lett. 95(22), 1108 (2009).
[Crossref]

2008 (1)

C. Metzger, M. Ludwig, C. Neuenhahn, A. Ortlieb, I. Favero, K. Karrai, and F. Marquardt, “Self-Induced Oscillations in an Optomechanical System Driven by Bolometric Backaction,” Phys. Rev. Lett. 101(13), 133903 (2008).
[Crossref] [PubMed]

2007 (1)

E. Weidner, S. Combrié, A. de Rossi, N-V-Q. Tran, and S. Cassette, “Nonlinear and bistable behavior of an ultrahigh-Q GaAs photonic crystal nanocavity,” Appl. Phys. Lett. 90(10), 101118 (2007).
[Crossref]

2006 (1)

T. J. Johnson, M. Borselli, and O. Painter, “Self-induced optical modulation of the transmission through a high-Q silicon microdisk resonator,” Opt. Express 14(2), 817–831 (2006).
[Crossref] [PubMed]

2005 (1)

T. Carmon, H. Rokhsari, L. Yang, T. J. Kippenberg, and K. J. Vahala, “Temporal behaviour of radiation pressure induced vibrations of an optical microcavity phonon mode,” Phys. Rev. Lett. 94(22), 223902 (2005).
[Crossref] [PubMed]

2004 (2)

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12(20), 4742–4750 (2004).
[Crossref] [PubMed]

V. R. Almeida and M. Lipson, “Optical bistability on a silicon chip,” Opt. Lett. 29(20), 2387–2389 (2004).
[Crossref] [PubMed]

2000 (1)

F. Della Corte, G. Cocorullo, M. Iodice, and I. Rendina, “Temperature dependence of the thermo-optic coefficient of InP, GaAs, and SiC from room temperature to 600 K at the wavelength of 1.5 µ m,” Appl. Phys. Lett. 77(11), 1614–1616 (2000).
[Crossref]

1985 (1)

S. Adachi, “GaAs, AlAs, and Alx Ga1−x As material parameters for use in research and device applications,” J. Appl. Phys. 58(3), R1–R29 (1985).
[Crossref]

1982 (1)

J. Blakemore, “Semiconducting and other major properties of gallium arsenide,” J. Appl. Phys. 53(10), R123–R181 (1982).
[Crossref]

Adachi, S.

S. Adachi, “GaAs, AlAs, and Alx Ga1−x As material parameters for use in research and device applications,” J. Appl. Phys. 58(3), R1–R29 (1985).
[Crossref]

S. Adachi, Physical properties of III–V semiconductor compounds, John Wiley & Sons, 1992.
[Crossref]

Ahmadi, V.

M. Gandomkar and V. Ahmadi, “Thermo-optical switching enhanced with second harmonic generation in microring resonators,” Opt. Lett. 36(19), 3825–3827 (2011).
[Crossref] [PubMed]

Alaie, S.

F. Liu, S. Alaie, Z. C. Leseman, and M. Hossein-Zadeh, “Sub-pg mass sensing and measurement with optomechanical oscillator,” Opt. Express 21(17), 19555–19567 (2013).
[Crossref] [PubMed]

Allman, M.

Almeida, V. R.

V. R. Almeida and M. Lipson, “Optical bistability on a silicon chip,” Opt. Lett. 29(20), 2387–2389 (2004).
[Crossref] [PubMed]

Amo, A.

Andronico, A.

J. C. L. Ding, C. Baker, A. Andronico, D. Parrain, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “Gallium arsenide disk optomechanical resonators,” in Handbook of Optical Microcavities, Anthony H. W. Choi, ed. (PanStanford, 2014).

Aspelmeyer, M.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391 (2014).
[Crossref]

Baker, C.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

C. Baker, On-chip nano-optomechanical whispering gallery resonators, PhD thesis, Université Paris Diderot, 2013.

Berkovitz, V.

Blakemore, J.

J. Blakemore, “Semiconducting and other major properties of gallium arsenide,” J. Appl. Phys. 53(10), R123–R181 (1982).
[Crossref]

Borselli, M.

Bruno, T. J.

W. M. Haynes, D. R. Lide, and T. J. Bruno, CRC handbook of chemistry and physics. CRC Press, 2012.

Cadiz, F.

Camacho, R. M.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]

Carmon, T.

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12(20), 4742–4750 (2004).
[Crossref] [PubMed]

Cassette, S.

Chan, J.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]

Chen, L.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462, 633–636 (2009).
[Crossref] [PubMed]

Cicak, K.

Cocorullo, G.

Cole, G. D.

Colman, P.

Combrié, S.

de Rossi, A.

Della Corte, F.

Ding, J. C. L.

Ding, L.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

Donner, T.

Ducci, S.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

Eichenfield, M.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]

Fainstein, A.

Favero, I.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photon. 3(4), 201–205 (2009).
[Crossref]

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

Gandomkar, M.

M. Gandomkar and V. Ahmadi, “Thermo-optical switching enhanced with second harmonic generation in microring resonators,” Opt. Lett. 36(19), 3825–3827 (2011).
[Crossref] [PubMed]

Gärtner, C.

Gerard, B.

Gil-Santos, E.

Gomez, C.

Gondarenko, A.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462, 633–636 (2009).
[Crossref] [PubMed]

Guha, B.

Harlow, J.

Haynes, W. M.

W. M. Haynes, D. R. Lide, and T. J. Bruno, CRC handbook of chemistry and physics. CRC Press, 2012.

Hease, W.

Hoelscher-Obermaier, J.

Hossein-Zadeh, M.

F. Liu, S. Alaie, Z. C. Leseman, and M. Hossein-Zadeh, “Sub-pg mass sensing and measurement with optomechanical oscillator,” Opt. Express 21(17), 19555–19567 (2013).
[Crossref] [PubMed]

Hunger, D.

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

Husko, C.

Iodice, M.

Jiang, W.C.

W. Yu, W.C. Jiang, Q. Lin, and T. Lu, “Cavity optomechanical spring sensing of single molecules,” Nat. Commun. 7, 12311 (2016).
[Crossref] [PubMed]

Johnson, T. J.

Jusserand, B.

Karrai, K.

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photon. 3(4), 201–205 (2009).
[Crossref]

Kippenberg, T. J.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391 (2014).
[Crossref]

Lehnert, K.

Lemaître, A.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

Leo, G.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

Leseman, Z. C.

F. Liu, S. Alaie, Z. C. Leseman, and M. Hossein-Zadeh, “Sub-pg mass sensing and measurement with optomechanical oscillator,” Opt. Express 21(17), 19555–19567 (2013).
[Crossref] [PubMed]

Li, D.

Lian, J.

Lide, D. R.

W. M. Haynes, D. R. Lide, and T. J. Bruno, CRC handbook of chemistry and physics. CRC Press, 2012.

Lin, Q.

W. Yu, W.C. Jiang, Q. Lin, and T. Lu, “Cavity optomechanical spring sensing of single molecules,” Nat. Commun. 7, 12311 (2016).
[Crossref] [PubMed]

Lipson, M.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462, 633–636 (2009).
[Crossref] [PubMed]

V. R. Almeida and M. Lipson, “Optical bistability on a silicon chip,” Opt. Lett. 29(20), 2387–2389 (2004).
[Crossref] [PubMed]

Liu, F.

F. Liu, S. Alaie, Z. C. Leseman, and M. Hossein-Zadeh, “Sub-pg mass sensing and measurement with optomechanical oscillator,” Opt. Express 21(17), 19555–19567 (2013).
[Crossref] [PubMed]

Lu, T.

W. Yu, W.C. Jiang, Q. Lin, and T. Lu, “Cavity optomechanical spring sensing of single molecules,” Nat. Commun. 7, 12311 (2016).
[Crossref] [PubMed]

Ludwig, M.

Mariani, S.

S. Mariani, “Three-wave mixing in semiconductor whispering gallery mode microcavities,” PhD thesis Université Paris Diderot, (2014).

Marquardt, F.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391 (2014).
[Crossref]

Marsault, F.

Mauguin, O.

Metzger, C.

Morgenroth, L.

Mosk, A. P.

Neuenhahn, C.

Nguyen, D.T.

Nia, R. M.

Ortlieb, A.

Ost, L.

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

Painter, O.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]

Parrain, D.

Poddubny, A. N.

Poshakinskiy, A. V.

Purdy, T. P.

Regal, C. A.

Reichel, J.

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

Rendina, I.

Rokhsari, H.

Rossi, A. De

Santos, E. G.

Schmöle, J.

Senellart, P.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

Simmonds, R. W.

Siquans, K.

Sirois, A.

Sokolov, S.

Stapfner, S.

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

Teufel, J.

Tran, N-V-Q.

Tran, Q. V.

Ulin, V.

Vahala, K.

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12(20), 4742–4750 (2004).
[Crossref] [PubMed]

Vahala, K. J.

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]

Wang, G.

Weidner, E.

Weig, E. M.

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

Whittaker, J. D.

Wieczorek, W.

Wiederhecker, G. S.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462, 633–636 (2009).
[Crossref] [PubMed]

Yang, L.

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12(20), 4742–4750 (2004).
[Crossref] [PubMed]

Yu, P-L.

Yu, W.

W. Yu, W.C. Jiang, Q. Lin, and T. Lu, “Cavity optomechanical spring sensing of single molecules,” Nat. Commun. 7, 12311 (2016).
[Crossref] [PubMed]

Appl. Opt. (1)

Appl. Phys. Lett. (6)

S. Stapfner, L. Ost, D. Hunger, J. Reichel, I. Favero, and E. M. Weig, “Cavity-enhanced optical detection of carbon nanotube Brownian motion,” Appl. Phys. Lett. 102(15), 151910 (2009).
[Crossref]

J. Appl. Phys. (2)

S. Adachi, “GaAs, AlAs, and Alx Ga1−x As material parameters for use in research and device applications,” J. Appl. Phys. 58(3), R1–R29 (1985).
[Crossref]

J. Blakemore, “Semiconducting and other major properties of gallium arsenide,” J. Appl. Phys. 53(10), R123–R181 (1982).
[Crossref]

Nat. Commun. (1)

W. Yu, W.C. Jiang, Q. Lin, and T. Lu, “Cavity optomechanical spring sensing of single molecules,” Nat. Commun. 7, 12311 (2016).
[Crossref] [PubMed]

Nat. Nanotechnol. (1)

Nat. Photon. (1)

I. Favero and K. Karrai, “Optomechanics of deformable optical cavities,” Nat. Photon. 3(4), 201–205 (2009).
[Crossref]

Nature (3)

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature 462, 633–636 (2009).
[Crossref] [PubMed]

M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, “Optomechanical crystals,” Nature 462, 78–82 (2009).
[Crossref] [PubMed]

Opt. Express (6)

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12(20), 4742–4750 (2004).
[Crossref] [PubMed]

F. Liu, S. Alaie, Z. C. Leseman, and M. Hossein-Zadeh, “Sub-pg mass sensing and measurement with optomechanical oscillator,” Opt. Express 21(17), 19555–19567 (2013).
[Crossref] [PubMed]

Opt. Lett. (4)

M. Gandomkar and V. Ahmadi, “Thermo-optical switching enhanced with second harmonic generation in microring resonators,” Opt. Lett. 36(19), 3825–3827 (2011).
[Crossref] [PubMed]

V. R. Almeida and M. Lipson, “Optical bistability on a silicon chip,” Opt. Lett. 29(20), 2387–2389 (2004).
[Crossref] [PubMed]

Optica (1)

Phys. Rev. Lett. (4)

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105(26), 263903 (2010).
[Crossref]

Proc. SPIE (1)

Rev. Mod. Phys. (1)

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86(4), 1391 (2014).
[Crossref]

Other (6)

Ioffe Institute, “Physical Properties of Semiconductor”, http://www.ioffe.ru/SVA/NSM/Semicond/index.html

W. M. Haynes, D. R. Lide, and T. J. Bruno, CRC handbook of chemistry and physics. CRC Press, 2012.

S. Adachi, Physical properties of III–V semiconductor compounds, John Wiley & Sons, 1992.
[Crossref]

S. Mariani, “Three-wave mixing in semiconductor whispering gallery mode microcavities,” PhD thesis Université Paris Diderot, (2014).

C. Baker, On-chip nano-optomechanical whispering gallery resonators, PhD thesis, Université Paris Diderot, 2013.

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Fig. 1 An (a) In_0.5Ga_0.5P and (b) Al_0.4Ga_0.6As optomechanical disk over a GaAs pedestal.

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Fig. 2 Optical spectrum of (a) an InGaP disk of radius 3.25 µm and thickness 200 nm and (b) an AlGaAs disk of radius 2 µm and thickness 150 nm. The spectra are acquired with an optical power of 50 µW, measured at the output of the fiber. The radial order (p) of the WGMs is identified with the help of Finite Element Method (FEM) simulations and indicated. The probe light is TE-polarized (in the disk plane). (c) and (d) Mechanical spectra of the same disks as above, where the 1^st order RBM is measured in the Brownian motion regime by optomechanical means.

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Fig. 3 Optomechanical self-oscillation of InGaP and AlGaAs disk resonators. (a,b) Evolution of the mechanical spectrum as a function of normalized detuning Δω/κ. (c,d) Mechanical energy as a function of Δω/κ. The measurements of Fig. 3(a) are obtained for an optical power of 1.1 mW in the fiber taper, using a TE WGM (p = 3) with a loaded Q_opt = 5 × 10⁴, while those of Fig. 3(b) are obtained for 4.2 mW of optical power, using a TE WGM (p = 1) with loaded Q_opt = 7 × 10³. The dashed line shows the threshold of self-oscillation.

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Fig. 4 (a) An In_0.5Ga_0.5P disk on a mesa. Inset is a schematic representation of the evanescent coupling of light from a tapered fiber to a disk resonator. (b) Several In_0.5Ga_0.5P disks on a mesa.

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Fig. 5 (a) Temperature profile (steady-state) in an InGaP disk, for 1 mW absorbed power at the disk periphery. The colour bar indicates the temperature in K. (b) Temperature as a function of time. The green line corresponds to an exponential fit. (c,d) Thermo-optic shift of a WGM resonance in an AlGaAs disk. (c) Experimental measurements. (d) Results of our model [17]. The indicated power levels are measured at the fiber output.

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Fig. 6 Mechanical linewidth as function of the laser wavelength, extracted from the self-oscillation spectra series of Fig. 3 for both the InGaP (a) and AlGaAs (b) disk resonator. The open symbols are experimental data, while the solid line is a fit by our optomechanical model, with a thermal time τ_th=1.8 (0.085) µs for the InGaP (AlGaAs) resonator. The dashed lines indicate the self-oscillation threshold.

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Tables (3)

Table 1 Radiation pressure, Electrostriction and Photothermal force per photon, together with the thermal relaxation time and vacuum optomechanical coupling g₀ for the considered InGaP and AlGaAs disk resonator.

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Table 2 Best Q_opt and Q_m (intrinsic values), along with the frequency of the 1^st order RBM, measured on different disk resonators. Measurements are with an optical wavelength range 1500–1600 nm and at room temperature.

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Table 3 Material properties of GaAs, In_0.5 Ga_0.5 P and Al_0.4 Ga_0.6 As disks [18, 22, 30–38].

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Equations (4)

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\dot{a} (t) = - \frac{κ}{2} a (t) + i [Δ^{b} ω + g_{o m} x (t) + \frac{ω_{c a v}}{n} \frac{d n}{d t} Δ T (t)] a (t) + \sqrt{κ_{e x}} a_{i n} (t)

m_{e f f} \ddot{x} (t) + m_{e f f} Γ_{m} \dot{x} (t) + m_{e f f} ω_{m}^{2} x (t) = F_{o p t} (t) + F_{p t h} (t) + F_{L} (t)

\frac{d Δ T (t)}{d t} = - \frac{Δ T (t)}{τ_{t h}} + \frac{Γ_{p t h} {| a (t) |}^{2}}{τ_{t h}}

\begin{array}{l} Γ_{m, e f f} = Γ_{m} [1 + \frac{{| < a > |}^{2} g_{o m}^{2} ω_{m}}{m_{e f f} ω_{m} Γ_{m}} {\frac{\frac{κ}{2}}{{(Δ ω + ω_{m})}^{2} + \frac{κ^{2}}{4}} - \frac{\frac{κ}{2}}{{(Δ ω - ω_{m})}^{2} + \frac{κ^{2}}{4}}} \\ + \frac{{| < a > |}^{2} g_{o m} ω_{m}}{ℏ m_{e f f} ω_{m} Γ_{m}} \frac{F_{p t h}^{1}}{1 + ω_{m}^{2} τ_{t h}^{2}} {\frac{(Δ ω + ω_{m}) ω_{m} τ_{t h} - \frac{κ}{2}}{{(Δ ω + ω_{m})}^{2} + \frac{κ^{2}}{4}} + \frac{(Δ ω - ω_{m}) ω τ_{t h} + \frac{κ}{2}}{{(Δ ω - ω_{m})}^{2} + \frac{κ^{2}}{4}}}] \end{array}

Disk	$F_{r p}^{1} (N)$	$F_{e l}^{1} (N)$	$F_{p t h}^{1} (N)$	τ_th (µs)	g₀ (kHz)
InGaP	1.92 × 10⁻¹⁴	2.68 × 10⁻¹⁴	2.42 × 10⁻⁹	1.8	390
AlGaAs	2.49 × 10⁻¹⁴	3.42 × 10⁻¹⁴	3.11 × 10⁻⁹	0.085	720

Disk	Radius(µm)	Thickness(nm)	Q_opt	f_m(MHz)	Q_min air at room T
InGaP	3.25	200	∼ 1 × 10⁵	480.77	~ 1500
AlGaAs	2	150	∼ 5 × 10⁴	757.10	∼ 350
GaAs	4.5	200	∼ 5 × 10⁵	314.5	∼3000
GaAs with ALD	4.5	200	∼ 6 × 10⁶	∼ 314.5	∼ 3000

Property	unit	GaAs	In_0.5 Ga_0.5 P	Al_0.4 Ga_0.6 As
Poisson’s ratio (ν)	—	0.31	0.3345	0.35

Young’s modulus (E)	GPa	85.9	82.5	84.6

Density (ρ)	Kg/m³	5317	4470	4696

Specific heat (C)	JKg⁻¹ K⁻¹	327	371.2	378

Thermal conductivity (λ)	WK⁻¹ m⁻¹	55	5.26	9.88

Thermal expansion coefficient (α)	K⁻¹	5.7×10⁻⁶	5.3×10⁻⁶	5.52×10⁻⁶

Refractive index (n) at λ= 1550 nm and room T	—	3.374	3.19	3.17

Thermo-optic coefficient $(\frac{\partial n}{\partial T})$ at room T	K⁻¹	2.34×10⁻⁴	−4×2 10	2.3×10⁻⁴

TPA coefficient (β) at λ = 1550 nm and room T	cm/GW	∼ 15	∼ 0	∼ 0

Photoelastic parameters
p₁₁	—	−0.165	−0.151	−0.165
p₁₂	—	−0.140	−0.082	−0.090
p₄₄		−0.172	−0.074	−0.088

Disk	$F_{r p}^{1} (N)$	$F_{e l}^{1} (N)$	$F_{p t h}^{1} (N)$	τ_th (µs)	g₀ (kHz)
InGaP	1.92 × 10⁻¹⁴	2.68 × 10⁻¹⁴	2.42 × 10⁻⁹	1.8	390
AlGaAs	2.49 × 10⁻¹⁴	3.42 × 10⁻¹⁴	3.11 × 10⁻⁹	0.085	720

Disk	Radius(µm)	Thickness(nm)	Q_opt	f_m(MHz)	Q_min air at room T
InGaP	3.25	200	∼ 1 × 10⁵	480.77	~ 1500
AlGaAs	2	150	∼ 5 × 10⁴	757.10	∼ 350
GaAs	4.5	200	∼ 5 × 10⁵	314.5	∼3000
GaAs with ALD	4.5	200	∼ 6 × 10⁶	∼ 314.5	∼ 3000

Abstract

References

2017 (2)

2016 (1)

2015 (3)

2014 (4)

2013 (2)

2012 (1)

2011 (3)

2010 (2)

2009 (5)

2008 (1)

2007 (1)

2006 (1)

2005 (1)

2004 (2)

2000 (1)

1985 (1)

1982 (1)

Adachi, S.

Ahmadi, V.

Alaie, S.

Allman, M.

Almeida, V. R.

Amo, A.

Andronico, A.

Aspelmeyer, M.

Baker, C.

Berkovitz, V.

Blakemore, J.

Borselli, M.

Bruno, T. J.

Cadiz, F.

Camacho, R. M.

Carmon, T.

Cassette, S.

Chan, J.

Chen, L.

Cicak, K.

Cocorullo, G.

Cole, G. D.

Colman, P.

Combrié, S.

de Rossi, A.

Della Corte, F.

Ding, J. C. L.

Ding, L.

Donner, T.

Ducci, S.

Eichenfield, M.

Fainstein, A.

Favero, I.

Gandomkar, M.

Gärtner, C.

Gerard, B.

Gil-Santos, E.

Gomez, C.

Gondarenko, A.

Guha, B.

Harlow, J.

Haynes, W. M.

Hease, W.

Hoelscher-Obermaier, J.

Hossein-Zadeh, M.

Hunger, D.

Husko, C.

Iodice, M.

Jiang, W.C.

Johnson, T. J.

Jusserand, B.

Karrai, K.

Kippenberg, T. J.

Lehnert, K.

Lemaître, A.

Leo, G.

Leseman, Z. C.

Li, D.

Lian, J.

Lide, D. R.

Lin, Q.